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    Capacitive pressure sensor or capacitive differential pressure sensor
    1.
    发明授权
    Capacitive pressure sensor or capacitive differential pressure sensor 失效
    电容式压力传感器或电容差压传感器

    公开(公告)号：US06374680B1

    公开(公告)日：2002-04-23

    申请号：US09511723

    申请日：2000-02-21

    申请人： Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt ,  Frank Hegner ,  Thomas Velten

    发明人： Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt ,  Frank Hegner ,  Thomas Velten

    IPC分类号： G01L912

    CPC分类号： G01L9/0075

    摘要： The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor (10) has a substrate (1) and a first major surface (11), a second major surface (12) and a circumferential surface (13. A plate-shaped electrode (14) of electrically conductive material is secured in a recess (15) in the major surface (11) in a high-pressure-resistant and high-vacuum-tight manner by a joining material (16). A through connection (17) is provided from the electrode (14) through the substrate (1) to the major surface (12) or the circumferential surface (13). A diaphragm (2) of ceramic, glass, or single-crystal material is attached to the substrate (1) outside the recess (15) along a joint (18) by a joining material (26), and forms itself a further electrode or is covered, on a surface facing the electrode (14), with a further electrode (24) which is contacted through the joint (18). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.

    摘要翻译： 这些压力传感器或差压传感器的电极使用丝网印刷或溅射以外的技术来形成：压力传感器（10）具有基板（1）和第一主表面（11），第二主表面（12） ）和圆周表面（13）。导电材料的板状电极（14）以高耐压和高真空密封的方式固定在主表面（11）的凹部（15）中，由 连接材料（16），从电极（14）穿过基板（1）到主表面（12）或圆周表面（13）提供贯通连接件（17），陶瓷的隔膜（2） 玻璃或单晶材料通过接合材料（26）沿着接头（18）附接到凹部（15）外部的基板（1）上，并且在其上面形成另外的电极或被覆盖在面向 电极（14），具有通过接头（18）接触的另一个电极（24）。基板和隔膜 t的陶瓷，玻璃或单晶材料。 各差压传感器具有共同的中心隔膜和两个基板或公共基板和两个隔膜。

    Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same
    2.
    发明授权
    Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same 失效
    电容式压力传感器单元或差压传感器单元及其制造方法

    公开(公告)号：US06267009B1

    公开(公告)日：2001-07-31

    申请号：US09505489

    申请日：2000-02-16

    申请人： Ulfert Drewes ,  Elke Schmidt ,  Andreas Rossberg ,  Frank Hegner ,  Thomas Velten

    发明人： Ulfert Drewes ,  Elke Schmidt ,  Andreas Rossberg ,  Frank Hegner ,  Thomas Velten

    IPC分类号： G01L912

    CPC分类号： G01L9/0075 ,  G01L9/0044

    摘要： These capacitive pressure sensor cells have joints between substrates and diaphragms being both pressure and/or tension-proof and high-vacuum-tight and long-term-stable. The sensor cell comprises a ceramic substrate (1) having a cylindrical surface (11), a major surfaces (12, 13). The major surface (12) includes a concave central area (121) merging, in the direction of and up to said cylindrical surface (11), into a convex surface (124) having a vertex line (125) and forming a planar ring surface (126) in its area. An electrode (122) is located in the concave area (121). An electrical connection (123) extends from electrode (122) through the substrate (1) to surface (13). A ceramic diaphragm (5) has a planar inner surface (51) on which an electrode (52) is located and which rests on the ring surface (126) of the substrate (1). The diaphragm (5) is joined to the substrate by an active brazing solder forming a circumferential wedge zone (91) in the area of the substrate between the ring surface (126) and the cylindrical surface (11). An electrical connection to the electrode (52) is made through the wedge zone (91). Respective differential pressure sensors can comprise a central substrate (2) and two outer diaphragms (61, 71) or a central diaphragm (8) and two outer substrates (3, 4).

    摘要翻译： 这些电容式压力传感器单元在基板和隔膜之间具有接头，其压力和/或抗张力和高真空密封性和长期稳定性。 传感器单元包括具有圆柱形表面（11），主表面（12,13）的陶瓷基底（1）。 主表面（12）包括凹入的中心区域（121），其在所述圆柱形表面（11）的方向上并且与所述圆柱形表面（11）一起合并成具有顶点线（125）的凸形表面（124）并形成平面环表面 （126）。 电极（122）位于凹部（121）中。 电连接（123）从电极（122）穿过衬底（1）延伸到表面（13）。 陶瓷膜片（5）具有平面的内表面（51），电极（52）位于该平面内表面上，并且该陶瓷膜片位于衬底（1）的环表面（126）上。 膜片（5）通过在环形表面（126）和圆柱形表面（11）之间的衬底区域中形成周向楔形区域（91）的活性钎焊焊料与衬底接合。 通过楔形区域（91）制成与电极（52）的电连接。 各差压传感器可以包括中央基板（2）和两个外隔膜（61,71）或中央隔膜（8）和两个外基板（3,4）。

