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公开(公告)号：US06812164B2
公开(公告)日：2004-11-02
申请号：US10350019
申请日：2003-01-24
IPC分类号： H01L2131
CPC分类号： C23C14/046 , C23C14/32 , C23C14/355 , H01J2237/3137
摘要： A method for ionization film formation to form a deposited film by ionizing vaporized particles with an ionization mechanism of the hot-cathode system and injecting the ionized particles into a substrate is provided. The method includes the step of introducing He gas inside the ionization mechanism.
摘要翻译： 提供了一种用于通过用热阴极系统的电离机构离子化蒸发的颗粒以将离子化的颗粒注入基底而形成沉积膜的电离膜的形成方法。 该方法包括将He气引入电离机构的步骤。
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公开(公告)号：US06949174B2
公开(公告)日：2005-09-27
申请号：US10444990
申请日：2003-05-27
IPC分类号： H05H1/10 , C23F4/00 , G11B7/26 , G11B11/105 , H01J37/32 , H01L21/00 , H05H1/11 , C23C14/35 , C23F1/00
CPC分类号： H01L21/67069 , H01J37/32009 , H01J37/3233
摘要： A milling apparatus is provided in which temperature rise of a treatment-object in milling treatment, especially of the substrate thereof, is prevented. In the apparatus, ionization mechanism 2 comprises casing 20d having an opening at the center portion of the face thereof opposing to substrate 5 held by substrate holder 6; a filament is placed at the position where the straight line drawn from the filament to substrate 5 is intercepted by casing 20d; and electromagnets 31, 32 are provided around ionization mechanism 2 for generating a magnetic field to produce magnetic lines extending through opening 20j to substrate 5.
摘要翻译： 提供了一种铣削设备，其中防止了处理对象在铣削处理中的温度升高，特别是其衬底的温度升高。 在该装置中，电离机构2包括壳体20d，其在其面的中心部分处具有与由基板保持器6保持的基板5相对的开口; 灯丝被放置在从灯丝到基板5的直线被壳体20d截取的位置处; 并且在电离机构2周围设置电磁体31,32，用于产生磁场，以产生延伸通过开口20j到基板5的磁线。
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公开(公告)号：US06878241B2
公开(公告)日：2005-04-12
申请号：US10409190
申请日：2003-04-09
CPC分类号： H01J37/3402 , C23C14/355 , C23C14/358
摘要： Sputtering particles emitted from a target are ionized by the Penning ionization process. And the sputtering particles ionized are caused to fly in the direction of the substrate by a magnetic field formed by ambipolar diffusion due to a magnetic field generating means without scattering the particles to deposit the particles on the substrate. The partial pressure of a sputtering discharge gas in a discharge space is set to 1.3 Pa or less and a distance from the target to an ionization space is within twice the mean free path of the partial pressure of the sputtering discharge gas.
摘要翻译： 通过Penning电离过程使从靶发射的溅射粒子离子化。 并且通过由于磁场产生装置的双极扩散形成的磁场而使离子化的溅射粒子在基板的方向上飞行，而不会散射颗粒以将颗粒沉积在基板上。 放电空间中的溅射放电气体的分压设定为1.3Pa以下，从靶到电离空间的距离在溅射放电气体的分压平均自由程的2倍以下。
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公开(公告)号：US06551471B1
公开(公告)日：2003-04-22
申请号：US09722675
申请日：2000-11-28
IPC分类号： C23C1435
CPC分类号： H01J37/3233 , C23C14/355 , H01J37/3405
摘要： The present invention provides a film forming method comprising the steps of ionizing sputtering particles and applying a periodically changing voltage to an electrode near a substrate, wherein a time for applying a voltage equal to or higher than an intermediate value between maximum and minimum values of the periodically changing voltage is shorter than a time for applying a voltage equal to or less than the intermediate value, and a film forming apparatus for carrying out the above method.
