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211 条记录 (耗时 0.018 秒)

    Automated semiconductor probing device
    1.
    发明授权
    Automated semiconductor probing device 失效
    自动半导体探测装置

    公开(公告)号：US06825680B1

    公开(公告)日：2004-11-30

    申请号：US09885362

    申请日：2001-06-20

    申请人： Yakov Kogan ,  Parviz Tayebati ,  Daryoosh Vakhshoori

    发明人： Yakov Kogan ,  Parviz Tayebati ,  Daryoosh Vakhshoori

    IPC分类号： G01R3102

    CPC分类号： G01R31/2887

    摘要： Apparatus and methods are provided for automated semiconductor device probing. The apparatus includes a probe assembly; a machine vision system; and a semiconductor support fixture. A method includes providing apparatus for automated semiconductor device probing; locating the semiconductor device positioned on the semiconductor support fixture with the machine vision system; guiding the movement of at least one of the probe assembly and the semiconductor support fixture so as to position a contact portion of the semiconductor device and the electrical probe in alignment with one another; and moving at least one of the probe assembly and the semiconductor support fixture toward the other of the at least one of the probe assembly and the semiconductor support fixture so as to position the electrical probe and the contact portion of the semiconductor device in electrical connection with one another.

    摘要翻译： 提供了用于自动半导体器件探测的装置和方法。 该装置包括探针组件; 机器视觉系统; 和半导体支架。 一种方法包括提供用于自动半导体器件探测的装置; 利用机器视觉系统定位位于半导体支架上的半导体器件; 引导所述探针组件和所述半导体支撑固定装置中的至少一个的移动，以使所述半导体器件和所述电探针的接触部分彼此对齐; 以及将所述探针组件和所述半导体支撑固定件中的至少一个移动到所述探针组件和所述半导体支撑固定装置中的所述至少一个探针组件和所述半导体支撑固定装置中的另一个，以便将所述电探针和所述半导体器件的接触部分 另一个。

    Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
    3.
    发明授权
    Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter 失效
    微机电可调谐，共聚焦，垂直腔表面发射激光和fabry-perot滤光片

    公开(公告)号：US06645784B2

    公开(公告)日：2003-11-11

    申请号：US10136057

    申请日：2002-04-29

    申请人： Parviz Tayebati ,  Masud Azimi ,  Peidong Wang ,  Daryoosh Vakhshoori

    发明人： Parviz Tayebati ,  Masud Azimi ,  Peidong Wang ,  Daryoosh Vakhshoori

    IPC分类号： H01L2100

    CPC分类号： H01S5/18388 ,  G01J3/26 ,  G02B6/4203 ,  G02B26/001 ,  G02B26/0816 ,  G02B2006/12104 ,  G02B2006/12121 ,  H01S5/02284 ,  H01S5/0614 ,  H01S5/18366 ,  H01S5/3201

    摘要： A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers and microelectromechanically tunable Fabry-Perot filters with precise lateral and vertical dimensional control. Strained reflective dielectric film(s) are applied to a multiple quantum well structure to electronically band-gap-engineer the quantum wells. Appropriate strain in the reflective dielectric film layers is also used to create appropriate curvature in one of the reflective dielectric film stacks so as to form a confocal cavity between a planar reflective dielectric film layer and the curved reflective dielectric film layer in the vertical cavity surface emitting laser or filter. Microelectromechanical tunable vertical cavity surface emitting lasers and filter structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Precise air-cavity length and lateral dimensions are achieved by micro-die-casting using a micro-machined sacrificial polyimide or aluminum disk. Further, tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field.

