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    Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate
    2.
    发明授权
    Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate 有权
    包括附接到基板的测量刻度的组件和用于将测量刻度保持在基板上的方法

    公开(公告)号：US08650769B2

    公开(公告)日：2014-02-18

    申请号：US13260891

    申请日：2010-02-23

    申请人： Peter Speckbacher ,  Josef Weidmann ,  Wolfgang Holzapfel

    发明人： Peter Speckbacher ,  Josef Weidmann ,  Wolfgang Holzapfel

    IPC分类号： G01D5/347 ,  G01D5/26 ,  G01B11/02

    CPC分类号： G01D5/34707

    摘要： An assembly including a substrate and a scale held on the substrate, wherein the scale has a measuring graduation, and the scale is held on the substrate by pneumatic suction. The scale is braced on the substrate via two-dimensionally distributed, spaced-apart supports, which are disposed facing a measurement area defined by the measuring graduation and wherein adjacent ones of the supports are spaced apart from one another at a mutual period that is less than a thickness of the scale. In addition, the supports have a structure such that a connection by optical contact bonding between the supports and the scale and/or between the supports and the substrate is prevented at least in the measurement area. A space between the scale and the substrate is sealed off from surroundings by a sealing structure.

    摘要翻译： 包括保持在基板上的基板和刻度的组件，其中刻度尺具有测量刻度，并且通过气动抽吸将刻度保持在基板上。 尺寸通过二维分布的间隔开的支撑件支撑在基板上，该支撑件面向由测量刻度限定的测量区域，并且其中相邻支撑件之间的相邻周期间隔较小 比秤的厚度。 此外，支撑体具有这样的结构，使得至少在测量区域中防止了通过支撑件和标尺之间和/或支撑件和基板之间的光学接触接合的连接。 标尺和基板之间的空间通过密封结构与周围环境密封。

    Assembly Comprising a Measuring Scale Attached to a Substrate and Method for Holding a Measuring Scale Against a Substrate
    4.
    发明申请
    Assembly Comprising a Measuring Scale Attached to a Substrate and Method for Holding a Measuring Scale Against a Substrate 有权
    包括附着在基板上的测量刻度的组件以及用于将基板保持测量刻度的方法

    公开(公告)号：US20120023769A1

    公开(公告)日：2012-02-02

    申请号：US13260891

    申请日：2010-02-23

    申请人： Peter Speckbacher ,  Josef Weidmann ,  Wolfgang Holzapfel

    发明人： Peter Speckbacher ,  Josef Weidmann ,  Wolfgang Holzapfel

    IPC分类号： G01D5/347 ,  B23P11/00

    CPC分类号： G01D5/34707

    摘要： An assembly including a substrate and a scale held on the substrate, wherein the scale has a measuring graduation, and the scale is held on the substrate by pneumatic suction. The scale is braced on the substrate via two-dimensionally distributed, spaced-apart supports, which are disposed facing a measurement area defined by the measuring graduation and wherein adjacent ones of the supports are spaced apart from one another at a mutual period that is less than a thickness of the scale. In addition, the supports have a structure such that a connection by optical contact bonding between the supports and the scale and/or between the supports and the substrate is prevented at least in the measurement area. A space between the scale and the substrate is sealed off from surroundings by a sealing structure.

    摘要翻译： 包括保持在基板上的基板和刻度的组件，其中刻度尺具有测量刻度，并且通过气动抽吸将刻度保持在基板上。 尺寸通过二维分布的间隔开的支撑件支撑在基板上，该支撑件面向由测量刻度限定的测量区域，并且其中相邻支撑件之间的相邻周期间隔较小 比秤的厚度。 此外，支撑体具有这样的结构，使得至少在测量区域中防止了通过支撑件和标尺之间和/或支撑件和基板之间的光学接触接合的连接。 标尺和基板之间的空间通过密封结构与周围环境密封。

