公开(公告)号：US06389106B1

公开(公告)日：2002-05-14

申请号：US09555819

申请日：2000-07-28

申请人： Willi Neff ,  Rainer Lebert ,  Guido Schriever ,  Klaus Bergmann

发明人： Willi Neff ,  Rainer Lebert ,  Guido Schriever ,  Klaus Bergmann

IPC分类号： H01J3500

CPC分类号： H05G2/003 ,  G03F7/70033 ,  H05H1/48

摘要： A method and a device for generating extreme ultraviolet (EUV) and soft x-ray radiation from a gas discharge. The device has at least two electrodes each having a flush opening by which an axis of symmetry is defined, in which an intermediate space with a wide spatial homogenous gas filling between anode and cathode is provided. The electrodes are formed in such a way, that the gas discharge is formed exclusively in the volume defined by the flush openings. The current pulses with respect to amplitude and period duration are selected in such a way that a dense hot plasma channel is formed on the axis of symmetry, the plasma being the source of EUV and/or soft x-ray radiation. The preferred area of application is the EUV projection lithography in the spectral range around 13 nm.

摘要翻译： 一种用于从气体放电产生极紫外（EUV）和软X射线辐射的方法和装置。 该装置具有至少两个电极，每个电极具有齐平的开口，通过该开口限定对称轴，其中提供了在阳极和阴极之间填充宽空间均匀气体的中间空间。 电极以这样的方式形成，即气体排出仅在由冲洗开口限定的体积中形成。 选择相对于振幅和周期持续时间的电流脉冲，使得在对称轴上形成致密的热等离子体通道，等离子体是EUV和/或软X射线辐射源。 优选的应用领域是在约13nm的光谱范围内的EUV投影光刻。

公开(公告)号：US06788763B1

公开(公告)日：2004-09-07

申请号：US10019475

申请日：2002-08-09

申请人： Willi Neff ,  Rainer Lebert ,  Klaus Bergmann ,  Oliver Rosier

发明人： Willi Neff ,  Rainer Lebert ,  Klaus Bergmann ,  Oliver Rosier

IPC分类号： G21G400

CPC分类号： H05G2/003 ,  G03F7/70033

摘要： The invention relates to a device for generating extreme ultraviolet and soft x-rays from a gas discharge, operated on the left-hand branch of the Paschen curve. There are two main electrodes, between which there is a gas-filled space, and each main electrode exhibits an opening, by means of which an axis of symmetry [(5)] is defined; and there are means to increase the conversion efficiency. Preferred fields of application are those requiring extreme ultraviolet (EUV) radiation or soft x-rays at a wavelength ranging from approximately 1 to 20 nm, and in particular around 13 nm, such as in EUV lithography.

摘要翻译： 本发明涉及一种用于从气体放电产生极紫外和软X射线的装置，其在帕邢曲线的左手分支上操作。 存在两个主电极，其间有气体填充的空间，并且每个主电极具有开口，通过该开口定义对称轴[（5）]; 并且有提高转换效率的方法。 优选的应用领域是那些需要极紫外（EUV）辐射或在约1至20nm，特别是约13nm的波长范围内的软x射线，例如在EUV光刻中。

公开(公告)号：US5023897A

公开(公告)日：1991-06-11

申请号：US568193

申请日：1990-08-16

申请人： Willi Neff ,  Raymond Holz ,  Rainer Lebert ,  Franz Richter

发明人： Willi Neff ,  Raymond Holz ,  Rainer Lebert ,  Franz Richter

IPC分类号： H05H1/48 ,  G03F7/20 ,  H05G2/00 ,  H05H1/24

CPC分类号： H05G2/003 ,  G03F7/70033 ,  H05H1/52

摘要： The invention is an improvement in a device for generating X-radiation with a plasma source. In the device, two concentric cylindrical electrodes (11, 12) are separated by an evacuated discharge space (13) filled with low-pressure gas. When the inner electrode is momentarily raised to an extremely high voltage, the gas is ionized and a plasma shock wave (17, 17') is created and compressed into a plasma focus (21) emitting X-radiation (20). The improvement introduces a first ("discharge") gas into the discharge space for initiation of the plasma, while introducing a second ("emitting") gas into the inner electrode for generating the X-radiation in the plasma focus. Special features of the improved device include a plurality of gas extraction ports, which can be used independently or together, and which can be combined with variations in the introduction and flow of the two gases to control the movement and intermixture of the gases and, thereby, the operation of the device. Also, the device introduces a third gas for improving the transmission of the X-radiation from the generating plasma focus to a work station for X-ray microscopy or for X-ray lithography.

