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公开(公告)号:US20180052136A1
公开(公告)日:2018-02-22
申请号:US15676617
申请日:2017-08-14
发明人: Ying DIAO , Fengjiao ZHANG
IPC分类号: G01N27/414 , H01L51/05 , H01L51/00 , G01N33/00 , G01N33/497
CPC分类号: G01N27/4141 , G01N27/4146 , G01N33/0047 , G01N33/0054 , G01N33/497 , G01N2033/4975 , H01L51/0014 , H01L51/0035 , H01L51/0036 , H01L51/004 , H01L51/0043 , H01L51/0071 , H01L51/0074 , H01L51/0096 , H01L51/0533 , H01L51/0545 , H01L51/0558 , H01L51/0562 , Y02A50/246
摘要: The present disclosure provides a method of fabricating a nanoporous thin film device comprising depositing a template on a substrate to form a nanoporous insulating layer, the template comprising one or more polymers capable of forming pores when polymerized and at least one cross-linking agent, and depositing a second layer (e.g. organic semiconductor, semiconductor, insulator) on the nanopourous insulating layer to form a thin film having a plurality of isolated nanopores on the surface. Nanoporous semiconductor thin films made by these methods is provided. Sensors and devices comprising the nanoporous thin film is also disclosed.