-
1.发明授权公开(公告)号：US07530670B2
公开(公告)日：2009-05-12
申请号：US11314642
申请日：2005-12-21
IPC分类号： B41J2/04
CPC分类号： B41J2/16 , B41J2/14314 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1635 , B41J2/1642 , B41J2/1646 , B41J2002/14411
摘要： To provide an electrostatic actuator, etc. which is capable of miniaturizing the size, and preventing moisture, etc. from entering a gap in an effective manner. An electrostatic actuator includes an electrode substrate 10 having individual electrodes 12 as fixed electrodes, and a cavity substrate 20 having diaphragms 22 as movable electrodes which are disposed so as to be opposed to the fixed electrodes 12 with a predetermined distance, and operated due to an electrostatic force occurring between the cavity substrate 20 and the individual electrodes 12. Sealing portions 26a are formed on one of the electrode substrate 10 and the cavity substrate 20, each of the sealing portions 26a has a plurality of sealing layers (a TEOS layer 25a, a moisture permeation preventing layer 25b) laminated one another, and each of the sealing layers is made of a sealing material 25 for isolating a space formed between the individual electrode 12 and the diaphragm 22.
摘要翻译： 提供能够使尺寸小型化并且防止湿气等以有效的方式进入间隙的静电致动器等。 静电致动器包括具有作为固定电极的单独电极12的电极基板10和具有作为可动电极的隔膜22的空腔基板20，该隔膜22以与预定距离的固定电极12相对的方式设置， 在空穴基板20和各个电极12之间产生静电力。密封部分26a形成在电极基板10和空腔基板20之一上，每个密封部分26a具有多个密封层（TEOS层25a， 防潮层25b），并且每个密封层由用于隔离形成在单独电极12和隔膜22之间的空间的密封材料25制成。
-
2.发明申请公开(公告)号：US20060139409A1
公开(公告)日：2006-06-29
申请号：US11314642
申请日：2005-12-21
IPC分类号： B41J2/06
CPC分类号： B41J2/16 , B41J2/14314 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1635 , B41J2/1642 , B41J2/1646 , B41J2002/14411
摘要： To provide an electrostatic actuator, etc. which is capable of miniaturizing the size, and preventing moisture, etc. from entering a gap in an effective manner. An electrostatic actuator includes an electrode substrate 10 having individual electrodes 12 as fixed electrodes, and a cavity substrate 20 having diaphragms 22 as movable electrodes which are disposed so as to be opposed to the fixed electrodes 12 with a predetermined distance, and operated due to an electrostatic force occurring between the cavity substrate 20 and the individual electrodes 12. Sealing portions 26a are formed on one of the electrode substrate 10 and the cavity substrate 20, each of the sealing portions 26a has a plurality of sealing layers (a TEOS layer 25a, a moisture permeation preventing layer 25b) laminated one another, and each of the sealing layers is made of a sealing material 25 for isolating a space formed between the individual electrode 12 and the diaphragm 22.
摘要翻译： 提供能够使尺寸小型化并且防止湿气等以有效的方式进入间隙的静电致动器等。 静电致动器包括具有作为固定电极的单独电极12的电极基板10和具有作为可动电极的隔膜22的空腔基板20，该隔膜22以与预定距离的固定电极12相对的方式设置， 在空腔基板20和各电极12之间产生静电力。密封部分26a形成在电极基板10和空腔基板20之一上，每个密封部分26a具有多个密封层（TEOS层 如图25a所示，防潮层25b）彼此层叠，并且每个密封层由用于隔离形成在单独电极12和隔膜22之间的空间的密封材料25制成。
-
3.发明授权Tunable interference filter having communicable groove part, optical filter module, and photometric analyzer 有权可调谐干涉滤波器，具有通信槽部分，光学滤波器模块和光度分析仪公开(公告)号：US09377357B2
公开(公告)日：2016-06-28
申请号：US13548578
申请日：2012-07-13
IPC分类号： G02B5/28 , G01J3/02 , G02B26/00 , G01J3/10 , G01J3/26 , G01J3/28 , G01J3/32 , G01J3/44 , G01J3/51
CPC分类号： G01J3/0291 , G01J3/0208 , G01J3/0264 , G01J3/027 , G01J3/10 , G01J3/26 , G01J3/2823 , G01J3/32 , G01J3/44 , G01J3/51 , G02B5/284 , G02B26/001
摘要： A filter includes a fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode provided on the surface of the fixed substrate facing the movable substrate, a second electrode provided on the movable substrate and opposed to the first electrode, bonding parts provided on opposing surfaces of the fixed and movable substrates and bonding the fixed substrate to the movable substrate, and a groove part provided in at least one of the opposing surfaces, and the gap is in communication with an exterior of the filter via the groove part.
