公开(公告)号：US20070241458A1

公开(公告)日：2007-10-18

申请号：US11809153

申请日：2007-05-30

申请人： Peijun Ding ,  Zheng Xu ,  Hong Zhang ,  Xianmin Tang ,  Praburam Gopalraja ,  Suraj Rengarajan ,  John Forster ,  Jianming Fu ,  Tony Chiang ,  Gongda Yao ,  Fusen Chen ,  Barry Chin ,  Gene Kohara

发明人： Peijun Ding ,  Zheng Xu ,  Hong Zhang ,  Xianmin Tang ,  Praburam Gopalraja ,  Suraj Rengarajan ,  John Forster ,  Jianming Fu ,  Tony Chiang ,  Gongda Yao ,  Fusen Chen ,  Barry Chin ,  Gene Kohara

IPC分类号： H01L23/48

CPC分类号： H01L21/02183 ,  C23C14/024 ,  C23C14/046 ,  C23C14/0641 ,  C23C14/165 ,  C23C14/541 ,  C23C14/5806 ,  H01L21/022 ,  H01L21/02266 ,  H01L21/02271 ,  H01L21/02362 ,  H01L21/2855 ,  H01L21/318 ,  H01L21/76846 ,  H01L21/76856 ,  H01L21/76862 ,  H01L21/76876 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： A metal/metal nitride barrier layer for semiconductor device applications. The barrier layer is particularly useful in contact vias where high conductivity of the via is important, and a lower resistivity barrier layer provides improved overall via conductivity.

摘要翻译： 用于半导体器件应用的金属/金属氮化物阻挡层。 阻挡层在通孔的高导电性很重要的接触孔中特别有用，并且较低电阻率的阻挡层提供改进的整体通孔导电性。

公开(公告)号：US20050085068A1

公开(公告)日：2005-04-21

申请号：US10981319

申请日：2004-11-03

申请人： Tony Chiang ,  Gongda Yao ,  Peijun Ding ,  Fusen Chen ,  Barry Chin ,  Gene Kohara ,  Zheng Xu ,  Hong Zhang

发明人： Tony Chiang ,  Gongda Yao ,  Peijun Ding ,  Fusen Chen ,  Barry Chin ,  Gene Kohara ,  Zheng Xu ,  Hong Zhang

IPC分类号： H01L21/285 ,  H01L21/768 ,  H01L21/4763

CPC分类号： H01L21/76843 ,  C23C14/046 ,  C23C14/165 ,  H01L21/2855 ,  H01L21/76805 ,  H01L21/76844 ,  H01L21/76846 ,  H01L21/76862 ,  H01L21/76865 ,  H01L21/76871 ,  H01L21/76877 ,  H01L21/76879 ,  H01L21/76883

摘要： We disclose a method of applying a sculptured layer of material on a semiconductor feature surface using ion deposition sputtering, wherein a surface onto which the sculptured layer is applied is protected to resist erosion and contamination by impacting ions of a depositing layer, said method comprising the steps of a) applying a first portion of a sculptured layer with sufficiently low substrate bias that a surface onto which said sculptured layer is applied is not eroded away or contaminated in an amount which is harmful to said semiconductor device performance or longevity; and b) applying a subsequent portion of said sculptured layer with sufficiently high substrate bias to sculpture a shape from said the first portion, while depositing additional layer material. The method is particularly applicable to the sculpturing of barrier layers, wetting layers, and conductive layers upon semiconductor feature surfaces and is especially helpful when the conductive layer is copper. In the application of a barrier layer, a first portion of barrier layer material is deposited on the substrate surface using standard sputtering techniques or using an ion deposition plasma, but in combination with sufficiently low substrate bias voltage (including at no applied substrate voltage) that the surfaces impacted by ions are not sputtered in an amount which is harmful to device performance or longevity. Subsequently, a second portion of barrier material is applied using ion deposition sputtering at increased substrate bias voltage which causes resputtering (sculpturing) of the first portion of barrier layer material, while enabling a more anisotropic deposition of newly depositing material. A conductive material, and particularly a copper seed layer applied to the feature may be accomplished using the same sculpturing technique as that described above with reference to the barrier layer.

