公开(公告)号：US06469593B2

公开(公告)日：2002-10-22

申请号：US09757490

申请日：2001-01-11

申请人： Toshio Nishizawa ,  Masanori Ueda ,  Osamu Kawauchi ,  Kiyohide Misawa ,  Hiroyuki Furusato

发明人： Toshio Nishizawa ,  Masanori Ueda ,  Osamu Kawauchi ,  Kiyohide Misawa ,  Hiroyuki Furusato

IPC分类号： H03H964

CPC分类号： H03H9/6436 ,  H03H9/0061 ,  H03H9/0576 ,  H03H9/08 ,  H03H9/1071 ,  H03H9/6469 ,  H03H9/72 ,  H03H9/725 ,  H03H2250/00

摘要： A surface acoustic wave device includes a package having a coefficient of linear expansion; and a piezoelectric element forming a surface acoustic wave element, and mounted on the package by a flip chip bonding. The piezoelectric element has different coefficients of linear expansion in a direction of propagation of surface acoustic waves generated by an interdigital electrode of the surface acoustic wave element and in a vertical direction thereto, and further has a long side existing to a direction having a coefficient of linear expansion close to the coefficient of linear expansion of the package. The piezoelectric element is cut out from a single crystal having X, Y, and Z crystal axes, and the X crystal axis agrees with a direction of propagation of the surface acoustic wave.

公开(公告)号：US07437932B2

公开(公告)日：2008-10-21

申请号：US11392843

申请日：2006-03-29

申请人： Osamu Kawauchi

发明人： Osamu Kawauchi

IPC分类号： G01P9/04

CPC分类号： G01C19/5607

摘要： A gyro vibration piece detecting an angular velocity includes a supporting part, a driving part connected to the supporting part and performing vibration, and a detection part detecting vibration generated by Coriolis force generated by the rotation of the driving part. A connection part includes a connection portion having a fin and an end portion connected between at least one of a side of the driving part and a side of the supporting part and a side of the detection part and a side of the supporting part. The end portion includes a top surface and a side surface, whereby the side surface is substantially perpendicular to the top surface and includes a circular arc shape disposed along a bottom portion thereof opposite to a junction of the top surface and the side surface.

摘要翻译： 检测角速度的陀螺仪振动片包括支撑部，与支撑部连接并进行振动的驱动部，以及检测由驱动部的旋转产生的科里奥利力产生的振动的检测部。 连接部分包括具有翅片的连接部分和连接在驱动部分的一侧和支撑部分的侧面和检测部分的侧面和支撑部分的侧面中的至少一个之间的端部。 该端部包括顶表面和侧表面，由此侧表面基本上垂直于顶表面并且包括沿着与顶表面和侧表面的接合部相对的底部部分设置的圆弧形状。

公开(公告)号：US07207221B2

公开(公告)日：2007-04-24

申请号：US11239698

申请日：2005-09-29

申请人： Osamu Kawauchi ,  Shigeki Miyazawa ,  Katsumi Takayama ,  Keiichi Yamaguchi

发明人： Osamu Kawauchi ,  Shigeki Miyazawa ,  Katsumi Takayama ,  Keiichi Yamaguchi

IPC分类号： G01P9/04

CPC分类号： G01C19/5628 ,  Y10T29/42

摘要： A piezo-electric vibration reed 1 including connection arms extended in opposing directions from a base 12, drive arms extended in a direction perpendicular to the connection arms at the respective tips of the connection arms 13 and 14, and detection arms extended from the base 12 in a direction perpendicular to the connection arms. In the respective tips of the drive arms, and the detection arms, there are formed a first deadweight portion and a second deadweight portion, which are adjustment portions used for mass adjustment. The adjustment portions are formed of deadweight layers and an electrode film.

