公开(公告)号：US20220098717A1

公开(公告)日：2022-03-31

申请号：US17428597

申请日：2019-09-20

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kenichi IMAKITA ,  Kazunaga ONO ,  Toru KITADA ,  Keisuke SATO ,  Atsushi GOMI ,  Hiroyuki YOKOHARA ,  Hiroshi SONE

IPC: C23C14/00 ,  C23C14/50 ,  C23C14/08 ,  C23C14/56 ,  C23C14/34

Abstract: A film forming apparatus according to the present invention comprises: a processing chamber; a substrate holder for holding a substrate within the processing chamber; a target electrode, disposed above the substrate holder, for holding a metal target and supplying electrical power from a power source to the target; an oxidizing gas introduction mechanism for supplying an oxidizing gas to the substrate; and a gas supply unit for supplying an inert gas to the space where the target is disposed. Constituent metal is discharged from the target in the form of sputter particles, whereby a metal film is deposited on the substrate, and the metal film is oxidized by the oxidizing gas introduced by the oxidizing gas introduction mechanism, thereby forming a metal oxide film. When the oxidizing gas is introduced, the gas supply unit supplies the inert gas to the space where the target is disposed so that the pressure therein is positive with respect to the pressure in a processing space.

公开(公告)号：US20200381226A1

公开(公告)日：2020-12-03

申请号：US16883543

申请日：2020-05-26

Applicant: Tokyo Electron Limited

Inventor： Kenichi IMAKITA ,  Yasuhiko KOJIMA ,  Atsushi GOMI ,  Hiroyuki YOKOHARA ,  Hiroshi SONE

IPC: H01J37/34 ,  C23C14/34 ,  H01J37/32

Abstract: A film forming apparatus includes: a processing container; a substrate holder that holds the substrate in the processing container; and a target assembly disposed in an upper side of the substrate holder. The target assembly includes: a target made of metal, including a main body and a flange provided around the main body, and emitting sputter particles from the main body; a target holder including a target electrode configured to supply power to the target, and holding the target; a target clamp that clamps the flange of the target to the target holder; and an anti-deposition shield provided around the main body of the target to cover the flange, the target clamp, and the target holder, and having a labyrinth structure in which an inner tip end thereof is disposed to enter a recess between the main body of the target and the target clamp.