COMBINE-INFORMATION PROCESSING APPARATUS, METHOD FOR PROCESSING COMBINE-INFORMATION, PROGRAM, AND RECORDING MEDIUM
    2.
    发明申请
    COMBINE-INFORMATION PROCESSING APPARATUS, METHOD FOR PROCESSING COMBINE-INFORMATION, PROGRAM, AND RECORDING MEDIUM 有权
    组合信息处理装置,处理组合信息,程序和记录介质的方法

    公开(公告)号:US20080270058A1

    公开(公告)日:2008-10-30

    申请号:US12108153

    申请日:2008-04-23

    申请人: Toru FUJII

    发明人: Toru FUJII

    IPC分类号: G01N37/00

    摘要: In order to solve the conventional problem in which the occurrence of abnormal behaviors in a manufacturing apparatus cannot be properly determine in view of the variations in measured data caused by adjustment made to the manufacturing apparatuses, the combine-information processing apparatus comprises: an inspectional equation storage unit 103 for storing an inspectional equation calculating one or more principal component scores, the inspectional equation being obtained by performing a principal component analysis on measured data on a plurality of measuring objects in terms of two or more correlated measurement items, and the measuring objects being processed by the manufacturing apparatus whose adjustable conditions are changed while the manufacturing apparatus is in a normal state; an inspected measured-data acceptance unit 104 for accepting inspected measured data on the measuring objects processed by the manufacturing apparatus in terms of the measurement items corresponding to each term contained in the inspectional equation; a principal-component-score calculation unit 105 for calculating principal component scores using the inspected measured data with the inspectional equation; an inspecting unit 106 for inspecting the manufacturing apparatus using the calculated principal component scores; and an output unit 107 for outputting the inspecting results.

    摘要翻译: 为了解决制造装置中出现异常行为的传统问题,鉴于由对制造装置进行的调整引起的测量数据的变化,无法适当确定,组合信息处理装置包括:检验方程式 存储单元103,用于存储计算一个或多个主成分分数的检验方程,通过对两个或更多个相关测量项目的多个测量对象上的测量数据执行主成分分析获得的检验方程,以及测量对象 在制造装置处于正常状态时由可调节状态改变的制造装置进行加工; 检查测量数据接收单元104,用于根据与检查方程中包含的每个项相对应的测量项接受由制造设备处理的测量对象上的检查测量数据; 主成分分数计算单元105,用于使用检查方程用检验的测量数据计算主成分分数; 检查单元106,用于使用所计算的主成分分数来检查制造装置; 以及用于输出检查结果的输出单元107。

    ILLUMINATION OPTICAL DEVICE, ILLUMINATION METHOD, AND EXPOSURE METHOD AND DEVICE
    3.
    发明申请
    ILLUMINATION OPTICAL DEVICE, ILLUMINATION METHOD, AND EXPOSURE METHOD AND DEVICE 有权
    照明光学装置,照明方法和曝光方法和装置

    公开(公告)号:US20120249989A1

    公开(公告)日:2012-10-04

    申请号:US13494749

    申请日:2012-06-12

    申请人: Toru FUJII

    发明人: Toru FUJII

    IPC分类号: G03F7/20 G03B27/72 G02B26/00

    摘要: An illumination optical apparatus includes a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other, a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part.

    摘要翻译: 一种照明光学装置,包括分光装置,其将光束分成具有彼此不同的偏振状态的多个光束;空间光调制装置,布置在第一光路中的至少一个上,其中第一光束出射 所述多个光束行进的第二光束和所述多个光束中的第二光束行进的第二光路,并且具有多个被二维地排列并被单独驱动的光学元件和控制所述空间调制装置的控制装置 至少部分地组合第一光束和第二光束。