摘要翻译： 包括从底座12向相反方向延伸的连接臂的压电振动片1，在连接臂13和14的各个尖端处沿垂直于连接臂的方向延伸的驱动臂以及从底座12延伸的检测臂 在垂直于连接臂的方向上。 在驱动臂和检测臂的各个尖端中形成有用于质量调节的调节部分的第一自重部分和第二自重部分。 调整部分由自重层和电极膜形成。

公开(公告)号：US20060219007A1

公开(公告)日：2006-10-05

申请号：US11392843

申请日：2006-03-29

申请人： Osamu Kawauchi

发明人： Osamu Kawauchi

IPC分类号： G01P15/08

CPC分类号： G01C19/5607

摘要： A gyro vibration piece detecting an angular velocity includes: a supporting part; a driving part connected to the supporting part and performing vibration; a detection part connected through the driving part and the supporting part and detecting detection vibration generated by Coriolis force generated by the rotation of the driving part; and a connection part including a connection portion having a plurality of steps formed between a side of a width direction of the driving part or a side of a width direction of the detection part and a side of another portion connected to the driving part or the detection part, which are continuously connected. The connection part has a first end portion which is located on an innermost side of the connection part among the connection portion and has a circular arc shaped wall portion that connects a side of a width direction of the driving part or a side of a width direction of the detection part to a side of another portion connected to the driving part or the detection part, and a bottom surface having a predetermined depth.

摘要翻译： 检测角速度的陀螺仪振动片包括：支撑部; 与支撑部连接的驱动部，进行振动; 通过驱动部和支撑部连接的检测部，检测由驱动部旋转产生的科里奥利力产生的检测振动; 以及连接部，包括具有多个台阶的连接部分，所述多个台阶形成在所述驱动部分的宽度方向的一侧或所述检测部分的宽度方向的一侧，以及连接到所述驱动部分的另一部分的侧面或所述检测 部分，连续连接。 连接部具有位于连接部中的连接部的最内侧的第一端部，并且具有连接驱动部的宽度方向的一侧或宽度方向侧的圆弧状的壁部 的检测部分的一侧到连接到驱动部分或检测部分的另一部分的侧面，以及具有预定深度的底面。

公开(公告)号：US20050005411A1

公开(公告)日：2005-01-13

申请号：US10833006

申请日：2004-04-28

申请人： Osamu Kawauchi ,  Masayuki Kikushima ,  Yoshio Morita

发明人： Osamu Kawauchi ,  Masayuki Kikushima ,  Yoshio Morita

IPC分类号： H03H3/013 ,  H03H3/04 ,  H03H9/10 ,  H03H9/21 ,  H04R17/00

CPC分类号： H03H9/1021 ,  Y10T29/42 ,  Y10T29/435

摘要： A method for manufacturing a tuning fork type piezoelectric device 10 includes a step of mounting a tuning fork type piezoelectric vibrating element 16 to a package base 12 having a sealing hole 20 with a conductive adhesive 14 having a Young's modulus of 1×10−2 GPa and below, a step of bonding a lid member 18 to an upper surface of the package base 12 with a low melting point glass 30, a step of a vacuum sealing the sealing hole 20 with a sealing member after vacuuming the inside of the package 28 through the sealing hole 20, and a step of adjusting a frequency by irradiating laser light to the tuning fork type piezoelectric vibrating element 16 through the lid member 18.

摘要翻译： 音叉型压电装置10的制造方法包括将音叉型压电振动元件16安装到具有密封孔20的封装基座12的步骤，导电粘合剂14的杨氏模量为1×10 -2 GPa 以下，使用低熔点玻璃30将盖部件18接合到封装基板12的上表面的步骤，在对封装28的内部进行抽真空之后，用密封部件对密封孔20进行真空密封的工序 通过密封孔20和通过盖构件18向音叉型压电振动元件16照射激光来调节频率的步骤。

公开(公告)号：US07145283B2

公开(公告)日：2006-12-05

申请号：US10697632

申请日：2003-10-29

申请人： Manabu Takeuchi ,  Katsumi Takayama ,  Osamu Kawauchi ,  Yusuke Kinoshita

发明人： Manabu Takeuchi ,  Katsumi Takayama ,  Osamu Kawauchi ,  Yusuke Kinoshita

IPC分类号： H01L41/053 ,  H03H9/25

CPC分类号： H03H9/1071 ,  B81B7/0048 ,  H01L41/053 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/16 ,  H01L2224/32014 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49175 ,  H01L2224/73265 ,  H01L2924/01004 ,  H01L2924/01019 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/16195 ,  H03H9/02897 ,  H03H9/02984 ,  H03H9/0552 ,  H03H9/059 ,  H03H9/1021 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2224/05624

