Charged particle analyzer with means to determine the coordinate position of the sample
    1.
    发明授权
    Charged particle analyzer with means to determine the coordinate position of the sample 失效
    用于确定样品坐标位置的充电颗粒分析仪

    公开(公告)号:US3686501A

    公开(公告)日:1972-08-22

    申请号:US3686501D

    申请日:1970-09-28

    CPC classification number: H01J49/482 H01J37/252

    Abstract: A cylindrical mirror analyzer is described having apparatus for quickly and accurately positioning the area of a sample to be investigated at the proper position for analysis. The cylindrical analyzer includes a pair of coaxial and radially spaced apart cylinders and suitable mechanism for supporting a sample to be investigated on their common axis. Means are provided for forming in the space between the cylinders a charged particle deflecting field which will deflect towards the inner cylinder any charged particles within such space which have issued from the sample. Slots in the inner cylinder define a path for the passage of particles from the sample into the space between the cylinders for deflection and then back through the inner cylinder to the cylindrical axis where such particles are collected for analysis of their energy. A screen of fluorescent material is disposed at a location at which it will be activated by particles issuing from the sample because of the bombardment, and a shield is disposed between the fluorescent screen and the sample to project an unactivated or shadow area on the screen. The positional relationship of the shadow on the screen is indicative of the coordinate position of the area on the sample from which the radiation is emitted and, hence, is indicative of the location of the area under investigation.

    Abstract translation: 描述了一种圆柱形镜面分析仪,其具有用于将待研究样品的面积快速准确地定位在适当位置进行分析的装置。 圆柱形分析器包括一对同轴和径向间隔开的圆柱体和用于在其共同轴线上支撑要研究的样品的适当机构。 提供了用于在气缸之间的空间中形成带电粒子偏转场的装置,其将朝向内圆柱体偏转,在该空间内从样品发出的任何带电粒子。 内筒中的槽限定了用于使颗粒从样品通过到用于偏转的气缸之间的空间的路径,然后通过内圆筒返回到圆柱轴线,其中收集这些颗粒以分析其能量。 荧光材料的屏幕设置在由于轰击而从样品发出的颗粒被激活的位置处,并且在荧光屏和样品之间设置屏蔽以在屏幕上投影未激活或阴影区域。 屏幕上的阴影的位置关系表示放射辐射的样品上的区域的坐标位置,因此表示被调查区域的位置。

    Retarding field electron diffraction spectrometer having improved resolution
    2.
    发明授权
    Retarding field electron diffraction spectrometer having improved resolution 失效
    具有改进分辨率的延迟场电子衍射光谱仪

    公开(公告)号:US3582649A

    公开(公告)日:1971-06-01

    申请号:US3582649D

    申请日:1968-10-21

    Inventor: TAYLOR NORMAN J

    CPC classification number: H01J37/295 H01J49/488

    Abstract: A retarded field electron diffraction spectrometer is disclosed which includes an electron gun for directing substantially monoenergetic electrons onto the surface to be examined of a target to produce scattered electrons from such surface. A spherical retarding grid structure is concentrically disposed of the target in the space between the target electrode and a concentric spherical fluorescent screen. A retarding potential applied to the retarding grid permits only those target scattered electrons having a potential greater than the potential of the retarding electrode to reach the fluorescent screen. The retarding grid electrode has grid openings defining electron passageways having a characteristic diameter less than three times the characteristic length thereof to improve the uniformity of the retarding field. A spherical shield grid electrode is concentrically disposed of and has a radius within the range of 0.3 to 0.8 of that of the retarding grid to enhance the resolution of the spectrometer.

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