公开(公告)号：US5629538A

公开(公告)日：1997-05-13

申请号：US433576

申请日：1995-05-03

申请人： Uwe Lipphardt ,  Guenther Findler ,  Horst Muenzel ,  Helmut Baumann

发明人： Uwe Lipphardt ,  Guenther Findler ,  Horst Muenzel ,  Helmut Baumann

IPC分类号： G01L9/04 ,  G01L9/00 ,  G01L19/06 ,  H01L29/84 ,  H01L29/82

CPC分类号： G01L19/147 ,  G01L19/0627 ,  G01L9/0042

摘要： A semiconductor chip, which is preferably designed as a pressure sensor, has on its rear side one or more depressions in which the pressure is measured by correspondingly designed diaphragms which are coupled to piezosensitive circuits. The surface of the depressions and, optionally, the rear side of the semiconductor chip are coated with a protective layer which ensures that the semiconductor is protected from aggressive media. The protective layer thereby makes it possible to use the sensor universally in acids, lyes or hot gases.

摘要翻译： 优选地设计为压力传感器的半导体芯片在其后侧具有一个或多个凹陷，其中通过相应设计的隔膜耦合压敏电阻来测量压力。 凹部的表面和可选地，半导体芯片的后侧涂覆有保护层，其保护半导体免受侵蚀性介质的侵害。 因此，保护​​层使得可以将传感器普遍用于酸，碱液或热气体中。

公开(公告)号：US5507186A

公开(公告)日：1996-04-16

申请号：US260585

申请日：1994-06-16

申请人： Kurt Weiblen ,  Werner Herden ,  Uwe Lipphardt ,  Horst Muenzel ,  Matthias Kuesell ,  Steffen Schmidt

发明人： Kurt Weiblen ,  Werner Herden ,  Uwe Lipphardt ,  Horst Muenzel ,  Matthias Kuesell ,  Steffen Schmidt

IPC分类号： G01L7/08 ,  G01L1/18 ,  G01L1/26 ,  G01L9/00 ,  G01L9/04 ,  G01L9/06 ,  G01L23/10 ,  G01L23/18 ,  G01L7/00

CPC分类号： G01L23/18 ,  G01L1/18 ,  G01L1/26 ,  G01L9/0052

摘要： In a pressure sensor, a force is transferred via a pressure plunger end made of relatively hard material onto a measurement element including a sensor membrane on a support. The sensor membrane is part of a micromechanical arrangement made of silicon. A metal structure made of a metal of lower hardness compared with the hardness of the material of the pressure plunger end is applied onto the sensor membrane. This metal structure can be impressed and plastically deformed with increased force by the contact surface of the pressure plunger end, in such a way that conforming contact of the contact surface is achieved, and potential angular errors are compensated for.

摘要翻译： 在压力传感器中，力通过由相对硬的材料制成的压力柱塞端传递到包括传感器膜的测量元件上。 传感器膜是由硅制成的微机械装置的一部分。 与传感器膜上的硬度相比，具有较低硬度的金属制成的金属结构被施加到传感器膜上。 这种金属结构可以通过压力柱塞端的接触表面的增加的力被施加和塑性变形，使得实现接触表面的适形接触并且补偿潜在的角度误差。

公开(公告)号：US5525943A

公开(公告)日：1996-06-11

申请号：US223071

申请日：1994-04-04

申请人： Walter Roethlingshoefer ,  Kurt Weiblen ,  Peter Tauber ,  Uwe Lipphardt

发明人： Walter Roethlingshoefer ,  Kurt Weiblen ,  Peter Tauber ,  Uwe Lipphardt

IPC分类号： H04B15/02 ,  H05K9/00 ,  H03H7/00

CPC分类号： H04B15/02

摘要： An electromagnetic compatibility (EMC) filter used in a hybrid technology circuit component, having current-carrying lines and a ground conductor, for protection against electromagnetic interference. The current-carrying lines and ground conductor are arranged on a ceramic plate. The current-carrying lines are covered by a dielectric, which in turn, is covered by an upper metal screen in electrical contact with the ground conductor. A lower metal screen is arranged on the ceramic plate beneath the current-carrying lines and is in electrical contact with the ground conductor.

摘要翻译： 用于混合技术电路部件的电磁兼容（EMC）滤波器，具有载流线路和接地导体，用于防止电磁干扰。 载流线和接地导体布置在陶瓷板上。 载流线由电介质覆盖，电介质又由与接地导体电接触的上金属屏蔽覆盖。 下部金属屏幕布置在载流线下方的陶瓷板上，并与接地导体电接触。

公开(公告)号：US06782756B2

公开(公告)日：2004-08-31

申请号：US10239470

申请日：2003-01-09

申请人： Joerg Muchow ,  Jochen Franz ,  Uwe Lipphardt ,  Andreas Duell ,  Wolfgang Romes

发明人： Joerg Muchow ,  Jochen Franz ,  Uwe Lipphardt ,  Andreas Duell ,  Wolfgang Romes

IPC分类号： G01L900

CPC分类号： G01L9/0054

摘要： A micromechanical component, in particular a pressure sensor, including a substrate that has a membrane region, a surrounding region of the membrane region, at least one measuring resistance provided in the membrane region and modifiable by deformation of the membrane region, and a corresponding evaluation circuit provided in the surrounding region. An interference effect on the measuring resistance is producible by way of a deformation of parts, in particular conductor paths, of the evaluation circuit relative to the substrate. The invention also creates a corresponding equalization method on a test chip or as an individual final equalization.

摘要翻译： 一种微机械部件，特别是压力传感器，包括具有膜区域的基板，膜区域的周围区域，设置在膜区域中的至少一个测量电阻，并且可以通过膜区域的变形而修改，以及相应的评估 电路设在周边地区。 测量电阻的干涉效应可以通过评估电路相对于衬底的部件，特别是导体路径的变形来产生。 本发明还在测试芯片上或作为单独的最终均衡产生相应的均衡方法。

公开(公告)号：US06212946B1

公开(公告)日：2001-04-10

申请号：US09194147

申请日：1998-11-23

申请人： Erwin Naegele ,  Winfried Kuhnt ,  Klaus Hirschberger ,  Uwe Lipphardt

发明人： Erwin Naegele ,  Winfried Kuhnt ,  Klaus Hirschberger ,  Uwe Lipphardt

IPC分类号： G01M1900

CPC分类号： G01L19/147 ,  G01D11/245 ,  G01D21/02 ,  G01K1/26 ,  G01K13/02 ,  G01K2205/02 ,  G01L19/0038 ,  G01L19/0084 ,  G01L19/0092 ,  G01L19/14 ,  G01L19/141 ,  G01L23/24

摘要： A device for detecting the pressure and the temperature in the intake tube of an internal combustion engine, including a temperature sensor, a pressure sensor and a substrate each of which are secured in a housing with as little stress as possible with the pressure sensor secured on a substrate together with an evaluation circuit. The temperature sensor measures precise temperature measurement. In order to introduce a fluid medium that is under pressure, a neck part is secured to the housing and an adapter is joined both to the substrate and to the neck part via adhesive seals that decouple mechanical stress from the pressure and temperature detectors.

摘要翻译： 一种用于检测内燃机的进气管中的压力和温度的装置，包括温度传感器，压力传感器和基板，每个密封件固定在壳体中，压力传感器固定在壳体上尽可能小的应力 基板和评估电路。 温度传感器可测量精确的温度测量。 为了引入处于压力下的流体介质，颈部固定到壳体，并且适配器通过将机械应力与压力和温度检测器分离的粘合密封件连接到基底和颈部。