摘要： A piezoelectric device and method comprising a piezoelectric vibrating reed 10 and excitation electrodes which are mounted in a package having a package base 42 and outer terminals using a TAB tape 20 composed of a plurality of electrical conductors formed on an insulating material with each of the plurality of electrical conductors disposed in an arrangement forming predetermined winding patterns 30 thereon with the wiring patterns 30 interconnecting the excitation electrodes to the outer terminals.

摘要翻译： 一种压电装置和方法，包括压电振动片10和激励电极，其安装在具有封装基座42的封装中，并且使用由形成在绝缘材料上的多个电导体构成的TAB带20，所述多个电导体具有多个 电导体布置在其上形成预定绕组图案30的布置中，其中布线图案30将激励电极互连到外部端子。

公开(公告)号：US07140251B2

公开(公告)日：2006-11-28

申请号：US10848830

申请日：2004-05-19

申请人： Osamu Kawauchi ,  Yoshio Morita ,  Takayuki Kikuchi ,  Takao Soma

发明人： Osamu Kawauchi ,  Yoshio Morita ,  Takayuki Kikuchi ,  Takao Soma

IPC分类号： G01P9/04

CPC分类号： G01C19/5642

摘要： A device for measuring a physical value, such as a vibratory gyroscope, is provided. The device comprises a vibrator; a driving means for exciting a driving vibration in the vibrator; a detecting means for obtaining an output signal based on a detection vibration excited in the vibrator in response with the physical value; and a detection circuit for processing the output signal to provide a detection signal corresponding with the physical value. The vibrator has at least one bending vibration arms 1A and 1B vibrating in bending mode along a specified plane (X-Y plane). The bending vibration arm comprises at least a pair of base parts 2A, 2B and a connecting part 3 connecting the base parts 2A, 2B. The connecting and base parts define a pair of recesses 8A, 8B.

摘要翻译： 提供了用于测量物理值的装置，例如振动陀螺仪。 该装置包括振动器; 用于激励振动器中的驱动振动的驱动装置; 检测装置，用于响应于物理值，根据在振动器中激发的检测振动获得输出信号; 以及检测电路，用于处理输出信号以提供与物理值对应的检测信号。 振动器具有沿着特定平面（X-Y平面）以弯曲模式振动的至少一个弯曲振动臂1A和1B。 弯曲振动臂包括至少一对基部2A，2B和连接基部2A，2B的连接部3.连接部和基部形成有一对凹部8A，8B。

公开(公告)号：US07126262B2

公开(公告)日：2006-10-24

申请号：US10852606

申请日：2004-05-25

申请人： Osamu Kawauchi ,  Koji Watanabe

发明人： Osamu Kawauchi ,  Koji Watanabe

IPC分类号： G01C19/56

CPC分类号： G01C19/5607 ,  Y10T74/12 ,  Y10T74/1275

摘要： The invention provides a piezoelectric vibration gyro element including a pair of detecting resonant arms at its center, connecting arms each on, the right and left of the center, and a pair of driving resonant arms at each far end of the connecting arms, which makes it possible to secure the symmetry of the resonant arms' flexure and vibrating, and easily and accurately separate electrodes. In particular, two side surfaces of extension parts that extend along the direction in which each end surface of connecting arms extends, flat surfaces are provided to both sides in a direction perpendicular to the direction in which driving resonant arms extend. A wiring passing across the end surface of the extension parts in its thickness direction and joining front and back main surfaces of the end surface of the connecting arms and the extension parts can be formed so as to electrically couple the first driving electrodes each on the front and back main surfaces of the driving resonant arms. The exposure for electrode separation can be done from the above in a direction perpendicular to the flat surface of the extension part and with a given angle to the main surfaces of the driving resonant arms so as to simultaneously expose the main surfaces and side surfaces to light.

