摘要:
In a support member for supporting a sample processed in a hollow space between first and second electrodes between which a high frequency a.c. voltage is supplied to produce plasma in the hollow space, a conductor is laid on the first electrode with a first dielectric layer interposed therebetween and is covered with a second dielectric layer to be attached to the sample. A d.c. voltage source is connected through the first dielectric layer out of contact with the first electrode to induce electrostatic attraction during production of the plasma and, thereby, to fixedly attach the sample to the second dielectric layer. A temperature control member is embedded in the first electrode to control a temperature of the sample. The control member may be a cooling member or a heater. A plurality of the support members may be located on the first electrode. Preferably, the first and the second dielectric layers are of epoxy resin and polyimide resin, respectively.
摘要:
[Object]To provide a substrate processing method capable of forming a concavo-convex structure on a substrate surface while reducing the number of processes.[Solving Means] In a substrate processing method according to the present invention, particles are dispersed on a surface of a substrate, and a concavo-convex structure is formed on the surface of the substrate by etching the surface of the substrate with the particles as a mask and the mask is simultaneously removed by the etching. According to this method, a process of removing the mask from the substrate surface after the concavo-convex structure is formed becomes unnecessary. Accordingly, since the number of processes necessary to form the concavo-convex structure on the substrate surface is largely reduced, it becomes possible to greatly improve productivity.
摘要:
In a method for transmitting force from one piston to another piston, a superplastic alloy is used between the pistons as a pressure transmitting medium. An apparatus adopting the method serves as a force multiplication apparatus.
摘要:
A printing apparatus free from contamination of dust into a coated layer is provided. A printing apparatus of this application includes a first ejecting head and a printing head. The first ejecting head is located on a leading side in a moving direction D of the printing head. Since electric charge is removed from an object to be printed and dust is removed therefrom, by blowing an electric charge-removing gas through the first ejecting head before an ink lands on the object to be printed, dust does not contaminate a coated layer. In addition, since a suction hole is arranged between an ejecting hole and a nozzle zone, a stream of the electric charge-removing gas is not formed in the nozzle zone, and thus a meniscus of nozzles is not disturbed.
摘要:
A transparent electroconductive film having a small resistance value and a high transmittance and causing no damage upon an underlying organic EL film is formed. First and second targets are spaced and arranged in parallel, and a shielding plate is provided between the space and a transporting path for an object to be film-formed. Sputtered particles are allowed to reach the object through a release hole formed at the shielding plate. The sputtering particles obliquely irradiated are shielded by the shielding plate so that the transparent electroconductive film having a low resistivity and high transmittance can be formed.
摘要:
A pressure transmitting apparatus for hot - press sintering comprises a container 21 with a lid 22, a piston 23, a superplastic alloy medium 24a and 24b and heaters 25a, 25b, and 25c. A force is applied to generate an isostatic compression pressure on the powder body.
摘要:
To the surface of a base material, there is applied, a dispersion containing fine particles of at least one metal selected from the group consisting of indium, tin, antimony, aluminum and zinc, fine particles of at least one alloy consisting of at least two metals specified above or a mixture of these fine particles, the coated layer is then fired in a vacuum atmosphere, an inert gas atmosphere, a reducing atmosphere; and subsequently the layer is fired in an oxidizing atmosphere. After this firing step in an oxidizing atmosphere, the coated layer may further be fired in a reducing atmosphere. The inert gas atmosphere is one comprising at least one inert gas selected from the group consisting of rare gases, carbon dioxide and nitrogen and the reducing atmosphere is one comprising at least one reducing gas selected from the group consisting of hydrogen, carbon monoxide and lower alcohols. A transparent electrode is composed of a transparent conductive film prepared according to the foregoing method. The present invention thus permits the formation of a transparent conductive film having a low resistance and a high transmittance while making use of a low temperature firing step.
摘要:
A concentrated constant type isolator includes an upper member, a lower member, a resin case, a center electrode assembly, a permanent magnet, a resistor element, matching capacitor elements, and a resin member. By setting the electrostatic capacitance value of the matching capacitor element on the input terminal side and that on the output terminal side to appropriate values, the reflection loss characteristic of the concentrated constant type isolator is set such that the center frequency in a pass band is located between the frequency at which the input-side reflection loss becomes a maximum value and the frequency at which the output-side reflection loss becomes a maximum value, and such that the frequency at which insertion loss becomes the minimum value is close to the center frequency, whereby the standard of the insertion loss is satisfied.
摘要:
A radio communication apparatus has a switch for indicating occurrence of emergency, a speaker, a speaker driver for emitting an alarm sound by driving said speaker in response to the operation of the switch, and a transmitter for transmitting a predetermined alarm signal by radio. When an emergency condition occurs to an owner of the radio communication apparatus, the radio communication apparatus emits an alarm sound from the speaker and emits an alarm signal by radio in response to a switching operation. Therefore, a person a short-distance away will be informed of an emergency by sound, and a person a long-distance away will be received by using a radio.