    CAPACITIVE PRESSURE SENSOR
    3.
    发明申请
    CAPACITIVE PRESSURE SENSOR 有权
    电容式压力传感器

    公开(公告)号：US20100199778A1

    公开(公告)日：2010-08-12

    申请号：US12451209

    申请日：2008-06-04

    申请人： Frank Hegner ,  Andreas Rossberg ,  Ulfert Drewes ,  Elke Schmidt ,  Sabine Stolle ,  Christel Kretschmar ,  Melanie Hentsche

    发明人： Frank Hegner ,  Andreas Rossberg ,  Ulfert Drewes ,  Elke Schmidt ,  Sabine Stolle ,  Christel Kretschmar ,  Melanie Hentsche

    IPC分类号： G01L9/12 ,  H01R43/00

    CPC分类号： G01L9/0075 ,  G01L13/025 ,  Y10T29/49117

    摘要： A pressure sensor includes a platform 1 and an elastic measuring membrane 2, which is joined with a surface of the platform 1 to form a measuring chamber 3 sealed closed at the edge, wherein the platform 1 and/or the measuring membrane 2 comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode 6, which faces the surface of the platform 2, the surface of the platform 1 has at least a second electrode 5, which faces that of the measuring membrane 2, wherein the capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.

    摘要翻译： 压力传感器包括平台1和弹性测量膜2，其与平台1的表面接合以形成密封在边缘处的测量室3，其中平台1和/或测量膜2包括陶瓷， 玻璃或单晶材料，测量膜至少具有面向平台2的表面的第一电极6，平台1的表面至少具有与测量膜2的表面相对的第二电极5， 其中所述第一电极和所述第二电极之间的电容是待测压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。

    Capacitive pressure sensor
    4.
    发明授权
    Capacitive pressure sensor 有权
    电容式压力传感器

    公开(公告)号：US08104353B2

    公开(公告)日：2012-01-31

    申请号：US12451209

    申请日：2008-06-04

    申请人： Ulfert Drewes ,  Frank Hegner ,  Andreas Rossberg ,  Elke Schmidt ,  Sabine Stolle ,  Christel Kretschmar ,  Melanie Hentsche

    发明人： Ulfert Drewes ,  Frank Hegner ,  Andreas Rossberg ,  Elke Schmidt ,  Sabine Stolle ,  Christel Kretschmar ,  Melanie Hentsche

    IPC分类号： G01L9/12 ,  H01R43/00

    CPC分类号： G01L9/0075 ,  G01L13/025 ,  Y10T29/49117

    摘要： A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.

    摘要翻译： 压力传感器包括平台和弹性测量膜，其与平台的表面结合以形成密封在边缘处的测量室，其中平台和/或测量膜包括陶瓷，玻璃或单晶材料 测量膜至少具有面向平台表面的第一电极，平台的表面具有至少第二电极，其面向测量膜的表面。 第一电极和第二电极之间的电容是测量压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。

    Hydrophobically coated pressure sensor
    5.
    发明授权
    Hydrophobically coated pressure sensor 有权
    疏水涂层压力传感器

    公开(公告)号：US06941814B2

    公开(公告)日：2005-09-13

    申请号：US10498515

    申请日：2002-12-18

    申请人： Frank Hegner ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt

    发明人： Frank Hegner ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt

    IPC分类号： G01L19/06 ,  G01L7/00 ,  G01L9/00 ,  G01L9/12

    CPC分类号： G01L9/0075

    摘要： A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.

    摘要翻译： 用于测量压力的压力传感器包括压力室; 以及变形体，其可以在压力下暴露于介质，并且另外至少部分地限定压力室并且与介质如此压力地密封; 其中传感器室的壁具有通过气相和/或气相沉积施加的疏水涂层。 疏水涂层优选包括硅烷。 特别优选的是具有一个或多个疏水基团R和一个或多个锚定基团X的硅烷。特别优选的是：R-Si-X 3，R 1 R 1， 2 -Si-X 2，R 1 R 2 R 3 -Si-X。 疏水性基团R优选为烷基，全氟烷基，苯基或全氟苯基。 锚定基团X优选为-OH（硅烷醇），-X（卤化物，例如-Cl），-OR（酯，例如-OCH 3），-NH 2（胺）或-SH（巯基甲硅烷）。 另外，脂族或环状硅氮烷-Si-NH-Si-，例如 六甲基二硅氮烷。 同样合适的是类型R a-Me-X z z的化合物，其中Me = Zr，Ti。

    Hydrophobically coated pressure sensor
    8.
    发明申请
    Hydrophobically coated pressure sensor 有权

    公开(公告)号：US20050103109A1

    公开(公告)日：2005-05-19

    申请号：US10498515

    申请日：2002-12-18

    申请人： Frank Hegner ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt

    发明人： Frank Hegner ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt

    IPC分类号： G01L19/06 ,  G01L7/00 ,  G01L9/00 ,  G01L9/12

    CPC分类号： G01L9/0075

    摘要： A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.

