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    Method of and apparatus for measuring and controlling substrate holder temperature using ultrasonic tomography
    1.
    发明申请
    Method of and apparatus for measuring and controlling substrate holder temperature using ultrasonic tomography 审中-公开
    使用超声波断层扫描测量和控制衬底保持器温度的方法和装置

    公开(公告)号：US20050089077A1

    公开(公告)日：2005-04-28

    申请号：US10994312

    申请日：2004-11-23

    申请人： William Jones ,  Michael Grapperhaus ,  Andrej Mitrovic

    发明人： William Jones ,  Michael Grapperhaus ,  Andrej Mitrovic

    IPC分类号： G01K11/24 ,  G01K11/22

    CPC分类号： G01K11/24

    摘要： Ultrasonic transducers and tomographic techniques determine the temperature of a semiconductor substrate holder at all points on the substrate holder, thereby allowing comprehensive real-time control of the temperature of the substrate holder during a process, such as a semiconductor wafer etching process. An apparatus for measuring temperatures of respective portions of a substrate holder that supports a substrate (e.g., a semiconductor wafer) on which a process (e.g., an etching process) is carried out, and for controlling the temperatures of the respective portions in response to the measured temperatures, includes: an arrangement of at least one ultrasonic transducer arranged and configured to transmit ultrasonic energy through the substrate holder, and a data processor configured to calculate, during the process, the temperatures of the respective portions of the substrate holder based on respective propagation time delays of the ultrasonic energy through the respective portions.

    摘要翻译： 超声波换能器和断层摄影技术确定了衬底保持器上所有点处的半导体衬底保持器的温度，从而允许在诸如半导体晶片蚀刻工艺的工艺期间对衬底保持器的温度进行全面的实时控制。 一种用于测量支撑在其上执行工艺（例如，蚀刻工艺）的衬底（例如，半导体晶片）的衬底保持器的各个部分的温度的装置，并且用于响应于 所测量的温度包括：至少一个超声波换能器的布置，布置和配置成通过衬底保持器传输超声波能量;以及数据处理器，被配置为在该过程期间基于衬底保持器的相应部分的温度，基于 相应部分的超声能量的相应传播时间延迟。

    Apparatus and method for determining clamping status of semiconductor wafer
    4.
    发明授权
    Apparatus and method for determining clamping status of semiconductor wafer 失效
    用于确定半导体晶片的夹持状态的装置和方法

    公开(公告)号：US07073383B2

    公开(公告)日：2006-07-11

    申请号：US10478689

    申请日：2002-05-09

    申请人： William Jones ,  Paul Moroz ,  Andrej Mitrovic

    发明人： William Jones ,  Paul Moroz ,  Andrej Mitrovic

    IPC分类号： G01N29/40

    CPC分类号： H01L21/6831 ,  G01N29/11 ,  G01N29/4427 ,  G01N29/48 ,  G01N2291/011 ,  G01N2291/0231 ,  G01N2291/044 ,  G01N2291/105 ,  G01N2291/2697 ,  G01N2291/2698 ,  H01L21/67259

    摘要： An apparatus determines how well a semiconductor wafer (4) is clamped to a support member (1). The apparatus has at least one ultrasonic transducer (2a,2b,2c,2d) configured to emit ultrasonic energy (3) toward an interface between the water (4) and the support member (1) so that the interface generates echo signals, and a data processing unit (11) configured to analyze the echo signals to arrive at a determination as to how well the semiconductor wafer (4) is clamped to the support member (1before semiconductor process is started. A first method ensures that a wafer (4) is securely clamped to a support member before a semiconductor process is started. A second method verifies proper de-clamping of a semiconductor wafer (4) from a support member (1) before the semiconductor wafer (4) is removed from the support member (1) upon completion of a semiconductor process.

    摘要翻译： 一种装置确定半导体晶片（4）如何被夹紧到支撑构件（1）上。 该装置具有至少一个超声波换能器（2a，2b，2c，2d），其构造成朝向水（4）和支撑构件（1）之间的界面发射超声能量（3），使得界面产生 回波信号和数据处理单元（11），被配置为分析回波信号以得出半导体晶片（4）如何在半导体工艺开始之前被夹持到支撑构件（1）的确定。第一种方法确保 半导体晶片（4）之前，第二种方法验证半导体晶片（4）从支撑构件（1）的适当的去夹紧 在完成半导体工艺时从支撑构件（1）移除。

    MATERIAL COOLING SYSTEM HAVING A VARIABLE HEAT REJECTION INTERFACE
    6.
    发明公开
    MATERIAL COOLING SYSTEM HAVING A VARIABLE HEAT REJECTION INTERFACE 审中-公开

