公开(公告)号：US10832892B2

公开(公告)日：2020-11-10

申请号：US16478770

申请日：2018-01-04

Applicant: Tokyo Electron Limited

Inventor： Kazuki Takahashi ,  Yuki Kawada ,  Naoki Matsumoto ,  Takahiro Senda ,  Koji Koyama ,  Shohei Fukano ,  Jun Yoshikawa ,  Hiroyuki Kondo ,  Takashi Minakawa

IPC: H01J37/32 ,  H05H1/46

Abstract: An antenna according to an aspect includes: a dielectric window having a first surface and a second surface, the second surface having an annular recessed surface and a flat surface surrounded by the recessed surface; a slot plate; a dielectric plate; a heat transfer member made of metal and having an upper surface and a lower surface opposing each other; a cooling jacket; and a heater, in which the upper surface includes a plurality of first regions and a second region, the cooling jacket is mounted on the plurality of first regions, the second region is recessed further toward the lower surface side than the plurality of first regions, the heater is mounted on the second region, and each of the plurality of first regions is provided at a position at least partially overlapping with the flat surface when viewed in a direction parallel to a central axis.

公开(公告)号：US10553402B2

公开(公告)日：2020-02-04

申请号：US16394190

申请日：2019-04-25

Applicant: Tokyo Electron Limited

Inventor： Yuki Kawada ,  Naoki Matsumoto ,  Koji Koyama ,  Ayako Ito ,  Takahiro Senda

IPC: H01J37/32

Abstract: An antenna device according to an exemplary embodiment radiates electromagnetic waves. In the antenna device, a dielectric window is in contact with a lower wall of a first waveguide, the first waveguide is provided between the dielectric window and a second waveguide and extends in a direction crossing a tube axis of the second waveguide, a dispersion part in the first waveguide disperses the electromagnetic waves in the first waveguide, two inner conductors disposed at different distances from the tube axis and connected to the dielectric window include coaxial conversion parts which cause propagation of the electromagnetic waves dispersed by the dispersion part to direct to the dielectric window side, a body length of the inner conductor most distant from the tube axis, out of body lengths of the two inner conductors, is longer, and a front surface of the dielectric window does not have irregularities.

公开(公告)号：US12159771B2

公开(公告)日：2024-12-03

申请号：US17835251

申请日：2022-06-08

Applicant: Tokyo Electron Limited

Inventor： Yuki Kawada ,  Naoto Hayasaka

IPC: H01J37/32

Abstract: There is provided a plasma processing apparatus comprising: a plasma processing chamber having an upper wall, a sidewall, and a lower wall and having therein a plasma processing space; and a magnetic shield disposed around an outer side of the sidewall and having an opening at an upper side thereof. On the assumption that an angle between a line that passes through a midpoint of an inner surface of the upper wall on the plasma processing space side and connects end points of the opening and the inner surface is θ[°] and a product μi×t of an initial relative permeability μi of a magnetic material forming the magnetic shield and a thickness t[m] of the magnetic shield is Pmc[m], the angle θ[°] satisfies a condition θ>764×Pmc−2+179×Pmc−1+21.3.

公开(公告)号：US10896811B2

公开(公告)日：2021-01-19

申请号：US16552372

申请日：2019-08-27

Applicant: Tokyo Electron Limited

Inventor： Ayako Ito ,  Koji Koyama ,  Yuki Kawada ,  Takahiro Senda ,  Naoki Matsumoto

IPC: H01J37/32 ,  H05H1/24 ,  H01P1/08

Abstract: In one exemplary embodiment, a second waveguide is connected to an upper wall of a first waveguide and communicates with the first waveguide, a dielectric window is in contact with a lower wall of the first waveguide, a first inner conductor penetrates an upper wall, is electrically connected with the upper wall, and extends along the direction of a tube axis from an inside of the first waveguide to an inside of a third waveguide, the third waveguide is connected to the lower wall on the dielectric window side and communicates with the first waveguide, a first opening end of the third waveguide is connected to the dielectric window, and a drive device is connected to the first inner conductor, and is configured to drive the first inner conductor in the direction of the tube axis.

公开(公告)号：US10825658B2

公开(公告)日：2020-11-03

申请号：US16014628

申请日：2018-06-21

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuki Kawada ,  Koji Koyama

IPC: B23K10/00 ,  H01J37/32 ,  C23C16/511 ,  H01L21/3213 ,  H01Q1/36 ,  H01Q15/08 ,  H01Q21/00 ,  H01Q21/06 ,  H05H1/46 ,  H01Q13/10 ,  H01Q1/42

Abstract: In an antenna including a dielectric window and a slot plate provided on one surface of the dielectric window, in a case where a reference position g is a center position in a width direction of each slot S and a center position in a length direction in the slot plate, the reference position g of each slot is located on a virtual circle centered on a center of gravity G0, and line segments connecting the reference positions g of the slots S and virtual point G1 to which the slots belong are located radially from a virtual point G1, angles (β1 to β4) between adjacent line segments are equal to each other, and angles (θ1 to θ4) formed by the length directions of the slots S at the reference positions g and the line segments to which the slots belong are equal to each other.