摘要翻译： 本发明是用于产生具有等离子体源的X射线的装置的改进。 在该装置中，两个同心圆柱形电极（11,12）由填充有低压气体的抽空放电空间（13）分开。 当内部电极瞬间升高到极高的电压时，气体被离子化，产生等离子体冲击波（17,17'）并压缩成发射X射线的等离子体焦点（21）（20）。 该改进将第一（“放电”）气体引入到放电空间中以引发等离子体，同时将第二（“发射”）气体引入内部电极中，以在等离子体焦点中产生X射线。 改进的装置的特征包括多个气体提取口，其可以独立地或一起使用，并且可以与两种气体的引入和流动的变化相结合以控制气体的运动和混合，从而 ，设备的操作。 此外，该装置引入第三气体，用于改善从产生等离子体焦点的X射线的透射到用于X射线显微镜或X射线光刻的工作站。

公开(公告)号：US06967341B2

公开(公告)日：2005-11-22

申请号：US10473906

申请日：2002-03-21

申请人： Willi Neff ,  Klaus Bergmann ,  Oliver Rosier ,  Joseph Pankert

发明人： Willi Neff ,  Klaus Bergmann ,  Oliver Rosier ,  Joseph Pankert

IPC分类号： G21K1/00 ,  G03F7/20 ,  G21K5/02 ,  G21K5/08 ,  H05G2/00 ,  H05H1/24

CPC分类号： H05G2/003 ,  G03F7/70033

摘要： In a method for generating extreme ultraviolet radiation or soft x-ray radiation by means of gas discharge, in particular, for EUV lithography, a discharge vessel is provided with two electrodes that are connected to high voltage. Between the electrodes, in an area of two electrode recesses that are coaxial to one another, a gas fill with predetermined gas pressure in accordance with a discharge operation realized on the left branch of the Paschen curve is provided. In this area, a plasma emitting the radiation is generated when supplying energy. The plasma is displaced or deformed by a pressure change of the gas fill in the area of the electrode recesses.

摘要翻译： 在通过气体放电产生极紫外辐射或软X射线辐射的方法中，特别是对于EUV光刻技术，放电容器具有连接到高电压的两个电极。 在电极之间，在彼此同轴的两个电极凹部的区域中，提供根据在Paschen曲线的左分支上实现的放电操作的预定气体压力的气体填充。 在该区域，在供给能量时产生发射辐射的等离子体。 等离子体通过气体填充物在电极凹部的区域中的压力变化而移位或变形。

公开(公告)号：US07734014B2

公开(公告)日：2010-06-08

申请号：US10567038

申请日：2004-07-29

申请人： Klaus Bergmann ,  Willi Neff

发明人： Klaus Bergmann ,  Willi Neff

IPC分类号： H01J35/06 ,  H01J35/02 ,  G21G4/00

CPC分类号： H05G2/003

摘要： A gas discharge source, in particular, for generating extreme ultraviolet and/or soft X-radiation, has a gas-filled intermediate electrode space located between two electrodes, devices for the admission and evacuation of gas, and one electrode that has an opening that defines an axis of symmetry and is provided for the discharge of radiation. A diaphragm exhibits at least one opening on the axis of symmetry and operates as a differential pump stage, between the two electrodes.

摘要翻译： 特别是用于产生极端的紫外线和/或软X射线的气体放电源具有位于两个电极之间的气体填充的中间电极空间，用于进入和排出气体的装置，以及一个具有开口的电极 定义了一个对称轴，并提供了放射线。 隔膜在对称轴上具有至少一个开口，作为两个电极之间的差动泵级。

公开(公告)号：US07397190B2

公开(公告)日：2008-07-08

申请号：US10536918

申请日：2003-11-28

申请人： Guenther Hans Derra ,  Joseph Robert Rene Pankert ,  Willi Neff ,  Klaus Bergmann ,  Jeroen Jonkers

发明人： Guenther Hans Derra ,  Joseph Robert Rene Pankert ,  Willi Neff ,  Klaus Bergmann ,  Jeroen Jonkers

IPC分类号： H01J61/09

CPC分类号： H05G2/003 ,  H01J61/09

摘要： The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3′) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5′) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).

摘要翻译： 本发明涉及一种用于具有阳极（1）和中空阴极（2）的EUV辐射的气体放电灯，其中中空阴极（2）具有至少两个开口（3,3'），阳极（1）具有 一个通孔（4），其特征在于，中空阴极开口（3）的纵向轴线（5,5'）具有位于阳极开口（6）的对称轴线（6）上的公共交点S 4）。

公开(公告)号：US20050040347A1

公开(公告)日：2005-02-24

申请号：US10473906

申请日：2002-03-21

申请人： Willi Neff ,  Klaus Bergmann ,  Oliver Rosier ,  Joseph Pankert

发明人： Willi Neff ,  Klaus Bergmann ,  Oliver Rosier ,  Joseph Pankert

IPC分类号： G21K1/00 ,  G03F7/20 ,  G21K5/02 ,  G21K5/08 ,  H05G2/00 ,  H05H1/24 ,  G01J1/00

CPC分类号： H05G2/003 ,  G03F7/70033

摘要： In a method for generating extreme ultraviolet radiation or soft x-ray radiation by means of gas discharge, in particular, for EUV lithography, a discharge vessel is provided with two electrodes that are connected to high voltage. Between the electrodes, in an area of two electrode recesses that are coaxial to one another, a gas fill with predetermined gas pressure in accordance with a discharge operation realized on the left branch of the Paschen curve is provided. In this area, a plasma emitting the radiation is generated when supplying energy. The plasma is displaced or deformed by a pressure change of the gas fill in the area of the electrode recesses.

