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25 条记录 (耗时 0.022 秒)

    ELECTROSTATIC CHUCK
    7.
    发明申请
    ELECTROSTATIC CHUCK 有权
    静电卡

    公开(公告)号：US20070223175A1

    公开(公告)日：2007-09-27

    申请号：US11687824

    申请日：2007-03-19

    申请人： Ikuhisa Morioka ,  Yasufumi Aihara ,  Hideyoshi Tsuruta

    发明人： Ikuhisa Morioka ,  Yasufumi Aihara ,  Hideyoshi Tsuruta

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6831

    摘要： An electrostatic chuck includes a ceramic base having an electrode embedded in vicinity to a holding face for holding a substrate. On a back side of this ceramic base, provided are a terminal connected to the electrode, a wafer temperature control member, and an insulating member for insulating the temperature control member from the terminal. This insulating member has a flange portion on its end portion in contact with the ceramic base, and is made of highly thermal conductive ceramics.

    摘要翻译： 静电吸盘包括具有嵌入到用于保持基板的保持面附近的电极的陶瓷基体。 在该陶瓷基体的背面设置有与电极连接的端子，晶片温度控制部件以及用于将温度控制部件与端子绝缘的绝缘部件。 该绝缘构件在其与陶瓷基体接触的端部具有凸缘部，并且由高导热性陶瓷制成。

    Method of producing anti-corrosion member and anti-corrosion member
    8.
    发明授权
    Method of producing anti-corrosion member and anti-corrosion member 有权
    生产防腐蚀部件和防腐蚀部件的方法

    公开(公告)号：US06406799B1

    公开(公告)日：2002-06-18

    申请号：US09494987

    申请日：2000-01-31

    申请人： Yasufumi Aihara ,  Keiichiro Watanabe ,  Kiyoshi Araki

    发明人： Yasufumi Aihara ,  Keiichiro Watanabe ,  Kiyoshi Araki

    IPC分类号： B21D3900

    CPC分类号： C23C8/06 ,  C23C8/62 ,  Y10T428/12556

    摘要： A base member made of a metal in which aluminum is included, ceramics in which an aluminum element is included, or a composition member constructed by a metal in which aluminum and ceramics are included, is provided in a container in which a solid fluorine compound such as NaHF2 is filled. Then, the container is heated at a temperature higher than a decomposition temperature of the solid fluorine compound. After that, the base member is subjected to a heat treatment with the decomposed gas of the solid fluorine compound to form a fluoride layer on a surface of the base member. In this manner, it is possible to obtain an anti-corrosion member which shows a high corrosion property with respect to the corrosion gas of halogen series and its plasma, particularly with respect to chlorine gas and its plasma.

    摘要翻译： 在其中包含固体氟化合物的容器中设置由包含铝的金属制成的基材，包含铝元素的陶瓷或包含铝和陶瓷的金属构成的组合物构件 因为填充了NaHF2。 然后，在高于固体氟化合物的分解温度的温度下加热容器。 之后，用固体氟化合物的分解气体对基材进行热处理，在基材的表面形成氟化物层。 以这种方式，可以获得相对于卤素系列及其等离子体的腐蚀气体具有高腐蚀性的防腐蚀部件，特别是对于氯气及其等离子体。

    SUBSTRATE SUPPORTING MEMBER
    9.
    发明申请
    SUBSTRATE SUPPORTING MEMBER 有权
    基座支撑构件

    公开(公告)号：US20080138645A1

    公开(公告)日：2008-06-12

    申请号：US11867044

    申请日：2007-10-04

    申请人： Tetsuya KAWAJIRI ,  Yasufumi Aihara ,  Tomoyuki Fujii

    发明人： Tetsuya KAWAJIRI ,  Yasufumi Aihara ,  Tomoyuki Fujii

    IPC分类号： B32B3/26

    CPC分类号： H02N13/00 ,  H01L21/6833 ,  H01L21/68757 ,  Y10T428/12479 ,  Y10T428/24959 ,  Y10T428/249957 ,  Y10T428/249967 ,  Y10T428/249982 ,  Y10T428/249985 ,  Y10T428/265 ,  Y10T428/31678

    摘要： A substrate supporting member includes: a plate-shaped ceramic body having a surface serving as a substrate supporting surface; a plate-shaped composite material body which is joined to a surface of the ceramic body opposite to the substrate supporting surface with a joint material interposed therebetween and made of porous ceramic with pores filled with metal, the composite material body having a porosity of more than 0% and not more than 5%; and a metallic plate which is joined to a surface of the composite material body opposite to the surface joined to the ceramic body with a joint material interposed therebetween.

    摘要翻译： 基板支撑构件包括：具有用作基板支撑表面的表面的板状陶瓷体; 一种板状复合材料体，其与陶瓷体的与基板支撑面相对的表面与介于其间的接合材料接合，并由具有填充金属的孔的多孔陶瓷制成，复合材料体的孔隙率大于 0％不超过5％; 以及金属板，其与所述复合材料体的与所述陶瓷体接合的表面相对的表面接合，其间插入有接合材料。