公开(公告)号：US09431993B1

公开(公告)日：2016-08-30

申请号：US13287068

申请日：2011-11-01

申请人： Wan-Thai Hsu ,  John Ryan Clark

发明人： Wan-Thai Hsu ,  John Ryan Clark

IPC分类号： H03H9/24 ,  H03H9/02

CPC分类号： H03H9/02448 ,  H03H3/0076 ,  H03H9/02244 ,  H03H9/02259 ,  H03H9/02338 ,  H03H9/2431 ,  H03H2009/02291 ,  H03H2009/02322 ,  H03H2009/02503 ,  H03H2009/241 ,  H03H2009/2442

摘要： A device includes a substrate, an electrode supported by the substrate, an anchor supported by the substrate, and a composite structure supported by the anchor, disposed adjacent the electrode, and configured for resonant vibration. The composite structure includes an external layer and an internal dielectric region covered by the external layer.

摘要翻译： 一种装置包括基板，由基板支撑的电极，由基板支撑的锚固体以及由锚固件支撑的复合结构，该复合结构邻近电极设置并且被配置为用于共振振动。 复合结构包括外层和被外层覆盖的内部电介质区域。

公开(公告)号：US08878633B1

公开(公告)日：2014-11-04

申请号：US13294950

申请日：2011-11-11

申请人： Wan-Thai Hsu ,  Guohong He ,  John Ryan Clark

发明人： Wan-Thai Hsu ,  Guohong He ,  John Ryan Clark

IPC分类号： H03H9/24 ,  H03H9/05 ,  H03H9/46 ,  H03H9/50 ,  H03H9/02 ,  H03H7/00

CPC分类号： H03H9/0023 ,  H03B5/30 ,  H03H9/02244 ,  H03H9/02259 ,  H03H9/02338 ,  H03H9/02409 ,  H03H9/02417 ,  H03H9/02448 ,  H03H9/2431 ,  H03H9/2447 ,  H03H9/2452 ,  H03H9/505 ,  H03H2007/008 ,  H03H2009/02291 ,  H03H2009/02354 ,  H03H2009/02511 ,  H03H2009/241

摘要： A micromechanical device includes a substrate, a micromechanical structure supported by the substrate and configured for overtone resonant vibration relative to the substrate, and a plurality of electrodes supported by the substrate and spaced from the micromechanical structure by respective gaps. The plurality of electrodes include multiple drive electrodes configured relative to the micromechanical structure to excite the overtone resonant vibration with a differential excitation signal, or multiple sense electrodes configured relative to the micromechanical structure to generate a differential output from the overtone resonant vibration.

摘要翻译： 微机械装置包括衬底，由衬底支撑并被配置为相对于衬底的谐波振荡的微机械结构，以及由衬底支撑并由微机械结构通过相应的间隙间隔开的多个电极。 多个电极包括相对于微机械结构构造的多个驱动电极，以利用差分激励信号激励泛音共振振动，或者相对于微机械结构配置的多个感测电极，以产生来自谐波谐振振动的差分输出。

公开(公告)号：US08686802B1

公开(公告)日：2014-04-01

申请号：US13351215

申请日：2012-01-16

申请人： Andrew Robert Brown ,  John Ryan Clark ,  Wan-Thai Hsu ,  Graham Yorke Mostyn ,  William Cochrane Ingle

发明人： Andrew Robert Brown ,  John Ryan Clark ,  Wan-Thai Hsu ,  Graham Yorke Mostyn ,  William Cochrane Ingle

IPC分类号： H03B5/30 ,  G01R23/00 ,  G01N27/00

CPC分类号： G01N29/30 ,  G01N29/022 ,  G01N29/036 ,  H03B5/30

摘要： A method of configuring a device comprising a MEMS resonator includes initiating operation of the device, estimating a first parameter of the MEMS resonator based on the initiated operation, the first parameter not varying with the bias voltage, monitoring the operation of the device at a plurality of levels of the bias voltage, calculating a second parameter of the MEMS resonator based on the monitored operation, the second parameter varying with the bias voltage, determining an operational level of the bias voltage based on the estimated first parameter and the calculated second parameter, and configuring the device in accordance with the determined operational level of the bias voltage.

摘要翻译： 一种配置包括MEMS谐振器的装置的方法包括启动装置的操作，基于所启动的操作来估计MEMS谐振器的第一参数，第一参数不随着偏置电压而变化，监测多个装置的操作 基于所监视的操作来计算MEMS谐振器的第二参数，第二参数随偏置电压变化，基于估计的第一参数和所计算的第二参数确定偏置电压的操作电平， 以及根据确定的偏置电压的操作电平配置该装置。