公开(公告)号：US06353203B1

公开(公告)日：2002-03-05

申请号：US09602154

申请日：2000-06-21

申请人： Toshiyuki Hokodate ,  Yasuhiko Iwai ,  Miki Kurosawa ,  Junichi Nishimae ,  Kentaro Tanaka

发明人： Toshiyuki Hokodate ,  Yasuhiko Iwai ,  Miki Kurosawa ,  Junichi Nishimae ,  Kentaro Tanaka

IPC分类号： B23K2602

CPC分类号： B23K26/032 ,  B23K26/046 ,  B23K26/048 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/1224 ,  B23K26/123 ,  B23K26/125 ,  B23K26/702 ,  G02B7/028 ,  G02B26/101

摘要： In a laser machining apparatus comprising a deflector for changing a direction of a laser beam outputted from a laser oscillator, and a converging lens for refracting the laser beam introduced from the deflector and focusing the laser beam onto a work to be machined, a lens position adjusting unit is provided for changing a relative position between a plurality of lenses constituting the converging lens and the lens position adjusting unit change the relative positions of the lenses so as to cancel a change in refractance of the lenses due to a change in the temperature.

摘要翻译： 在包括用于改变从激光振荡器输出的激光束的方向的偏转器的激光加工装置和用于折射从偏转器引入的激光束并将激光束聚焦到待加工的工件上的会聚透镜的透镜位置 提供用于改变构成会聚透镜的多个透镜和透镜位置调整单元之间的相对位置的调节单元改变透镜的相对位置，以便消除由于温度变化引起的透镜的折射率变化。

公开(公告)号：US06875951B2

公开(公告)日：2005-04-05

申请号：US10111611

申请日：2001-07-27

申请人： Masahiko Sakamoto ,  Shozui Takeno ,  Yasuhiko Iwai ,  Toshiyuki Hokodate ,  Miki Kurosawa

发明人： Masahiko Sakamoto ,  Shozui Takeno ,  Yasuhiko Iwai ,  Toshiyuki Hokodate ,  Miki Kurosawa

IPC分类号： B23K26/06 ,  B23K26/067 ,  B23K26/08 ,  B23K26/38

CPC分类号： B23K26/0608 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/067 ,  B23K26/08 ,  B23K26/082 ,  B23K26/382 ,  B23K2103/50

摘要： A laser machining device according to the invention is provided with a laser oscillator for generating a laser beam, a main deflecting galvannometer mirror, an Fθ lens, and a sub-deflecting means arranged in an optical path between the laser oscillator and the main deflecting galvanometer mirror. A means for splitting a laser beam is provided, and the sub-deflecting means is inserted into the optical path of one of the split laser beams. At the same time, both the split laser beams are incident from the same main deflecting galvannometer mirror to the Fθ lens, and a numerical aperture in the optical system constituted by the main deflecting galvannometer mirror, the Fθ lens, and an object is set to be not more than 0.08.

摘要翻译： 根据本发明的激光加工装置设置有用于产生激光束的激光振荡器，主偏转电流计镜，Ftheta透镜和布置在激光振荡器和主偏转电流计之间的光路中的副偏转装置 镜子。 提供了用于分割激光束的装置，并且将副偏转装置插入到一个分割激光束的光路中。 同时，分离的激光束都从相同的主偏转加速计反射镜入射到Ftheta透镜，并且由主偏转加速计镜，Ftheta透镜和物体构成的光学系统中的数值孔径被设置为 不超过0.08。

公开(公告)号：US6150826A

公开(公告)日：2000-11-21

申请号：US219776

申请日：1998-12-23

申请人： Toshiyuki Hokodate ,  Kentaro Tanaka

发明人： Toshiyuki Hokodate ,  Kentaro Tanaka

IPC分类号： B23K26/00 ,  B23K26/04 ,  G01B7/00 ,  G01B7/02 ,  G01R27/26

CPC分类号： B23K26/04 ,  G01B7/003 ,  G01B7/023

摘要： A distance detector detects a distance between a focal position and a workpiece by use of a capacitance. A sensing electrode forms the capacitance relative to said workpiece. An input signal generator generates an alternating signal or an input signal that is input into the sensing electrode. A signal detector detects an alternating signal or a detection signal that is generated at the sensing electrode and that has a value varied in accordance with the capacitance. A computing unit receives the input signal from the input signal generator and the detection signal from the signal detector. The computing unit extracts a component having the same frequency as a frequency of the input signal from the detection signal. Thus, it computes the extracted component to generate a distance information output representing the distance between the focal position and the workpiece.

