公开(公告)号：US08196451B2

公开(公告)日：2012-06-12

申请号：US12661194

申请日：2010-03-12

申请人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Takayuki Takano ,  Takashi Mihara

发明人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Takayuki Takano ,  Takashi Mihara

IPC分类号： G01N29/02

CPC分类号： G01N5/02 ,  G01G3/16 ,  G01N29/022 ,  G01N29/32 ,  G01N2291/0255 ,  G01N2291/0256

摘要： There is provided a technique that can increase sensitivity of a resonator. A ratio Rb/Ra between an inner diameter Rb and an outer diameter Ra of the resonator 20 is appropriately selected, and thus there may be a fixed point where an r component (U(Ra) or U(Rb)) of displacement in a radial direction and an r component (V(Ra) or V(Rb)) of displacement in a tangential direction are 0 on an outer diameter portion or an inner diameter portion of the resonator 20. In this case, the resonator 20 is supported by a holding member 22 constituted by a single-span beam set so that a boundary condition on a side of the resonator 20 is pinned and a boundary condition on a side of an anchor that supports the resonator 20 is clamped at the fixed point, and this prevents vibration energy of the resonator 20 from being lost through the holding member 22, avoids a state to disturb a vibration mode, and achieves a sensor having high sensitivity.

摘要翻译： 提供了可以增加谐振器的灵敏度的技术。 适当地选择谐振器20的内径Rb和外径Ra之间的比率Rb / Ra，因此可以存在固定点，其中在（a）中的位移的r分量（U（Ra）或U（Rb）） 径向方向和在切线方向上的位移的r分量（V（Ra）或V（Rb））在谐振器20的外径部分或内径部分上为0°。在这种情况下，谐振器20由 保持构件22由单跨梁组构成，使得谐振器20侧的边界条件被固定，并且支撑谐振器20的锚的侧面上的边界条件被夹持在固定点，并且这个 防止谐振器20的振动能量通过保持构件22而损失，避免了干扰振动模式的状态，并且实现了具有高灵敏度的传感器。

公开(公告)号：US08006561B2

公开(公告)日：2011-08-30

申请号：US12293348

申请日：2007-06-01

申请人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Takashi Mihara

发明人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Takashi Mihara

IPC分类号： G01N29/036 ,  G01N29/02

CPC分类号： G01G3/16 ,  G01N5/02

摘要： It is an object of the present invention to provide a technique that can realize improvement of sensitivity of a vibrator. A platform 50 to which a substance adheres or sticks is provided to be mechanically coupled to a vibrator 20 of a sensor via bridges 51. Sensitivity of the sensor is improved by causing the mass of a substance adhering or sticking onto the platform 50 as if the substance concentratedly adheres or sticks to places where the platform 50 is connected to the vibrator 20. It is preferable to connect, via the bridges 51, the platform 50 to places where the platform 50 vibrates integrally with the vibrator 20. For this purpose, it is preferable to mechanically couple, via the bridges 51, the platform 50 to regions where vibration occurs only in one of an r direction or a θ direction in the vibrator 20.

摘要翻译： 本发明的目的是提供一种能够实现振动器的灵敏度提高的技术。 通过桥接件51将物质粘附或粘贴的平台50设置为机械耦合到传感器的振动器20.通过使物质的质量粘附或粘附到平台50上来改善传感器的灵敏度，就像 物质集中地粘附或粘附到平台50连接到振动器20的地方。优选地，经由桥51将平台50连接到平台50与振动器20一体振动的地方。为此目的 优选地通过桥51将平台50机械地耦合到仅在r方向或者其中之一发生振动的区域; 振动器20的方向。

公开(公告)号：US08258675B2

公开(公告)日：2012-09-04

申请号：US13096409

申请日：2011-04-28

申请人： Tsuyoshi Ikehara ,  Mitsuo Konno ,  Takashi Mihara

发明人： Tsuyoshi Ikehara ,  Mitsuo Konno ,  Takashi Mihara

IPC分类号： H01L41/08

CPC分类号： G01N5/02 ,  G01N1/405 ,  G01N29/036 ,  G01N33/0031 ,  G01N2291/0256

摘要： A detection sensor (10) includes: plural beam-like resonators (30A, 30B), a vibration characteristic of which changes according to adsorption or sticking of a substance having a mass and one end of each of which is fixed; a driving unit (40) that vibrates the resonators; and a detecting unit (40) that detects a change in the vibration in the resonators to detect the substance. The plural resonators have lengths different from one another. When the length of an arbitrary resonator is represented as L, a difference ΔL between the length L and the length of the other resonators is set to satisfy the following condition: 2(ΔL/L)>1/Q (Q represents a Q factor of the resonators). The driving unit vibrates the respective plural resonators at frequencies corresponding to resonant frequencies of the resonators.

