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54 条记录 (耗时 0.035 秒)

    Integrated electrostatic slider fly height control
    5.
    发明授权
    Integrated electrostatic slider fly height control 失效
    集成静电滑块飞行高度控制

    公开(公告)号：US06876509B2

    公开(公告)日：2005-04-05

    申请号：US10055448

    申请日：2002-01-23

    申请人： Wayne A. Bonin ,  Zine-Eddine Boutaghou

    发明人： Wayne A. Bonin ,  Zine-Eddine Boutaghou

    IPC分类号： G11B5/58 ,  G11B5/60 ,  G11B9/00 ,  G11B21/21 ,  G11B21/02

    CPC分类号： B82Y10/00 ,  G11B5/581 ,  G11B5/6005 ,  G11B9/1445 ,  G11B21/21

    摘要： A disc drive that includes a slider with a field emission sensor that senses fly height. The sensor has an electrode tip disposed on the slider. The electrode tip faces a media surface across a gap. The sensor conducts a tunneling current through the gap and provides an output representing the length of the gap. An actuator adjusts the fly height spacing. A feedback circuit provides an actuator electrical input as a feedback function of the sensor output to control the fly height spacing.

    摘要翻译： 磁盘驱动器，其包括具有感测飞行高度的场致发射传感器的滑块。 传感器具有设置在滑块上的电极头。 电极尖端跨越间隙面向介质表面。 传感器通过间隙传导隧穿电流，并提供表示间隙长度的输出。 执行器调节飞行高度间距。 反馈电路提供致动器电输入作为传感器输出的反馈功能以控制飞行高度间隔。

    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining
    6.
    发明授权
    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效
    用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片

    公开(公告)号：US06733681B1

    公开(公告)日：2004-05-11

    申请号：US09707698

    申请日：2000-11-07

    申请人： Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    发明人： Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    IPC分类号： B81C100

    CPC分类号： B81C1/00357 ,  B81C2201/019 ,  Y10T29/49025

    摘要： A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.

    摘要翻译： 用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。 在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。 因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。 还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。

    Method of fabricating electrically isolated metal MEMS beams and microactuator incorporating the MEMS beam
    7.
    发明授权
    Method of fabricating electrically isolated metal MEMS beams and microactuator incorporating the MEMS beam 有权
    制造电隔离金属MEMS光束的方法和结合MEMS光束的微型致动器

    公开(公告)号：US06674614B2

    公开(公告)日：2004-01-06

    申请号：US10037679

    申请日：2002-01-02

    申请人： Wayne A. Bonin ,  Lee Walter ,  Zine-Eddine Boutaghou

    发明人： Wayne A. Bonin ,  Lee Walter ,  Zine-Eddine Boutaghou

    IPC分类号： G11B2124

    CPC分类号： G11B5/5552

    摘要： A microactuator is formed by defining stator and rotor regions on a wafer. Isolation barriers are formed in the stator and rotor regions to define a isolation regions. Conductive suspension beam are formed between the first and second isolation regions, and wafer material between the stator and rotor regions is removed to form a stator and a rotor. The microactuator is arranged to position a load device having an electrical component. The suspension beams support the rotor and load device and provide electrical connection between the stator and rotor for the microactuator and/or the load device.

    摘要翻译： 通过在晶片上限定定子和转子区域来形成微致动器。 在定子和转子区域中形成隔离屏障，以限定隔离区域。 在第一和第二隔离区域之间形成导电悬架梁，并且去除定子和转子区域之间的晶片材料以形成定子和转子。 微型致动器布置成定位具有电气部件的负载装置。 悬架梁支撑转子和负载装置，并为微型致动器和/或负载装置提供定子和转子之间的电连接。

    Seal for micro-electro-mechanical devices
    8.
    发明授权
    Seal for micro-electro-mechanical devices 有权
    微电机械密封

    公开(公告)号：US06590747B1

    公开(公告)日：2003-07-08

    申请号：US09507136

    申请日：2000-02-18

    申请人： Zine-Eddine Boutaghou ,  Wayne A. Bonin

    发明人： Zine-Eddine Boutaghou ,  Wayne A. Bonin

    IPC分类号： G11B555

    CPC分类号： G11B5/5552

    摘要： A sealed micro-actuator device for positioning a slider in a disc drive comprises a micro-actuator body, which includes a stator, a rotor, and a motor for moving the rotor with respect to the stator. The micro-actuator device includes means for sealing the micro-actuator body to prevent debris from reaching the motor. In a preferred embodiment, the means for sealing comprises a plurality of cavities formed in the micro-actuator body and an injection molded polymer seal with a plurality of protrusions that extend into the plurality of cavities. A first subset of the plurality of protrusions make contact with the stator, thereby holding the means for sealing in place. A second subset of the plurality of protrusions extend into cavities formed in the rotor. The second subset of protrusions does not contact the rotor. In an alternative preferred embodiment, a first and a second surface of the rotor are recessed from a first and a second surface of the stator, and the means for sealing comprises a first flexible film heat sealed to the first surface of the stator and a second flexible film heat sealed to the second surface of the stator. In another alternative embodiment, a sealed actuator is incorporated into a slider of a disc drive. The slider comprises a slider body, a data transfer element, and an actuator. The data transfer element transfers data to or from a magnetic medium. The actuator is coupled between the slider body and the data transfer element. The actuator is operable to move the data transfer element relative to the slider body. The slider includes sealing means to prevent debris from reaching the actuator.

    摘要翻译： 用于将滑块定位在盘驱动器中的密封微致动器装置包括微致动器本体，其包括定子，转子和用于相对于定子移动转子的电动机。 微致动器装置包括用于密封微致动器主体以防止碎片到达马达的装置。 在优选实施例中，用于密封的装置包括形成在微致动器本体中的多个空腔和具有延伸到多个空腔中的多个突起的注塑聚合物密封件。 多个突起的第一子集与定子接触，从而将用于密封的装置保持在适当位置。 多个突起的第二子集延伸到形成在转子中的空腔中。 突起的第二子集不接触转子。 在替代的优选实施例中，转子的第一和第二表面从定子的第一和第二表面凹入，并且用于密封的装置包括热密封到定子的第一表面的第一柔性膜， 热定形的第二表面热密封的柔性薄膜。 在另一替代实施例中，将密封的致动器并入盘驱动器的滑块中。 滑块包括滑块体，数据传送元件和致动器。 数据传输元件将数据传送到磁介质或从磁介质传送数据。 致动器联接在滑块体和数据传送元件之间。 致动器可操作以相对于滑块体移动数据传送元件。 滑块包括密封装置，以防止碎屑到达致动器。

    Slider fly control
    10.
    发明授权
    Slider fly control 失效

    公开(公告)号：US07068449B2

    公开(公告)日：2006-06-27

    申请号：US10135734

    申请日：2002-04-30

    申请人： Jason W. Riddering ,  Wayne A. Bonin ,  Zine-Eddine Boutaghou

    发明人： Jason W. Riddering ,  Wayne A. Bonin ,  Zine-Eddine Boutaghou

    IPC分类号： G11B5/02 ,  G11B21/02

    CPC分类号： G11B5/6005 ,  G11B5/58 ,  G11B33/10

    摘要： A disc drive data storage system is disclosed that includes a disc storage medium having a disc surface. The system also includes an armature and a slider coupled to the armature. The slider supports a transducer head that communicates with the disc storage medium. The slider flies above the disc surface and positions the transducer head proximate the disc surface. Data representing a topography map of the disc surface is stored in a memory. A controller controls the fly height of the slider above the disc surface as a function of the topography map of the disc surface.