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公开(公告)号：US20060086463A1
公开(公告)日：2006-04-27
申请号：US11255015
申请日：2005-10-21
CPC分类号： C23C16/45565
摘要： A substrate processing apparatus includes a reaction chamber with a structure allowing pressure reduction, a shower head for supplying a processing gas into the reaction chamber including a gas diffusion plate in which through holes are formed, and a substrate support for placing a substrate. Each ones of through holes provided in a peripheral region of the gas diffusion plate is formed so that an area of an inlet thereof is larger than an area of an outlet thereof. With use of the substrate processing apparatus, a processing gas can be supplied uniformly in the gas diffusion plate. Therefore, substrate processing such as film deposition and film etching can be uniformly performed.
摘要翻译： 基板处理装置包括具有允许减压的结构的反应室，用于向反应室供应处理气体的喷头，包括形成有通孔的气体扩散板和用于放置基板的基板支撑件。 设置在气体扩散板的周边区域中的每个通孔形成为使得其入口的面积大于其出口的面积。 通过使用基板处理装置，能够在气体扩散板中均匀地供给处理气体。 因此，可以均匀地进行诸如膜沉积和膜蚀刻的基板处理。
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公开(公告)号：US20060086318A1
公开(公告)日：2006-04-27
申请号：US11253569
申请日：2005-10-20
CPC分类号： C23C16/45565
摘要： In a gas diffusion plate, a plurality of through holes for passing a processing gas used in processing a substrate are provided. Each one of the through holes provided in a peripheral region of the gas diffusion plate is formed so that an area of an inlet thereof is larger than an area of an outlet thereof. With use of a substrate processing apparatus including the gas diffusion plate, a processing gas can be supplied uniformly in the gas diffusion plate. Accordingly, substrate processing such as film deposition and film etching can be uniformly performed.
摘要翻译： 在气体扩散板中，设置用于使用于处理基板的处理气体通过的多个通孔。 设置在气体扩散板的周边区域的通孔中的每一个形成为使得其入口的面积大于其出口的面积。 通过使用包括气体扩散板的基板处理装置，能够在气体扩散板中均匀地供给处理气体。 因此，可以均匀地进行诸如膜沉积和膜蚀刻之类的衬底处理。
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公开(公告)号：US07368398B2
公开(公告)日：2008-05-06
申请号：US11255015
申请日：2005-10-21
IPC分类号： H01L21/31
CPC分类号： C23C16/45565
摘要： A substrate processing apparatus includes a reaction chamber with a structure allowing pressure reduction, a shower head for supplying a processing gas into the reaction chamber including a gas diffusion plate in which through holes are formed, and a substrate support for placing a substrate. Each ones of through holes provided in a peripheral region of the gas diffusion plate is formed so that an area of an inlet thereof is larger than an area of an outlet thereof. With use of the substrate processing apparatus, a processing gas can be supplied uniformly in the gas diffusion plate. Therefore, substrate processing such as film deposition and film etching can be uniformly performed.
摘要翻译： 基板处理装置包括具有允许减压的结构的反应室，用于向反应室供应处理气体的喷头，包括形成有通孔的气体扩散板和用于放置基板的基板支撑件。 设置在气体扩散板的周边区域中的每个通孔形成为使得其入口的面积大于其出口的面积。 利用基板处理装置，能够在气体扩散板中均匀地供给处理气体。 因此，可以均匀地进行诸如膜沉积和膜蚀刻的基板处理。
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公开(公告)号：US20080283086A1
公开(公告)日：2008-11-20
申请号：US11898697
申请日：2007-09-14
CPC分类号： C23C16/4405 , C23C16/45565
摘要： A substrate processing apparatus has a pressure-reducible reaction chamber, a substrate support provided in the reaction chamber, a gas inlet port provided in a wall portion of the reaction chamber to introduce a gas into the reaction chamber, a first plate provided between the substrate support and the gas inlet port in the reaction chamber and having a plurality of first holes for dispersing the gas introduced from the gas inlet port into the reaction chamber, and a second plate provided between the substrate support and the first plate in the reaction chamber in opposing relation to the first plate and having a plurality of second holes for further dispersing the gas dispersed by the first plate. The first and second plates can be moved relatively to each other such that a spacing between the first and second plates is variable.