    摘要翻译： 提供了一种用于制造具有精确横向和垂直尺寸控制的微机电可调垂直腔表面发射激光器和微机电可调法布里 - 珀罗滤波器的方法。 将应变反射介电膜应用于多量子阱结构，以电子带隙工程化量子阱。 反射介电膜层中的适当应变也用于在反射介电膜堆叠之一中产生适当的曲率，以便在平面反射介电膜层和在垂直腔表面中的弯曲反射介电膜层之间形成共聚焦腔 激光或过滤器。 还提供了微电子机械可调谐垂直腔表面发射激光器和滤波器结构，其包括由电介质/金属膜或金属膜制成的悬浮膜结构，其在通过金属支撑柱锚固在周边的同时支撑腔调谐反射介电膜堆叠（ s）。 通过使用微加工的牺牲聚酰亚胺或铝盘的微压铸来实现精确的空腔长度和横向尺寸。 此外，调谐是通过腔调谐反射介电膜堆叠在受控静电场中的平移运动来实现的。

    Apparatus and method for providing auxiliary cooling and thermal stability to an opto-electronic component
    7.
    发明授权
    Apparatus and method for providing auxiliary cooling and thermal stability to an opto-electronic component 失效
    为光电元件提供辅助冷却和热稳定性的装置和方法

    公开(公告)号：US06762938B2

    公开(公告)日：2004-07-13

    申请号：US10021936

    申请日：2001-12-13

    申请人： Parviz Tayebati ,  Brian Cranton ,  Daryoosh Vakhshoori ,  Masud E. Azimi ,  Kevin J. McCallion

    发明人： Parviz Tayebati ,  Brian Cranton ,  Daryoosh Vakhshoori ,  Masud E. Azimi ,  Kevin J. McCallion

    IPC分类号： H05K720

    CPC分类号： H01S5/02415 ,  G02B26/001 ,  H01S5/02446 ,  H01S5/02476 ,  Y10S257/93

    摘要： Apparatus is disclosed for providing auxiliary cooling and thermal stability to a temperature sensitive opto-electronic component. The disclosed apparatus comprising a primary thermal control system having a first thermal connection with a primary structure supporting at least one component of an optical system and a second thermal connection being thermally connected with an external environment; and an auxiliary thermal control system having a first thermal connection being thermally connected with the temperature sensitive opto-electronic component, and the auxiliary thermal control system having a second thermal connection being thermally connected with the primary thermal control system whereby the auxiliary thermal control system provides cooling to the temperature sensitive opto-electronic component and the primary thermal control system provides additional cooling to the auxiliary thermal control system through temperature regulation of the primary structure.

    摘要翻译： 公开了用于向温度敏感的光电子部件提供辅助冷却和热稳定性的装置。 所公开的设备包括主热控制系统，其具有第一热连接，其具有支撑光学系统的至少一个部件的主结构和与外部环境热连接的第二热连接; 以及辅助热控制系统，其具有与所述感温光电子部件热连接的第一热连接，并且所述辅助热控制系统具有与主热控制系统热连接的第二热连接，由此所述辅助热控制系统提供 冷却到温度敏感的光电子部件，并且主要热控制系统通过一级结构的温度调节为辅助热控制系统提供额外的冷却。

    Wavelength reference device
    8.
    发明授权
    Wavelength reference device 失效
    波长参考装置

    公开(公告)号：US06594022B1

    公开(公告)日：2003-07-15

    申请号：US09644781

    申请日：2000-08-23

    申请人： Reich Watterson ,  Parviz Tayebati ,  Kevin McCallion ,  Daryoosh Vakhshoori

    发明人： Reich Watterson ,  Parviz Tayebati ,  Kevin McCallion ,  Daryoosh Vakhshoori

    IPC分类号： G01B902

    CPC分类号： H01S5/0687 ,  G01J9/0246 ,  H01S5/18366 ,  H01S5/18388

    摘要： A wavelength reference device for tuning a tunable Fabry-Perot filter and/or a tunable VCSEL to a desired frequency, where the device uses a Fizeau interferometer and a position sensitive detector, with the position sensitive detector being used to measure the location of the maximum reflected power from the interferometer, whereby to determine the wavelength of laser radiation for tuning the device.

