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公开(公告)号：US07647842B1
公开(公告)日：2010-01-19
申请号：US12180070
申请日：2008-07-25
IPC分类号： G01F1/38
摘要： A volumetric fluid flow sensor (100) includes a flow channel (120) for flowing a fluid therein; and a diaphragm (110) having an outer surface within the flow channel (120). The diaphragm (110) includes at least one flow disrupting feature mechanically coupled to or emerging from the outer surface of the diaphragm (110). A sensing structure (126) is coupled to the diaphragm (110) for generating a sensing signal responsive to a pressure signal on the diaphragm (110).
摘要翻译： 体积流体流量传感器（100）包括用于在其中流动流体的流动通道（120） 以及在所述流动通道（120）内具有外表面的隔膜（110）。 隔膜（110）包括至少一个机械耦合到隔膜（110）的外表面或从隔膜的外表面出来的流动干扰特征。 感测结构（126）耦合到隔膜（110），用于响应于隔膜（110）上的压力信号产生感测信号。
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公开(公告)号：US20100018324A1
公开(公告)日：2010-01-28
申请号：US12180070
申请日：2008-07-25
IPC分类号： G01F1/38
摘要： A volumetric fluid flow sensor (100) includes a flow channel (120) for flowing a fluid therein; and a diaphragm (110) having an outer surface within the flow channel (120). The diaphragm (110) includes at least one flow disrupting feature mechanically coupled to or emerging from the outer surface of the diaphragm (110). A sensing structure (126) is coupled to the diaphragm (110) for generating a sensing signal responsive to a pressure signal on the diaphragm (110).
摘要翻译： 体积流体流量传感器（100）包括用于在其中流动流体的流动通道（120） 以及在所述流动通道（120）内具有外表面的隔膜（110）。 隔膜（110）包括至少一个机械耦合到隔膜（110）的外表面或从隔膜的外表面出来的流动干扰特征。 感测结构（126）耦合到隔膜（110），用于响应于隔膜（110）上的压力信号产生感测信号。
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公开(公告)号：US20100212434A1
公开(公告)日：2010-08-26
申请号：US12779657
申请日：2010-05-13
CPC分类号： G01L19/0023 , G01F1/363 , G01F1/48 , Y10T29/49002 , Y10T29/49826
摘要： A flow sensor apparatus that utilizes a pressure sensor with media isolated electrical connections. A cap can be attached to topside of the pressure sensor over a diaphragm to protect bond pads and wire bonds from a fluid media. A flow channel can be etched on the cap with an opening and exit on the sides of the cap so that liquid can flow through the flow channel. An inlet port and an outlet port can be attached to the channel's opening and exit to allow for fluid flow over the diaphragm. The flow channel creates a larger pressure over portions of the diaphragm that increases the deflection of the diaphragm, which increases an output signal of the pressure sensor. V-grooves can be created on two sides of the pressure sensor and in the cap to create the channel for the fluid in and out of the cap's cavity.
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4.发明申请公开(公告)号：US20100122580A1
公开(公告)日：2010-05-20
申请号：US12273912
申请日：2008-11-19
IPC分类号： G01L7/00
CPC分类号： G01L19/0023 , G01F1/363 , G01F1/48 , Y10T29/49002 , Y10T29/49826
摘要： A flow sensor apparatus that utilizes a pressure sensor with media isolated electrical connections. A cap can be attached to topside of the pressure sensor over a diaphragm to protect bond pads and wire bonds from a fluid media. A flow channel can be etched on the cap with an opening and exit on the sides of the cap so that liquid can flow through the flow channel. An inlet port and an outlet port can be attached to the channel's opening and exit to allow for fluid flow over the diaphragm. The flow channel creates a larger pressure over portions of the diaphragm that increases the deflection of the diaphragm, which increases an output signal of the pressure sensor. V-grooves can be created on two sides of the pressure sensor and in the cap to create the channel for the fluid in and out of the cap's cavity.
摘要翻译： 一种使用具有介质隔离电气连接的压力传感器的流量传感器装置。 盖可以通过隔膜连接到压力传感器的顶部，以保护接合垫和引线接合与流体介质。 可以在盖上蚀刻流动通道，其开口和出口在盖的侧面上，使得液体可以流过流动通道。 入口和出口可以连接到通道的开口和出口，以允许流体流过隔膜。 流动通道在膜片的部分上产生较大的压力，这增加了膜片的偏转，这增加了压力传感器的输出信号。 可以在压力传感器和盖子的两侧上形成V形槽，以形成流体进出盖体腔体的通道。
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5.发明授权Flow sensor apparatus and method with media isolated electrical connections 有权具有介质隔离电气连接的流量传感器装置和方法公开(公告)号：US08033180B2
公开(公告)日：2011-10-11
申请号：US12779657
申请日：2010-05-13
IPC分类号： G01L7/00
CPC分类号： G01L19/0023 , G01F1/363 , G01F1/48 , Y10T29/49002 , Y10T29/49826
摘要： A flow sensor apparatus that utilizes a pressure sensor with media isolated electrical connections. A cap can be attached to topside of the pressure sensor over a diaphragm to protect bond pads and wire bonds from a fluid media. A flow channel can be etched on the cap with an opening and exit on the sides of the cap so that liquid can flow through the flow channel. An inlet port and an outlet port can be attached to the channel's opening and exit to allow for fluid flow over the diaphragm. The flow channel creates a larger pressure over portions of the diaphragm that increases the deflection of the diaphragm, which increases an output signal of the pressure sensor. V-grooves can be created on two sides of the pressure sensor and in the cap to create the channel for the fluid in and out of the cap's cavity.