摘要翻译： 检测传感器（10）包括：多个束状谐振器（30A，30B），其振动特性根据其质量和一端固定的物质的吸附或粘附而变化; 使所述谐振器振动的驱动单元（40）; 以及检测单元（40），其检测所述谐振器中的振动的变化以检测所述物质。 多个谐振器具有彼此不同的长度。 当任意谐振器的长度表示为L时，将长度L与其他谐振器的长度之间的差Dgr; L设定为满足以下条件：2（＆Dgr; L / L）> 1 / Q 表示谐振器的Q因子）。 驱动单元以对应于谐振器的谐振频率的频率振动相应的多个谐振器。

公开(公告)号：US20110266919A1

公开(公告)日：2011-11-03

申请号：US13096409

申请日：2011-04-28

申请人： Tsuyoshi Ikehara ,  Mitsuo Konno ,  Takashi Mihara

发明人： Tsuyoshi Ikehara ,  Mitsuo Konno ,  Takashi Mihara

IPC分类号： H01L41/00

CPC分类号： G01N5/02 ,  G01N1/405 ,  G01N29/036 ,  G01N33/0031 ,  G01N2291/0256

摘要： A detection sensor (10) includes: plural beam-like resonators (30A, 30B), a vibration characteristic of which changes according to adsorption or sticking of a substance having a mass and one end of each of which is fixed; a driving unit (40) that vibrates the resonators; and a detecting unit (40) that detects a change in the vibration in the resonators to detect the substance. The plural resonators have lengths different from one another. When the length of an arbitrary resonator is represented as L, a difference ΔL between the length L and the length of the other resonators is set to satisfy the following condition: 2(ΔL/L)>1/Q (Q represents a Q factor of the resonators). The driving unit vibrates the respective plural resonators at frequencies corresponding to resonant frequencies of the resonators.

摘要翻译： 检测传感器（10）包括：多个束状谐振器（30A，30B），其振动特性根据其质量和一端固定的物质的吸附或粘附而变化; 使所述谐振器振动的驱动单元（40）; 以及检测单元（40），其检测所述谐振器中的振动的变化以检测所述物质。 多个谐振器具有彼此不同的长度。 当任意谐振器的长度表示为L时，将长度L与其他谐振器的长度之间的差Dgr; L设定为满足以下条件：2（＆Dgr; L / L）> 1 / Q 表示谐振器的Q因子）。 驱动单元以对应于谐振器的谐振频率的频率振动相应的多个谐振器。

公开(公告)号：US07681433B2

公开(公告)日：2010-03-23

申请号：US11441829

申请日：2006-05-26

申请人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Ryutaro Maeda ,  Takashi Mihara

发明人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Ryutaro Maeda ,  Takashi Mihara

IPC分类号： G01N29/02

CPC分类号： G01N29/036

摘要： By using a disc type resonator, a sensor detects a substance having a mass and the mass with high sensitivity. Moreover, it is preferable to detect a change in vibrations of a substance attached or adsorbed to an area having a vibration amplitude equal to or larger than a constant value. This disc type resonator can be fabricated by the MEMS technique by using single-crystal or polycrystalline Si as a structural material. To improve the attachment efficiency of molecules and the like to be detected, irregularity or a groove is preferably provided on the surface of the disc type resonator.

摘要翻译： 通过使用盘式谐振器，传感器以高灵敏度检测具有质量和质量的物质。 此外，优选地，检测附着或吸附到具有等于或大于恒定值的振动幅度的区域的物质的振动的变化。 该光盘型谐振器可以通过使用单晶或多晶Si作为结构材料的MEMS技术来制造。 为了提高要检测的分子等的附着效率，优选在盘型谐振器的表面上设置凹凸或凹槽。

公开(公告)号：US20100223987A1

公开(公告)日：2010-09-09

申请号：US12661194

申请日：2010-03-12

申请人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Takayuki Takano ,  Takashi Mihara

发明人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Takayuki Takano ,  Takashi Mihara