摘要翻译： 滤光器包括固定基板，与固定基板相对的可移动基板，设置在固定基板的面对可动基板的表面上的第一反射膜，设置在可移动基板上并与第一反射膜相对的第二反射膜 间隙，设置在固定基板的面对可动基板的表面上的第一电极，设置在可移动基板上并与第一电极相对的第二电极，设置在固定和可移动基板的相对表面上的接合部分， 衬底到可移动衬底，以及设置在至少一个相对表面中的槽部分，并且间隙经由槽部与过滤器的外部连通。
-
4.发明授权Variable wavelength interference filter, optical module, and optical analysis device 有权可变波长干涉滤波器，光学模块和光学分析装置公开(公告)号：US08797650B2
公开(公告)日：2014-08-05
申请号：US13313661
申请日：2011-12-07
IPC分类号： G02B27/00
摘要： A wavelength-variable interference filter includes first and second electrodes provided at first and second substrates, respectively, the second substrate including a movable section, first and second electrode wires that extend from the first and second electrodes toward outer circumferential edges of the first and second substrates, respectively, a first opposite electrode wire disposed so as to be isolated from the second electrode, and a first conductive section that connects the first electrode wire with the first opposite electrode wire. The second electrode wire and the first opposite electrode wire extend passing through a center point of an imaginary circle of the movable section in respective directions and dividing the imaginary circle at regular angular intervals.
摘要翻译： 波长可变干涉滤光器包括分别设置在第一和第二基板处的第一和第二电极，第二基板包括可移动部分，从第一和第二电极朝向第一和第二基板的外周缘延伸的第一和第二电极线 基板分别设置为与第二电极隔离的第一对置电极线以及将第一电极线与第一相对电极线连接的第一导电部。 第二电极线和第一相对电极线沿着各个方向延伸穿过可动部分的假想圆的中心点，并以规则的角度间隔分割假想圆。
-
5.发明授权Optical filter, optical filter module, spectrometric instrument, and optical instrument 有权光滤波器，光滤波器模块，光谱仪，光学仪器公开(公告)号：US08817267B2
公开(公告)日：2014-08-26
申请号：US13211794
申请日：2011-08-17
IPC分类号： G01J3/45
CPC分类号： G02B26/001 , G01J3/26
摘要： An Etalon filter includes a first substrate, a second substrate which faces the first substrate, a first optical film which is provided on the first substrate, and a second optical film which is provided on the second substrate to face the first optical film. The reflective characteristic of the first optical film determined by the reflectance of light of each wavelength in a reflective band is different from the reflective characteristic of the second optical film determined by the reflectance of light of each wavelength in the reflective band. The first optical film can have a reflective characteristic with a first wavelength λ1 as a center wavelength, and the second optical film can have a reflective characteristic with a second wavelength λ2 different from the first wavelength as a center wavelength.
摘要翻译： Etalon滤光器包括第一基板，面向第一基板的第二基板，设置在第一基板上的第一光学膜和设置在第二基板上以面对第一光学膜的第二光学膜。 由反射带中的每个波长的光的反射率确定的第一光学膜的反射特性与由反射带中的每个波长的光的反射率确定的第二光学膜的反射特性不同。 第一光学膜可以具有第一波长λ1作为中心波长的反射特性，并且第二光学膜可以具有不同于第一波长的第二波长λ2作为中心波长的反射特性。
-
-
-
-
搜索结果
5 条记录 (耗时 0.026 秒)
