公开(公告)号：US20190393054A1

公开(公告)日：2019-12-26

申请号：US16440431

申请日：2019-06-13

Applicant: SCREEN HOLDINGS CO., LTD.

Inventor： Yukio Ono

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/324 ,  H01L21/66 ,  H01J61/90 ,  H01J61/16

Abstract: Prior to heat treatment of a semiconductor wafer to be treated, a dummy wafer is placed on a susceptor made of quartz, and the susceptor is preheated by irradiation with light from halogen lamps. A controller controls an output from the halogen lamps, based on the temperature of the susceptor measured with a radiation thermometer. The radiation thermometer receives infrared radiation of a wavelength longer than 4 μm to measure the temperature of the susceptor. The radiation thermometer is able to receive only infrared radiation emitted from the susceptor to accurately measure the temperature of the susceptor, regardless of whether or not a wafer is held by the susceptor, because quartz is opaque in a wavelength range longer than 4 μm.

公开(公告)号：US20180240681A1

公开(公告)日：2018-08-23

申请号：US15882271

申请日：2018-01-29

Applicant: SCREEN HOLDINGS CO., LTD.

Inventor： Yukio ONO ,  Kaoru Matsuo ,  Kazuhiko Fuse

IPC: H01L21/324 ,  H01L21/67 ,  H01J61/90

CPC classification number: H01L21/324 ,  H01J61/90 ,  H01L21/2686 ,  H01L21/67115 ,  H01L21/68707 ,  H01L21/6875

Abstract: When pressure in a chamber is once reduced lower than that when a flash of light is emitted and is maintained, after a flash lamp irradiates a semiconductor wafer accommodated in the chamber with the flash of light, a portion in the chamber, where gas is liable to remain, is eliminated. Then, when a flow rate of nitrogen gas to be supplied into the chamber is increased to discharge gas in the chamber, particles flying in the chamber due to flash irradiation can be smoothly discharged. As a result, the particles flying in the chamber can be prevented from being attached to an additional semiconductor wafer.

公开(公告)号：US09373494B1

公开(公告)日：2016-06-21

申请号：US14739206

申请日：2015-06-15

Applicant: Excelitas Technologies Corp.

Inventor： David Vidal

IPC: H01J17/18 ,  H01J61/90 ,  H01J61/16

CPC classification number: H01J61/90 ,  H01J9/30 ,  H01J9/34 ,  H01J61/16 ,  H01J61/363 ,  H01J61/366

Abstract: A base assembly for a flash lamp is disclosed. The base assembly has an integrated sparker and includes an electrically conductive header having a surface that defines a boundary of a flash chamber for the flash lamp. There is an opening in the surface of the electrically conductive header and an electrically conductive lead within the opening. The electrically conductive lead is electrically insulated from surrounding portions of the electrically conductive header. A distal end of the electrically conductive lead is substantially flush with the surface of the electrically conductive header.

Abstract translation: 公开了一种用于闪光灯的基座组件。 基座组件具有集成的火花塞并且包括具有限定闪光灯的闪光室的边界的表面的导电头部。 在导电集管的表面有开口，在开口内有一个导电引线。 导电引线与导电集管的周围部分电绝缘。 导电引线的远端基本上与导电集管的表面齐平。

公开(公告)号：US09177747B2

公开(公告)日：2015-11-03

申请号：US14540432

申请日：2014-11-13

Applicant: Heraeus Noblelight Ltd.

Inventor： John Littlechild ,  Martin Brown

IPC: H01J9/02 ,  H01J9/20 ,  H01J61/35 ,  H01J61/54 ,  H01J61/90

CPC classification number: H01J9/02 ,  H01J9/20 ,  H01J61/35 ,  H01J61/545 ,  H01J61/90

Abstract: A flash lamp is disclosed including an insulative envelope containing a gas and housing a pair of arcing electrodes and characterized by an instance of isolated conductive material being formed at a predetermined location on the inside of the envelope adjacent an electrode. Further disclosed is a corresponding method of manufacturing a flash lamp and apparatus for the same.