摘要翻译： 一种使用具有介质隔离电气连接的压力传感器的流量传感器装置。 盖可以通过隔膜连接到压力传感器的顶部，以保护接合垫和引线接合与流体介质。 可以在盖上蚀刻流动通道，其开口和出口在盖的侧面上，使得液体可以流过流动通道。 入口和出口可以连接到通道的开口和出口，以允许流体流过隔膜。 流动通道在膜片的部分上产生较大的压力，这增加了膜片的偏转，这增加了压力传感器的输出信号。 可以在压力传感器和盖子的两侧上形成V形槽，以形成流体进出盖体腔体的通道。
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公开(公告)号：US20110252882A1
公开(公告)日：2011-10-20
申请号：US12762797
申请日：2010-04-19
CPC分类号： G01F1/6845 , G01F15/14 , Y10T29/49002
摘要： A robust sensor, such as a robust flow sensor or pressure sensor, is provided. In one illustrative embodiment, a robust flow sensor includes one or more flow sensor components secured relative to a membrane, and a substrate for supporting the membrane. In some cases, the one or more flow sensor components may be substantially thermally isolated from the substrate by the membrane. One or more wire bond pads may be situated adjacent to a first side of the substrate and may be provided for communicating signals relative to the one or more flow sensor components. A top cap may be situated adjacent to the first side of the substrate and secured relative to the substrate. The top cap may define at least part of a fluid inlet and/or an outlet of the flow sensor assembly, and may at least partially define a flow channel that extends from the inlet, past at least one of the one or more flow sensor components, and out the outlet of the flow sensor assembly. The top cap may be structured and attached relative to the first side of the substrate such that the one or more wire bond pads are not exposed to a fluid in the flow channel, but are accessible for electrical connection to an external device. While a flow sensor is used as an example, it is contemplated that any suitable sensor may be used, as desired.
摘要翻译： 提供鲁棒的传感器，例如鲁棒的流量传感器或压力传感器。 在一个说明性实施例中，坚固的流量传感器包括相对于膜固定的一个或多个流量传感器部件和用于支撑膜的基板。 在一些情况下，一个或多个流量传感器组件可以通过膜与衬底基本上热隔离。 一个或多个引线接合焊盘可以位于与衬底的第一侧相邻的位置，并且可被设置用于相对于一个或多个流量传感器部件传送信号。 顶盖可以位于邻近衬底的第一侧并相对于衬底固定。 顶盖可以限定流量传感器组件的流体入口和/或出口的至少一部分，并且可以至少部分地限定从入口延伸通过一个或多个流量传感器部件中的至少一个的流动通道 ，并从流量传感器组件的出口排出。 顶盖可以相对于基板的第一侧被构造和附接，使得一个或多个引线接合焊盘不暴露于流动通道中的流体，而是可访问以用于与外部设备的电连接。 虽然使用流量传感器作为示例，但是可以设想，可以根据需要使用任何合适的传感器。
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7.发明授权Flow sensor apparatus and method with media isolated electrical connections 有权具有介质隔离电气连接的流量传感器装置和方法公开(公告)号：US07765872B2
公开(公告)日：2010-08-03
申请号：US12273912
申请日：2008-11-19
IPC分类号： G01L7/00
CPC分类号： G01L19/0023 , G01F1/363 , G01F1/48 , Y10T29/49002 , Y10T29/49826
摘要： A flow sensor apparatus that utilizes a pressure sensor with media isolated electrical connections. A cap can be attached to topside of the pressure sensor over a diaphragm to protect bond pads and wire bonds from a fluid media. A flow channel can be etched on the cap with an opening and exit on the sides of the cap so that liquid can flow through the flow channel. An inlet port and an outlet port can be attached to the channel's opening and exit to allow for fluid flow over the diaphragm. The flow channel creates a larger pressure over portions of the diaphragm that increases the deflection of the diaphragm, which increases an output signal of the pressure sensor. V-grooves can be created on two sides of the pressure sensor and in the cap to create the channel for the fluid in and out of the cap's cavity.