摘要翻译： 我们公开了使用离子沉积溅射在半导体特征表面上施加雕刻层的材料的方法，其中施加有雕刻层的表面被保护以通过冲击沉积层的离子来抵抗侵蚀和污染，所述方法包括 步骤：a）以足够低的衬底偏压施加雕刻层的第一部分，使得施加所述雕刻层的表面不会以对所述半导体器件的性能或寿命有害的量被腐蚀掉或污染; 以及b）将所述雕刻层的后续部分施加足够高的衬底偏压，以从所述第一部分雕刻形状，同时沉积附加层材料。 该方法特别适用于在半导体特征表面上雕刻阻挡层，润湿层和导电层，并且当导电层是铜时尤其有用。 在施加阻挡层时，使用标准溅射技术或使用离子沉积等离子体将阻挡层材料的第一部分沉积在衬底表面上，但是与足够低的衬底偏置电压（包括没有施加的衬底电压）组合， 受离子影响的表面不会以对器件性能或寿命有害的量溅射。 随后，使用离子沉积溅射在增加的衬底偏置电压下施加阻挡材料的第二部分，这导致阻挡层材料的第一部分的再溅射（雕刻），同时能够进行更多的各向异性沉积新沉积的材料。 应用于特征的导电材料，特别是铜种子层可以使用与上述参考阻挡层所述相同的雕刻技术来实现。

公开(公告)号：US20070178682A1

公开(公告)日：2007-08-02

申请号：US11733671

申请日：2007-04-10

申请人： Tony Chiang ,  Gongda Yao ,  Peijun Ding ,  Fusen Chen ,  Barry Chin ,  Gene Kohara ,  Zheng Xu ,  Hong Zhang

发明人： Tony Chiang ,  Gongda Yao ,  Peijun Ding ,  Fusen Chen ,  Barry Chin ,  Gene Kohara ,  Zheng Xu ,  Hong Zhang

IPC分类号： H01L21/20

CPC分类号： H01L21/76843 ,  C23C14/046 ,  C23C14/165 ,  H01L21/2855 ,  H01L21/76805 ,  H01L21/76844 ,  H01L21/76846 ,  H01L21/76862 ,  H01L21/76865 ,  H01L21/76871 ,  H01L21/76877 ,  H01L21/76879 ,  H01L21/76883

摘要： We disclose a method of applying a sculptured layer of material on a semiconductor feature surface using ion deposition sputtering, wherein a surface onto which the sculptured layer is applied is protected to resist erosion and contamination by impacting ions of a depositing layer, said method comprising the steps of: a) applying a first portion of a sculptured layer with sufficiently low substrate bias that a surface onto which said sculptured layer is applied is not eroded away or contaminated in an amount which is harmful to said semiconductor device performance or longevity; and b) applying a subsequent portion of said sculptured layer with sufficiently high substrate bias to sculpture a shape from said the first portion, while depositing additional layer material. The method is particularly applicable to the sculpturing of barrier layers, wetting layers, and conductive layers upon semiconductor feature surfaces and is especially helpful when the conductive layer is copper. In the application of a barrier layer, a first portion of barrier layer material is deposited on the substrate surface using standard sputtering techniques or using an ion deposition plasma, but in combination with sufficiently low substrate bias voltage (including at no applied substrate voltage) that the surfaces impacted by ions are not sputtered in an amount which is harmful to device performance or longevity. Subsequently, a second portion of barrier material is applied using ion deposition sputtering at increased substrate bias voltage which causes resputtering (sculpturing) of the first portion of barrier layer material, while enabling a more anisotropic deposition of newly depositing material. A conductive material, and particularly a copper seed layer applied to the feature may be accomplished using the same sculpturing technique as that described above with reference to the barrier layer.

摘要翻译： 我们公开了使用离子沉积溅射在半导体特征表面上施加雕刻层的材料的方法，其中施加有雕刻层的表面被保护以通过冲击沉积层的离子来抵抗侵蚀和污染，所述方法包括 步骤：a）以足够低的衬底偏压施加雕刻层的第一部分，使得施加所述雕刻层的表面不会以对所述半导体器件的性能或寿命有害的量被侵蚀或污染; 以及b）将所述雕刻层的后续部分施加足够高的衬底偏压，以从所述第一部分雕刻形状，同时沉积附加层材料。 该方法特别适用于在半导体特征表面上雕刻阻挡层，润湿层和导电层，并且当导电层是铜时尤其有用。 在施加阻挡层时，使用标准溅射技术或使用离子沉积等离子体将阻挡层材料的第一部分沉积在衬底表面上，但是与足够低的衬底偏置电压（包括没有施加的衬底电压）组合， 受离子影响的表面不会以对器件性能或寿命有害的量溅射。 随后，使用离子沉积溅射在增加的衬底偏置电压下施加阻挡材料的第二部分，这导致阻挡层材料的第一部分的再溅射（雕刻），同时能够进行更多的各向异性沉积新沉积的材料。 应用于特征的导电材料，特别是铜种子层可以使用与上述参考阻挡层所述相同的雕刻技术来实现。

