公开(公告)号：US06616332B1

公开(公告)日：2003-09-09

申请号：US09442413

申请日：1999-11-18

申请人： Wayne Renken ,  Mei H. Sun ,  Arwa Ginwalla

发明人： Wayne Renken ,  Mei H. Sun ,  Arwa Ginwalla

IPC分类号： G01K1112

CPC分类号： G01K11/12

摘要： A sensor of a parameter such as temperature includes an indicator encapsulated within a rigid enclosure, wherein the sensor has a characteristic that varies with the parameter that is detectable upon illumination with electromagnetic radiation through a window of the enclosure that is transparent to the radiation. In a specific example, the indicator changes an optical characteristic such as its color as a function of its temperature, and may be of an irreversible type in order to indicate the peak temperature reached. The sensor may include a pattern of such indicators that have different peak temperatures to which they respond, so that the sensor gives a unique visual pattern at each temperature within its measurement range. This pattern may be viewed directly or processed by computer to compare the pattern with those which indicate known temperatures. The sensor and system utilizing it have particular advantages for operation in a vacuum, and/or under ion bombardment, such occurs in plasma etching and deposition machines, and/or within a strong electromagnetic field, such as within the radio frequency and microwave frequency ranges. An array of such sensors positioned across a surface of a thermally conductive substrate is especially useful for measuring a temperature distribution occurring across semiconductor wafers in wafer processing machinery.

摘要翻译： 诸如温度的参数的传感器包括封装在刚性外壳内的指示器，其中传感器具有随着通过对辐射透明的外壳的窗口的电磁辐射照射时可检测的参数而变化的特性。 在具体示例中，指示器将光学特性如其颜色改变为其温度的函数，并且可以是不可逆类型以便指示达到的峰值温度。 传感器可以包括这样的指示器的图案，其具有与其响应的不同峰值温度，使得传感器在其测量范围内的每个温度下给出独特的视觉图案。 该模式可以直接观看或由计算机处理，以将模式与指示已知温度的模式进行比较。 利用它的传感器和系统具有在真空中和/或离子轰击下操作的特殊优点，例如在等离子体蚀刻和沉积机器中和/或在强电磁场（例如在射频和微波频率范围内） 。 定位在导热基板的表面上的这种传感器的阵列特别适用于测量在晶片加工机械中跨半导体晶片发生的温度分布。

公开(公告)号：US20100294051A1

公开(公告)日：2010-11-25

申请号：US12787326

申请日：2010-05-25

申请人： Wayne G. Renken ,  Mei H. Sun

发明人： Wayne G. Renken ,  Mei H. Sun

IPC分类号： G01M19/00 ,  H05K3/00

CPC分类号： G01D9/005 ,  H01L21/67253 ,  H01L22/34 ,  H01L2224/48091 ,  Y10T29/4913 ,  H01L2924/00014

摘要： A measuring device incorporating a substrate with sensors that measure the processing conditions that a wafer may undergo during manufacturing. The substrate can be inserted into a processing chamber by a robot head and the measuring device can transmit the conditions in real time or store the conditions for subsequent analysis. Sensitive electronic components of the device can be distanced or isolated from the most deleterious processing conditions in order increase the accuracy, operating range, and reliability of the device. Isolation may be provided by vacuum or suitable material and phase change material may be located adjacent to electronics to maintain a low temperature.

摘要翻译： 一种测量装置，其包括具有测量晶片在制造期间可能经历的加工条件的传感器的基板。 基板可以通过机器人头插入处理室，并且测量装置可以实时地传送条件或存储用于后续分析的条件。 设备的敏感电子元件可以远离或与最有害的处理条件隔离，以提高设备的精度，操作范围和可靠性。 可以通过真空或合适的材料提供隔离，并且相变材料可以位于电子设备附近以保持低温。

