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    Electronically controlled squishable composite switch
    1.
    发明授权
    Electronically controlled squishable composite switch 有权
    电子控制可压缩复合开关

    公开(公告)号：US08933496B2

    公开(公告)日：2015-01-13

    申请号：US13291016

    申请日：2011-11-07

    申请人： Vladimir Bulovic ,  Jeffrey H. Lang ,  Sarah Paydavosi ,  Annie I-Jen Wang ,  Trisha L. Andrew ,  Apoorva Murarka ,  Farnaz Niroui ,  Frank Yaul ,  Jeffrey C. Grossman

    发明人： Vladimir Bulovic ,  Jeffrey H. Lang ,  Sarah Paydavosi ,  Annie I-Jen Wang ,  Trisha L. Andrew ,  Apoorva Murarka ,  Farnaz Niroui ,  Frank Yaul ,  Jeffrey C. Grossman

    IPC分类号： H01L45/00 ,  H01L21/62

    CPC分类号： H01L29/84 ,  H01L27/0629 ,  H01L29/41725 ,  H01L45/00 ,  Y10S977/742

    摘要： A method and apparatus for making analog and digital electronics which includes a composite including a squishable material doped with conductive particles. A microelectromechanical systems (MEMS) device has a channel made from the composite, where the channel forms a primary conduction path for the device. Upon applied voltage, capacitive actuators squeeze the composite, causing it to become conductive. The squishable device includes a control electrode, and a composite electrically and mechanically connected to two terminal electrodes. By applying a voltage to the control electrode relative to a first terminal electrode, an electric field is developed between the control electrode and the first terminal electrode. This electric field results in an attractive force between the control electrode and the first terminal electrode, which compresses the composite and enables electric control of the electron conduction from the first terminal electrode through the channel to the second terminal electrode.

    摘要翻译： 一种用于制造模拟和数字电子学的方法和装置，其包括掺杂有导电颗粒的可堆置材料的复合材料。 微机电系统（MEMS）装置具有由复合材料制成的通道，其中通道形成器件的主导通路径。 在施加电压时，电容执行器挤压复合材料，使其变得导电。 可挤压装置包括控制电极，以及电气和机械连接到两个端子电极的复合体。 通过相对于第一端子电极向控制电极施加电压，在控制电极和第一端子电极之间产生电场。 该电场导致控制电极和第一端子电极之间的吸引力，其压缩复合材料并且能够电控制从第一端子电极通过通道到第二端子电极的电子传导。

    ELECTRONICALLY CONTROLLED SQUISHABLE COMPOSITE SWITCH
    2.
    发明申请
    ELECTRONICALLY CONTROLLED SQUISHABLE COMPOSITE SWITCH 有权
    电子控制可混合复合开关

    公开(公告)号：US20120112152A1

    公开(公告)日：2012-05-10

    申请号：US13291016

    申请日：2011-11-07

    申请人： Vladimir Bulovic ,  Jeffrey H. Lang ,  Sarah Paydavosi ,  Annie I-Jen Wang ,  Trisha L. Andrew ,  Apoorva Murarka ,  Farnaz Niroui ,  Frank Yaul ,  Jeffrey C. Grossman

    发明人： Vladimir Bulovic ,  Jeffrey H. Lang ,  Sarah Paydavosi ,  Annie I-Jen Wang ,  Trisha L. Andrew ,  Apoorva Murarka ,  Farnaz Niroui ,  Frank Yaul ,  Jeffrey C. Grossman

    IPC分类号： H01L45/00 ,  H01L21/62 ,  B82Y99/00

    CPC分类号： H01L29/84 ,  H01L27/0629 ,  H01L29/41725 ,  H01L45/00 ,  Y10S977/742

    摘要： A method and apparatus for making analog and digital electronics which includes a composite including a squishable material doped with conductive particles. A microelectromechanical systems (MEMS) device has a channel made from the composite, where the channel forms a primary conduction path for the device. Upon applied voltage, capacitive actuators squeeze the composite, causing it to become conductive. The squishable device includes a control electrode, and a composite electrically and mechanically connected to two terminal electrodes. By applying a voltage to the control electrode relative to a first terminal electrode, an electric field is developed between the control electrode and the first terminal electrode. This electric field results in an attractive force between the control electrode and the first terminal electrode, which compresses the composite and enables electric control of the electron conduction from the first terminal electrode through the channel to the second terminal electrode.