公开(公告)号：US20050020080A1

公开(公告)日：2005-01-27

申请号：US10922052

申请日：2004-08-18

申请人： Tony Chiang ,  Gongda Yao ,  Peijun Ding ,  Fusen Chen ,  Barry Chin ,  Gene Kohara ,  Zheng Xu ,  Hong Zhang

发明人： Tony Chiang ,  Gongda Yao ,  Peijun Ding ,  Fusen Chen ,  Barry Chin ,  Gene Kohara ,  Zheng Xu ,  Hong Zhang

IPC分类号： H01L21/285 ,  H01L21/768 ,  H01L21/4763 ,  H01L21/302 ,  H01L21/461

CPC分类号： H01L21/76843 ,  C23C14/046 ,  C23C14/165 ,  H01L21/2855 ,  H01L21/76805 ,  H01L21/76844 ,  H01L21/76846 ,  H01L21/76862 ,  H01L21/76865 ,  H01L21/76871 ,  H01L21/76877 ,  H01L21/76879 ,  H01L21/76883

摘要： We disclose a method of applying a sculptured layer of material on a semiconductor feature surface using ion deposition sputtering, wherein a surface onto which the sculptured layer is applied is protected to resist erosion and contamination by impacting ions of a depositing layer, said method comprising the steps of: a) applying a first portion of a sculptured layer with sufficiently low substrate bias that a surface onto which said sculptured layer is applied is not eroded away or contaminated in an amount which is harmful to said semiconductor device performance or longevity; and b) applying a subsequent portion of said sculptured layer with sufficiently high substrate bias to sculpture a shape from said the first portion, while depositing additional layer material. The method is particularly applicable to the sculpturing of barrier layers, wetting layers, and conductive layers upon semiconductor feature surfaces and is especially helpful when the conductive layer is copper. In the application of a barrier layer, a first portion of barrier layer material is deposited on the substrate surface using standard sputtering techniques or using all ion deposition plasma, but in combination with sufficiently low substrate bias voltage (including at no applied substrate voltage) that the surfaces impacted by ions are not sputtered in an amount which is harmful to device performance or longevity. Subsequently, a second portion of barrier material is applied using ion deposition sputtering at increased substrate bias voltage which causes resputtering (sculpturing) or the first portion of barrier layer material, while enabling a more anisotropic deposition of newly depositing material. A conductive material, and particularly a copper seed layer applied to the feature may be accomplished using the same sculpturing technique as that described above with reference to the barrier layer.

摘要翻译： 我们公开了使用离子沉积溅射在半导体特征表面上施加雕刻层的材料的方法，其中施加有雕刻层的表面被保护以通过冲击沉积层的离子来抵抗侵蚀和污染，所述方法包括 步骤：a）以足够低的衬底偏压施加雕刻层的第一部分，使得施加所述雕刻层的表面不会以对所述半导体器件的性能或寿命有害的量被侵蚀或污染; 以及b）将所述雕刻层的后续部分施加足够高的衬底偏压，以从所述第一部分雕刻形状，同时沉积附加层材料。 该方法特别适用于在半导体特征表面上雕刻阻挡层，润湿层和导电层，并且当导电层是铜时尤其有用。 在施加阻挡层时，使用标准溅射技术或使用所有离子沉积等离子体将阻挡层材料的第一部分沉积在衬底表面上，但是与足够低的衬底偏置电压（包括没有施加的衬底电压）相结合， 受离子影响的表面不会以对器件性能或寿命有害的量溅射。 随后，使用离子沉积溅射以增加的衬底偏置电压施加阻挡材料的第二部分，其引起再溅射（雕刻）或阻挡层材料的第一部分，同时能够进行更多的各向异性沉积新沉积材料。 应用于特征的导电材料，特别是铜种子层可以使用与上述参考阻挡层所述相同的雕刻技术来实现。

公开(公告)号：US20050272254A1

公开(公告)日：2005-12-08

申请号：US11184404

申请日：2005-07-18

申请人： Peijun Ding ,  Zheng Xu ,  Hong Zhang ,  Xianmin Tang ,  Praburam Gopalraja ,  Suraj Rengarajan ,  John Forster ,  Jianming Fu ,  Tony Chiang ,  Gongda Yao ,  Fusen Chen ,  Barry Chin ,  Gene Kohara