公开(公告)号：US06190040B1

公开(公告)日：2001-02-20

申请号：US09307667

申请日：1999-05-10

申请人： Wayne G. Renken ,  Mei H. Sun

发明人： Wayne G. Renken ,  Mei H. Sun

IPC分类号： G01K702

CPC分类号： H01L21/67248 ,  G01K1/026 ,  G01K1/143

摘要： A cable and interconnect design including a substrate containing discrete sensors in a plurality of cavities or a plurality of thin film sensors deposited throughout the substrate surface. The discrete sensors are bonded within each cavity and potted with a potting compound. Each sensor has leads joined to filaments by an interconnect system. Thin film sensor leads on the substrate connect to a signal transmitting cable by the interconnect system. The filaments are coated and converge at a strain relief coupled to the substrate. The cable, having flat and round portions, includes an array of flat signal transmitting cables arranged side by side in the flat portion and stacked one on top of the other in the round portion. Each signal cable contains a plurality of the filaments bonded together. A pair of ribbons extend along the length of the array of cables. The ribbons and array of cables are bonded together with film to form the flat portion. The ribbons are joined to the strain relief, thereby joining the cable to the substrate. A boot is disposed around the cable transition between the flat and round portions. A connector is coupled to the round portion and the filaments are terminated to the connector. Advantages include the interconnect system bonding pads which reduce fabrication time and provide simple connection geometry on the substrate. Integration of the ribbons into the flat portion allows repeated use in a vacuum seal without damaging the cables. Stacked flat cables make identification of the filaments easy and product assembly fast.

摘要翻译： 一种电缆和互连设计，其包括在多个空腔中包含离散传感器的基板或沉积在整个基板表面上的多个薄膜传感器。 离散的传感器在每个腔内结合并用灌封组合物灌装。 每个传感器具有通过互连系统连接到细丝的引线。 基板上的薄膜传感器引线通过互连系统连接到信号传输电缆。 长丝被涂覆并在与基底耦合的应变释放物上会聚。 具有扁圆形部分的电缆包括在平坦部分中并排布置并且在圆形部分中彼此层叠的扁平信号传输电缆阵列。 每个信号电缆包含多个连接在一起的长丝。 一对带沿电缆阵列的长度延伸。 带子和电缆阵列用薄膜粘合在一起以形成平坦部分。 带被连接到应变消除件，从而将电缆连接到基板。 在平坦部分和圆形部分之间的电缆过渡处布置引导件。 连接器连接到圆形部分，并且细丝终止于连接器。 优点包括互连系统接合焊盘，其减少制造时间并且在衬底上提供简单的连接几何形状。 将带状物整合到平坦部分中允许重复使用在真空密封中而不损坏电缆。 堆叠扁平电缆使灯丝的识别容易，产品组装快速。

公开(公告)号：US5109595A

公开(公告)日：1992-05-05

申请号：US678704

申请日：1991-04-01

申请人： Kenneth A. Wickersheim ,  Mei H. Sun ,  James H. Kim

发明人： Kenneth A. Wickersheim ,  Mei H. Sun ,  James H. Kim

IPC分类号： G01K17/00 ,  G01R1/07 ,  G01R21/02 ,  G01R29/08

CPC分类号： G01R1/071 ,  G01K17/003 ,  G01R21/02 ,  G01R29/0885 ,  Y10T29/49016

摘要： Fiberoptic sensors of various configurations are provided for measuring the magnitude of the electric or magnetic fields, and thereby the power, at local points within a relatively high-power electromagnetic heating environment such as occurs, for example, in a microwave oven or an industrial microwave processing chamber. Each type of sensor includes one element that is heated by either the oscillating electric or magnetic field, and an optical temperature measuring element positioned to be heated by the first element, its temperature being optically determined by an instrument to which an opposite end of the optical fiber length is connected.

摘要翻译： 提供各种配置的光纤传感器用于测量电场或磁场的大小，从而在相对高功率的电磁加热环境内的本地点（例如在微波炉或工业微波中发生） 处理室。 每种类型的传感器包括被振荡电场或磁场加热的一个元件和定位成由第一元件加热的光学温度测量元件，其温度由光学器件确定，仪器的相对端 光纤长度连接。