摘要翻译： 本发明提供一种成膜方法，其特征在于，包括以下步骤：使溅射粒子离子化，向基板附近的电极施加周期性变化的电压，其中施加电压等于或高于中间值的电压的时间 周期性变化的电压比施加等于或小于中间值的电压的时间短;以及用于实施上述方法的成膜装置。
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公开(公告)号：US20050029090A1
公开(公告)日：2005-02-10
申请号：US10940024
申请日：2004-09-14
IPC分类号： C23C14/04 , C23C14/32 , C23C14/35 , G11B11/105
CPC分类号： C23C14/046 , C23C14/32 , C23C14/355 , H01J2237/3137
摘要： A method for ionization film formation to form a deposited film by ionizing vaporized particles with an ionization mechanism of the hot-cathode system and injecting the ionized particles into a substrate is provided. The method includes the step of introducing He gas inside the ionization mechanism.
摘要翻译： 提供了一种用于通过用热阴极系统的电离机构离子化蒸发的颗粒以将离子化的颗粒注入基底而形成沉积膜的电离膜的形成方法。 该方法包括将He气引入电离机构的步骤。
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6.发明授权Organic electroluminescence display device with upper electrode including a thin silver film 有权具有包括薄银膜的上电极的有机电致发光显示装置公开(公告)号：US08643267B2
公开(公告)日：2014-02-04
申请号：US12875765
申请日：2010-09-03
IPC分类号： H01J1/62
CPC分类号： H01L27/3258 , H01L27/3246 , H01L27/3276 , H01L51/5048 , H01L51/5092 , H01L51/5234 , H01L51/5246 , H01L2251/5315
摘要： In an organic electroluminescence display device which includes: a display region DR in which a plurality of pixels are arranged; and a power source part CC which is arranged outside the display region, each of the plurality of pixels includes: a lower electrode An; a light emitting layer stacked above the lower electrode; and an upper electrode which includes a thin silver film AG and is formed by a layer shared in common by other pixels above the light emitting layer, the upper electrode extends to the power source part for electrically connection, the thin silver film has a portion arranged between the display region and the power source part, and a background layer containing an electron pair donor is arranged as a background of at least a portion of the thin silver film between the display region and the power source part.
摘要翻译： 一种有机电致发光显示装置，其特征在于，包括：配置有多个像素的显示区域DR; 以及布置在显示区域外的电源部CC，所述多个像素中的每一个包括：下电极An; 堆叠在下电极上的发光层; 以及上部电极，其包括薄的银膜AG，并且由发光层上方的其他像素共同共享的层形成，上部电极延伸到用于电连接的电源部分，薄的银膜具有布置的部分 在显示区域和电源部分之间，并且包含电子对供体的背景层被布置为显示区域和电源部分之间的薄银膜的至少一部分的背景。
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公开(公告)号：US20110057920A1
公开(公告)日：2011-03-10
申请号：US12875765
申请日：2010-09-03
CPC分类号： H01L27/3258 , H01L27/3246 , H01L27/3276 , H01L51/5048 , H01L51/5092 , H01L51/5234 , H01L51/5246 , H01L2251/5315
摘要： In an organic electroluminescence display device which includes: a display region DR in which a plurality of pixels are arranged; and a power source part CC which is arranged outside the display region, each of the plurality of pixels includes: a lower electrode An; a light emitting layer stacked above the lower electrode; and an upper electrode which includes a thin silver film AG and is formed by a layer shared in common by other pixels above the light emitting layer, the upper electrode extends to the power source part for electrically connection, the thin silver film has a portion arranged between the display region and the power source part, and a background layer containing an electron pair donor is arranged as a background of at least a portion of the thin silver film between the display region and the power source part.