摘要翻译： 距离检测器通过使用电容来检测焦点位置与工件之间的距离。 感测电极相对于所述工件形成电容。 输入信号发生器产生输入到感测电极的交流信号或输入信号。 信号检测器检测在感测电极处产生的并且具有根据电容而变化的值的交流信号或检测信号。 计算单元接收来自输入信号发生器的输入信号和来自信号检测器的检测信号。 计算单元从检测信号中提取具有与输入信号的频率相同的频率的分量。 因此，它计算提取的分量以产生表示焦点位置和工件之间的距离的距离信息输出。

公开(公告)号：US08563943B2

公开(公告)日：2013-10-22

申请号：US13255027

申请日：2010-12-24

申请人： Takaaki Iwata ,  Toshiyuki Hokodate

发明人： Takaaki Iwata ,  Toshiyuki Hokodate

IPC分类号： A61N5/10

CPC分类号： A61N5/1043 ,  A61N5/1075 ,  A61N2005/1074 ,  A61N2005/1087

摘要： A particle beam irradiation apparatus There is provided a data processing apparatus that displays on a display unit a measured irradiation position value and an irradiation position value error, which is the error of the measured irradiation position relevant value related to the irradiation position of charged particle beam with respect to a desired irradiation position value related to a desired irradiation position, so that the measured irradiation position relevant value and the irradiation position relevant value error correspond to each other. The data processing apparatus displays a desired value display figure indicating a desired irradiation position relevant value at the coordinates of the desired irradiation position value and a measured value display figure at display coordinates, which are coordinates obtained by adding the desired irradiation position value to the coordinates acquired by arithmetically operating an irradiation position value error with deformation coefficients, and displays a line that connects the measured value display figure with the desired value display figure.

摘要翻译： 粒子束照射装置提供了一种数据处理装置，在显示单元上显示测量的照射位置值和照射位置值误差，其是与带电粒子束的照射位置相关的测量的照射位置相关值的误差 相对于与期望的照射位置相关的期望的照射位置值，使得测量的照射位置相关值和照射位置相关值误差彼此对应。 数据处理装置在期望的照射位置值的坐标和显示坐标处的测量值显示图形显示表示期望的照射位置相关值的期望值显示图形，该坐标是通过将所需的照射位置值与坐标 通过用变形系数算术地操作照射位置值误差来获取，并且显示将测量值显示图与期望值显示图连接的线。

公开(公告)号：US20120161030A1

公开(公告)日：2012-06-28

申请号：US13255027

申请日：2010-12-24

申请人： Takaaki Iwata ,  Toshiyuki Hokodate

发明人： Takaaki Iwata ,  Toshiyuki Hokodate

IPC分类号： A61N5/10

CPC分类号： A61N5/1043 ,  A61N5/1075 ,  A61N2005/1074 ,  A61N2005/1087

摘要： A particle beam irradiation apparatus There is provided a data processing apparatus that displays on a display unit a measured irradiation position value and an irradiation position value error, which is the error of the measured irradiation position relevant value related to the irradiation position of charged particle beam with respect to a desired irradiation position value related to a desired irradiation position, so that the measured irradiation position relevant value and the irradiation position relevant value error correspond to each other. The data processing apparatus displays a desired value display figure indicating a desired irradiation position relevant value at the coordinates of the desired irradiation position value and a measured value display figure at display coordinates, which are coordinates obtained by adding the desired irradiation position value to the coordinates acquired by arithmetically operating an irradiation position value error with deformation coefficients, and displays a line that connects the measured value display figure with the desired value display figure.

摘要翻译： 粒子束照射装置提供了一种数据处理装置，在显示单元上显示测量的照射位置值和照射位置值误差，其是与带电粒子束的照射位置相关的测量的照射位置相关值的误差 相对于与期望的照射位置相关的期望的照射位置值，使得测量的照射位置相关值和照射位置相关值误差彼此对应。 数据处理装置在期望的照射位置值的坐标和显示坐标处的测量值显示图形显示表示期望的照射位置相关值的期望值显示图形，该坐标是通过将所需的照射位置值与坐标 通过用变形系数算术地操作照射位置值误差来获取，并且显示将测量值显示图与期望值显示图连接的线。