公开(公告)号：US5107445A

公开(公告)日：1992-04-21

申请号：US621900

申请日：1990-12-04

申请人： Earl M. Jensen ,  Mei H. Sun ,  David L. Vecht ,  Robert E. Melen

发明人： Earl M. Jensen ,  Mei H. Sun ,  David L. Vecht ,  Robert E. Melen

IPC分类号： A61B5/01 ,  G01K11/20 ,  G01K11/32

CPC分类号： G01K11/3213

摘要： A luminescence-based integrated optical and electronic system for measuring temperature or some other parameter from the decay time of a luminescent sensor is disclosed. A high bandwidth, low noise amplifier applies a detected decaying luminescent signal to a digital system that acquires that signal and processes it in order to determine its decay time characteristics that are related to temperature or another parameter being measured. The digital signal processing includes use of a digital curve-fitting technique. A preferred luminescent material for temperature measurement is a chromium-doped yttrium gallium garnet material. The entire optical and electronic portions of the measuring system can be accommodated on a small single circuit card.

摘要翻译： 公开了一种用于从发光传感器的衰减时间测量温度或某些其它参数的基于发光的集成光学和电子系统。 高带宽低噪声放大器将检测到的衰减发光信号应用于获取该信号并进行处理的数字系统，以便确定其与温度相关的衰减时间特性或正被测量的另一参数。 数字信号处理包括使用数字曲线拟合技术。 用于温度测量的优选发光材料是掺杂铬的钇镓石榴石材料。 测量系统的整个光学和电子部分可以被容纳在小的单个电路卡上。

公开(公告)号：US08033190B2

公开(公告)日：2011-10-11

申请号：US12787326

申请日：2010-05-25

申请人： Wayne G. Renken ,  Mei H. Sun

发明人： Wayne G. Renken ,  Mei H. Sun

IPC分类号： G01D7/02

CPC分类号： G01D9/005 ,  H01L21/67253 ,  H01L22/34 ,  H01L2224/48091 ,  Y10T29/4913 ,  H01L2924/00014

摘要： A measuring device incorporating a substrate with sensors that measure the processing conditions that a wafer may undergo during manufacturing. The substrate can be inserted into a processing chamber by a robot head and the measuring device can transmit the conditions in real time or store the conditions for subsequent analysis. Sensitive electronic components of the device can be distanced or isolated from the most deleterious processing conditions in order increase the accuracy, operating range, and reliability of the device. Isolation may be provided by vacuum or suitable material and phase change material may be located adjacent to electronics to maintain a low temperature.

摘要翻译： 一种测量装置，其包括具有测量晶片在制造期间可能经历的加工条件的传感器的基板。 基板可以通过机器人头插入处理室，并且测量装置可以实时地传送条件或存储用于后续分析的条件。 设备的敏感电子元件可以远离或与最有害的处理条件隔离，以提高设备的精度，操作范围和可靠性。 可以通过真空或合适的材料提供隔离，并且相变材料可以位于电子设备附近以保持低温。

公开(公告)号：US07924408B2

公开(公告)日：2011-04-12

申请号：US11690813

申请日：2007-03-24

申请人： Tony DiBiase ,  Mei H. Sun ,  Mark Wiltse

发明人： Tony DiBiase ,  Mei H. Sun ,  Mark Wiltse

IPC分类号： G03B27/58 ,  G03B27/32

CPC分类号： G03F7/70875 ,  G03F7/70633

摘要： A method for reducing overlay error in a photolithographic process, by providing a substrate having a permanent layer with a first pattern disposed therein, coating the substrate with photoresist, exposing the photoresist to a second pattern, while measuring temperatures at a plurality of different first positions across the substrate, developing the second pattern in the photoresist, measuring overlay errors between the first and second patterns at a plurality of different second positions across the substrate, correlating the overlay errors with temperatures by position on the substrate, determining any relationship indicated between the correlated overlay errors and temperatures, and adjusting at least one temperature controlling aspect of the photolithographic process in response to any relationship determined.

