Light source device, light irradiating apparatus equipped with light source device, and method of patterning self-assembled monolayer using light irradiating apparatus
    1.
    发明授权
    Light source device, light irradiating apparatus equipped with light source device, and method of patterning self-assembled monolayer using light irradiating apparatus 有权
    光源装置,配备有光源装置的光照射装置以及使用光照射装置构图自组装单层的方法

    公开(公告)号:US09070526B2

    公开(公告)日:2015-06-30

    申请号:US14294177

    申请日:2014-06-03

    IPC分类号: G21K5/00 H01J21/02

    CPC分类号: H01J21/02 H01J61/16 H01J61/90

    摘要: A light source device is disclosed that can be regarded as a point light source and that emits vacuum ultraviolet light at a sufficiently high optical intensity. The device has a lamp housing to house a flash lamp and a parabolic mirror. Light emitted from the flash lamp is converted to parallel light by the parabolic mirror, and the parallel light exits the lamp housing from a quartz window. The flash lamp has a pair of electrodes, and the distance between the electrodes is 12.5 mm or less. The filler gas pressure is between 2 atm and 8 atm. A current is fed to the flash lamp from an electricity feeding unit. This current requires 8 μs or less from the start of discharge until the current value reaches the peak value. The peak current value is 1500 A or more. The flash lamp emits light including vacuum ultraviolet light.

    摘要翻译: 公开了一种光源装置,其可以被认为是点光源,并以足够高的光强度发射真空紫外光。 该装置具有容纳闪光灯和抛物面镜的灯壳。 从闪光灯发射的光被抛物面镜转换为平行光,平行的光从石英窗口离开灯壳。 闪光灯具有一对电极,电极之间的距离为12.5mm以下。 填料气体压力在2atm和8atm之间。 从馈电单元将电流馈送到闪光灯。 该电流从放电开始直到电流值达到峰值为止要求8μs以下。 峰值电流值为1500A以上。 闪光灯发光,包括真空紫外线。