发明人： Peijun Ding ,  Zheng Xu ,  Hong Zhang ,  Xianmin Tang ,  Praburam Gopalraja ,  Suraj Rengarajan ,  John Forster ,  Jianming Fu ,  Tony Chiang ,  Gongda Yao ,  Fusen Chen ,  Barry Chin ,  Gene Kohara

IPC分类号： C23C14/06 ,  C23C14/16 ,  C23C14/32 ,  H01L21/285 ,  H01L21/44 ,  H01L21/4763 ,  H01L21/768

CPC分类号： H01L21/02183 ,  C23C14/0641 ,  C23C14/165 ,  C23C14/541 ,  C23C14/5806 ,  H01L21/02266 ,  H01L21/2855 ,  H01L21/318 ,  H01L21/76846 ,  H01L21/76856 ,  H01L21/76862 ,  H01L21/76876

摘要： We have discovered a method of providing a thin approximately from about 2 Å to about 100 Å thick TaN seed layer, which can be used to induce the formation of alpha tantalum when tantalum is deposited over the TaN seed layer. Further, the TaN seed layer exhibits low resistivity, in the range of 30 μΩ cm and can be used as a low resistivity barrier layer in the absence of an alpha tantalum layer. In one embodiment of the method, a TaN film is altered on its surface form the TaN seed layer. In another embodiment of the method, a Ta film is altered on its surface to form the TaN seed layer.

摘要翻译： 我们已经发现了一种提供大约约2埃至大约100埃的Ta N种子层的薄膜的方法，当钽沉积在Ta上时可用于诱导形成α钽， SUB> N 种子层。 此外，Ta N N种子层在30μΩ·cm的范围内显示低电阻率，并且可以在不存在α钽层的情况下用作低电阻率阻挡层。 在该方法的一个实施方案中，TaN膜在其表面上形成Ta N N种子层。 在该方法的另一个实施方案中，在其表面上改变Ta膜以形成Ta N N种子层。

公开(公告)号：US20070020922A1

公开(公告)日：2007-01-25

申请号：US11450703

申请日：2006-06-09

申请人： Tony Chiang ,  Gongda Yao ,  Peijun Ding ,  Fusen Chen ,  Barry Chin ,  Gene Kohara ,  Zheng Xu ,  Hong Zhang

发明人： Tony Chiang ,  Gongda Yao ,  Peijun Ding ,  Fusen Chen ,  Barry Chin ,  Gene Kohara ,  Zheng Xu ,  Hong Zhang

IPC分类号： H01L21/4763

CPC分类号： H01L21/76843 ,  C23C14/046 ,  C23C14/165 ,  H01L21/2855 ,  H01L21/76805 ,  H01L21/76844 ,  H01L21/76846 ,  H01L21/76862 ,  H01L21/76865 ,  H01L21/76871 ,  H01L21/76877 ,  H01L21/76879 ,  H01L21/76883

摘要： We disclose a method of applying a sculptured layer of material on a semiconductor feature surface using ion deposition sputtering, wherein a surface onto which the sculptured layer is applied is protected to resist erosion and contamination by impacting ions of a depositing layer. A first protective layer of material is deposited on a substrate surface using traditional sputtering or ion deposition sputtering, in combination with sufficiently low substrate bias that a surface onto which the layer is applied is not eroded away or contaminated during deposition of the protective layer. Subsequently, a sculptured second layer of material is applied using ion deposition sputtering at an increased substrate bias, to sculpture a shape from a portion of the first protective layer of material and the second layer of depositing material. The method is particularly applicable to the sculpturing of barrier layers, wetting layers, and conductive layers upon semiconductor feature surfaces.