IPC分类号： G01N19/04 ,  H01L41/053

CPC分类号： G01N5/02 ,  G01G3/16 ,  G01N29/022 ,  G01N29/32 ,  G01N2291/0255 ,  G01N2291/0256

摘要： There is provided a technique that can increase sensitivity of a resonator. A ratio Rb/Ra between an inner diameter Rb and an outer diameter Ra of the resonator 20 is appropriately selected, and thus there may be a fixed point where an r component (U(Ra) or U(Rb)) of displacement in a radial direction and an r component (V(Ra) or V(Rb)) of displacement in a tangential direction are 0 on an outer diameter portion or an inner diameter portion of the resonator 20. In this case, the resonator 20 is supported by a holding member 22 constituted by a single-span beam set so that a boundary condition on a side of the resonator 20 is pinned and a boundary condition on a side of an anchor that supports the resonator 20 is clamped at the fixed point, and this prevents vibration energy of the resonator 20 from being lost through the holding member 22, avoids a state to disturb a vibration mode, and achieves a sensor having high sensitivity.

摘要翻译： 提供了可以增加谐振器的灵敏度的技术。 适当地选择谐振器20的内径Rb和外径Ra之间的比率Rb / Ra，因此可以存在固定点，其中在（a）中的位移的r分量（U（Ra）或U（Rb）） 径向方向和在切线方向上的位移的r分量（V（Ra）或V（Rb））在谐振器20的外径部分或内径部分上为0°。在这种情况下，谐振器20由 保持构件22由单跨梁组构成，使得谐振器20侧的边界条件被固定，并且支撑谐振器20的锚的侧面上的边界条件被夹持在固定点，并且这个 防止谐振器20的振动能量通过保持构件22而损失，避免了干扰振动模式的状态，并且实现了具有高灵敏度的传感器。

公开(公告)号：US20090199639A1

公开(公告)日：2009-08-13

申请号：US12293348

申请日：2007-06-01

申请人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Takashi Mihara

发明人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Takashi Mihara

IPC分类号： G01G3/16

CPC分类号： G01G3/16 ,  G01N5/02

摘要： It is an object of the present invention to provide a technique that can realize improvement of sensitivity of a vibrator. A platform 50 to which a substance adheres or sticks is provided to be mechanically coupled to a vibrator 20 of a sensor via bridges 51. Sensitivity of the sensor is improved by causing the mass of a substance adhering or sticking onto the platform 50 as if the substance concentratedly adheres or sticks to places where the platform 50 is connected to the vibrator 20. It is preferable to connect, via the bridges 51, the platform 50 to places where the platform 50 vibrates integrally with the vibrator 20. For this purpose, it is preferable to mechanically couple, via the bridges 51, the platform 50 to regions where vibration occurs only in one of an r direction or a θ direction in the vibrator 20.

摘要翻译： 本发明的目的是提供一种可以实现振动器的灵敏度的提高的技术。 通过桥接件51将物质粘附或粘贴的平台50设置为机械耦合到传感器的振动器20.通过使物质的质量粘附或粘附到平台50上来改善传感器的灵敏度，就像 物质集中地粘附或粘附到平台50连接到振动器20的地方。优选地，经由桥51将平台50连接到平台50与振动器20一体振动的地方。为此目的 优选地通过桥51将平台50机械地耦合到振动器20中仅在r方向或θ方向之一上发生振动的区域。

公开(公告)号：US20070119232A1

公开(公告)日：2007-05-31

申请号：US11441829

申请日：2006-05-26

申请人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Ryutaro Maeda ,  Takashi Mihara

发明人： Mitsuo Konno ,  Tsuyoshi Ikehara ,  Ryutaro Maeda ,  Takashi Mihara

IPC分类号： G01H3/00

CPC分类号： G01N29/036

摘要： By using a disc type resonator, a sensor detects a substance having a mass and the mass with high sensitivity. Moreover, it is preferable to detect a change in vibrations of a substance attached or adsorbed to an area having a vibration amplitude equal to or larger than a constant value. This disc type resonator can be fabricated by the MEMS technique by using single-crystal or polycrystalline Si as a structural material. To improve the attachment efficiency of molecules and the like to be detected, irregularity or a groove is preferably provided on the surface of the disc type resonator.