摘要翻译： 本发明提供了一种压电振动陀螺元件，其包括一对检测谐振臂在其中心，连接臂位于中心的右侧和左侧，以及一对驱动谐振臂在连接臂的每个远端，这使得 可以确保共振臂的弯曲和振动的对称性，并且容易且精确地分离电极。 特别地，沿着连接臂的每个端面延伸的方向延伸的延伸部分的两个侧表面在垂直于驱动共振臂延伸的方向的方向上设置在两侧。 延伸部件的厚度方向的端面穿过连接臂的端面的表面和后表面与延伸部分的布线可以形成为将前面的每个的第一驱动电极电耦合 和驱动谐振臂的后表面。 用于电极分离的曝光可以从上述方向在垂直于延伸部分的平坦表面的方向上以与驱动谐振臂的主表面给定的角度进行，以便同时将主表面和侧表面暴露于光 。

公开(公告)号：US20060070442A1

公开(公告)日：2006-04-06

申请号：US11239698

申请日：2005-09-29

申请人： Osamu Kawauchi ,  Shigeki Miyazawa ,  Katsumi Takayama ,  Keiichi Yamaguchi

发明人： Osamu Kawauchi ,  Shigeki Miyazawa ,  Katsumi Takayama ,  Keiichi Yamaguchi

IPC分类号： G01P9/04 ,  G01P1/04 ,  G01C25/00

CPC分类号： G01C19/5628 ,  Y10T29/42

摘要： A piezo-electric vibration reed 1 including connection arms extended in opposing directions from a base 12, drive arms extended in a direction perpendicular to the connection arms at the respective tips of the connection arms 13 and 14, and detection arms extended from the base 12 in a direction perpendicular to the connection arms. In the respective tips of the drive arms, and the detection arms, there are formed a first deadweight portion and a second deadweight portion, which are adjustment portions used for mass adjustment. The adjustment portions are formed of deadweight layers and an electrode film.

摘要翻译： 包括从底座12向相反方向延伸的连接臂的压电振动片1，在连接臂13和14的各个尖端处沿垂直于连接臂的方向延伸的驱动臂以及从底座12延伸的检测臂 在垂直于连接臂的方向上。 在驱动臂和检测臂的各个尖端中形成有用于质量调节的调节部分的第一自重部分和第二自重部分。 调整部分由自重层和电极膜形成。

公开(公告)号：US20050257620A1

公开(公告)日：2005-11-24

申请号：US10848830

申请日：2004-05-19

申请人： Osamu Kawauchi ,  Yoshio Morita ,  Takayuki Kikuchi ,  Takao Soma

发明人： Osamu Kawauchi ,  Yoshio Morita ,  Takayuki Kikuchi ,  Takao Soma

IPC分类号： G01C19/56 ,  G01M3/32

CPC分类号： G01C19/5642

摘要： A device for measuring a physical value, such as a vibratory gyroscope, is provided. The device comprises a vibrator; a driving means for exciting a driving vibration in the vibrator; a detecting means for obtaining an output signal based on a detection vibration excited in the vibrator in response with the physical value; and a detection circuit for processing the output signal to provide a detection signal corresponding with the physical value. The vibrator has at least one bending vibration arms 1A and 1B vibrating in bending mode along a specified plane (X-Y plane). The bending vibration arm comprises at least a pair of base parts 2A, 2B and a connecting part 3 connecting the base parts 2A, 2B. The connecting and base parts define a pair of recesses 8A, 8B.

摘要翻译： 提供了用于测量物理值的装置，例如振动陀螺仪。 该装置包括振动器; 用于激励振动器中的驱动振动的驱动装置; 检测装置，用于响应于物理值，根据在振动器中激发的检测振动获得输出信号; 以及检测电路，用于处理输出信号以提供与物理值对应的检测信号。 振动器具有沿着特定平面（X-Y平面）以弯曲模式振动的至少一个弯曲振动臂1A和1B。 弯曲振动臂包括至少一对基部2A，2B和连接基部2A，2B的连接部3.连接部和基部形成有一对凹部8A，8B。