摘要翻译： 基板处理装置具有减压反应室，设置在反应室中的基板支撑体，设置在反应室壁部的气体导入口，将气体导入反应室，设置在基板之间的第一板 支撑件和气体入口，并且具有多个用于将从气体入口引入的气体分散到反应室中的第一孔，以及设置在反应室中的基板支撑件和第一板之间的第二板 与第一板相对，并且具有多个用于进一步分散由第一板分散的气体的第二孔。 第一和第二板可以相对移动，使得第一和第二板之间的间隔是可变的。
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公开(公告)号：US20050145170A1
公开(公告)日：2005-07-07
申请号：US11004897
申请日：2004-12-07
IPC分类号： C23C16/44 , C23C16/455 , H01L21/3065 , H01L21/31 , B08B3/00
CPC分类号： C23C16/4405 , C23C16/45565
摘要： A substrate processing apparatus has a pressure-reducible reaction chamber, a substrate support provided in the reaction chamber, a gas inlet port provided in a wall portion of the reaction chamber to introduce a gas into the reaction chamber, a first plate provided between the substrate support and the gas inlet port in the reaction chamber and having a plurality of first holes for dispersing the gas introduced from the gas inlet port into the reaction chamber, and a second plate provided between the substrate support and the first plate in the reaction chamber in opposing relation to the first plate and having a plurality of second holes for further dispersing the gas dispersed by the first plate. The first and second plates can be moved relatively to each other such that a spacing between the first and second plates is variable.
摘要翻译： 基板处理装置具有减压反应室，设置在反应室中的基板支撑体，设置在反应室壁部的气体导入口，将气体导入反应室，设置在基板之间的第一板 支撑件和气体入口，并且具有多个用于将从气体入口引入的气体分散到反应室中的第一孔，以及设置在反应室中的基板支撑件和第一板之间的第二板 与第一板相对，并且具有多个用于进一步分散由第一板分散的气体的第二孔。 第一和第二板可以相对移动，使得第一和第二板之间的间隔是可变的。
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公开(公告)号：US06681844B1
公开(公告)日：2004-01-27
申请号：US09806503
申请日：2001-04-13
IPC分类号： F28D900
CPC分类号： F28F3/046 , F25B33/00 , F25B37/00 , F25B39/00 , F28D5/02 , F28D9/0043 , F28D2021/007 , F28D2021/0071 , F28F3/042 , F28F3/044 , F28F3/083 , F28F9/0275 , F28F2250/104
摘要： The present invention relates to a plate type heat exchanger having a heat exchange element composed of two plates for exchanging heat between a fluid flowing inside the heat exchange element and a fluid flowing outside the heat exchange element. In the plate type heat exchanger, the two plates (1) have a plurality of depressions (8), and the depressions are brought into contact with and bonded to each other. Peripheral portions of the plates are sealed to form a space in which a fluid flows and constitute a heat exchange element (2) having opening portions (5, 6) at both ends thereof. The heat exchange elements (2) are piled on and bonded to each other so that the opening portions (5, 6) communicate with each other.
摘要翻译： 本发明涉及一种板式热交换器，其具有热交换元件，该热交换元件由在热交换元件内部流动的流体与流过热交换元件的流体之间进行热交换的两个板构成。 在板式热交换器中，两个板（1）具有多个凹部（8），并且使凹部彼此接触并接合。 板的外围部分被密封以形成流体流动的空间，并且构成在其两端具有开口部分（5,6）的热交换元件（2）。 热交换元件（2）彼此堆叠并彼此结合，使得开口部（5,6）彼此连通。
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公开(公告)号：US06442964B1
公开(公告)日：2002-09-03
申请号：US09806504
申请日：2001-06-25
申请人： Naoyuki Inoue , Toshio Matsubara , Tomoyoshi Irie
发明人： Naoyuki Inoue , Toshio Matsubara , Tomoyoshi Irie
IPC分类号： F25B1500
CPC分类号： F28D9/00 , F25B15/00 , F25B15/02 , F25B37/00 , F25B39/04 , F25B49/043 , Y02A30/277 , Y02B30/62
摘要： An absorption refrigerating machine according to the present invention has a system for flowing cooling water in parallel to an absorber and a condenser. The absorption refrigerating machine is constituted such that plate type heat exchangers H1, H3 are used in an absorber A and a condenser C, and the amounts of cooling water distributed to the absorber and the condenser are determined mainly based on fluid resistance of each of the plate type heat exchangers.
摘要翻译： 根据本发明的吸收式制冷机具有平行于吸收器和冷凝器流动冷却水的系统。 吸收式制冷机构成为在吸收器A和冷凝器C中使用板式热交换器H1，H3，分配到吸收器和冷凝器的冷却水的量主要基于每个的吸收器和冷凝器的流体阻力 板式热交换器。
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公开(公告)号：US20060146369A1
公开(公告)日：2006-07-06
申请号：US11320597
申请日：2005-12-30
申请人： Toshio Matsubara
发明人： Toshio Matsubara
IPC分类号： G06K15/00
CPC分类号： H04N1/00278 , G03B27/00
摘要： The present invention provides a printing apparatus and a method for a user to easily obtain an image print without accompanying information if the user needs no accompanying information even if the image is already embedded with various types of accompanying information such as date of taking the picture and the like. The printing apparatus comprises: a detecting section for detecting accompanying information accompanying an image; a trimming section for determining a trimming region which does not include the accompanying information and cutting an image included in the trimming region out from the region; and a printing section for printing the cut out image. The printing method comprises the steps of: detecting accompanying information which accompanies an image; determining a trimming region which does not include the accompanying information and cutting an image included in the trimming region out from the region; and printing the cut out image.