摘要翻译： 一种使用具有介质隔离电气连接的压力传感器的流量传感器装置。 盖可以通过隔膜连接到压力传感器的顶部，以保护接合垫和引线接合与流体介质。 可以在盖上蚀刻流动通道，其开口和出口在盖的侧面上，使得液体可以流过流动通道。 入口和出口可以连接到通道的开口和出口，以允许流体流过隔膜。 流动通道在膜片的部分上产生较大的压力，这增加了膜片的偏转，这增加了压力传感器的输出信号。 可以在压力传感器和盖子的两侧上形成V形槽，以形成流体进出盖体腔体的通道。
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公开(公告)号：US07278309B2
公开(公告)日：2007-10-09
申请号：US11366653
申请日：2006-03-01
申请人： Anthony M. Dmytriw , Wayne T. Kilian , Jamie W. Speldrich , Scott Edward Beck , Gilberto Morales , Richard William Gehman
发明人： Anthony M. Dmytriw , Wayne T. Kilian , Jamie W. Speldrich , Scott Edward Beck , Gilberto Morales , Richard William Gehman
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/688
摘要： A sensor apparatus includes a heating element comprising an upstream side and a downstream side. A first heat sensing set is generally configured adjacent to the upstream side of the heating element and comprises a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern. A second heat sensing set can be configured adjacent to the downstream side of the heating element and comprises a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern.
摘要翻译： 传感器装置包括加热元件，该加热元件包括上游侧和下游侧。 第一感测组件通常配置成与加热元件的上游侧相邻，并且包括第一感测元件和第二感测元件，第一和第二感测元件被构造成蛇形，交错图案。 第二感测组可以被配置成与加热元件的下游侧相邻，并且包括第三感测元件和第四感测元件，第三和第四感测元件被构造成蛇形，叉指形式。
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公开(公告)号：US20120180563A1
公开(公告)日：2012-07-19
申请号：US13006397
申请日：2011-01-13
申请人： Yong-Fa Wang , Scott Edward Beck
发明人： Yong-Fa Wang , Scott Edward Beck
CPC分类号： G01F1/6845 , G01F1/692
摘要： Improved sensors are disclosed that include a heater resistor and/or one or more sensor resistors. In some instances, the heater resistor may be configured to have a zero or near-zero temperature coefficient of resistance (TCR), while one or more sensor resistors may be configured to have a non-zero higher TCR. In some instances, the heater resistor may include a polysilicon material that is doped with a first concentration of dopant, and the one or more sensing elements may include a polysilicon material that is doped with a second higher concentration of dopant. In some cases, the first concentration of dopant may be configured to provide a heater resistor that has a zero or near-zero temperature coefficient of resistance (TCR).
摘要翻译： 公开了改进的传感器，其包括加热电阻器和/或一个或多个传感器电阻器。 在一些情况下，加热电阻器可以被配置为具有零或接近零的电阻温度系数（TCR），而一个或多个传感器电阻器可被配置为具有非零较高的TCR。 在一些情况下，加热电阻器可以包括掺杂有第一浓度掺杂剂的多晶硅材料，并且一个或多个感测元件可以包括掺杂有第二较高浓度掺杂剂的多晶硅材料。 在一些情况下，掺杂剂的第一浓度可被配置成提供具有零或近零电阻温度系数（TCR）的加热电阻器。
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公开(公告)号：US20110226052A1
公开(公告)日：2011-09-22
申请号：US12729173
申请日：2010-03-22
申请人： Jamie Speldrich , Scott Edward Beck , Phil Foster , Ru Wang
发明人： Jamie Speldrich , Scott Edward Beck , Phil Foster , Ru Wang
IPC分类号： G01F1/688
CPC分类号： G01F15/125 , B01D17/10 , G01F1/36 , G01F1/40 , G01F1/684 , G01F1/6842
摘要： The present disclosure relates generally to sensors, and more particularly, to methods and devices for reducing moisture, dust, particulate matter, and/or other contaminates entering a sensor. In one illustrative embodiment, a sensor assembly includes a housing with an inlet flow port and an outlet flow port. The housing defines a fluid channel extending between the inlet flow port and the outlet flow port, with a sensor positioned in the housing and exposed to the fluid channel. The illustrative sensor is configured to sense a measure related to the flow rate of a fluid flowing through the fluid channel. A hydrophobic filter may be situated in the fluid channel, sometimes upstream of the sensor. When so configured, and during operation of the sensor assembly, a fluid may pass through the inlet flow port, through the hydrophobic filter, across the sensor, and through the outlet flow port. The hydrophobic filter may be configured to reduce the moisture entering the fluid channel of the sensor.
摘要翻译： 本公开一般涉及传感器，更具体地，涉及用于减少进入传感器的湿气，灰尘，颗粒物质和/或其它污染物的方法和装置。 在一个说明性实施例中，传感器组件包括具有入口流动端口和出口流动端口的壳体。 壳体限定在入口流动端口和出口流动端口之间延伸的流体通道，传感器定位在壳体中并暴露于流体通道。 说明性传感器被配置为感测与流过流体通道的流体的流量相关的测量。 疏水过滤器可以位于流体通道中，有时位于传感器的上游。 当这样构造并且在传感器组件的操作期间，流体可以穿过入口流动端口，穿过疏水过滤器，穿过传感器，并且通过出口流动端口。 疏水过滤器可以被配置为减少进入传感器的流体通道的湿气。
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