    摘要翻译： 用于将可调谐Fabry-Perot滤波器和/或可调谐VCSEL调谐到所需频率的波长参考装置，其中该装置使用Fizeau干涉仪和位置敏感检测器，位置敏感检测器用于测量最大值的位置 来自干涉仪的反射功率，从而确定用于调谐该装置的激光辐射的波长。

    Tunable external cavity laser
    9.
    发明授权
    Tunable external cavity laser 有权
    可调外腔激光器

    公开(公告)号：US06301274B1

    公开(公告)日：2001-10-09

    申请号：US09281404

    申请日：1999-03-30

    申请人： Parviz Tayebati ,  Daryoosh Vakhshoori

    发明人： Parviz Tayebati ,  Daryoosh Vakhshoori

    IPC分类号： H01S310

    CPC分类号： H01S3/106 ,  H01S3/083 ,  H01S5/1071 ,  H01S5/141

    摘要： A tunable microelectromechanical optical filter is placed in a linear laser cavity and is tilted at a large enough angle to prevent the unwanted reflections from coupling back to the mode of the cavity. Front and back mirrors form the cavity with a lens matching the mode of the gain media to that of the tuning element. The gain media can be a semiconductor, a solid state crystal or a fiber based region. In another preferred embodiment, the invention includes a ring cavity geometry with clockwise laser oscillation. In this case, the surface of the tunable microelectromechanical filter can be perpendicular to the direction of laser oscillation since the unwanted reflection may be prevented from coupling to the cavity mode by the action of an isolator.

    摘要翻译： 可调谐微机电滤光器放置在线性激光腔中，并以足够大的角度倾斜，以防止不想要的反射耦合回腔的模式。 前镜和后视镜形成具有与增益介质的模式匹配的调谐元件的镜头。 增益介质可以是半导体，固态晶体或基于光纤的区域。 在另一优选实施例中，本发明包括具有顺时针激光振荡的环腔几何形状。 在这种情况下，可调谐微机电滤波器的表面可以垂直于激光振荡的方向，因为可以通过隔离器的作用防止不期望的反射与腔模式耦合。

    Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers
    10.
    发明授权
    Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers 失效
    微机电可调谐，半对称，垂直腔表面发射激光器的单模操作

    公开(公告)号：US06744805B2

    公开(公告)日：2004-06-01

    申请号：US10255401

    申请日：2002-09-26

    申请人： Peidong Wang ,  Parviz Tayebati ,  Daryoosh Vakhshoori

    发明人： Peidong Wang ,  Parviz Tayebati ,  Daryoosh Vakhshoori

    IPC分类号： H01S308

    CPC分类号： H01S5/18366 ,  H01S5/18308 ,  H01S5/18311 ,  H01S5/18388 ,  H01S2301/163 ,  H01S2301/166

    摘要： A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers with precise lateral and vertical dimensional control. Microelectromechanical tunable vertical cavity surface emitting laser structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field. The current invention deals with the intracavity electrical contacts for current injection for this type of MEM-tunable VCSEL's. The current invention also includes various mechanisms to control the current injection profile so as to ensure single mode operation throughout the tuning range of the MEM-tunable VCSEL's.

    摘要翻译： 提供了一种用于制造具有精确横向和垂直尺寸控制的微机电可调垂直腔表面发射激光器的方法。 还提供了微电子机械可调谐垂直腔表面发射激光器结构，其包括由电介质/金属膜或金属膜制成的悬浮膜结构，该膜结构在通过金属支撑柱在周边锚定的同时支撑腔调谐反射介电膜堆叠， 。 调谐是通过腔调谐反射介电膜堆叠在受控静电场中的平移运动来实现的。 本发明涉及用于这种MEM可调谐VCSEL的电流注入的腔内电触头。 本发明还包括控制电流注入分布的各种机制，以确保在MEM可调VCSEL的整个调谐范围内的单模操作。