Abstract translation: 公开了一种闪光灯，其包括包含气体并且容纳一对电弧电极的绝缘外壳，其特征在于隔离导电材料的实例形成在邻近电极的外壳内侧上的预定位置处。 进一步公开的是制造闪光灯的相应方法及其装置。

公开(公告)号：US09016882B2

公开(公告)日：2015-04-28

申请号：US14009131

申请日：2012-04-02

Applicant: Toshiaki Murai ,  Yoshihiro Kanbata

Inventor： Toshiaki Murai ,  Yoshihiro Kanbata

IPC: G03B15/02 ,  G03B15/05 ,  H01J61/54 ,  H01J61/02 ,  H01J61/90

CPC classification number: G03B15/05 ,  G03B2215/0578 ,  G03B2215/0582 ,  H01J61/025 ,  H01J61/547 ,  H01J61/90

Abstract: A strobe device of the present invention includes a flash discharge tube having an anode electrode and a cathode electrode on both ends thereof, and a conductive reflector in contact with an outer peripheral surface of the flash discharge tube. The reflector houses a part of the flash discharge tube inside, and functions as an external trigger electrode. The reflector has a bottom that is in contact with a portion of the outer peripheral surface of the flash discharge tube, the portion covering at least an area between the anode electrode and the cathode electrode and a sintered metal of the cathode electrode. This can suppress variation in discharge path at every light emission from the flash discharge tube. As a result, variation in light quantity and variation in light distribution of light emitted from the strobe device can be suppressed.

Abstract translation: 本发明的选通装置包括在其两端具有阳极电极和阴极电极的闪光放电管和与闪光放电管的外周面接触的导电反射器。 反射镜内部容纳闪光放电管的一部分，起到外部触发电极的作用。 反射器具有与闪光放电管的外周表面的一部分接触的底部，该部分覆盖至少一个阳极电极和阴极电极之间的区域以及阴极电极的烧结金属。 这可以抑制来自闪光放电管的每次发光时的放电路径的变化。 结果，可以抑制从选通装置发射的光的光量变化和光分布的变化。

公开(公告)号：US06960883B2

公开(公告)日：2005-11-01

申请号：US10327103

申请日：2002-12-24

Applicant: Takahumi Mizoziri ,  Kenichiro Matsushita ,  Kazuyuki Mori

Inventor： Takahumi Mizoziri ,  Kenichiro Matsushita ,  Kazuyuki Mori

IPC: H01J61/26 ,  H01J17/02 ,  H01J17/44 ,  H01J61/54 ,  H01J61/90 ,  H01J65/00 ,  H01J11/00

CPC classification number: H01J61/547 ,  H01J61/90

Abstract: A flash lamp device having a flash lamp that includes an arc tube in which a pair of electrodes are disposed in opposition and a high voltage supply proximal conductor which extends parallel to the electrodes, on the exterior of the arc tube of the flash lamp. The high voltage supply proximal conductor is supported in an interior space of a sealed tubular body having a dielectric member with a greater permittivity than that of air.

Abstract translation: 一种具有闪光灯的闪光灯装置，其包括在闪光灯的电弧管的外部上相对设置有一对电极的电弧管和平行于电极延伸的高压电源近侧导体。 高电压源近端导体被支撑在密封管状体的内部空间中，所述密封管状体具有电介质构件，其电容率大于空气的介电常数。

公开(公告)号：US06885134B2

公开(公告)日：2005-04-26

申请号：US10296504

申请日：2001-05-18

Applicant: Tatsuo Kurashima ,  Keiji Suyama ,  Nobuharu Harada ,  Kouji Makino

Inventor： Tatsuo Kurashima ,  Keiji Suyama ,  Nobuharu Harada ,  Kouji Makino

IPC: H01J61/52 ,  H01J61/68 ,  H01J61/90 ,  H01J1/02

CPC classification number: H01J61/68 ,  H01J61/523 ,  H01J61/90

Abstract: In a light source, a heat sink is in contact with a side-on type discharge tube 110. The heat sink is in contact with a peripheral region 110ws around an exit window 101ww of the discharge tube 110. The heat sink consists of a spring member 101sp kept in direct contact with the peripheral region 101ws, and a radiating block 101bl which connects the spring member 101sp to a radiator box 101bx. Since materials made by sputtering or the like of electrodes in the discharge tube 110 mostly attach to the peripheral region 101ws of side wall 101w, it is feasible to decrease the amount of materials attaching to the exit window 101ww and, in turn, lengthen the lifetime of the discharge tube. Another light source may be constructed in structure in which the heat sink is in contact with a head-on type discharge tube or in structure in which light is outputted from a projecting portion.