公开(公告)号：US07126143B2

公开(公告)日：2006-10-24

申请号：US10474121

申请日：2002-03-23

申请人： Jürgen Klein ,  Willi Neff ,  Stefan Seiwart ,  Klaus Bergmann ,  Joseph Pankert ,  Michael Löken

发明人： Jürgen Klein ,  Willi Neff ,  Stefan Seiwart ,  Klaus Bergmann ,  Joseph Pankert ,  Michael Löken

IPC分类号： G21K5/02

CPC分类号： H05G2/003 ,  G03F7/70033

摘要： A method for generating extreme ultraviolet radiation and soft x-ray radiation with a gas discharge operated on the left branch of the Paschen curve, in particular, for EUV lithography,wherein a discharge chamber (10) of a predetermined gas pressure and two electrodes (11, 12) are used, wherein the electrodes have an opening (14, 15), respectively, positioned on the same symmetry axis (13) and, in the course of a voltage increase (16) upon reaching a predetermined ignition voltage (Uz), generate a plasma (17) located in the area between their openings (14, 15), which plasma is a source of the radiation (17′) to be generated, wherein an ignition of the plasma (17) is realized by affecting the gas pressure and/or by triggering, and wherein, with the ignition of the plasma (17), an energy storage device supplies by means of the electrodes (11, 12) stored energy into the plasma (17), characterized in that the ignition of the plasma (17) is realized by using a predetermined ignition delay (18).

摘要翻译： 一种用于在帕邢斯曲线的左分支上操作的气体放电产生极紫外辐射和软X射线辐射的方法，特别是用于EUV光刻，其中具有预定气体压力的放电室（10）和两个电极 11，12），其中电极分别具有位于同一对称轴线（13）上的开口（14,15），并且在达到预定点火电压（U）时在电压增加（16）的过程中 产生位于其开口（14,15）之间的区域中的等离子体（17），该等离子体是要产生的辐射源（17'），其中点火 通过影响气体压力和/或通过触发实现等离子体（17），并且其中，通过等离子体（17）的点火，能量存储装置通过电极（11,12）将储存的能量供应到等离子体 （17），其特征在于，通过以下方式实现等离子体（17）的点火 使用预定的点火延迟（18）。

公开(公告)号：US20080143228A1

公开(公告)日：2008-06-19

申请号：US10567038

申请日：2004-07-29

申请人： Klaus Bergmann ,  Willi Neff

发明人： Klaus Bergmann ,  Willi Neff

IPC分类号： H05G2/00

CPC分类号： H05G2/003

摘要： The invention relates to a gas discharge source, in particular for generating extreme ultraviolet and/or soft X-radiation, in which a gas-filled intermediate electrode space (3) is located between two electrodes (1, 2), in which devices for the admission and evacuation of gas are present, and in which one electrode (1) exhibits an opening (5) that defines an axis of symmetry (4) and is provided for the discharge of radiation. The proposed improvements constitute the presence of a diaphragm (6), which exhibits at least one opening (7) on the axis of symmetry (4) and operates as a differential pump stage, between the two electrodes (1, 2).

摘要翻译： 本发明涉及一种气体放电源，特别是用于产生极端的紫外线和/或软X射线，其中气体填充的中间电极空间（3）位于两个电极（1,2）之间，其中用于 存在气体的进入和排出，并且其中一个电极（1）具有限定对称轴（4）的开口（5），并且被设置用于放射辐射。 所提出的改进构成了在对称轴线（4）上具有至少一个开口（7）并在两个电极（1,2）之间作为差分泵级作用的隔膜（6）的存在。

公开(公告)号：US20060138960A1

公开(公告)日：2006-06-29

申请号：US10536918

申请日：2003-11-28

申请人： Guenther Derra ,  Joseph Pankert ,  Willi Neff ,  Klaus Bergmann ,  Jeroen Jonkers

发明人： Guenther Derra ,  Joseph Pankert ,  Willi Neff ,  Klaus Bergmann ,  Jeroen Jonkers

IPC分类号： H01J61/09 ,  H01J17/06

CPC分类号： H05G2/003 ,  H01J61/09

摘要： The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3′) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5′) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).

摘要翻译： 本发明涉及一种用于具有阳极（1）和中空阴极（2）的EUV辐射的气体放电灯，其中中空阴极（2）具有至少两个开口（3,3'），阳极（1）具有 一个通孔（4），其特征在于，中空阴极开口（3）的纵向轴线（5,5'）具有位于阳极开口（6）的对称轴线（6）上的公共交点S 4）。