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公开(公告)号：US12025744B2
公开(公告)日：2024-07-02
申请号：US17490428
申请日：2021-09-30
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
CPC classification number: G01S7/4818 , G02B6/12002 , G01S17/06 , G01S17/88 , G02B2006/12104
Abstract: One example system comprises a plurality of substrates disposed in an overlapping arrangement. The plurality of substrates includes at least a first substrate and a second substrate. The system also comprises a first waveguide disposed on the first substrate to define a first optical path on the first substrate. The first waveguide is configured to guide light along the first optical path and to transmit, at an output section of the first waveguide, the light out of the first waveguide toward the second substrate. The system also comprises a second waveguide disposed on the second substrate to define a second optical path on the second substrate. An input section of the second waveguide is aligned with the output section of the first waveguide to receive the light transmitted by the first waveguide. The second waveguide is configured to guide the light along the second optical path.
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公开(公告)号：US20240103380A1
公开(公告)日：2024-03-28
申请号：US18526249
申请日：2023-12-01
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
CPC classification number: G03F7/702 , G02B6/4214
Abstract: The present disclosure relates to systems and methods relating to the fabrication of light guide elements. An example system includes an optical component configured to direct light emitted by a light source to illuminate a photoresist material at one or more desired angles so as to expose an angled structure in the photoresist material. The photoresist material overlays at least a portion of a first surface of a substrate. The optical component includes a container containing a light-coupling material that is selected based in part on the one or more desired angles. The system also includes a reflective surface arranged to reflect at least a first portion of the emitted light to illuminate the photoresist material at the one or more desired angles.
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公开(公告)号：US11275312B1
公开(公告)日：2022-03-15
申请号：US17107072
申请日：2020-11-30
Applicant: Waymo LLC
Inventor： James Dunphy , Hongqin Shi , David Hutchison , Yeh-Jiun Tung , Eric Copenhaver , Nao Chuei
IPC: G03F7/20
Abstract: The present application relates to contact immersion lithography systems and methods of their use. An example immersion lithography system includes a photomask substrate and at least one sensor disposed along a surface of the photomask substrate. The immersion lithography system also includes a controller having at least one processor and a memory. The at least one processor is configured to execute program instructions stored in the memory so as to carry out operations. The operations include receiving, from the at least one sensor, information indicative of an electric field proximate to the at least one sensor. The operations also include determining, based on the received information, at least one of: a thickness of a liquid layer adjacent to the photomask substrate or a distance to a further substrate adjacent to the photomask substrate.
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4.发明授权公开(公告)号：US11131929B2
公开(公告)日：2021-09-28
申请号：US16183728
申请日：2018-11-07
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
Abstract: Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example system may include an optical component configured to direct light from a light source to illuminate a photoresist material at a desired angle and to expose at least a portion of an angled structure in the photoresist material, where the photoresist material overlays at least a portion of a top surface of a substrate. The optical component includes a container containing an light-coupling material that is selected based in part on the desired angle. The optical component also includes a mirror arranged to reflect at least a portion of the light to illuminate the photoresist material at the desired angle.
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公开(公告)号：US20210124020A1
公开(公告)日：2021-04-29
申请号：US16667833
申请日：2019-10-29
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison , Pierre-Yves Droz , Yeh-Jiun Tung
Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.
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Patent Agency Ranking
公开(公告)号：US20230099679A1
公开(公告)日：2023-03-30
申请号：US18053255
申请日：2022-11-07
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
Abstract: The present disclosure relates to systems and methods relating to the fabrication of light guide elements. An example system includes an optical component configured to direct light emitted by a light source to illuminate a photoresist material at one or more desired angles so as to expose an angled structure in the photoresist material. The photoresist material overlays at least a portion of a first surface of a substrate. The optical component includes a container containing a light-coupling material that is selected based in part on the one or more desired angles. The system also includes a reflective surface arranged to reflect at least a first portion of the emitted light to illuminate the photoresist material at the one or more desired angles.
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公开(公告)号：US20210405536A1
公开(公告)日：2021-12-30
申请号：US17474779
申请日：2021-09-14
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
Abstract: The present disclosure relates to systems and methods relating to the fabrication of light guide elements. An example system includes an optical component configured to direct light emitted by a light source to illuminate a photoresist material at one or more desired angles so as to expose an angled structure in the photoresist material. The photoresist material overlays at least a portion of a first surface of a substrate. The optical component includes a container containing a light-coupling material that is selected based in part on the one or more desired angles. The system also includes a reflective surface arranged to reflect at least a first portion of the emitted light to illuminate the photoresist material at the one or more desired angles.
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公开(公告)号：US10746945B1
公开(公告)日：2020-08-18
申请号：US15727849
申请日：2017-10-09
Applicant: WAYMO LLC
Inventor： Pierre-yves Droz , Augusto Tazzoli , David Schleuning , Nathaniel Golshan , David Hutchison
Abstract: The present disclosure relates to systems and methods directed to alignment of light-emitting devices. An example method includes coupling a support substrate to a light guide assembly. The support substrate includes a plurality of elongate structures and a plurality of laser diodes. Each laser diode of the plurality of laser diodes is coupled to a respective elongate structure of the plurality of elongate structures. The method also includes causing a given laser diode of the plurality of laser diodes to emit light toward the light guide assembly. The light guide assembly includes a light guide manifold configured to guide at least a portion of the emitted light as transmitted light. The method additionally includes comparing at least one optical characteristic of the transmitted light to a desired optical characteristic and, based on the comparison, adjusting a position of the given laser diode by adjusting the respective elongate structure.
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公开(公告)号：US10605984B2
公开(公告)日：2020-03-31
申请号：US15366746
申请日：2016-12-01
Applicant: Waymo LLC
Inventor： Pierre-Yves Droz , David Hutchison
Abstract: The present disclosure relates to limitation of noise on light detectors using an aperture. One example implementation includes a system. The system includes a lens that focuses light from a scene toward a focal plane. The system also includes an aperture defined within an opaque material. The system also includes a plurality of waveguides. A given waveguide of the plurality has an input end that receives a portion of light transmitted through the aperture, and guides the received portion toward an output end of the given waveguide. A cross-sectional area of the guided portion at the output end is greater than a cross-sectional area of the received portion at the input end. The system also includes an array of light detectors that detects the guided light transmitted through the output end.
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公开(公告)号：US20200064473A1
公开(公告)日：2020-02-27
申请号：US16671399
申请日：2019-11-01
Applicant: Waymo LLC
Inventor： Pierre-Yves Droz , Blaise Gassend , Caner Onal , David Hutchison
Abstract: The present disclosure relates to limitation of noise on light detectors using an aperture. One example embodiment includes a system. The system includes a lens disposed relative to a scene and configured to focus light from the scene onto a focal plane. The system also includes an aperture defined within an opaque material disposed at the focal plane of the lens. The aperture has a cross-sectional area. In addition, the system includes an array of light detectors disposed on a side of the focal plane opposite the lens and configured to intercept and detect diverging light focused by the lens and transmitted through the aperture. A cross-sectional area of the array of light detectors that intercepts the diverging light is greater than the cross-sectional area of the aperture.
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