    公开(公告)号：US20230384011A1

    公开(公告)日：2023-11-30

    申请号：US18321039

    申请日：2023-05-22

    申请人： William Jones

    发明人： William Jones

    IPC分类号： F25B49/02 ,  F25B39/02 ,  F25B41/20 ,  F25B43/00

    CPC分类号： F25B49/02 ,  F25B39/02 ,  F25B41/20 ,  F25B43/003 ,  F25B2700/2106

    摘要： A cooling system for an industrial facility includes a facility that has a thermal energy output and an input, a dry cooler that includes a plurality of blowers, an evaporative cooling tower, a fluid-cooled chiller, a valving system that receives a thermally-charged media from the thermal energy output for delivery to at least one of the dry cooler, the evaporative cooling tower, and the fluid-cooled chiller, and a temperature sensor that is in communication with the valving system via a controller. The temperature sensor measures a current ambient temperature and cooperates with the controller to automatically adjust the valving system to direct the thermally-charged media to one of the dry cooler, the evaporative cooling tower, and the fluid-cooled chiller for rejecting heat from the thermally-charged media to define a thermally-receptive media. The cooling system further includes a return conduit that delivers the thermally-receptive media to the input.

    Catalyst composition comprising anionic clay and rare earth metals, its preparation and use in FCC
    8.
    发明授权
    Catalyst composition comprising anionic clay and rare earth metals, its preparation and use in FCC 有权
    包含阴离子粘土和稀土金属的催化剂组合物，其制备和用于FCC

    公开(公告)号：US07576024B2

    公开(公告)日：2009-08-18

    申请号：US10582177

    申请日：2004-12-06

    申请人： William Jones ,  Dennis Stamires ,  Paul O'Connor ,  Michael F. Brady

    发明人： William Jones ,  Dennis Stamires ,  Paul O'Connor ,  Michael F. Brady

    IPC分类号： B01J29/06

    CPC分类号： B01J21/16 ,  B01J23/10 ,  B01J37/03 ,  C10G11/04 ,  C10G11/18

    摘要： The invention relates to a composition comprising anionic clay and rare earth metal hydroxy carbonate. This composition can suitably be used in FCC for the reduction of NOx and/or SOx emissions, the reduction of the S and/or N-content in fuels, and as a metal trap.The composition can be prepared by precipitating a divalent metal salt, a trivalent metal salt, and a rare earth metal salt to form a precipitate, calcining the precipitate at 200-800° C., and rehydrating the precipitate in the presence of a carbonate source to form a composition comprising anionic clay and a rare earth metal hydroxy carbonate.

    摘要翻译： 本发明涉及包含阴离子粘土和稀土金属羟基碳酸酯的组合物。 该组合物可以适当地用于FCC中用于还原NOx和/或SO x排放，降低燃料中的S和/或N含量，以及作为金属阱。 该组合物可以通过沉淀二价金属盐，三价金属盐和稀土金属盐来制备，以形成沉淀物，在200-800℃下煅烧沉淀物，并在碳酸盐源存在下再沉淀沉淀物 以形成包含阴离子粘土和稀土金属羟基碳酸酯的组合物。

    Method and apparatus for channel equalization
    9.
    发明授权
    Method and apparatus for channel equalization 有权
    信道均衡的方法和装置

    公开(公告)号：US07400677B2

    公开(公告)日：2008-07-15

    申请号：US11220508

    申请日：2005-09-06

    申请人： William Jones

    发明人： William Jones

    IPC分类号： H03K5/159 ,  H04B1/10

    CPC分类号： H04L25/03343 ,  H04L25/03146

    摘要： A method and apparatus is disclosed to overcome the effects of intersymbol interference during data transmission. Overcoming the effects of intersymbol interference makes possible higher data transmission rates for a given error rate. In one embodiment a receiver-transmitter pair is configured with a precode filter at the transmit side and a feed forward filter and a feedback filter at the receive side. Filter coefficients are calculated to reduce the undesirable effects of the channel, such as intersymbol interference. In one embodiment a training process occurs with the feedforward filter and a feedback filter, such that the first N coefficients of the feedback filter are set to zero. Thereafter, the coefficients of the feedforward filter are subject to spectral factorization and separated into minimum phase roots and maximum phase roots. The minimum phase roots comprise the precode filter coefficients and the maximum phase roots are established as feedforward filter coefficients.

    摘要翻译： 公开了一种克服数据传输期间符号间干扰的影响的方法和装置。 克服符号间干扰的影响使给定错误率的数据传输速率更高。 在一个实施例中，接收机 - 发射机对在发射侧配置有预编码滤波器，并且在接收侧配置有前馈滤波器和反馈滤波器。 计算滤波器系数以减少信道的不期望的影响，例如符号间干扰。 在一个实施例中，使用前馈滤波器和反馈滤波器进行训练处理，使得反馈滤波器的前N个系数被设置为零。 此后，前馈滤波器的系数进行频谱分解，并分为最小相位根和最大相位根。 最小相位根包括预编码滤波器系数，并且将最大相位根建立为前馈滤波器系数。