摘要翻译： 我们公开了使用离子沉积溅射在半导体特征表面上施加雕刻的材料层的方法，其中施加有雕刻层的表面被保护以通过冲击沉积层的离子来抵抗侵蚀和污染。 使用传统的溅射或离子沉积溅射将第一保护层材料沉积在衬底表面上，结合足够低的衬底偏压，使得施加层的表面在保护层沉积期间不被腐蚀掉或被污染。 随后，使用离子沉积溅射在增加的衬底偏压下施加雕刻的第二材料层，以从材料的第一保护层的一部分和第二沉积材料层的一部分雕刻出形状。 该方法特别适用于在半导体特征表面上雕刻阻挡层，润湿层和导电层。

公开(公告)号：US20050208767A1

公开(公告)日：2005-09-22

申请号：US11069348

申请日：2005-02-28

申请人： Peijun Ding ,  Zheng Xu ,  Hong Zhang ,  Xianmin Tang ,  Praburam Gopalraja ,  Suraj Rengarajan ,  John Forster ,  Jianming Fu ,  Tony Chiang ,  Gongda Yao ,  Fusen Chen ,  Barry Chin ,  Gene Kohara

发明人： Peijun Ding ,  Zheng Xu ,  Hong Zhang ,  Xianmin Tang ,  Praburam Gopalraja ,  Suraj Rengarajan ,  John Forster ,  Jianming Fu ,  Tony Chiang ,  Gongda Yao ,  Fusen Chen ,  Barry Chin ,  Gene Kohara

IPC分类号： C23C14/06 ,  C23C14/16 ,  C23C14/32 ,  H01L21/285 ,  H01L21/44 ,  H01L21/4763 ,  H01L21/768

CPC分类号： H01L21/02183 ,  C23C14/024 ,  C23C14/046 ,  C23C14/0641 ,  C23C14/165 ,  C23C14/541 ,  C23C14/5806 ,  H01L21/022 ,  H01L21/02266 ,  H01L21/02271 ,  H01L21/02362 ,  H01L21/2855 ,  H01L21/318 ,  H01L21/76846 ,  H01L21/76856 ,  H01L21/76862 ,  H01L21/76876 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： We have discovered a method of providing a thin, approximately from about 2 Å to about 100 Å thick TaN seed layer, which can be used to induce the formation of alpha tantalum when tantalum is deposited over the TaN seed layer. Further, the TaN seed layer exhibits low resistivity, in the range of 30 μΩcm and can be used as a low resistivity barrier layer in the absence of an alpha tantalum layer. In one embodiment of the method, a TaN film is altered on its surface to form the TaN seed layer. In another embodiment of the method, a Ta film is altered on its surface to form the TaN seed layer.

摘要翻译： 我们已经发现了一种提供大约从大约2埃到大约100埃的Ta N种子层的薄的方法，其可以在钽沉积在Ta上时用于诱导形成α钽 N种子层。 此外，Ta N N种子层在30微米范围内显示低电阻率，并且可以在不存在α钽层的情况下用作低电阻率阻挡层。 在该方法的一个实施方案中，在其表面上改变TaN膜以形成Ta N N种子层。 在该方法的另一个实施方案中，在其表面上改变Ta膜以形成Ta N N种子层。

公开(公告)号：US6110821A

公开(公告)日：2000-08-29

申请号：US13823

申请日：1998-01-27

申请人： Gene Y. Kohara ,  Fusen Chen ,  Hyman Joseph Levinstein ,  Zheng Xu ,  Peijun Ding ,  Gongda Yao ,  Hong Zhang

发明人： Gene Y. Kohara ,  Fusen Chen ,  Hyman Joseph Levinstein ,  Zheng Xu ,  Peijun Ding ,  Gongda Yao ,  Hong Zhang

IPC分类号： C23C14/18 ,  C23C14/54 ,  H01L21/285 ,  H01L21/768 ,  H01L21/4763 ,  H01L21/44

CPC分类号： H01L21/76855 ,  C23C14/185 ,  C23C14/541 ,  H01L21/28518 ,  H01L21/76843 ,  H01L21/76877

摘要： Titanium is sputtered in an ionized metal plasma sputtering chamber to form titanium silicide in situ in the bottom of openings onto silicon in a series of steps that change the temperature and deposition conditions of sputtering. Ionized titanium is sputtered cold, the temperature is rapidly increased by passing argon through the heated substrate support without sputtering, thereby initiating titanium silicide formation, and then the sputtering of titanium ions is continued at high temperatures to deposit titanium silicide.To deposit titanium silicide in very high aspect ratio openings, a first layer of titanium atoms is sputter deposited in conventional manner to line the sidewalls of the openings, followed by sputtering from a plasma and continuing with the above process.

