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公开(公告)号:US20180363126A1
公开(公告)日:2018-12-20
申请号:US15781359
申请日:2016-12-02
Inventor: Cheng Xu , Luping Li , Yang Zhao , Kirk Jeremy Ziegler , Justin C. Wong
CPC classification number: C23C14/022 , B82Y30/00 , B82Y40/00 , B82Y99/00 , C23C14/30 , C23C14/34 , C23C14/5806 , C23C16/0272 , C23C16/453 , C23C16/45512 , C23C16/45514 , C23C16/45574 , C23C16/545 , C25D11/045
Abstract: Various examples related to fabrication of thermally stable ultra-high density particle-in-cavity (PIC) nanostructures. In one example, a method includes disposing an anodized aluminum oxide (AAO) template onto a surface of a substrate; removing, from the AAO template, a support layer disposed on a side of the AAO template opposite the surface of the substrate; etching nanocavities into the surface of the substrate using the AAO template as an etch mask; and removing the AAO template from the surface of the substrate. The method can include fabricating the AAO template on an aluminum substrate by anodization of an aluminum film and removing the AAO template from the aluminum substrate after formation of the support layer on the AAO template.
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公开(公告)号:US10745816B2
公开(公告)日:2020-08-18
申请号:US15766589
申请日:2016-10-24
Inventor: Cheng Xu , Kirk Jeremy Ziegler , Jie Liu
Abstract: Various examples are provided for vertically aligned ultra-high density nanowires and their transfer onto flexible substrates. In one example, a method includes forming a plurality of vertically aligned nanowires inside channels of an anodized alumina (AAO) template on an aluminum substrate, where individual nanowires of the plurality of vertically aligned nanowires extend to a distal end from a proximal end adjacent to the aluminum substrate; removing the aluminum substrate and a portion of the AAO template to expose a surface of the AAO template and a portion of the proximal end of the individual nanowires; depositing an interlayer on the exposed surface of the AAO template and the exposed portion of the individual nanowires; and removing the AAO template from around the plurality of vertically aligned nanowires embedded in the interlayer.
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公开(公告)号:US10400322B2
公开(公告)日:2019-09-03
申请号:US15781359
申请日:2016-12-02
Inventor: Cheng Xu , Luping Li , Yang Zhao , Kirk Jeremy Ziegler , Justin C. Wong
IPC: C23C14/02 , C25D11/04 , C23C16/02 , C23C16/453 , C23C16/455 , C23C16/54 , C23C14/30 , C23C14/34 , C23C14/58 , B82Y30/00 , B82Y99/00 , B82Y40/00
Abstract: Various examples related to fabrication of thermally stable ultra-high density particle-in-cavity (PIC) nanostructures. In one example, a method includes disposing an anodized aluminum oxide (AAO) template onto a surface of a substrate; removing, from the AAO template, a support layer disposed on a side of the AAO template opposite the surface of the substrate; etching nanocavities into the surface of the substrate using the AAO template as an etch mask; and removing the AAO template from the surface of the substrate. The method can include fabricating the AAO template on an aluminum substrate by anodization of an aluminum film and removing the AAO template from the aluminum substrate after formation of the support layer on the AAO template.
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公开(公告)号:US20180298507A1
公开(公告)日:2018-10-18
申请号:US15766589
申请日:2016-10-24
Inventor: Cheng Xu , Kirk Jeremy Ziegler , Jie Liu
Abstract: Various examples are provided for vertically aligned ultra-high density nanowires and their transfer onto flexible substrates. In one example, a method includes forming a plurality of vertically aligned nanowires inside channels of an anodized alumina (AAO) template on an aluminum substrate, where individual nanowires of the plurality of vertically aligned nanowires extend to a distal end from a proximal end adjacent to the aluminum substrate; removing the aluminum substrate and a portion of the AAO template to expose a surface of the AAO template and a portion of the proximal end of the individual nanowires; depositing an interlayer on the exposed surface of the AAO template and the exposed portion of the individual nanowires; and removing the AAO template from around the plurality of vertically aligned nanowires embedded in the interlayer.
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公开(公告)号:US10209017B2
公开(公告)日:2019-02-19
申请号:US15327477
申请日:2015-07-24
Inventor: Hong Hu , Jacob N. Chung , Kirk Jeremy Ziegler , Cheng Xu , Yang Zhao
Abstract: Various methods and systems are provided for cryogenic heat transfer by nanoporous surfaces. In one embodiment, among others, a system includes a cryogenic fluid in a flow path of the system; and a system component in the flow path that includes a nanoporous surface layer in contact with the cryogenic fluid. In another embodiment, a method includes providing a cryogenic fluid; and initiating chilldown of a cryogenic system by directing the cryogenic fluid across a nanoporous surface layer disposed on a surface of a system component.
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