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公开(公告)号：US10889896B2
公开(公告)日：2021-01-12
申请号：US16309024
申请日：2016-06-28
IPC分类号： C23C16/50 , H05H1/24 , C23C16/505 , C01B13/11 , H01J37/32
摘要： With respect to a dielectric electrode, gas-jetting holes and gas-jetting holes formed in two rows along the X direction are provided as three or more gas-jetting holes along the X direction in a central region. By providing a difference in the X direction between the position where the gas-jetting hole is formed and the position where the gas-jetting hole is formed, the gas-jetting holes and the gas-jetting holes disposed in two rows are provided such that gas-jetting holes and gas-jetting holes are alternately disposed along the X direction.
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公开(公告)号：US10927454B2
公开(公告)日：2021-02-23
申请号：US16480942
申请日：2017-02-14
发明人： Shinichi Nishimura , Kensuke Watanabe , Yoshihito Yamada , Akinobu Teramoto , Tomoyuki Suwa , Yoshinobu Shiba
IPC分类号： H01L21/00 , C23C16/46 , C23C16/34 , C23C16/503 , H01L21/02
摘要： A method of forming a nitride film wherein (a) a silane-based gas is supplied to a processing chamber through a gas supply port; (b) a nitrogen radical gas from a radical generator is supplied to the processing chamber through a radical gas pass-through port; and (c) the silane-based gas supplied in (a) is reacted with the nitrogen radical gas supplied in (b), without causing a plasma phenomenon in the processing chamber, to form a nitride film on a wafer.
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公开(公告)号：US10418226B2
公开(公告)日：2019-09-17
申请号：US16098038
申请日：2016-05-27
摘要： An activated gas generation apparatus includes a gas jet flow straightener below an activated gas generating electrode group and a nozzle constituent part. The gas jet flow straightener receives a plurality of nozzle passing activated gases as a whole at an inlet part of a gas flow-straightening passage. The gas flow-straightening passage is formed so that the outlet opening area of an outlet part is set to be narrower than the inlet opening area of the inlet part, and the cylindrical gas jet of each of the plurality of nozzle passing activated gases is converted into a linear flow-straightened activated gas by the flow-straightening action of the gas flow-straightening passage.
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公开(公告)号：US11760602B2
公开(公告)日：2023-09-19
申请号：US16960231
申请日：2019-07-31
发明人： Akihiro Ichinose , Yoshihito Yamada
IPC分类号： B65H57/00 , B65H51/18 , B65H63/024 , B65H59/32 , B65H75/28 , B65H49/26 , B65H57/02 , B65H59/38 , B21C47/34
CPC分类号： B65H57/003 , B21C47/34 , B65H49/26 , B65H51/18 , B65H57/02 , B65H59/32 , B65H59/384 , B65H63/024 , B65H75/285 , B65H2220/03 , B65H2511/52 , B65H2701/36
摘要： A lead wire storage mechanism stores most of a lead wire such that the lead wire can be taken out from a tip end portion. A tension adjusting mechanism including a dancer roller and two lifting and lowering guide rollers is formed with a partial space that is to be a part of a hand travel space at a time of a preparation state. A lead wire guide mechanism including an opening and closing lead guide is formed with a partial space that is to be a part of the hand travel space at the time of the preparation state. A lead wire grasping and moving mechanism can execute a grasping operation for grasping a tip end portion of the lead wire with a grasping part, and a grasping part moving operation for moving the grasping part through the hand travel space.
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公开(公告)号：US10946475B2
公开(公告)日：2021-03-16
申请号：US16321275
申请日：2016-08-04
发明人： Akihiro Ichinose , Yoshihito Yamada
摘要： A bonding tool as the tool for ultrasonic bonding includes a plurality of protrusion portions in a protrusion region at a contact tip portion. The plurality of protrusion portions are equally spaced at a longitudinal direction interval in an X direction as the longitudinal direction of the protrusion region, and an X direction outermost protrusion portion positioned outermost in the X direction is disposed separately from a side edge of the protrusion region in the X direction by a longitudinal direction side edge distance. The plurality of protrusion portions are disposed so that a first disposition condition {0.349≤EX (the longitudinal direction side edge distance/DX (the longitudinal direction interval)≤0.510} is satisfied.