摘要翻译： 将钛在电离金属等离子体溅射室中溅射，以在开口的底部原位形成硅化硅，该系列步骤改变了溅射的温度和沉积条件。 电离钛溅出冷却，通过在不溅射的情况下通过加热的衬底支撑通过氩气而迅速升高温度，从而引发硅化钛的形成，然后在高温下继续溅射钛离子以沉积硅化钛。 为了将钛硅化物沉积在非常高的纵横比开口中，以常规方式溅射沉积第一层钛原子，以对开口的侧壁进行排列，然后从等离子体溅射并继续上述过程。

公开(公告)号：US20090053888A1

公开(公告)日：2009-02-26

申请号：US12288540

申请日：2008-10-20

申请人： Peijun Ding ,  Zheng Xu ,  Hong Zhang ,  Xianmin Tang ,  Praburam Gopalraja ,  Suraj Rengarajan ,  John C. Forster ,  Jianming Fu ,  Tony Chiang ,  Gongda Yao ,  Fusen E. Chen ,  Barry L. Chin ,  Gene Y. Kohara

发明人： Peijun Ding ,  Zheng Xu ,  Hong Zhang ,  Xianmin Tang ,  Praburam Gopalraja ,  Suraj Rengarajan ,  John C. Forster ,  Jianming Fu ,  Tony Chiang ,  Gongda Yao ,  Fusen E. Chen ,  Barry L. Chin ,  Gene Y. Kohara

IPC分类号： H01L21/4763 ,  H01L21/31

CPC分类号： H01L21/02183 ,  C23C14/0641 ,  C23C14/165 ,  C23C14/541 ,  C23C14/5806 ,  H01L21/02266 ,  H01L21/2855 ,  H01L21/318 ,  H01L21/76846 ,  H01L21/76856 ,  H01L21/76862 ,  H01L21/76876

摘要： A method of depositing a duffusion barrier layer with overlying conductive layer or fill which lowers resistivity of a semiconductor device interconnect. The lower resistivity is achieved by inducing the formation of alpha tantalum within a tantalum-comprising barrier layer.

摘要翻译： 一种用覆盖的导电层或填充物沉积具有降低半导体器件互连电阻率的渗透阻挡层的方法。 通过诱导在含钽隔离层内形成α钽来实现较低的电阻率。

公开(公告)号：US09390970B2

公开(公告)日：2016-07-12

申请号：US11733671

申请日：2007-04-10

申请人： Tony Chiang ,  Gongda Yao ,  Peijun Ding ,  Fusen E. Chen ,  Barry L. Chin ,  Gene Y. Kohara ,  Zheng Xu ,  Hong Zhang

发明人： Tony Chiang ,  Gongda Yao ,  Peijun Ding ,  Fusen E. Chen ,  Barry L. Chin ,  Gene Y. Kohara ,  Zheng Xu ,  Hong Zhang

IPC分类号： H01L21/768 ,  C23C14/04 ,  C23C14/16 ,  H01L21/285

CPC分类号： H01L21/76843 ,  C23C14/046 ,  C23C14/165 ,  H01L21/2855 ,  H01L21/76805 ,  H01L21/76844 ,  H01L21/76846 ,  H01L21/76862 ,  H01L21/76865 ,  H01L21/76871 ,  H01L21/76877 ,  H01L21/76879 ,  H01L21/76883

摘要： We disclose a method of applying a sculptured layer of material on a semiconductor feature surface using ion deposition sputtering, wherein a surface onto which the sculptured layer is applied is protected to resist erosion and contamination by impacting ions of a depositing layer, A first protective layer of material is deposited on a substrate surface using traditional sputtering or ion deposition sputtering, in combination with sufficiently low substrate bias that a surface onto which the layer is applied is not eroded away or contaminated during deposition of the protective layer. Subsequently, a sculptured second layer of material is applied using ion deposition sputtering at an increased substrate bias, to sculpture a shape from a portion of the first protective layer of material and the second layer of depositing material. The method is particularly applicable to the sculpturing of barrier layers, wetting layers, and conductive layers upon semiconductor feature surfaces.

摘要翻译： 我们公开了使用离子沉积溅射在半导体特征表面上施加雕刻层的材料的方法，其中施加有雕刻层的表面被保护以通过冲击沉积层的离子来抵抗侵蚀和污染。第一保护层 的材料通过传统的溅射或离子沉积溅射沉积在衬底表面上，结合足够低的衬底偏压，其中施加了该层的表面在保护层沉积期间不被腐蚀掉或被污染。 随后，使用离子沉积溅射在增加的衬底偏压下施加雕刻的第二材料层，以从材料的第一保护层的一部分和第二沉积材料层的一部分雕刻出形状。 该方法特别适用于在半导体特征表面上雕刻阻挡层，润湿层和导电层。