摘要翻译： 一种通过提供具有设置在其中的具有第一图案的永久层的基板的衬底，用光致抗蚀剂涂覆衬底，将光致抗蚀剂暴露于第二图案，同时测量多个不同的第一位置处的温度的方法，用于减小光刻工艺中的覆盖误差的方法 跨越衬底，在光致抗蚀剂中显影第二图案，测量穿过衬底的多个不同第二位置处的第一和第二图案之间的重叠误差，将重叠误差与衬底上的位置的温度相关联，确定在衬底上指示的任何关系 相关重叠误差和温度，以及响应于确定的任何关系调整光刻工艺的至少一个温度控制方面。

公开(公告)号：US07698952B2

公开(公告)日：2010-04-20

申请号：US11861119

申请日：2007-09-25

申请人： Wayne G. Renken ,  Mei H. Sun ,  Aron Abramowski Mason ,  Lynn Karl Wiese

发明人： Wayne G. Renken ,  Mei H. Sun ,  Aron Abramowski Mason ,  Lynn Karl Wiese

IPC分类号： G01L1/00

CPC分类号： G01L9/0073

摘要： At least one pair of capacitively coupled electrodes contained in a structure is used to sense the deflection of a diaphragm in a pressure or force sensor for measuring the pressure or force exerted on the diaphragm. Preferably the structure has properties (such as one or more of the following: dimensions, hardness, area and flexibility) that are substantially the same as those of a real substrate, such as a semiconductor wafer or flat panel display panel.

摘要翻译： 使用包含在结构中的至少一对电容耦合电极来感测用于测量施加在隔膜上的压力或力的压力或力传感器中的隔膜的偏转。 优选地，结构具有与诸如半导体晶片或平板显示面板的实际基板的特性（例如尺寸，硬度，面积和柔性）相同的性质（诸如以下的一个或多个）。

公开(公告)号：US06915589B2

公开(公告)日：2005-07-12

申请号：US10688300

申请日：2003-10-16

申请人： Mei H. Sun ,  Richard Schwaninger ,  Wayne G. Renken

发明人： Mei H. Sun ,  Richard Schwaninger ,  Wayne G. Renken

IPC分类号： G01D20060101 ,  G01D11/30 ,  G01D21/00

CPC分类号： G01D11/30

摘要： Multiple sensors may be attached to a substrate to measure conditions at different points. Positioning the sensors accurately may be achieved using a template to establish sensor position. A pre-fabricated kit including a template, sensors and a cable assembly may be easily transported so that sensors may be attached in the field.

公开(公告)号：US4988212A

公开(公告)日：1991-01-29

申请号：US396996

申请日：1989-08-22

申请人： Mei H. Sun ,  Kenneth A. Wickersheim ,  Stanley O. Heinemann

发明人： Mei H. Sun ,  Kenneth A. Wickersheim ,  Stanley O. Heinemann

IPC分类号： G01D5/26 ,  G01K11/32

CPC分类号： G01K11/3213 ,  G01D5/268 ,  G01N21/431

摘要： Several specific types of optical sensors capable of measuring temperature, pressure, force, acceleration, radiation and electrical fields, fluid level, vapor pressure, and the like, are disclosed, along with an electro-optical system for detecting the optical signal developed by the sensor. One such probe utilizes a convex shaped structure consisting of an elastomeric material attached to an end of an optical fiber, the elastomeric material being coated with a luminescent material, a combination that is capable of measuring both temperature and pressure. Such a probe is also specifically adapted for measuring surface temperature by making a good physical contact with the surface being measured. Another such probe utilizes a similar structure but of a non-elastomeric material for the purpose of detecting both temperature and either index of refraction or vapor pressure changes. Improvements in other existing sensors of a wide variety of physical parameters other than temperature are also described wherein temperature is simultaneously measured for correcting such physical parameter measurements that are affected by temperature variations.

摘要翻译： 公开了能够测量温度，压力，力，加速度，辐射和电场，液位，蒸汽压力等的几种特定类型的光学传感器，以及用于检测由该光学系统开发的光信号的电光系统 传感器。 一种这样的探针利用由连接到光纤端部的弹性体材料组成的凸形结构，弹性体材料涂覆有发光材料，能够测量温度和压力的组合。 这种探针也特别适于通过与所测量的表面良好的物理接触来测量表面温度。 另一种这样的探针使用类似的结构，但是使用非弹性材料，以便检测温度和折射率或蒸汽压力变化。 还描述了除温度以外的各种物理参数的其它现有传感器的改进，其中同时测量温度以校正受温度变化影响的这种物理参数测量。