Substrate cleaning method, substrate cleaning system and program storage medium
    1.
    发明申请
    Substrate cleaning method, substrate cleaning system and program storage medium 有权
    基板清洗方法,基板清洗系统和程序存储介质

    公开(公告)号:US20070215172A1

    公开(公告)日:2007-09-20

    申请号:US11717170

    申请日:2007-03-13

    IPC分类号: B08B3/12 B08B3/00

    摘要: The present invention provides a substrate cleaning method capable of removing particles from the entire surface of a substrate to be processed at a high removing efficiency. In the substrate cleaning method according to the present invention, a substrate to be processed W is immersed in a cleaning liquid in a cleaning tank 12. Then, ultrasonic waves are generated in the cleaning liquid contained in the cleaning tank 12, so that the substrate to be processed W is subjected to an ultrasonic cleaning process. While the substrate to be processed is being cleaned, a dissolved gas concentration of a gas dissolved in the cleaning liquid contained in the cleaning tank is changed.

    摘要翻译: 本发明提供一种能够以高去除效率从待处理基板的整个表面去除颗粒的基板清洗方法。 在本发明的基板清洗方法中,将被处理基板W浸渍在清洗槽12内的清洗液中。 然后,在包含在清洗槽12中的清洗液中产生超声波,使待处理基板W进行超声波清洗处理。 当被处理基板被清洗时,溶解在清洗槽中所含的清洗液中的溶解气体浓度变化。

    Angle detector with self-calibration capability
    2.
    发明授权
    Angle detector with self-calibration capability 有权
    角度检测器具有自校准功能

    公开(公告)号:US07143518B2

    公开(公告)日:2006-12-05

    申请号:US11213704

    申请日:2005-08-30

    IPC分类号: G01B21/22

    摘要: An angle detector with self-calibration capability has a number of first scale read heads and one second scale read head around the periphery of a single scale disk and includes means for performing self-calibration by determining measurement differences between the second scale read head and the individual first scale read heads and calculating the average thereof.

    摘要翻译: 具有自校准功能的角度检测器具有多个第一刻度读取头和围绕单个刻度盘的周边的一个第二刻度读取头,并且包括用于通过确定第二刻度读取头和第二刻度读取头之间的测量差进行自校准的装置 单个第一刻度读头并计算其平均值。

    Check detector for glass bottle neck and finish portion
    4.
    发明授权
    Check detector for glass bottle neck and finish portion 有权
    检查玻璃瓶颈和完成部分的检测器

    公开(公告)号:US06275287B1

    公开(公告)日:2001-08-14

    申请号:US09295703

    申请日:1999-04-21

    申请人: Tsukasa Watanabe

    发明人: Tsukasa Watanabe

    IPC分类号: C01N2190

    CPC分类号: G01N21/9036 G01N21/9054

    摘要: A check detector for the neck and finish portion of glass bottles is disclosed. The check detectors comprises means for rotating glass bottles successively conveyed to a fixed position and a slide block which can change position freely in the width direction and vertical direction of the bottle. A plurality of light emitters for illuminating the neck and finish potion of the glass bottle are mounted to the slide block. The light by from the plurality of the light emitters is converged to the illuminated region from difference directions, and there are a plurality of light receivers equipped with light sensors for detecting the light reflected by checks in the neck and finish portion of the bottle, the light reflected by the mold seam formed at the neck and finish portions, and the directly transmitted light passing through the neck and finish portion, via lenses mounted to the slide block. There is a light emitter control section for constantly operating a plurality of light receivers in the light emitting condition so that the reflected and direct light are input as data, wherein each of the light receiving elements are divided so as to correspond to the vertical position of the neck and finish portion. The data inputted as light reflected at the seam and the data inputted as the direct light transmitted through the neck and finish portions are deleted.