    Optical position-measuring device having two crossed scales
    9.
    发明授权
    Optical position-measuring device having two crossed scales 有权
    具有两个十字刻度的光学位置测量装置

    公开(公告)号：US08822907B2

    公开(公告)日：2014-09-02

    申请号：US13288007

    申请日：2011-11-02

    申请人： Ralph Joerger ,  Michael Hermann ,  Wolfgang Holzapfel ,  Walter Huber

    发明人： Ralph Joerger ,  Michael Hermann ,  Wolfgang Holzapfel ,  Walter Huber

    IPC分类号： G01D5/34 ,  G01B11/24 ,  G01D5/38

    CPC分类号： G01D5/38 ,  G01B11/2441

    摘要： An optical position-measuring device includes a scanning bar extending in a first or second direction, and a scale extending in the other direction. The scale is offset by a scanning distance from the scanning bar in a third direction perpendicular to the first and second directions. The device has a light source whose light penetrates the scanning bar at an intersection point of the scanning bar and scale to fall on the scale and arrive back at the scanning bar. At a detector, the light is split by diffraction into different partial beams at optically effective structures of the scanning bar and scale and combined again. A periodic signal is obtained in the detector in response to: a shift between the scanning bar and scale in the first direction due to interference of combined partial beams, and a change in the scanning distance between the scanning bar and scale.

    摘要翻译： 光学位置测量装置包括沿第一或第二方向延伸的扫描杆和沿另一个方向延伸的刻度。 在与第一和第二方向垂直的第三方向上，刻度尺距离扫描杆的扫描距离偏移。 该装置具有光源，其光在扫描条和刻度的交点处穿过扫描条，落在刻度上并返回扫描条。 在检测器处，通过衍射将光分解成不同的部分光束，在扫描条和刻度的光学有效结构上再次组合。 在检测器中响应于由于组合的部分光束的干扰而在第一方向上的扫描条和标尺之间的偏移以及扫描条和标尺之间的扫描距离的变化而在检测器中获得周期性信号。

    Optical Position-Measuring Device
    10.
    发明申请
    Optical Position-Measuring Device 有权
    光学位置测量装置

    公开(公告)号：US20120099118A1

    公开(公告)日：2012-04-26

    申请号：US13236250

    申请日：2011-09-19

    申请人： Wolfgang Holzapfel ,  Florian Flossmann

    发明人： Wolfgang Holzapfel ,  Florian Flossmann

    IPC分类号： G01B11/14

    CPC分类号： G01S17/42 ,  G01S7/4812 ,  G01S7/4817 ,  G01S17/08 ,  G01S17/66

    摘要： An optical position-measuring device includes a light source, a measuring reflector movable in space, a detection unit and a light-beam deflection unit that can align at least one beam of rays, emitted by the light source, in the direction of the measuring reflector. The light-beam deflection unit includes a cardan system having two cardan frames. A first cardan frame is adjustable by motor about a first axis of rotation, and a second cardan frame within the first cardan frame is adjustable by motor about a second axis of rotation oriented in a direction perpendicular to the first axis of rotation. The two axes of rotation intersect in a fixed reference point, at which a reference reflector is disposed. A plurality of mirrors are disposed rigidly on the cardan frames, so that the beam of rays can be pivoted about the fixed reference point via the mirrors during alignment.

    摘要翻译： 一种光学位置测量装置，包括光源，可在空间中移动的测量反射器，检测单元和光束偏转单元，其可以将由光源发射的至少一束光线沿测量方向对准 反射器。 光束偏转单元包括具有两个万向节框架的万向节系统。 第一万向节框架可通过马达围绕第一旋转轴线进行调节，并且第一万向节框架内的第二万向节框架可通过马达围绕绕垂直于第一旋转轴线的方向定向的第二旋转轴线进行调节。 两个旋转轴在固定的参考点相交，在该参考点处设置参考反射器。 多个反射镜刚性地布置在万向节框架上，使得光束可以在对准期间经由反射镜围绕固定的参考点枢转。