摘要翻译： 本发明提供了一种打印装置和方法，用于即使图像已经嵌入有诸如拍摄日期等附带信息的用户也不需要伴随信息，用户便于获得图像打印而不附带信息。 类似。 打印装置包括：检测部分，用于检测伴随图像的附带信息; 修剪部，其用于确定不包括所述附加信息的修剪区域，并且从所述区域切出包括在所述修剪区域中的图像; 以及用于打印切出的图像的打印部分。 打印方法包括以下步骤：检测伴随图像的伴随信息; 确定不包括所述附加信息并从所述区域切割包括在所述修剪区域中的图像的修剪区域; 并打印切出的图像。
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公开(公告)号：US5381776A
公开(公告)日：1995-01-17
申请号：US102781
申请日：1993-08-06
申请人： Toshio Matsubara , Haruyuki Kato , Yuji Ota , Hideki Tominaga
发明人： Toshio Matsubara , Haruyuki Kato , Yuji Ota , Hideki Tominaga
IPC分类号： F02D41/02 , F02D41/00 , F02D41/04 , F02D41/14 , F02D45/00 , F02M25/08 , F02M51/00 , F02M7/00
CPC分类号： F02D41/0042 , F02M25/08
摘要： An air-fuel ratio control system for an engine, to which evaporated fuel in a canister is supplied, is used for feedback controlling an air-fuel ratio based on a feedback control value calculated according to the quantity of evaporated fuel supplied to the engine. A calculation is made, in a first range of engine operating conditions, of a difference of a first control value between the first control value determined during supplying of the evaporated fuel to the engine and the first control value determined during not supplying of the evaporated fuel to the engine in the first range. A second control value for a second range of engine operating conditions is established different from the first range based on a feedback control value for controlling an air-fuel ratio of fuel in the first range, a ratio of the quantity of intake air into the engine between the first and second ranges, and a ratio of the supplying quantity of the evaporated fuel into the engine between the first and second ranges. An air-fuel ratio is feedback controlled with the second control value in the second range.
摘要翻译： 用于发动机的空燃比控制系统，其中供应有罐内的蒸发燃料，用于基于根据供应给发动机的蒸发燃料量计算的反馈控制值来反馈控制空燃比。 在发动机工作条件的第一范围内，计算在蒸发燃料供给发动机时确定的第一控制值与在不供应蒸发燃料时确定的第一控制值之间的第一控制值的差异 到发动机的第一个范围。 基于用于控制第一范围内的燃料的空燃比的反馈控制值，进入发动机的进气量的比例，第二范围的发动机运转条件的第二控制值被设定为与第一范围不同 在第一和第二范围之间，以及在第一和第二范围之间的蒸发燃料在发动机中的供应量的比率。 利用第二控制值在第二范围内反馈控制空燃比。
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10.发明授权Print system and print terminal, and image saving system and image saving unit 有权打印系统和打印终端，以及图像保存系统和图像保存单元公开(公告)号：US07598704B2
公开(公告)日：2009-10-06
申请号：US11333305
申请日：2006-01-18
申请人： Toshio Taniguchi , Toshio Matsubara
发明人： Toshio Taniguchi , Toshio Matsubara
IPC分类号： H02J7/00
CPC分类号： H02J7/025 , H02J50/12 , H04M1/7253
摘要： As the present invention is adapted to receive an image to be printed or to be saved from a portable device having the image by wireless communication, an image needs not to be passed via a memory card or by connector connection or the like. As the present invention is also adapted to automatically identify the other party's device to wirelessly communicate with and establish a channel, and further adapted to supply power to the other party's device without contact, it is advantageous that a battery of the portable device is not exhausted or the portable device is not disconnected even if the device communicates wirelessly for a long time.
摘要翻译： 由于本发明适于通过无线通信从具有图像的便携式设备接收要打印或被保存的图像，所以不需要通过存储卡或连接器连接等传递图像。 由于本发明还适于自动识别另一方的设备以与无线通信并建立通道，并且还适于在不接触的情况下向另一方的设备供电，有利的是便携式设备的电池未被耗尽 或者即使设备长时间无线通信，便携式设备也不会断开连接。
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