Abstract translation: 在光源中，散热器与侧面放电管110接触。 散热器与围绕放电管110的出口窗口101w的周边区域110接触。 散热器由与外围区域101ws保持直接接触的弹簧构件101sp和将弹簧构件101sp连接到散热器箱101bx的辐射块101b1组成。 由于放电管110中的电极溅射等材料主要附着在侧壁101w的周边区域101w上，所以可以减少附着在出射窗101ww上的材料的量， 延长放电管的寿命。 另一个光源可以构造成其中散热器与头戴式放电管接触或结构中从突出部分输出光的结构。

公开(公告)号：US5777437A

公开(公告)日：1998-07-07

申请号：US675298

申请日：1996-07-01

Applicant: S. Edward Neister

Inventor： S. Edward Neister

IPC: H01J61/90 ,  H01S3/092 ,  H01S3/094 ,  H01J17/16 ,  H01J61/30

CPC classification number: H01J61/90 ,  H01S3/092 ,  H01S3/094034

Abstract: A coaxial flashlamp for optical pumping of a tunable dye laser. The flashlamp includes electrodes preferably made from a tungsten-based alloy for reduced metallic vapor deposition within the flashlamp. Positioned around the outer tube is a packed powder material having a diffuse reflectivity of the order of at least about 98%. The outer surface of the outer tube is placed under an inwardly-directed pressure provided by a pressurized cooling liquid that serves both to cool the flashlamp and simultaneously to offset internally generated pressure within the flashlamp caused by the pressure wave resulting from the movement of the ionization front through the gas within the annular gas chamber defined between the inner and outer tubes.

Abstract translation: 用于光泵浦可调染料激光器的同轴闪光灯。 闪光灯包括优选由钨基合金制成的电极，用于减少闪光灯内的金属气相沉积。 位于外管周围的是具有至少约98％量级的漫反射率的填充粉末材料。 外管的外表面被放置在由加压冷却液提供的向内的压力下，该加压冷却液既用于冷却闪光灯，同时也可以抵消闪电灯内部产生的压力波，该压力波是由电离 通过限定在内管和外管之间的环形气室内的气体前方。

公开(公告)号：US4897572A

公开(公告)日：1990-01-30

申请号：US298743

申请日：1989-01-19

Applicant: Fred A. Plofchan

Inventor： Fred A. Plofchan

IPC: G03B15/05 ,  H01J61/90

CPC classification number: G03B15/05 ,  H01J61/90 ,  G03B2215/0525

Abstract: A wide angle flash tube reflector has dual involute surfaces thereon intersecting at a cusp and bent in the horizontal to intercept light from a light source adjacent the cusp and to reflect such light in a dispersion pattern that spreads the flash coverage to match extended light coverages of lenses from a normal focal length to extreme wide angle. One light source is in the form of a bent tube having adjustably positioned cathode and anode electrodes for varying the length of a plasma arc to control the extent of the dispersion pattern reflected from the dual involute surfaces.

Abstract translation: 广角闪光管反射器在其上与尖端相交并在水平面上弯曲并具有双渐开线表面，以在与尖端相邻的光源中截取光，并将这种光以扩散图案的方式反射，从而扩展闪光覆盖范围以匹配 透镜从正常焦距到极广角度。 一个光源是弯管的形式，其具有可调节的阴极和阳极电极，用于改变等离子弧的长度以控制从双渐开线表面反射的分散图案的程度。

公开(公告)号：US4229658A

公开(公告)日：1980-10-21

申请号：US934912

申请日：1978-08-18

Applicant: Donald I. Gonser

Inventor： Donald I. Gonser

IPC: H01J61/80 ,  A61C13/15 ,  A61L15/07 ,  G02B6/42 ,  H01J5/16 ,  H01J61/00 ,  H01J61/16 ,  H01J61/90 ,  G01J1/00

CPC classification number: A61L15/07 ,  A61C19/004 ,  H01J5/16 ,  H01J61/00 ,  H01J61/16 ,  G02B6/4298

Abstract: A handheld lamp is disclosed wherein the light source is a rapid pulse unconfined xenon arc tube containing more than three atmospheres of xenon gas pressure, and providing a selectable spectral output of ultraviolet, visible, or ultraviolet and visible wavelengths. The lamp contains a radiation guide for directing the generating light, the tip of which is maintained cool for effective use such as in curing tooth restorative materials. The lamp may be located in the power supply and light delivered through a flexible light pipe.

Abstract translation: 公开了一种手持灯，其中光源是包含超过三个大气压的氙气压力的快速脉冲无约束氙弧灯管，并且提供紫外线，可见光或紫外线和可见波长的可选光谱输出。 灯包含用于引导发光的辐射引导件，其尖端保持冷却以有效地使用，例如固化牙齿修复材料。 灯可以位于电源中，并且光通过柔性光管传送。