    摘要翻译: 公开了一种用于玻璃瓶的颈部和末端部分的检查检测器。 检查检测器包括用于旋转连续输送到固定位置的玻璃瓶的装置和可在瓶的宽度方向和垂直方向上自由改变位置的滑动块。 用于照亮玻璃瓶的颈部和精加工液的多个发光体安装在滑块上。 来自多个发光体的光从差分方向会聚到照明区域,并且存在多个配备有光传感器的光接收器,该光传感器用于检测由颈部和瓶子的完成部分中的检查反射的光, 通过形成在颈部和完成部分的模具接缝反射的光以及通过安装到滑块的透镜通过颈部和光洁度部分的直接透射的光。 有一个发光器控制部分,用于在发光条件下不断地操作多个光接收器,使得反射的和直接的光被输入作为数据,其中每个光接收元件被分割成对应于垂直位置 颈部和完成部分。 作为在接缝处反射的光输入的数据和作为通过颈部和完成部分传输的直接光输入的数据被删除。

    Apparatus for driving rotary valve of shock absorber
    5.
    发明授权
    Apparatus for driving rotary valve of shock absorber 失效
    减震器旋转阀驱动装置

    公开(公告)号:US4754855A

    公开(公告)日:1988-07-05

    申请号:US909390

    申请日:1986-09-19

    IPC分类号: F16F9/46

    CPC分类号: F16F9/462 Y10T74/2063

    摘要: A rotary actuator is disclosed which changes the angular position of the rotary valve which is used to determine the attenuation presented by a shock absorber. The rotary actuator is disposed within a cylindrical piston rod of the shock absorber, and comprises a power transmission mechanism for driving the rotary valve for rotation between a first and a second position within a given range, a d.c. motor for driving the mechanism, a first stop mechanism for selectively stopping the rotation of the motor at a third position which is situated centrally within the given range, and a solenoid assembly for making the first stop mechanism operative. These components are disposed within the cylindrical piston rod in the sequence named from below to above. The power transmission mechanism includes a second stop mechanism which prevents the rotary valve from rotating outside a first and a second location which determine the given range.

    摘要翻译: 公开了一种旋转致动器,其改变用于确定减震器所呈现的衰减的旋转阀的角位置。 旋转致动器设置在减震器的圆柱形活塞杆内,并且包括用于驱动旋转阀以在给定范围内的第一和第二位置之间旋转的动力传递机构。 用于驱动机构的电动机,用于选择性地停止在位于给定范围中心的第三位置处的电动机的旋转的第一停止机构,以及用于使第一停止机构可操作的螺线管组件。 这些部件按照从下至上的顺序设置在圆柱形活塞杆内。 动力传递机构包括第二停止机构,其防止旋转阀在确定给定范围的第一和第二位置外旋转。

    Solenoid valve assembly
    6.
    发明授权
    Solenoid valve assembly 失效
    电磁阀总成

    公开(公告)号:US4397443A

    公开(公告)日:1983-08-09

    申请号:US271996

    申请日:1981-06-09

    IPC分类号: F16K31/06

    CPC分类号: F16K31/0682

    摘要: A solenoid valve assembly having a valve member, disposed in a casing, movable between first and second positions for controlling communication between an inlet port and an outlet port provided in the casing which includes an armature of magnetic material operatively connected with the valve member, a leaf spring fixed at a first end thereof to the armature and biasing the valve member to the first position, a spring retainer having a first end portion which retains a second end of the leaf spring and which is stationarily fixed at a second end portion thereof to the casing, a stationary core of magnetic material mounted in the casing and operatively engageable with the armature and a mechanism acting on the stationary core and the armature for rotating the armature towards the stationary core whereby the valve is moved to the second position and an adjusting mechanism connected to the casing for adjusting tensioning of the leaf spring.

    摘要翻译: 一种具有阀构件的电磁阀组件,其设置在壳体中,可在第一和第二位置之间移动,用于控制设置在壳体中的入口和出口之间的连通,其包括与阀构件可操作地连接的磁性材料的衔铁, 板簧在其第一端固定到电枢并将阀构件偏置到第一位置;弹簧保持器,具有保持板簧的第二端并固定在其第二端部处的第一端部, 壳体,安装在壳体中并与电枢可操作地接合的磁性材料的固定芯,以及作用在固定芯和电枢上的机构,用于使电枢朝向固定芯转动,由此阀移动到第二位置,并且调节 连接到壳体的机构用于调节板簧的张紧。

    Electromagnetic control valve assembly
    7.
    发明授权
    Electromagnetic control valve assembly 失效
    电磁调节阀总成

    公开(公告)号:US4250924A

    公开(公告)日:1981-02-17

    申请号:US3822

    申请日:1979-01-16

    摘要: An electromagnetic control valve is provided with a housing having an inlet and two outlets extending through the wall of the housing. A valve member is mounted in spaced relation from each outlet opening on a resilient member for movement into and out of engagement with a valve seat surrounding the outlet opening. An elongated valve actuator is pivoted at its mid-point between the two valve members and is provided with a projection adjacent each end disposed in contact with a respective valve member. A spring normally biases the valve actuator about its pivot point to bias one of the valve members into engagement with its associated valve seat. An electromagnet is located on the opposite side of the valve actuator from said one of said valve members to pivot the valve actuator against the force of the spring.

