公开(公告)号：US20240038483A1

公开(公告)日：2024-02-01

申请号：US18265897

申请日：2021-12-09

Applicant: UNIVERSITEIT ANTWERPEN

Inventor： Adrian Pedrazo Tardajos ,  Sara Bals

IPC: H01J37/20 ,  C23C16/26 ,  C23C16/56

CPC classification number: H01J37/20 ,  C23C16/26 ,  C23C16/56 ,  H01J2237/2001

Abstract: The present disclosure relates to a sample support device for charged particle microscopy and related methods. The device comprises a substrate and a heating and/or biasing element integrated in or on the substrate to heat (or apply a bias voltage to) a sample when positioned in an observation region of the device. The device comprises a membrane covering an opening in the heater element and/or substrate in the observation region of the device. The membrane is perforated to form at least one hole covered by a graphene layer to form a sample support to place a sample of interest thereon for study. A cap covers the membrane such that a chamber is formed in which the sample can be isolated in a controllable gaseous environment.

公开(公告)号：US09412558B2

公开(公告)日：2016-08-09

申请号：US14767796

申请日：2014-02-14

Applicant: UNIVERSITEIT ANTWERPEN ,  FEI COMPANY

Inventor： Dirk Van Dyck ,  Uwe Lucken ,  Holger Stark ,  Sara Bals

IPC: H01J37/26 ,  H01J37/06 ,  G01N23/04 ,  H01J37/244

CPC classification number: H01J37/265 ,  G01N23/04 ,  G01N2223/0565 ,  G01N2223/612 ,  H01J37/06 ,  H01J37/244 ,  H01J37/26 ,  H01J2237/063 ,  H01J2237/1534 ,  H01J2237/2602 ,  H01J2237/2614

Abstract: A method for performing high resolution electron microscopy of a soft matter object is described. The method comprises irradiating a soft matter object using an electron microscope having a spherical aberration correction with a substantially constant transfer function in a frequency band of thermal diffuse scattered electrons scattered at the soft matter object. The method comprises detecting the thermal diffuse scattered (TDS) electrons scattered at the soft matter, and using the detected thermal diffuse scattered electrons for deriving therefrom an image of the soft matter object.

Abstract translation: 描述了用于执行软物体的高分辨率电子显微镜的方法。 该方法包括使用具有基本上恒定的传递函数的球面像差校正的电子显微镜照射在软质物体上分散的热散射电子的频带中的软质物体。 该方法包括检测在软物质处散射的热散射散射（TDS）电子，并使用检测到的热散射电子从其中导出软物体的图像。