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公开(公告)号：US11433474B2
公开(公告)日：2022-09-06
申请号：US16630875
申请日：2019-03-13
IPC分类号： B23K20/00 , B23K20/10 , B23K103/00 , B23K101/40
摘要： In an ultrasonic bonding method, three ultrasonic bonding head units are disposed above a bonding target. At this time, initial heights in the three ultrasonic bonding head units are set to different heights from each other. Thereafter, a batch multiple lowering operation by a lifting-lowering servomotor and ultrasonic vibration operations by the three ultrasonic bonding head units are executed. At this time, a lowering speed V6 of the batch multiple lowering operation, an operation time T6 (min) of the ultrasonic vibration operation, and an adjustment gap length Δg among the initial heights are set to satisfy {T6
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公开(公告)号：US11239059B2
公开(公告)日：2022-02-01
申请号：US16764898
申请日：2018-01-10
IPC分类号： H01J37/32 , C23C16/452 , C23C16/455 , C23C16/50
摘要： The present invention has features (1) to (3). The feature (1) is that “an active gas generation electrode group is formed in such a manner that a ground side electrode component supports a high-voltage side electrode component”. The feature (2) is that “stepped parts are provided in a discharge space outside region of a dielectric electrode in the high-voltage side electrode component, and project downward, and by a formation height of these stepped parts, the gap length of a discharge space is defined”. The feature (3) is that “the high-voltage side electrode component and the ground side electrode component are formed to have the thickness of a discharge space formation region relatively thin and the thickness of a discharge space outside region relatively thick”.
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公开(公告)号：US11214017B2
公开(公告)日：2022-01-04
申请号：US16610139
申请日：2018-09-20
发明人： Yoshihito Yamada , Akihiro Ichinose
摘要： An ultrasonic vibration welding apparatus includes an air cylinder that is coupled to an ultrasonic welding head unit and executes a pressurizing operation of pressurizing on the ultrasonic welding head unit, and a lifting-lowering servomotor that executes a lifting-lowering operation including a lowering operation of lowering the ultrasonic welding head unit and the air cylinder at once, as components separate from each other.
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公开(公告)号：US09428831B2
公开(公告)日：2016-08-30
申请号：US14041313
申请日：2013-09-30
发明人： Hisaaki Yamakage , Yoshihito Yamada
IPC分类号： C23C16/448 , C23C14/24 , F22B1/16
CPC分类号： C23C16/4485 , C23C14/243 , F22B1/16
摘要： A heat equalizer includes a container structure, a material feed pipe, and a heating mechanism. The container structure includes an inner container and an outer container. In the outer container, a working fluid is held. Respective upper ends of the inner container and the outer container are joined to form a hollow portion between the inner container and the outer container. The material feed pipe extends from an outside of the container structure to the inner surface of the inner container. The heating mechanism is placed at the bottom of the outer container. At the bottom surface of the inner container, a plurality of protrusions protruding toward the inside of the inner container and depressions formed by the bottom surface depressed inward of the protrusions and capable of receiving the vaporized working fluid are formed.
摘要翻译： 热均衡器包括容器结构，供料管和加热机构。 容器结构包括内容器和外容器。 在外容器中，保持工作流体。 内容器和外容器的相应上端接合以在内容器和外容器之间形成中空部分。 材料供给管从容器结构的外部延伸到内部容器的内表面。 加热机构放置在外部容器的底部。 在内部容器的底面形成有多个向内部容器的内部突出的突起，并且形成有凹部，该凹部由凹部向内突出并且能够接收蒸发的工作流体。
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10.发明授权公开(公告)号：US11249008B2
公开(公告)日：2022-02-15
申请号：US16647670
申请日：2019-06-28
发明人： Akihiro Ichinose , Yoshihito Yamada
IPC分类号： G01N19/04 , G01L5/00 , H01L21/607
摘要： First and second operations are executed under control of a peeling inspection control apparatus functioning as a peeling and grasping control unit. In the first operation, a processed surface contact state in which a processed outer peripheral surface of a contact roller and a surface of a lead wire are in contact with each other is maintained, and contact roller rotation operation is executed in which the contact roller is moved on the surface of the lead wire while the contact roller is being rotated. During execution of the first operation, a tip portion of the lead wire is peeled from a glass substrate. Thereafter, in the second operation, grasping operation is executed in which the tip portion of the lead wire peeled from the glass substrate is grasped by a grasping mechanism.
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