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    Substrate processing apparatus and substrate processing method
    2.
    发明授权
    Substrate processing apparatus and substrate processing method 有权
    基板加工装置及基板处理方法

    公开(公告)号：US08112183B2

    公开(公告)日：2012-02-07

    申请号：US12260211

    申请日：2008-10-29

    申请人： Tomoyuki Yamada

    发明人： Tomoyuki Yamada

    IPC分类号： G06F19/00

    CPC分类号： H01L21/67109 ,  H01L21/67253

    摘要： A substrate processing apparatus detects malfunction of mechanisms in MFC. An inert gas supply line, a first shut-off valve shutting off the inert gas supply, a process gas supply line, and a second shut-off valve shutting off the process gas supply are installed upstream of the MFC. A gas supply pipe connected to a process chamber, a third shut-off valve shutting off gas supply to the gas supply pipe, an exhaust vent line which is exhaustible, and a fourth shut-off valve shutting off gas supply to the exhaust vent line are installed downstream of the MFC. A main control unit determines that the MFC is abnormal if a transition time exceeds a previously set time when the MFC transitions from a closed state to an opened state while the shut-off valves are in a closed state.

    摘要翻译： 基板处理装置检测MFC中的机构的故障。 惰性气体供给管线，关闭惰性气体源的第一截止阀，处理气体供应管线和关闭工艺气体供应的第二截止阀安装在MFC的上游。 连接到处理室的气体供给管，关闭气体供给管的气体供给的第三截止阀，可排出的排气管，以及关闭排气管线的气体供给的第四截止阀 安装在MFC的下游。 如果在关闭阀处于关闭状态时，当MFC从关闭状态转换到打开状态时，如果转换时间超过预先设定的时间，则主控制单元确定MFC异常。

    SUBSTRATE PROCESSING APPARATUS
    5.
    发明申请
    SUBSTRATE PROCESSING APPARATUS 有权
    基板加工设备

    公开(公告)号：US20100078128A1

    公开(公告)日：2010-04-01

    申请号：US12568175

    申请日：2009-09-28

    申请人： Tomoyuki YAMADA ,  Mamoru Oishi ,  Kanako Kitayama

    发明人： Tomoyuki YAMADA ,  Mamoru Oishi ,  Kanako Kitayama

    IPC分类号： H01L21/465 ,  B05C11/00

    CPC分类号： C23C16/455 ,  C23C16/45561 ,  Y10T137/218 ,  Y10T137/2202 ,  Y10T137/2213 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/87917

    摘要： A gas flow of a gas pipe is indicated before an electromagnetic valve is actually opened, so that the electromagnetic valve can be prevented from being opened or closed by a wrong manipulation or hazards caused by undesired mixing of gases can be avoided so as to improve safety. The substrate processing apparatus includes a state detection unit configured to detect an opening/closing request state and an opening/closing state of a valve installed at a gas pipeline; and a indication unit configured to indicate a gas flow state of the gas pipeline predicted according to the opening/closing request state and a gas flow state of the gas pipeline when the valve is opened, in a way that each state is distinguished.

    摘要翻译： 在电磁阀实际打开之前，指示气体管道的气体流动，从而可以防止电磁阀由于错误的操作而被打开或关闭，或者避免由于气体的不期望的混合引起的危险，从而提高安全性 。 基板处理装置包括状态检测单元，其被配置为检测安装在气体管道处的阀的打开/关闭请求状态和打开/关闭状态; 以及指示单元，其被配置为以每种状态被区分的方式指示根据打开/关闭请求状态预测的气体管道的气体流动状态和当打开阀时气体管道的气体流动状态。

    Base Sequence Retrieval Apparatus
    6.
    发明申请
    Base Sequence Retrieval Apparatus 审中-公开
    基本序列检索装置

    公开(公告)号：US20080263002A1

    公开(公告)日：2008-10-23

    申请号：US10594644

    申请日：2005-03-31

    申请人： Shinichi Morishita ,  Tomoyuki Yamada

    发明人： Shinichi Morishita ,  Tomoyuki Yamada

    IPC分类号： G06F7/06 ,  G06F17/30

    CPC分类号： G16B30/00 ,  G16B20/00

    摘要： An apparatus, method, etc. that in designing of the base sequence of, for example, siRNA, realize high-speed retrieval any genes containing analogous base sequences without omission. Accordingly, retrieval is carried out in such a manner that two partial sequences of given length and any extra part are identified from inputted base sequences, and that hamming distance being the number of corresponding bases incompatible with each other is divided and assigned to the partial sequences and extra part and out of the two partial sequences, one with an assigned number not greater is selected and retrieved.

