Methods for fabricating three-dimensional micro structures
    1.
    发明授权
    Methods for fabricating three-dimensional micro structures 失效
    制造三维微结构的方法

    公开(公告)号:US5389196A

    公开(公告)日:1995-02-14

    申请号:US828247

    申请日:1992-01-30

    摘要: A method for producing a three-dimensional object includes the steps of providing an interface plane within a chamber and generating a beam of radiant energy having varied levels of beam energy density. The beam is directed to selectively expose a pattern of address points on the interface plane to the beam of radiant energy for a limited duration. Conditions are established in the chamber to enable the beam to induce a micro-chemical reaction at the interface plane at a rate which serves to form a portion of the three-dimensional object. A significant feature of the invention is that the micro-chemical reaction is substantially binary with respect to the beam energy density. That is, the reaction is either substantially "on" or substantially "off."

    摘要翻译: 一种用于制造三维物体的方法包括以下步骤:在室内提供界面,并产生具有不同程度的束能量密度的辐射能束。 光束被引导以在有限的持续时间内选择性地将接口平面上的地址点的图案暴露于辐射能量束。 在腔室中建立了条件,以使束能够以界面处的微量化学反应,其速率用于形成三维物体的一部分。 本发明的一个重要特征是微量化学反应相对于束能量密度基本上是二进制的。 也就是说,反应基本上“开”或基本上“脱落”。

    Miniature actuator
    2.
    发明授权
    Miniature actuator 失效
    微型执行器

    公开(公告)号:US5293094A

    公开(公告)日:1994-03-08

    申请号:US626224

    申请日:1990-12-05

    IPC分类号: H01L41/09 H02N2/08 H01L41/08

    摘要: A ferroelectric motor comprises a single layer of ferroelectric material electrically excited by an array of electrical contacts and an electrical excitation source for supplying phased electrical signals to the contacts thereby creating a travelling wave of mechanical deformation in the ferroelectric layer and actuating an actuator. In alternative embodiments of the invention, the actuator may be linear or rotary. The motor may be fabricated on a single integrated circuit die, in which case the layer of ferroelectric material may be a thin film of PZT. In other embodiments a motor may comprise two dies which are sandwiched together by wafer to wafer bonding. Portions of a die may be removed to permit a linear actuator to project beyond the die.

    摘要翻译: 铁电电动机包括由电触头阵列电激励的单层铁电材料和用于向触点提供相控电信号的电激励源,从而在铁电层中产生机械变形的行波并致动致动器。 在本发明的替代实施例中,致动器可以是线性的或旋转的。 电动机可以制造在单个集成电路管芯上,在这种情况下,铁电材料层可以是PZT的薄膜。 在其它实施例中,马达可以包括通过晶片到晶片接合夹在一起的两个管芯。 可以去除模具的部分以允许线性致动器突出超过模具。

    Miniature electrical and mechanical structures useful for constructing
miniature robots
    3.
    发明授权
    Miniature electrical and mechanical structures useful for constructing miniature robots 失效
    用于构造微型机器人的微型电气和机械结构

    公开(公告)号:US5113117A

    公开(公告)日:1992-05-12

    申请号:US404741

    申请日:1989-09-08

    IPC分类号: B25J7/00 H01L21/00 H01L41/09

    摘要: An electrical device comprises a three-dimensional body formed from an organic polymer and a plurality of electrical elements attached to the body. The body has a regular pattern of sockets in its surface, and the electrical elements have barbed appendages, or, alternatively, the body has appendages and the electrical elements have sockets. The elements are affixed to the body by insertion of the appendages into the sockets. Electrical connections between the electrical elements are formed by selective deposition of tungsten onto the surface of the body with a scanning laser beam. A miniature ("gnat") robot can be constructed using those constructional techniques.

    摘要翻译: 电气装置包括由有机聚合物形成的三维体和附接到身体的多个电气元件。 主体在其表面上具有规则的插座图案,并且电气元件具有倒钩附件,或者替代地,主体具有附件并且电气元件具有插座。 元件通过将附件插入插座中而固定在身体上。 电子元件之间的电连接通过用扫描激光束选择性沉积到体表面上而形成。 可以使用这些构造技术构造一个微型(“gnat”)机器人。

    Infrared sensor operable without cooling
    4.
    发明授权
    Infrared sensor operable without cooling 失效
    红外线传感器无需冷却即可

    公开(公告)号:US5034608A

    公开(公告)日:1991-07-23

    申请号:US404732

    申请日:1989-09-08

    IPC分类号: G01J5/34 H01L27/148 H01L37/02

    摘要: An infrared sensor operable without cooling and thus usable at room temperature comprises a substrate supporting thin films of pyroelectric material and switched capacitor control circuitry. The control circuitry compares the absolute capacitance of a reference thin film to that of a sensor thin film, thereby sensing infrared radiation without the use of a chopper device. The reference thin film is thermally coupled to the substrate, and the sensor thin film is thermally insulated form the substrate. To increase the fill factor, the sensor thin film is placed directly above the control circuitry. In another apsect, the sensor is adpated to sense visible and infrared light by adding a CCD sensor and appropriate control circuitry to the substrate.

    摘要翻译: 可在不冷却的情况下可操作的红外线传感器可在室温下使用,其包括支撑热电材料薄膜和开关电容器控制电路的基板。 控制电路将参考薄膜的绝对电容与传感器薄膜的绝对电容进行比较,从而在不使用斩波器的情况下感测红外辐射。 参考薄膜热耦合到衬底,并且传感器薄膜与衬底热绝缘。 为了增加填充因子,传感器薄膜直接放置在控制电路的正上方。 在另一个apsect中,传感器适用于通过向基板添加CCD传感器和适当的控制电路来感测可见光和红外光。