公开(公告)号：US20180085769A1

公开(公告)日：2018-03-29

申请号：US15710017

申请日：2017-09-20

Applicant: Tokyo Electron Limited

Inventor： Go Ayabe ,  Minoru Tashiro ,  Kunihiko Fujimoto

IPC: B05B13/04 ,  B05B13/02 ,  B05D1/02

CPC classification number: B05B13/0405 ,  B05B13/0228 ,  B05B14/00 ,  B05D1/02 ,  H01L21/06 ,  H01L21/67051 ,  H01L21/6708 ,  H01L21/67253 ,  H01L21/67259

Abstract: A substrate processing apparatus according to the present disclosure includes a holding unit, a nozzle, a driving unit, and a controller. The holding unit holds a substrate. The nozzle supplies a processing liquid to the substrate held on the holding unit. The driving unit moves the nozzle. The controller controls the driving unit, so as to move the nozzle while supplying the processing liquid to the substrate from the nozzle. Further, the controller controls the driving unit based on recipe information including step information including positions of first and second points above the substrate, total time for moving the nozzle between the first and second points, and a moving speed of the nozzle, so as to cause reciprocation of the nozzle.

公开(公告)号：US10668494B2

公开(公告)日：2020-06-02

申请号：US15710017

申请日：2017-09-20

Applicant: Tokyo Electron Limited

Inventor： Go Ayabe ,  Minoru Tashiro ,  Kunihiko Fujimoto

IPC: H01L21/06 ,  B05B13/04 ,  H01L21/67 ,  B05B13/02 ,  B05D1/02 ,  B05B14/00

Abstract: A substrate processing apparatus according to the present disclosure includes a holding unit, a nozzle, a driving unit, and a controller. The holding unit holds a substrate. The nozzle supplies a processing liquid to the substrate held on the holding unit. The driving unit moves the nozzle. The controller controls the driving unit, so as to move the nozzle while supplying the processing liquid to the substrate from the nozzle. Further, the controller controls the driving unit based on recipe information including step information including positions of first and second points above the substrate, total time for moving the nozzle between the first and second points, and a moving speed of the nozzle, so as to cause reciprocation of the nozzle.

公开(公告)号：US10254816B2

公开(公告)日：2019-04-09

申请号：US14609901

申请日：2015-01-30

Applicant: TOKYO ELECTRON LIMITED

Inventor： Seiichiro Yuasa ,  Kunihiko Fujimoto

IPC: G06F1/32 ,  G06F1/3234 ,  G06F1/3287 ,  G05B19/042 ,  H01L21/67

Abstract: A control unit of a substrate processing apparatus has a storage medium that stores operation commands as a single macro. The operation commands include an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred to a condition suitable for normal operation after completion of the man power maintenance. The control unit makes a display unit display both the operation commands for shutdown and startup together on a single ejection screen of the display unit, and allows editing of the macro on the single edit screen by using the input unit.