    摘要翻译： 在设计例如siRNA的碱基序列的装置，方法等中，实现高速检索任何含有类似碱基序列而不被遗漏的基因。 因此，以从输入的基本序列识别给定长度和任何额外部分的两个部分序列，并且将彼此不相容的相应基数的汉明距离划分并分配给部分序列的方式进行检索 并且选择并检索两个部分序列中的额外部分和分配数目不大的部分序列。

    Layout verification method and device
    8.
    发明授权
    Layout verification method and device 有权
    布局验证方法和设备

    公开(公告)号：US07340701B2

    公开(公告)日：2008-03-04

    申请号：US11224129

    申请日：2005-09-13

    申请人： Tomoyuki Yamada

    发明人： Tomoyuki Yamada

    IPC分类号： G06F17/50

    CPC分类号： G06F17/5081

    摘要： There is provided a layout verification method including a space acquisition step of, with a wiring connected to a gate through a via as a target wiring, acquiring a space between the target wiring and a wiring adjacent thereto, a calculation step of calculating an antenna ratio according to the space between the target wiring and the adjacent wiring, the area of the gate, and the area of the target wiring, and an output step of outputting an antenna damage error when the antenna ratio exceeds a predetermined value.

    摘要翻译： 提供了一种布局验证方法，包括：空间获取步骤，通过通孔作为目标布线连接到栅极的布线，获取目标布线和与其相邻的布线之间的空间;计算步骤，计算天线比 根据目标布线和相邻布线之间的间隔，栅极的面积和目标布线的面积，以及当天线比超过预定值时输出天线损坏误差的输出步骤。

    Method Of Searching Specific Base Sequence
    9.
    发明申请
    Method Of Searching Specific Base Sequence 审中-公开
    搜索特定基本序列的方法

    公开(公告)号：US20070202504A1

    公开(公告)日：2007-08-30

    申请号：US10593753

    申请日：2005-03-23

    申请人： Shinichi Morishita ,  Tomoyuki Yamada ,  Yuki Naito

    发明人： Shinichi Morishita ,  Tomoyuki Yamada ,  Yuki Naito

    IPC分类号： C12Q1/68 ,  G06F17/30 ,  G06F19/00

    CPC分类号： C12Q1/6869 ,  G16B25/00 ,  G16B30/00 ,  C12Q2525/149

    摘要： It is intended to efficiently determine a base sequence specifically appearing in an expression gene. For this, providing that the expression gene consists of exons (301) . . . (306) and especially that exon (301) is united with exon (302) and exon (302) with exon (303), an aggregate of base sequences (401) (403) being a union of exon base sequences (301) . . . (305) and a boundary base sequence obtained by uniting together base sequences (404) and (405) and base sequences (406) and (407) respectively existing over boundaries between exon (301) and exon (302) and between exon (302) and exon (303) is formed, and the aggregate is searched. If a base sequence is one specifically appearing in the expression gene, the number of search results is 1 and otherwise, the number is plural.

    摘要翻译： 旨在有效地确定特异性出现在表达基因中的碱基序列。 为此，提供表达基因由外显子（301）组成。 。 。 （306），特别是外显子（301）与外显子（302）和外显子（302）与外显子（303）结合，作为外显子碱基序列（301）的并集的碱基序列（401）（403）的聚集体。 。 。 （305）和通过将分别存在于外显子（301）和外显子（302）之间的边界上的基本序列（404）和（405）以及碱基序列（406）和（407）之间以及外显子（302）之间的组合而获得的边界碱基序列 ）和外显子（303），并搜索聚集体。 如果碱基序列是表达基因中特定出现的碱基序列，则搜索结果数为1，否则为数。