    摘要翻译: 一种电磁控制阀具有壳体,该壳体具有延伸穿过壳体的壁的入口和两个出口。 阀构件与弹性构件上的每个出口开口间隔开地安装,用于与围绕出口开口的阀座移动和离开接合。 细长的阀致动器在其两个阀构件之间的中点处枢转,并且在与相应的阀构件接触设置的每个端部附近设置有突起。 弹簧通常围绕其枢转点偏压阀致动器,以将阀构件中的一个偏压到与其相关联的阀座的接合。 电磁体位于阀致动器的与所述一个阀构件相反的一侧上,以克服弹簧的力枢转阀致动器。

    Substrate cleaning method, substrate cleaning system and program storage medium
    8.
    发明授权
    Substrate cleaning method, substrate cleaning system and program storage medium 有权
    基板清洗方法,基板清洗系统和程序存储介质

    公开(公告)号:US08347901B2

    公开(公告)日:2013-01-08

    申请号:US11717170

    申请日:2007-03-13

    IPC分类号: B08B3/12

    摘要: The present invention provides a substrate cleaning method capable of removing particles from the entire surface of a substrate to be processed at a high removing efficiency. In the substrate cleaning method according to the present invention, a substrate to be processed W is immersed in a cleaning liquid in a cleaning tank 12. Then, ultrasonic waves are generated in the cleaning liquid contained in the cleaning tank 12, so that the substrate to be processed W is subjected to an ultrasonic cleaning process. While the substrate to be processed is being cleaned, a dissolved gas concentration of a gas dissolved in the cleaning liquid contained in the cleaning tank is changed.

    摘要翻译: 本发明提供一种能够以高去除效率从待处理基板的整个表面去除颗粒的基板清洗方法。 在本发明的基板清洗方法中,将待处理基板W浸入清洗槽12内的清洗液中。然后,在包含在清洗槽12内的清洗液中产生超声波,使基板 待处理的W进行超声波清洗处理。 当被处理基板被清洗时,溶解在清洗槽中所含的清洗液中的溶解气体浓度变化。

    ANGLE DETECTING DEVICE WITH COMPLEX SELF-CALIBRATION FUNCTION
    9.
    发明申请
    ANGLE DETECTING DEVICE WITH COMPLEX SELF-CALIBRATION FUNCTION 有权
    具有复杂自校准功能的角度检测装置

    公开(公告)号:US20120245876A1

    公开(公告)日:2012-09-27

    申请号:US13508701

    申请日:2010-10-27

    申请人: Tsukasa Watanabe

    发明人: Tsukasa Watanabe

    IPC分类号: G06F19/00

    CPC分类号: G01D5/24452

    摘要: An angle detecting device with a self-calibration function has sensor heads for reading a scale of a scale disc fixed to a rotating shaft, has first sensor heads and a second sensor head at a position of one of the first sensor heads, in which the first and second sensor heads are calibrated with a first group including L sensor heads and a second group including M sensor heads, respectively arranged with a different equiangular interval, and in which phases of the calibration values obtained from the second group, are shifted by j*P/L(j=1 to L−1), where P is the total number of scale marks, and average values of the calibration values from the second group and the shifted calibration values are obtained, the average values are added to the calibration values from the first group, and the added values are output as calibration values.

    摘要翻译: 具有自校正功能的角度检测装置具有用于读取固定到旋转轴的刻度盘的刻度的传感器头,在第一传感器头之一的位置具有第一传感器头和第二传感器头,其中 第一和第二传感器头用包括L个传感器头的第一组和包括分别以不同的等角度间隔布置的M个传感器头的第二组进行校准,并且从第二组获得的校准值的相位偏移j * P / L(j = 1〜L-1),其中P是刻度标记的总数,并且获得来自第二组的校正值和偏移的校准值的平均值,将平均值加到 来自第一组的校准值,并且添加的值作为校准值输出。