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1.发明授权Organic electroluminescence display device with upper electrode including a thin silver film 有权具有包括薄银膜的上电极的有机电致发光显示装置公开(公告)号：US08643267B2
公开(公告)日：2014-02-04
申请号：US12875765
申请日：2010-09-03
IPC分类号： H01J1/62
CPC分类号： H01L27/3258 , H01L27/3246 , H01L27/3276 , H01L51/5048 , H01L51/5092 , H01L51/5234 , H01L51/5246 , H01L2251/5315
摘要： In an organic electroluminescence display device which includes: a display region DR in which a plurality of pixels are arranged; and a power source part CC which is arranged outside the display region, each of the plurality of pixels includes: a lower electrode An; a light emitting layer stacked above the lower electrode; and an upper electrode which includes a thin silver film AG and is formed by a layer shared in common by other pixels above the light emitting layer, the upper electrode extends to the power source part for electrically connection, the thin silver film has a portion arranged between the display region and the power source part, and a background layer containing an electron pair donor is arranged as a background of at least a portion of the thin silver film between the display region and the power source part.
摘要翻译： 一种有机电致发光显示装置，其特征在于，包括：配置有多个像素的显示区域DR; 以及布置在显示区域外的电源部CC，所述多个像素中的每一个包括：下电极An; 堆叠在下电极上的发光层; 以及上部电极，其包括薄的银膜AG，并且由发光层上方的其他像素共同共享的层形成，上部电极延伸到用于电连接的电源部分，薄的银膜具有布置的部分 在显示区域和电源部分之间，并且包含电子对供体的背景层被布置为显示区域和电源部分之间的薄银膜的至少一部分的背景。
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公开(公告)号：US20110057920A1
公开(公告)日：2011-03-10
申请号：US12875765
申请日：2010-09-03
CPC分类号： H01L27/3258 , H01L27/3246 , H01L27/3276 , H01L51/5048 , H01L51/5092 , H01L51/5234 , H01L51/5246 , H01L2251/5315
摘要： In an organic electroluminescence display device which includes: a display region DR in which a plurality of pixels are arranged; and a power source part CC which is arranged outside the display region, each of the plurality of pixels includes: a lower electrode An; a light emitting layer stacked above the lower electrode; and an upper electrode which includes a thin silver film AG and is formed by a layer shared in common by other pixels above the light emitting layer, the upper electrode extends to the power source part for electrically connection, the thin silver film has a portion arranged between the display region and the power source part, and a background layer containing an electron pair donor is arranged as a background of at least a portion of the thin silver film between the display region and the power source part.
摘要翻译： 一种有机电致发光显示装置，其特征在于，包括：配置有多个像素的显示区域DR; 以及布置在显示区域外的电源部CC，所述多个像素中的每一个包括：下电极An; 堆叠在下电极上的发光层; 以及上部电极，其包括薄的银膜AG，并且由发光层上方的其他像素共同共享的层形成，上部电极延伸到用于电连接的电源部分，薄的银膜具有布置的部分 在显示区域和电源部分之间，并且包含电子对供体的背景层被布置为显示区域和电源部分之间的薄银膜的至少一部分的背景。
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公开(公告)号：US06949174B2
公开(公告)日：2005-09-27
申请号：US10444990
申请日：2003-05-27
IPC分类号： H05H1/10 , C23F4/00 , G11B7/26 , G11B11/105 , H01J37/32 , H01L21/00 , H05H1/11 , C23C14/35 , C23F1/00
CPC分类号： H01L21/67069 , H01J37/32009 , H01J37/3233
摘要： A milling apparatus is provided in which temperature rise of a treatment-object in milling treatment, especially of the substrate thereof, is prevented. In the apparatus, ionization mechanism 2 comprises casing 20d having an opening at the center portion of the face thereof opposing to substrate 5 held by substrate holder 6; a filament is placed at the position where the straight line drawn from the filament to substrate 5 is intercepted by casing 20d; and electromagnets 31, 32 are provided around ionization mechanism 2 for generating a magnetic field to produce magnetic lines extending through opening 20j to substrate 5.
摘要翻译： 提供了一种铣削设备，其中防止了处理对象在铣削处理中的温度升高，特别是其衬底的温度升高。 在该装置中，电离机构2包括壳体20d，其在其面的中心部分处具有与由基板保持器6保持的基板5相对的开口; 灯丝被放置在从灯丝到基板5的直线被壳体20d截取的位置处; 并且在电离机构2周围设置电磁体31,32，用于产生磁场，以产生延伸通过开口20j到基板5的磁线。
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公开(公告)号：US06812164B2
公开(公告)日：2004-11-02
申请号：US10350019
申请日：2003-01-24
IPC分类号： H01L2131
CPC分类号： C23C14/046 , C23C14/32 , C23C14/355 , H01J2237/3137
摘要： A method for ionization film formation to form a deposited film by ionizing vaporized particles with an ionization mechanism of the hot-cathode system and injecting the ionized particles into a substrate is provided. The method includes the step of introducing He gas inside the ionization mechanism.
摘要翻译： 提供了一种用于通过用热阴极系统的电离机构离子化蒸发的颗粒以将离子化的颗粒注入基底而形成沉积膜的电离膜的形成方法。 该方法包括将He气引入电离机构的步骤。
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公开(公告)号：US20050029090A1
公开(公告)日：2005-02-10
申请号：US10940024
申请日：2004-09-14
IPC分类号： C23C14/04 , C23C14/32 , C23C14/35 , G11B11/105
CPC分类号： C23C14/046 , C23C14/32 , C23C14/355 , H01J2237/3137
摘要： A method for ionization film formation to form a deposited film by ionizing vaporized particles with an ionization mechanism of the hot-cathode system and injecting the ionized particles into a substrate is provided. The method includes the step of introducing He gas inside the ionization mechanism.
