摘要:
The present invention provides a substrate cleaning method capable of removing particles from the entire surface of a substrate to be processed at a high removing efficiency. In the substrate cleaning method according to the present invention, a substrate to be processed W is immersed in a cleaning liquid in a cleaning tank 12. Then, ultrasonic waves are generated in the cleaning liquid contained in the cleaning tank 12, so that the substrate to be processed W is subjected to an ultrasonic cleaning process. While the substrate to be processed is being cleaned, a dissolved gas concentration of a gas dissolved in the cleaning liquid contained in the cleaning tank is changed.
摘要:
An angle detector with self-calibration capability has a number of first scale read heads and one second scale read head around the periphery of a single scale disk and includes means for performing self-calibration by determining measurement differences between the second scale read head and the individual first scale read heads and calculating the average thereof.
摘要:
An angle detector with self-calibration capability has a number of first scale read heads and one second scale read head around the periphery of a single scale disk and includes means for performing self-calibration by determining measurement differences between the second scale read head and the individual first scale read heads and calculating the average thereof.
摘要:
A check detector for the neck and finish portion of glass bottles is disclosed. The check detectors comprises means for rotating glass bottles successively conveyed to a fixed position and a slide block which can change position freely in the width direction and vertical direction of the bottle. A plurality of light emitters for illuminating the neck and finish potion of the glass bottle are mounted to the slide block. The light by from the plurality of the light emitters is converged to the illuminated region from difference directions, and there are a plurality of light receivers equipped with light sensors for detecting the light reflected by checks in the neck and finish portion of the bottle, the light reflected by the mold seam formed at the neck and finish portions, and the directly transmitted light passing through the neck and finish portion, via lenses mounted to the slide block. There is a light emitter control section for constantly operating a plurality of light receivers in the light emitting condition so that the reflected and direct light are input as data, wherein each of the light receiving elements are divided so as to correspond to the vertical position of the neck and finish portion. The data inputted as light reflected at the seam and the data inputted as the direct light transmitted through the neck and finish portions are deleted.
摘要:
A rotary actuator is disclosed which changes the angular position of the rotary valve which is used to determine the attenuation presented by a shock absorber. The rotary actuator is disposed within a cylindrical piston rod of the shock absorber, and comprises a power transmission mechanism for driving the rotary valve for rotation between a first and a second position within a given range, a d.c. motor for driving the mechanism, a first stop mechanism for selectively stopping the rotation of the motor at a third position which is situated centrally within the given range, and a solenoid assembly for making the first stop mechanism operative. These components are disposed within the cylindrical piston rod in the sequence named from below to above. The power transmission mechanism includes a second stop mechanism which prevents the rotary valve from rotating outside a first and a second location which determine the given range.
摘要:
A solenoid valve assembly having a valve member, disposed in a casing, movable between first and second positions for controlling communication between an inlet port and an outlet port provided in the casing which includes an armature of magnetic material operatively connected with the valve member, a leaf spring fixed at a first end thereof to the armature and biasing the valve member to the first position, a spring retainer having a first end portion which retains a second end of the leaf spring and which is stationarily fixed at a second end portion thereof to the casing, a stationary core of magnetic material mounted in the casing and operatively engageable with the armature and a mechanism acting on the stationary core and the armature for rotating the armature towards the stationary core whereby the valve is moved to the second position and an adjusting mechanism connected to the casing for adjusting tensioning of the leaf spring.
摘要:
An electromagnetic control valve is provided with a housing having an inlet and two outlets extending through the wall of the housing. A valve member is mounted in spaced relation from each outlet opening on a resilient member for movement into and out of engagement with a valve seat surrounding the outlet opening. An elongated valve actuator is pivoted at its mid-point between the two valve members and is provided with a projection adjacent each end disposed in contact with a respective valve member. A spring normally biases the valve actuator about its pivot point to bias one of the valve members into engagement with its associated valve seat. An electromagnet is located on the opposite side of the valve actuator from said one of said valve members to pivot the valve actuator against the force of the spring.
摘要:
The present invention provides a substrate cleaning method capable of removing particles from the entire surface of a substrate to be processed at a high removing efficiency. In the substrate cleaning method according to the present invention, a substrate to be processed W is immersed in a cleaning liquid in a cleaning tank 12. Then, ultrasonic waves are generated in the cleaning liquid contained in the cleaning tank 12, so that the substrate to be processed W is subjected to an ultrasonic cleaning process. While the substrate to be processed is being cleaned, a dissolved gas concentration of a gas dissolved in the cleaning liquid contained in the cleaning tank is changed.
摘要:
An angle detecting device with a self-calibration function has sensor heads for reading a scale of a scale disc fixed to a rotating shaft, has first sensor heads and a second sensor head at a position of one of the first sensor heads, in which the first and second sensor heads are calibrated with a first group including L sensor heads and a second group including M sensor heads, respectively arranged with a different equiangular interval, and in which phases of the calibration values obtained from the second group, are shifted by j*P/L(j=1 to L−1), where P is the total number of scale marks, and average values of the calibration values from the second group and the shifted calibration values are obtained, the average values are added to the calibration values from the first group, and the added values are output as calibration values.
摘要翻译:具有自校正功能的角度检测装置具有用于读取固定到旋转轴的刻度盘的刻度的传感器头,在第一传感器头之一的位置具有第一传感器头和第二传感器头,其中 第一和第二传感器头用包括L个传感器头的第一组和包括分别以不同的等角度间隔布置的M个传感器头的第二组进行校准,并且从第二组获得的校准值的相位偏移j * P / L(j = 1〜L-1),其中P是刻度标记的总数,并且获得来自第二组的校正值和偏移的校准值的平均值,将平均值加到 来自第一组的校准值,并且添加的值作为校准值输出。
摘要:
In a hydraulic active suspension system, a plurality of actuators having working fluid chambers are provided corresponding to vehicle wheels. Each actuator is adapted to increase and decrease vehicle height in response to the pressure within its working chamber, which is controlled by a pressure control device. Vehicle speed and lateral acceleration are detected by corresponding sensors. A control device is further provided for controlling the pressure control device by compensating values determined base upon the lateral acceleration detected. The control device is adapted to reduce the compensating values in magnitude when the vehicle speed is lower than a predetermined value under which the lateral acceleration sensor sometimes detects a false lateral acceleration, thereby reducing the possibility that the vehicle body may generate an unpleasant roll due to the erroneous control on the pressures within the working fluid chambers based upon a false lateral acceleration.