    CONJUGATED DIENE POLYMER RUBBER, AND CONJUGATED DIENE POLYMER RUBBER COMPOSITION
    4.
    发明申请
    CONJUGATED DIENE POLYMER RUBBER, AND CONJUGATED DIENE POLYMER RUBBER COMPOSITION 审中-公开
    共混二烯聚合物橡胶和共混二烯聚合物橡胶组合物

    公开(公告)号:US20110237737A1

    公开(公告)日:2011-09-29

    申请号:US13034067

    申请日:2011-02-24

    IPC分类号: C08L83/00 C08L9/00

    摘要: A conjugated diene polymer rubber is provided that includes component (A) and component (B) below, component (A) having a content, with the total amount of component (A) and component (B) as 100% by weight, of from 5% to 90% by weight, and component (B) having a content of from 95% to 10% by weight, Component (A): a conjugated diene polymer rubber component modified with a carbonyl group- and substituted amino group-containing compound Component (B): a conjugated diene polymer rubber component modified with a compound represented by formula (IIa) below (R21O)mSi(R22A)nR234-m-n  (IIa) wherein m denotes a number from 1 to 3, n denotes a number from 1 to 3, m+n is from 2 to 4, R21 and R23 denote a hydrocarbyl group, R22 denotes a hydrocarbylene group, A denotes a substituted amino group or an optionally substituted hydrocarbyloxy group, when there are a plurality of R21s the plurality of R21s may be identical to or different from each other, when there are a plurality of R22s the plurality of R22s may be identical to or different from each other, when there are a plurality of R23s the plurality of R23s may be identical to or different from each other, and when there are a plurality of As the plurality of As may be identical to or different from each other.

    摘要翻译: 提供了包含下述组分(A)和组分(B))的共轭二烯聚合物橡胶,组分(A)的含量为组分(A)和组分(B)的总量为100重量% 组分(A):用羰基和取代的含氨基的化合物改性的共轭二烯聚合物橡胶组分(B)含量为95重量%至10重量%的组分(B) 组分(B):用下式(IIa)表示的化合物(R21O)mSi(R22A)nR234-mn(Ⅱa)改性的共轭二烯聚合物橡胶组分,其中m表示1至3的数,n表示 1〜3,m + n为2〜4,R21和R23表示烃基,R22表示亚烃基,A表示取代氨基或任选取代的烃氧基,当存在多个R 21时, 当存在多个R22时,R21可以彼此相同或不同 当存在多个R23可以彼此相同或不同的多个R23时,并且当存在多个时,R22的优先级可以彼此相同或不同,因为多个As可以与 或彼此不同。

    CONJUGATED DIENE POLYMER, PROCESS FOR PRODUCING THE SAME, AND CONJUGATED DIENE POLYMER COMPOSITION AND VULCANIZATE
    5.
    发明申请
    CONJUGATED DIENE POLYMER, PROCESS FOR PRODUCING THE SAME, AND CONJUGATED DIENE POLYMER COMPOSITION AND VULCANIZATE 审中-公开
    连接二烯聚合物,其制备方法和共混二烯聚合物组合物和钒酸盐

    公开(公告)号:US20090247696A1

    公开(公告)日:2009-10-01

    申请号:US12409552

    申请日:2009-03-24

    IPC分类号: C08L9/00

    摘要: A conjugated diene polymer is provided that includes a conjugated diene-based constituent unit and a constituent unit represented by Formula (I) below, the constituent unit represented by Formula (I) being present between a conjugated diene-based constituent unit and a conjugated diene-based constituent unit, and the content of the constituent unit represented by Formula (I) being 1 unit or 2 units per polymer chain. In the formula, X1, X2, and X3 independently denote a group as defined in the specification.

    摘要翻译: 提供了共轭二烯聚合物,其包含共轭二烯基结构单元和由下式(I)表示的结构单元,由式(I)表示的构成单元存在于共轭二烯系构成单元和共轭二烯 (I)表示的构成单元的含量为1个单位或2个单位/个聚合物链。 在该式中,X1,X2和X3独立地表示说明书中定义的基团。