Apparatus and method for testing a plurality of electrical components that are coupled to one another
    2.
    发明授权
    Apparatus and method for testing a plurality of electrical components that are coupled to one another 失效
    用于测试彼此耦合的多个电气部件的装置和方法

    公开(公告)号:US06831474B2

    公开(公告)日:2004-12-14

    申请号:US10203179

    申请日:2002-12-30

    IPC分类号: G01R3128

    CPC分类号: G01R31/275 G01R31/2851

    摘要: An apparatus and method for testing a plurality of electrical components that are coupled to one another. Further, an electrical selection unit, coupled to the electrical components to be tested, is provided for selecting at least one electrical component to be tested. A parasitic voltage drop in the testing circuit can be at least partially compensated using a control element coupled to the electrical components to be tested. The invention makes it possible, for testing of electrical components on a wafer over a large distance, i.e., several millimeters, to permit automated compensation of interference influences which occur as a result of the lines coupling or connecting the components to be tested.

    摘要翻译: 一种用于测试彼此耦合的多个电气部件的装置和方法。 此外,提供耦合到要测试的电气部件的电选择单元,用于选择至少一个要测试的电气部件。 可以使用耦合到要测试的电气部件的控制元件来至少部分地补偿测试电路中的寄生电压降。 本发明使得可以在大范围(即几毫米)上测试晶片上的电气部件,以允许自动补偿由于线路耦合或连接待测组件的结果而发生的干扰影响。

    Circuit configuration and method for assessing capacitances in matrices
    3.
    发明授权
    Circuit configuration and method for assessing capacitances in matrices 失效
    用于评估矩阵中的电容的电路配置和方法

    公开(公告)号:US06870373B2

    公开(公告)日:2005-03-22

    申请号:US10236889

    申请日:2002-09-06

    摘要: A circuit configuration for assessing capacitances in a matrix, which has a number of rows with at least one capacitance in at least one dimension, includes a test arm connected to first electrodes of each of the capacitances to be assessed and by which two different potentials can be applied to the first electrodes, a measurement arm connected to second electrodes of each of the capacitances to be assessed and that has a first measurement path and a second measurement path connected to a common potential. The first measurement path has an instrument for assessing the capacitances and the first and second measurement paths can be connected to the second electrodes. The circuit configuration has a drive device that connects each of the capacitances to be assessed individually to the two different potentials.

    摘要翻译: 用于评估在至少一维中具有至少一个电容的行数的矩阵中的电容的电路配置包括连接到要评估的每个电容的第一电极的测试臂,并且两个不同的电位可以被 施加到第一电极,测量臂连接到要评估的每个电容的第二电极,并且具有连接到公共电位的第一测量路径和第二测量路径。 第一测量路径具有用于评估电容的仪器,并且第一和第二测量路径可以连接到第二电极。 电路配置具有驱动装置,其将要被分别评估的每个电容连接到两个不同的电位。