公开(公告)号：US08459202B2

公开(公告)日：2013-06-11

申请号：US12568175

申请日：2009-09-28

申请人： Tomoyuki Yamada ,  Mamoru Oishi ,  Kanako Kitayama

发明人： Tomoyuki Yamada ,  Mamoru Oishi ,  Kanako Kitayama

IPC分类号： C23C16/00 ,  C23C16/52 ,  H01L21/306 ,  G06F19/00 ,  G01F15/00 ,  G01F15/06

CPC分类号： C23C16/455 ,  C23C16/45561 ,  Y10T137/218 ,  Y10T137/2202 ,  Y10T137/2213 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/87917

摘要： A gas flow of a gas pipe is indicated before an electromagnetic valve is actually opened, so that the electromagnetic valve can be prevented from being opened or closed by a wrong manipulation or hazards caused by undesired mixing of gases can be avoided so as to improve safety. The substrate processing apparatus includes a state detection unit configured to detect an opening/closing request state and an opening/closing state of a valve installed at a gas pipeline; and a indication unit configured to indicate a gas flow state of the gas pipeline predicted according to the opening/closing request state and a gas flow state of the gas pipeline when the valve is opened, in a way that each state is distinguished.

摘要翻译： 在电磁阀实际打开之前，指示气体管道的气体流动，从而可以防止电磁阀由于错误的操作而被打开或关闭，或者避免由于气体的不期望的混合引起的危险，从而提高安全性 。 基板处理装置包括状态检测单元，其被配置为检测安装在气体管道处的阀的打开/关闭请求状态和打开/关闭状态; 以及指示单元，其被配置为以每种状态被区分的方式指示根据打开/关闭请求状态预测的气体管道的气体流动状态和当打开阀时气体管道的气体流动状态。

公开(公告)号：US20100078128A1

公开(公告)日：2010-04-01

申请号：US12568175

申请日：2009-09-28

申请人： Tomoyuki YAMADA ,  Mamoru Oishi ,  Kanako Kitayama

发明人： Tomoyuki YAMADA ,  Mamoru Oishi ,  Kanako Kitayama

IPC分类号： H01L21/465 ,  B05C11/00

CPC分类号： C23C16/455 ,  C23C16/45561 ,  Y10T137/218 ,  Y10T137/2202 ,  Y10T137/2213 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/87917

摘要： A gas flow of a gas pipe is indicated before an electromagnetic valve is actually opened, so that the electromagnetic valve can be prevented from being opened or closed by a wrong manipulation or hazards caused by undesired mixing of gases can be avoided so as to improve safety. The substrate processing apparatus includes a state detection unit configured to detect an opening/closing request state and an opening/closing state of a valve installed at a gas pipeline; and a indication unit configured to indicate a gas flow state of the gas pipeline predicted according to the opening/closing request state and a gas flow state of the gas pipeline when the valve is opened, in a way that each state is distinguished.

摘要翻译： 在电磁阀实际打开之前，指示气体管道的气体流动，从而可以防止电磁阀由于错误的操作而被打开或关闭，或者避免由于气体的不期望的混合引起的危险，从而提高安全性 。 基板处理装置包括状态检测单元，其被配置为检测安装在气体管道处的阀的打开/关闭请求状态和打开/关闭状态; 以及指示单元，其被配置为以每种状态被区分的方式指示根据打开/关闭请求状态预测的气体管道的气体流动状态和当打开阀时气体管道的气体流动状态。

公开(公告)号：US06350530B1

公开(公告)日：2002-02-26

申请号：US09155407

申请日：1998-09-25

申请人： Akira Morikawa ,  Mamoru Oishi ,  Yoshikiyo Saito

发明人： Akira Morikawa ,  Mamoru Oishi ,  Yoshikiyo Saito

IPC分类号： B32B2708

CPC分类号： B32B27/08 ,  B32B27/36 ,  B32B2307/7163 ,  B32B2367/00 ,  B32B2425/00 ,  C08L67/04 ,  Y10T428/24802 ,  Y10T428/31786 ,  C08L67/00

摘要： The present invention provides a card base which is degradable by microbes in natural environment. The card base is excellent in properties necessary for card bases, such as tensile strength, impact strength, flex temperature, heat resistance, resistance to thermal expansion and contraction, blocking resistance and humidity resistance, and has rigidity, bending resistance and durability. The card base contains, as essential components, a 3-hydroxybutylate/3-hydroxyvalerate copolymer and a lactic acid polymer, and, where necessary, a polycaprolactone or a high-molecular aliphatic polyester. The card base has a single-layer structure, or a sandwich structure further having overlay layers comprising a composition containing, as essential components, a lactic acid polymer and either or both of a polycaprolactone and a high-molecular alphatic polyester.

摘要翻译： 本发明提供了一种在天然环境中可被微生物降解的卡片基底。 卡片基体具有拉伸强度，冲击强度，弯曲温度，耐热性，耐热膨胀和收缩性，耐粘连性和耐湿性等卡基所需性能优异，并且具有刚性，耐弯曲性和耐久性。 卡片基本含有3-羟基丁酸酯/ 3-羟基戊酸酯共聚物和乳酸聚合物，必要时含有聚己酸内酯或高分子脂肪族聚酯。 卡片基底具有单层结构，或者具有覆盖层的夹层结构，该覆盖层包括含有作为必要成分的乳酸聚合物和聚己内酯和高分子脂肪聚酯中的任一种或两者的组合物。