    摘要翻译： 一种用于制造模拟和数字电子学的方法和装置，其包括掺杂有导电颗粒的可堆置材料的复合材料。 微机电系统（MEMS）装置具有由复合材料制成的通道，其中通道形成器件的主导通路径。 在施加电压时，电容执行器挤压复合材料，使其变得导电。 可挤压装置包括控制电极，以及电气和机械连接到两个端子电极的复合体。 通过相对于第一端子电极向控制电极施加电压，在控制电极和第一端子电极之间产生电场。 该电场导致控制电极和第一端子电极之间的吸引力，其压缩复合材料，并且能够电控制从第一端子电极通过通道到第二端子电极的电子传导。

    Method and apparatus for release-assisted microcontact printing of MEMS
    3.
    发明授权
    Method and apparatus for release-assisted microcontact printing of MEMS 有权

    公开(公告)号：US10570005B2

    公开(公告)日：2020-02-25

    申请号：US13604613

    申请日：2012-09-05

    申请人： Apoorva Murarka ,  Vladimir Bulovic ,  Sarah Paydavosi

    发明人： Apoorva Murarka ,  Vladimir Bulovic ,  Sarah Paydavosi

    IPC分类号： B81B3/00 ,  B81C1/00

    摘要： The disclosure provides methods and apparatus for release-assisted microcontact printing of MEMS. Specifically, the principles disclosed herein enable patterning diaphragms and conductive membranes on a substrate having articulations of desired shapes and sizes. Such diaphragms deflect under applied pressure or force (e.g., electrostatic, electromagnetic, acoustic, pneumatic, mechanical, etc.) generating a responsive signal. Alternatively, the diaphragm can be made to deflect in response to an external bias to measure the external bias/phenomenon. The disclosed principles enable transferring diaphragms and/or thin membranes without rupturing.

    Method and apparatus for forming MEMS device
    4.
    发明授权
    Method and apparatus for forming MEMS device 有权
    用于形成MEMS器件的方法和装置

    公开(公告)号：US08963262B2

    公开(公告)日：2015-02-24

    申请号：US12903149

    申请日：2010-10-12

    申请人： Vladimir Bulovic ,  Corinne E. Packard ,  Vanessa C. Wood ,  Apoorva Murarka ,  Gleb Akselrod

    发明人： Vladimir Bulovic ,  Corinne E. Packard ,  Vanessa C. Wood ,  Apoorva Murarka ,  Gleb Akselrod

    IPC分类号： H01L29/84

    CPC分类号： B81C1/00357 ,  B81C1/0046 ,  H01L51/5265

    摘要： The disclosure is generally directed to fabrication steps, and operation principles for microelectromechanical (MEMS) transducers. In one embodiment, the disclosure relates to a texture morphing device. The texture morphing device includes: a plurality of supports arranged on a substrate to support a deformable mirror; an ITO layer; and a Distributed Bragg Reflector (DBR) layer. A pair of adjacent supports form a cavity with the ITO layer and the deformable mirror. When the height of the cavity changes responsive to an external pressure, the internal reflection within the cavity is changed. The change in the height of the cavity causes the exterior texture to morph. Similar principles are disclosed for constructing sensor and actuators.

