公开(公告)号：US20230418166A1

公开(公告)日：2023-12-28

申请号：US18213785

申请日：2023-06-23

Applicant: Tokyo Electron Limited

Inventor： Yuichiro KUNUGIMOTO ,  Shota UEYAMA ,  Akihiro TERAMOTO ,  Yuta NISHIYAMA ,  Shinichi HATAKEYAMA

IPC: G03F7/00 ,  B08B13/00 ,  G01F9/00 ,  G03F7/16 ,  G01G21/22 ,  B08B3/02

CPC classification number: G03F7/70491 ,  B08B13/00 ,  G01F9/003 ,  G03F7/16 ,  G01G21/22 ,  B08B3/02

Abstract: A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.

公开(公告)号：US20240152052A1

公开(公告)日：2024-05-09

申请号：US18386781

申请日：2023-11-03

Applicant: Tokyo Electron Limited

Inventor： Masataka TANAKA ,  Tsunaki IKEDA ,  Yuta NISHIYAMA

IPC: G03F7/16 ,  G03F7/40 ,  H01L21/67

CPC classification number: G03F7/16 ,  G03F7/40 ,  H01L21/67023

Abstract: A substrate processing apparatus includes: a carrier block, into which a carrier storing a substrate is carried; a processing block including a liquid processing module that supplies a processing liquid to the substrate transferred from the carrier block, thereby performing a liquid processing; and an interface block, to which the substrate is transferred from the processing block. The interface block includes a liquid storage, in which a bottle storing the processing liquid is disposed. The carrier block includes a liquid feeder that feeds the processing liquid supplied from the liquid storage, to the liquid processing module. The liquid feeder includes a filter that filters the processing liquid supplied from the liquid storage, and a first pump that pumps the processing liquid toward the liquid processing module.

公开(公告)号：US20220171294A1

公开(公告)日：2022-06-02

申请号：US17522050

申请日：2021-11-09

Applicant: Tokyo Electron Limited

Inventor： Yuichiro KUNUGIMOTO ,  Shota UEYAMA ,  Akihiro TERAMOTO ,  Yuta NISHIYAMA ,  Shinichi HATAKEYAMA

IPC: G03F7/20 ,  B08B13/00 ,  B08B3/02 ,  G03F7/16 ,  G01G21/22 ,  G01F9/00

Abstract: A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.