摘要翻译： 一种有机电致发光显示装置，其特征在于，包括：配置有多个像素的显示区域DR; 以及布置在显示区域外的电源部CC，所述多个像素中的每一个包括：下电极An; 堆叠在下电极上的发光层; 以及上部电极，其包括薄的银膜AG，并且由发光层上方的其他像素共同共享的层形成，上部电极延伸到用于电连接的电源部分，薄的银膜具有布置的部分 在显示区域和电源部分之间，并且包含电子对供体的背景层被布置为显示区域和电源部分之间的薄银膜的至少一部分的背景。
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公开(公告)号：US20120064651A1
公开(公告)日：2012-03-15
申请号：US13320827
申请日：2010-05-13
IPC分类号： H01L51/56
CPC分类号： H01L51/0011 , H01L27/3218 , H01L27/3244 , H01L51/0073
摘要： Provided is a method for manufacturing an organic electroluminescent display apparatus that includes a substrate and a plurality of pixels each including two or more types of sub-pixels, in which the pixels are arranged in a display area of the substrate, and, among the sub-pixels, one type of sub-pixels are specified sub-pixels provided at certain intervals. The specified sub-pixels are formed by selectively forming the (2n-1)th specified sub-pixels (wherein n represents an integer of 1 or more) numbered from a side end of the display area using a mask having openings at positions corresponding to the (2n-1)th specified sub-pixels numbered from the side end, and selectively forming the (2n)th specified sub-pixels numbered from the side end using a mask having openings at positions corresponding to the (2n)th specified sub-pixels numbered from the side end.
摘要翻译： 本发明提供一种有机电致发光显示装置的制造方法，其特征在于，具备基板和多个像素，所述多个像素包括两个以上的像素，所述像素分布在所述基板的显示区域中，所述子像素 像素，一种类型的子像素是以特定间隔提供的指定的子像素。 通过使用对应于显示区域的位置处的开口的掩模选择性地形成从显示区域的侧端编号的（2n-1）个特定子像素（其中n表示1以上的整数），形成指定的子像素 （2n-1）个子像素，从侧端编号的第（2n）个特定的子像素，使用具有与第（2n）个指定子对应的位置的开口的掩模 从侧端编号的像素。
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9.发明授权Organic EL panel including an element substrate dehydrated in a shorter time and method for manufacturing the same 失效包括在较短时间内脱水的元件基板的有机EL面板及其制造方法公开(公告)号：US08221177B2
公开(公告)日：2012-07-17
申请号：US11851490
申请日：2007-09-07
申请人： Yasushi Iwakura , Katsunori Oya , Takuro Yamazaki
发明人： Yasushi Iwakura , Katsunori Oya , Takuro Yamazaki
IPC分类号： H01J9/00
CPC分类号： H01L27/3246 , H01L27/3258 , H01L51/5237
摘要： An organic EL panel is produced with high productivity by a method in which a first protective film (planarizing layer) can be dehydrated in a shorter time without increasing the number of steps up to the step of forming a second protective film (separation film). The second protective film has regions at which the first protective film is exposed between first electrodes.
摘要翻译： 通过可以在不增加直到形成第二保护膜（分离膜）的步骤的步骤的数量的情况下在较短时间内脱水第一保护膜（平坦化层）的方法，以高生产率制造有机EL面板。 第二保护膜具有在第一电极之间暴露第一保护膜的区域。
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公开(公告)号：US20080203906A1
公开(公告)日：2008-08-28
申请号：US11851490
申请日：2007-09-07
申请人： Yasushi Iwakura , Katsunori Oya , Takuro Yamazaki
发明人： Yasushi Iwakura , Katsunori Oya , Takuro Yamazaki
CPC分类号： H01L27/3246 , H01L27/3258 , H01L51/5237
摘要： An organic EL panel is produced with high productivity by a method in which a first protective film (planarizing layer) can be dehydrated in a shorter time without increasing the number of steps up to the step of forming a second protective film (separation film). The second protective film has regions at which the first protective film is exposed between first electrodes.
摘要翻译： 通过可以在不增加直到形成第二保护膜（分离膜）的步骤的步骤的数量的情况下在较短时间内脱水第一保护膜（平坦化层）的方法，以高生产率制造有机EL面板。 第二保护膜具有在第一电极之间暴露第一保护膜的区域。
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