公开(公告)号：US20240120225A1

公开(公告)日：2024-04-11

申请号：US18273446

申请日：2022-01-12

Applicant: Tokyo Electron Limited

Inventor： Takehiro SHINDO ,  Akinori SHIMAMURA ,  Hiromitsu SAKAUE ,  Dongwei LI

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/67709 ,  H01L21/67017

Abstract: Provided is an apparatus that transfers a substrate inside a substrate transfer chamber by a substrate transfer module using magnetic levitation. The apparatus includes: a substrate transfer chamber having a floor portion provided with a first magnet and connected, through an opening portion, to a substrate processing chamber in which the substrate is processed; and a substrate transfer module including a substrate holder configured to hold the substrate, and a second magnet configured such that a repulsive force acts between the first magnet and the second magnet. The substrate transfer module is movable inside the substrate transfer chamber by the magnetic levitation based on the repulsive force. The substrate transfer module performs loading/unloading of the substrate by directly entering into the substrate transfer chamber via the opening portion, or delivers the substrate to and from a substrate transfer mechanism fixedly provided inside the substrate transfer chamber.

公开(公告)号：US20230154777A1

公开(公告)日：2023-05-18

申请号：US17980255

申请日：2022-11-03

Applicant: TOKYO ELECTRON LIMITED

Inventor： Akinori SHIMAMURA ,  Hiroki OKA

IPC: H01L21/677 ,  H01L21/67 ,  H01F7/16 ,  B08B13/00 ,  B08B5/02 ,  B08B3/02 ,  B08B7/02

CPC classification number: H01L21/677 ,  H01L21/67196 ,  H01F7/1646 ,  B08B13/00 ,  B08B5/02 ,  B08B3/02 ,  B08B7/028 ,  H01L21/67161 ,  H01L21/67017

Abstract: There is a substrate transfer apparatus comprising: a circular tube having a tube axis extending in a lateral direction and having a transfer region for a substrate in the circular tube; a magnetic field generating portion having a magnetic field generating surface facing the transfer region and configured to generate a magnetic field on the magnetic field generating surface; and a transfer body configured to transfer the substrate while moving in a plane direction of the magnetic field generating surface in a state that the transfer body is distant from the magnetic field generating surface by the magnetic field.

公开(公告)号：US20180097205A1

公开(公告)日：2018-04-05

申请号：US15719166

申请日：2017-09-28

Applicant: TOKYO ELECTRON LIMITED

Inventor： Akinori SHIMAMURA ,  Teruyuki HAYASHI

IPC: H01L51/56 ,  F26B5/04 ,  F26B9/06 ,  F26B3/30 ,  H01L51/00

CPC classification number: H01L51/56 ,  F26B3/30 ,  F26B5/04 ,  F26B5/042 ,  F26B9/06 ,  H01L51/0007 ,  H01L51/0025

Abstract: A reduced-pressure drying apparatus, for drying solution on a substrate in a chamber in a depressurized state, includes a solvent collecting unit that is a net-shaped plate configured to temporarily collect a solvent in the solution vaporized from the substrate. The solvent collecting unit is provided to face the substrate in the chamber, and the net-shaped plate has an opening ratio of 60% to 80% and a thermal capacity of 850 J/K or less per 1 m2.