公开(公告)号：US20210247286A1

公开(公告)日：2021-08-12

申请号：US17245220

申请日：2021-04-30

Applicant: TOKYO ELECTRON LIMITED

Inventor： Masato HAYASHI ,  Kohei NOGUCHI ,  Koudai HIGASHI ,  Makoto OGATA

IPC: G01N15/02 ,  H01L21/67

Abstract: According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.

公开(公告)号：US20240094644A1

公开(公告)日：2024-03-21

申请号：US18465420

申请日：2023-09-12

Applicant: Tokyo Electron Limited

Inventor： Makoto OGATA ,  Katsuya HASHIMOTO ,  Katsunori ICHINO ,  Masataka TANAKA ,  Kazuya KUDO

IPC: G03F7/00

CPC classification number: G03F7/70808 ,  G03F7/7085 ,  G03F7/70925

Abstract: A substrate treatment apparatus includes: a plurality of solution treatment modules stacked at multiple stages, each configured to perform a treatment using a treatment solution on a substrate; and a solution supply unit configured to supply the treatment solution to the plurality of solution treatment modules, wherein: the solution supply unit includes supply pipelines provided with a solution feeder corresponding to the solution treatment modules; and the solution feeder includes a pump configured to pressure-feed the treatment solution to the corresponding solution treatment module and a filter configured to filtrate the treatment solution, and is arranged adjacent to the corresponding solution treatment module in a horizontal direction.

公开(公告)号：US20200240891A1

公开(公告)日：2020-07-30

申请号：US16746118

申请日：2020-01-17

Applicant: TOKYO ELECTRON LIMITED

Inventor： Masato HAYASHI ,  Kohei NOGUCHI ,  Koudai HIGASHI ,  Makoto OGATA

IPC: G01N15/02 ,  H01L21/67

Abstract: According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.