摘要翻译： 通过使用盘式谐振器，传感器以高灵敏度检测具有质量和质量的物质。 此外，优选地，检测附着或吸附到具有等于或大于恒定值的振动幅度的区域的物质的振动的变化。 该光盘型谐振器可以通过使用单晶或多晶Si作为结构材料的MEMS技术来制造。 为了提高要检测的分子等的附着效率，优选在盘型谐振器的表面上设置凹凸或凹槽。

公开(公告)号：US20070028668A1

公开(公告)日：2007-02-08

申请号：US11457902

申请日：2006-07-17

申请人： Hiroshi Goto ,  Ryutaro Maeda ,  Tsuyoshi Ikehara ,  Giulio Manzoni ,  Sven Heisig ,  Takashi Mihara

发明人： Hiroshi Goto ,  Ryutaro Maeda ,  Tsuyoshi Ikehara ,  Giulio Manzoni ,  Sven Heisig ,  Takashi Mihara

IPC分类号： G01N29/036 ,  G01N1/24 ,  F04B39/06

CPC分类号： F04B19/006 ,  G01N29/022 ,  G01N30/32 ,  G01N30/62 ,  G01N2030/085 ,  G01N2030/128 ,  G01N2030/324 ,  G01N2030/326 ,  G01N2030/765 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/02881 ,  G01N2291/0427 ,  G01N30/6095

摘要： A sensor 10 has a pump 20, an adsorbing unit 30, a gas chromatography unit 40, and a sensor unit 50 all of which are provided on a substrate 80. The pump 20 sucks in and condenses surrounding gas, and the adsorbing unit 30 adsorbs molecules contained in the gas. The gas chromatography unit 40 separates a particular type of molecules from those adsorbed to the adsorbing unit 30. An absorption film in the sensor unit 50 then adsorbs the separated particular type of molecules. The sensor unit 50 detects adsorption of the molecules to the adsorption film. On the basis of the detection level of the adsorption, a measurement processing unit 60 determines the presence of the particular type of molecules or measures the amount of the molecules. The present invention thus detects the presence of a particular type of molecules or measures the amount of the molecules.

摘要翻译： 传感器10具有泵20，吸附单元30，气相色谱单元40和传感器单元50，所有这些都设置在基板80上。 泵20吸入并冷凝周围的气体，吸附单元30吸附气体中所含的分子。 气相色谱单元40将特定类型的分子与吸附单元30吸附的分子分离。 传感器单元50中的吸收膜然后吸附分离的特定类型的分子。 传感器单元50检测分子对吸附膜的吸附。 基于吸附的检测水平，测量处理单元60确定特定类型的分子的存在或测量分子的量。 因此，本发明检测特定类型的分子的存在或测量分子的量。

公开(公告)号：US20100107736A1

公开(公告)日：2010-05-06

申请号：US12555221

申请日：2009-09-08

申请人： Jian Lu ,  Tsuyoshi Ikehara ,  Takashi Mihara

发明人： Jian Lu ,  Tsuyoshi Ikehara ,  Takashi Mihara

IPC分类号： G01N29/02

CPC分类号： G01G3/165

摘要： An object of the present invention is to provide a detection sensor and a vibrator which can offer improved sensitivity. The present invention uses a scheme in which no piezoelectric layer, drive electrode, or the like is provided on the surface of a vibrator 30 and in which the vibrator 30 is driven by an actuator 40 provided separately from the vibrator 30. The actuator 40 is of a cantilever type and is provided near a fixed end 30a of the vibrator 30. Vibration of the actuator 40 is transmitted to the vibrator 30 via a coupling beam 70. Thus, vibration of the vibrator 30 is prevented from being inhibited by a piezoelectric layer, a drive electrode, or the like. This improves the Q value of the vibrator 30 and thus the sensitivity of the detection sensor 10. Furthermore, if the detection sensor 10 is configured to offer a sensitivity equivalent to that of a conventional one, the size of the detection sensor 10 can be sharply reduced compared to that of the conventional one.

摘要翻译： 本发明的目的是提供一种能够提供更高灵敏度的检测传感器和振动器。 本发明使用在振动器30的表面上没有设置压电层，驱动电极等的方案，并且振动器30由与振动器30分开设置的致动器40驱动。致动器40是 并且设置在振动器30的固定端30a附近。致动器40的振动通过耦合梁70传递到振动器30.因此，防止振动器30的振动受到压电层的抑制 ，驱动电极等。 这提高了振动器30的Q值，从而提高了检测传感器10的灵敏度。此外，如果检测传感器10被配置为提供与常规灵敏度相当的灵敏度，则检测传感器10的尺寸可以是尖锐的 与传统方法相比有所减少。