    Pressure sensing device with moisture filter
    9.
    发明授权
    Pressure sensing device with moisture filter 失效
    带湿气过滤器的压力传感装置

    公开(公告)号：US06675654B2

    公开(公告)日：2004-01-13

    申请号：US10138519

    申请日：2002-05-06

    申请人： Frank Hegner ,  Andreas Rossberg ,  Elke Schmidt ,  Ulfert Drewes ,  Michael Kirst ,  Bernhard Walter

    发明人： Frank Hegner ,  Andreas Rossberg ,  Elke Schmidt ,  Ulfert Drewes ,  Michael Kirst ,  Bernhard Walter

    IPC分类号： G01L708

    CPC分类号： B01D39/2093

    摘要： A chamber in the interior of a housing communicates with the environment of the housing by means of a gas esxchange path, wherein a filter element with a hydrophobic and/or hydrophobicized, nanoporous material is placed in the gas exchange path. The chamber serves, e.g. to accomodate electronic circuitry, or it is chamed as a reference pressure chamber of a relative pressure sensor. The relative pressure sensor according to the present invention for capturing a measured pressure with respect to a reference pressure comprises a reference pressure path 23 which extends between a surface which can be exposed to the reference pressure and an opening in a reference pressure chamber 22, a filter element 30 which is arranged in the reference pressure path comprising a hydrophobic or hydrophobicized, nanoporous material. The filter element allows pressure compensation on account of its permeability to N2 and O2, while water molecules are selectively blocked. The nanoporous material preferably comprises an inorganic material, in particular Al2O3, TiO2 or SiO2. The nanoporous material is preferably hydrophobic and/or can be impregnated with a hydrophobic layer, preferably a silane, in order to optimize the hydrophobic properties.

    摘要翻译： 壳体内部的腔室通过气体交换路径与壳体的环境连通，其中具有疏水和/或疏水化的纳米多孔材料的过滤元件被放置在气体交换路径中。 该室供应，例如 以适应电子电路，或者将其作为相对压力传感器的参考压力室进行加工。 根据本发明的用于捕获相对于参考压力的测量压力的相对压力传感器包括在可暴露于参考压力的表面和参考压力室22中的开口之间延伸的参考压力路径23， 过滤元件30布置在参考压力路径中，包括疏水或疏水化的纳米多孔材料。 过滤元件由于其对N2和O2的渗透性而允许压力补偿，而水分子被选择性地阻挡。 纳米多孔材料优选包含无机材料，特别是Al 2 O 3，TiO 2或SiO 2。 纳米多孔材料优选是疏水性的和/或可以用疏水层，优选硅烷浸渍，以优化疏水性质。

    Flush-diaphragm relative pressure sensor
    10.
    发明授权
    Flush-diaphragm relative pressure sensor 有权
    冲洗隔膜相对压力传感器

    公开(公告)号：US06422085B1

    公开(公告)日：2002-07-23

    申请号：US09354628

    申请日：1999-07-16

    申请人： Frank Hegner ,  Andreas Rossberg ,  Ulfert Drewes ,  Elke Schmidt

    发明人： Frank Hegner ,  Andreas Rossberg ,  Ulfert Drewes ,  Elke Schmidt

    IPC分类号： G01L700

    CPC分类号： G01L19/0654 ,  G01L19/0636

    摘要： In this flush-diaphragm relative pressure sensor (1), the reference air reaches its current dew point before getting into the interior of the housing. The sensor has a capacitive, resistive, or piezoelectric sensing element (2) with a diaphragm (21) an external surface of which comes into direct contact with a medium under pressure. A housing (7) has an interior space (71) and a front portion (72) open across the interior space in the vicinity of which the diaphragm closes the interior space such that the front portion projects beyond the diaphragm. Further, the housing has a bore (721) extending through the front portion from an outer side thereof to the interior space for guiding the reference air. The bore is closed from the outer side with an open-pore, highly heat-conducting and hydrophobic filter (8), so that the filter and the diaphragm are at the same or nearly the same temperature. The filter can be made of a sintered metal, e.g. high-grade steel or bronze, or of a metallic sponge, e.g. titanium or zirconium.

    摘要翻译： 在该冲洗隔膜相对压力传感器（1）中，参考空气在进入壳体内部之前达到其目前的露点。 传感器具有电容式，电阻式或压电传感元件（2），其具有隔膜（21），其外表面与压力介质直接接触。 壳体（7）具有内部空间（71）和横跨内部空间开放的前部（72），隔膜在其附近敞开内部空间，使得前部突出超过隔膜。 此外，壳体具有从其外侧延伸穿过前部到内部空间的孔（721），用于引导参考空气。 孔从外侧封闭，具有开孔，高度导热和疏水的过滤器（8），使得过滤器和隔膜处于相同或接近相同的温度。 过滤器可以由烧结金属制成，例如， 高级钢或青铜，或金属海绵，例如。 钛或锆。