    摘要翻译： 本公开一般涉及制造步骤以及微机电（MEMS）换能器的操作原理。 在一个实施例中，本公开涉及纹理变形装置。 纹理变形装置包括：布置在基板上以支撑可变形反射镜的多个支撑件; ITO层; 和分布式布拉格反射器（DBR）层。 一对相邻的支撑件形成具有ITO层和可变形反射镜的空腔。 当空腔的高度响应于外部压力而变化时，空腔内的内部反射被改变。 空腔的高度变化导致外部纹理变形。 公开了用于构造传感器和致动器的类似原理。

    Method for microcontact printing of MEMS
    5.
    发明授权
    Method for microcontact printing of MEMS 有权
    MEMS微接触印刷方法

    公开(公告)号：US08739390B2

    公开(公告)日：2014-06-03

    申请号：US12636757

    申请日：2009-12-13

    申请人： Vladimir Bulovic ,  Corinne Evelyn Packard ,  Jennifer Jong-Hua Yu ,  Apoorva Murarka ,  LeeAnn Kim

    发明人： Vladimir Bulovic ,  Corinne Evelyn Packard ,  Jennifer Jong-Hua Yu ,  Apoorva Murarka ,  LeeAnn Kim

    IPC分类号： H01H11/00

    CPC分类号： B81C1/0046 ,  B81B2201/042 ,  B81C2201/0185 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49002 ,  Y10T29/4902 ,  Y10T29/49105 ,  Y10T156/1168

    摘要： The embodiments disclosed herein are directed to fabrication methods useful for creating MEMS via microcontact printing by using small organic molecule release layers. The disclose method enables transfer of a continuous metal film onto a discontinuous platform to form a variable capacitor array. The variable capacitor array can produce mechanical motion under the application of a voltage. The methods disclosed herein eliminate masking and other traditional MEMS fabrication methodology. The methods disclosed herein can be used to form a substantially transparent MEMS having a PDMS layer interposed between an electrode and a graphene diaphragm.

    摘要翻译： 本文公开的实施例涉及通过使用小的有机分子释放层通过微接触印刷创建MEMS的制造方法。 公开的方法能够将连续金属膜转移到不连续平台上以形成可变电容器阵列。 可变电容器阵列可以在施加电压的情况下产生机械运动。 本文公开的方法消除掩蔽和其它传统的MEMS制造方法。 本文公开的方法可以用于形成基本上透明的MEMS，其具有介于电极和石墨烯隔膜之间的PDMS层。

    Method for forming a MEMS capacitor array
    6.
    发明授权
    Method for forming a MEMS capacitor array 有权
    MEMS电容阵列的形成方法

    公开(公告)号：US08601658B2

    公开(公告)日：2013-12-10

    申请号：US13248901

    申请日：2011-09-29

    申请人： Vladimir Bulovic ,  Corinne Evelyn Packard ,  Jennifer Jong-Hua Yu ,  Apoorva Murarka ,  LeeAnn Kim

    发明人： Vladimir Bulovic ,  Corinne Evelyn Packard ,  Jennifer Jong-Hua Yu ,  Apoorva Murarka ,  LeeAnn Kim

    IPC分类号： H01G7/00

    CPC分类号： B81C1/0046 ,  B81B2201/042 ,  B81C2201/0185 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49002 ,  Y10T29/4902 ,  Y10T29/49105 ,  Y10T156/1168

    摘要： The embodiments disclosed herein are directed to fabrication methods useful for creating MEMS via microcontact printing by using small organic molecule release layers. The disclose method enables transfer of a continuous metal film onto a discontinuous platform to form a variable capacitor array. The variable capacitor array can produce mechanical motion under the application of a voltage. The methods disclosed herein eliminate masking and other traditional MEMS fabrication methodology. The methods disclosed herein can be used to form a substantially transparent MEMS having a PDMS layer interposed between an electrode and a graphene diaphragm.

    摘要翻译： 本文公开的实施例涉及通过使用小的有机分子释放层通过微接触印刷创建MEMS的制造方法。 公开的方法能够将连续金属膜转移到不连续平台上以形成可变电容器阵列。 可变电容器阵列可以在施加电压的情况下产生机械运动。 本文公开的方法消除掩蔽和其它传统的MEMS制造方法。 本文公开的方法可以用于形成基本上透明的MEMS，其具有介于电极和石墨烯隔膜之间的PDMS层。