公开(公告)号：US20150380648A1

公开(公告)日：2015-12-31

申请号：US14730768

申请日：2015-06-04

Applicant: Universal Display Corporation

Inventor： Gregory McGRAW ,  William E. QUINN ,  Matthew KING ,  Elliot H. HARTFORD, JR. ,  Siddharth Harikrishna MOHAN ,  Benjamin SWEDLOVE ,  Gregg KOTTAS

IPC: H01L51/00 ,  H01L51/56 ,  C23C14/12 ,  C23C14/24 ,  C23C14/54

CPC classification number: C23C14/12 ,  B05D1/60 ,  B41J2/045 ,  B41J2202/02 ,  C23C14/04 ,  C23C14/228 ,  C23C14/54 ,  H01L51/0005 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.

Abstract translation: 所公开的主题的实施例提供了方法和系统，包括喷嘴，要沉积在与喷嘴流体连通的基板上的材料源，与待喷射的材料沉积的材料源流体连通的输送气体源， 与喷嘴相邻设置的排气通道，与喷嘴和排气通道流体连通并且邻近排气通道设置的限制气体源，以及致动器，用于调节喷嘴的沉积喷嘴孔和 沉积目标。 飞高高度分离的调整可能会停止和/或开始从喷嘴沉积材料。

公开(公告)号：US20140295615A1

公开(公告)日：2014-10-02

申请号：US14246737

申请日：2014-04-07

Applicant: Universal Display Corporation

Inventor： Siddharth Harikrishna MOHAN ,  Paul E. BURROWS

IPC: H01L51/00 ,  H01L51/56

CPC classification number: H01L51/0003 ,  C23C14/04 ,  C23C14/12 ,  C23C14/228 ,  H01L51/0005 ,  H01L51/56

Abstract: Systems and methods are provided for depositing thin patterned films of materials in which individual elements of the patterned film are deposited by two or more nozzles having different geometries. The different nozzle geometries may include one or more of different throttle diameters, different exhaust diameters, different cross-sectional shapes, different bore angles, different wall angles, different exhaust distances from the substrate, and different leading edges relative to the direction of movement of the nozzles or the substrate. Methods may include steps of ejecting a carrier gas and a material from a plurality of nozzles and depositing the material on a substrate in a plurality of laterally spaced elements.

Abstract translation: 提供了用于沉积材料的薄图案化膜的系统和方法，其中通过具有不同几何形状的两个或更多个喷嘴沉积图案化膜的各个元件。 不同的喷嘴几何形状可以包括一个或多个不同的节流直径，不同的排气直径，不同的横截面形状，不同的孔角度，不同的壁角度，与基板的不同排气距离以及相对于运动方向的不同前缘 喷嘴或基板。 方法可以包括从多个喷嘴喷射载气和材料并将材料沉积在多个横向间隔的元件的基板上的步骤。