摘要翻译： 提供了一种用于通过用热阴极系统的电离机构离子化蒸发的颗粒以将离子化的颗粒注入基底而形成沉积膜的电离膜的形成方法。 该方法包括将He气引入电离机构的步骤。
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公开(公告)号：US06551471B1
公开(公告)日：2003-04-22
申请号：US09722675
申请日：2000-11-28
IPC分类号： C23C1435
CPC分类号： H01J37/3233 , C23C14/355 , H01J37/3405
摘要： The present invention provides a film forming method comprising the steps of ionizing sputtering particles and applying a periodically changing voltage to an electrode near a substrate, wherein a time for applying a voltage equal to or higher than an intermediate value between maximum and minimum values of the periodically changing voltage is shorter than a time for applying a voltage equal to or less than the intermediate value, and a film forming apparatus for carrying out the above method.
摘要翻译： 本发明提供一种成膜方法，其特征在于，包括以下步骤：使溅射粒子离子化，向基板附近的电极施加周期性变化的电压，其中施加电压等于或高于中间值的电压的时间 周期性变化的电压比施加等于或小于中间值的电压的时间短;以及用于实施上述方法的成膜装置。
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公开(公告)号：US06878241B2
公开(公告)日：2005-04-12
申请号：US10409190
申请日：2003-04-09
CPC分类号： H01J37/3402 , C23C14/355 , C23C14/358
摘要： Sputtering particles emitted from a target are ionized by the Penning ionization process. And the sputtering particles ionized are caused to fly in the direction of the substrate by a magnetic field formed by ambipolar diffusion due to a magnetic field generating means without scattering the particles to deposit the particles on the substrate. The partial pressure of a sputtering discharge gas in a discharge space is set to 1.3 Pa or less and a distance from the target to an ionization space is within twice the mean free path of the partial pressure of the sputtering discharge gas.
摘要翻译： 通过Penning电离过程使从靶发射的溅射粒子离子化。 并且通过由于磁场产生装置的双极扩散形成的磁场而使离子化的溅射粒子在基板的方向上飞行，而不会散射颗粒以将颗粒沉积在基板上。 放电空间中的溅射放电气体的分压设定为1.3Pa以下，从靶到电离空间的距离在溅射放电气体的分压平均自由程的2倍以下。
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公开(公告)号：US20110239941A1
公开(公告)日：2011-10-06
申请号：US13074124
申请日：2011-03-29
申请人： Yoshiyuki Nakagawa , Masanori Yoshida , Masamichi Masuda , Junji Ohyama , Akio Koganei , Naotoshi Miyamachi , Hirohito Yamaguchi , Tetsuya Karaki , Nobutaka Ukigaya , Toshiaki Yoshikawa
发明人： Yoshiyuki Nakagawa , Masanori Yoshida , Masamichi Masuda , Junji Ohyama , Akio Koganei , Naotoshi Miyamachi , Hirohito Yamaguchi , Tetsuya Karaki , Nobutaka Ukigaya , Toshiaki Yoshikawa
IPC分类号： C23C16/448 , C23C14/34
CPC分类号： C23C14/042
摘要： Provided is an evaporation apparatus which reduces deformation of a mask, improves adhesion between a substrate and an evaporation mask, and improves accuracy of dividing a region on which a film is to be formed and a region on which the film is not to be formed. The evaporation apparatus includes a pressing mechanism for pressing a film forming substrate disposed on an evaporation mask including a magnetic material against the evaporation mask. The pressing mechanism includes a magnet for attracting the mask toward at least a corner portion of the film forming substrate.
摘要翻译： 本发明提供一种降低掩模变形的蒸发装置，提高基板与蒸发掩模之间的粘附性，提高将要形成膜的区域的分割精度和不形成膜的区域。 蒸发装置包括用于将设置在包括磁性材料的蒸发掩模上的成膜基板压靠在蒸发掩模上的按压机构。 按压机构包括用于将掩模吸引至成膜基板的至少角部的磁体。
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公开(公告)号：US06787478B2
公开(公告)日：2004-09-07
申请号：US10400872
申请日：2003-03-28
IPC分类号： H01L2131
CPC分类号： H01J37/3233 , C23C14/0021 , C23C14/0063 , C23C14/0068 , C23C14/355 , C23C14/564 , H01J37/34
摘要： In a deposited-film-forming method of forming a compound film on a substrate by a chemical reaction between the particles of a raw material emitted from a raw material particle generation source opposed to the substrate in the direction of the substrate, and the atoms of a reactive gas supplied to a flying space of the particles of the raw material, the space being interposed between the substrate and the raw material particle source, the atoms of a rare gas in an excited state are supplied to the flying space of the particles of the raw material, in order to ionize the atoms of the reactive gas and the particles of the raw material and thereby induce the chemical reaction.
摘要翻译： 在通过在与基板相反的原料颗粒发生源发射的原料颗粒沿着基板的方向发生的化学反应而在基板上形成化合物膜的沉积膜形成方法中， 提供给原料颗粒的飞行空间的反应气体，该空间插入在基板和原料颗粒源之间，将处于激发状态的稀有气体的原子供给到颗粒的飞行空间 原料，以使电反应气体的原子和原料的粒子离子化，从而引起化学反应。
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