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公开(公告)号:US07235490B2
公开(公告)日:2007-06-26
申请号:US10788216
申请日:2004-02-27
申请人: Yasuhiko Sato , Seiji Nakagawa , Jun Idebuchi , Motoya Kishida , Shuichi Taniguchi , Tsuyoshi Shibata
发明人: Yasuhiko Sato , Seiji Nakagawa , Jun Idebuchi , Motoya Kishida , Shuichi Taniguchi , Tsuyoshi Shibata
IPC分类号: H01L21/311
CPC分类号: H01L21/31144 , G03F7/09 , H01L21/0332
摘要: A method of manufacturing a semiconductor device comprises preparing a working film to be processed, forming an adhesion improving region on the working film for increasing an adhesion between the working film and a mask material containing carbon, forming the mask material on the working film, forming a resist pattern on the mask material, the mask material having a higher etching resistance for the working film than the resist pattern, transferring the pattern of the resist pattern onto the mask material, and etching the working film by using the mask material as a mask.
摘要翻译: 一种制造半导体器件的方法包括:制备待加工的工作薄膜,在工作薄膜上形成粘合改善区域,以增加工作薄膜和含有碳的掩模材料之间的粘附力,在工作薄膜上形成掩模材料,形成 在掩模材料上的抗蚀剂图案,掩模材料对抗蚀剂图案具有比工作膜更高的耐蚀刻性,将抗蚀剂图案的图案转印到掩模材料上,并且通过使用掩模材料作为掩模来蚀刻工作膜 。
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公开(公告)号:US07198886B2
公开(公告)日:2007-04-03
申请号:US11138216
申请日:2005-05-27
申请人: Yasuhiko Sato , Tsuyoshi Shibata , Junko Ohuchi , Yasunobu Onishi
发明人: Yasuhiko Sato , Tsuyoshi Shibata , Junko Ohuchi , Yasunobu Onishi
IPC分类号: G03F7/30
CPC分类号: G03F7/11 , H01L21/0274 , H01L21/3081
摘要: A method of forming a pattern, which comprises forming a masking material layer on a surface of a working film by coating the surface with a solution of a mixture comprising an inorganic compound having a bond between an inorganic element and oxygen atom, and a volatile unit, volatilizing the volatile unit to thereby make the masking material layer porous, forming a resist layer on a surface of the masking material layer, patterning the resist film to form a resist pattern, dry-etching the masking material layer to thereby transfer the resist pattern to the masking material layer, thereby forming a masking material pattern, and dry etching the working film to thereby transfer the masking material pattern to the working film to thereby form a working film pattern.
摘要翻译: 一种形成图案的方法,其包括通过用包含无机元素和氧原子之间的键的无机化合物的混合物的溶液和挥发性单元涂覆表面来在工作膜的表面上形成掩模材料层 挥发挥发性单元,使掩模材料层多孔,在掩模材料层的表面上形成抗蚀剂层,图案化抗蚀剂膜以形成抗蚀剂图案,干蚀刻掩模材料层,从而将抗蚀剂图案 到掩蔽材料层,从而形成掩模材料图案,并干燥蚀刻加工膜,从而将掩模材料图案转印到工作膜上,从而形成工作膜图案。
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公开(公告)号:US20050233255A1
公开(公告)日:2005-10-20
申请号:US11138216
申请日:2005-05-27
申请人: Yasuhiko Sato , Tsuyoshi Shibata , Junko Ohuchi , Yasunobu Onishi
发明人: Yasuhiko Sato , Tsuyoshi Shibata , Junko Ohuchi , Yasunobu Onishi
IPC分类号: H01L21/027 , G03F7/11 , H01L21/308 , G03C5/00
CPC分类号: G03F7/11 , H01L21/0274 , H01L21/3081
摘要: A method of forming a pattern, which comprises forming a masking material layer on a surface of a working film by coating the surface with a solution of a mixture comprising an inorganic compound having a bond between an inorganic element and oxygen atom, and a volatile unit, volatilizing the volatile unit to thereby make the masking material layer porous, forming a resist layer on a surface of the masking material layer, patterning the resist film to form a resist pattern, dry-etching the masking material layer to thereby transfer the resist pattern to the masking material layer, thereby forming a masking material pattern, and dry etching the working film to thereby transfer the masking material pattern to the working film to thereby form a working film pattern.
摘要翻译: 一种形成图案的方法,其包括通过用包含无机元素和氧原子之间的键的无机化合物的混合物的溶液和挥发性单元涂覆表面来在工作膜的表面上形成掩模材料层 挥发挥发性单元,使掩模材料层多孔,在掩模材料层的表面上形成抗蚀剂层,图案化抗蚀剂膜以形成抗蚀剂图案,干蚀刻掩模材料层,从而将抗蚀剂图案 到掩蔽材料层,从而形成掩模材料图案,并干燥蚀刻加工膜,从而将掩模材料图案转印到工作膜上,从而形成工作膜图案。
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公开(公告)号:US08959916B2
公开(公告)日:2015-02-24
申请号:US13281981
申请日:2011-10-26
申请人: Kenji Yamamoto , Masato Handa , Naoyuki Nagafuchi , Naohiro Kusumi , Mitsuko Fukuda , Tsuyoshi Shibata , Shinji Matsuura
发明人: Kenji Yamamoto , Masato Handa , Naoyuki Nagafuchi , Naohiro Kusumi , Mitsuko Fukuda , Tsuyoshi Shibata , Shinji Matsuura
CPC分类号: F01K13/00 , F01K11/02 , F22B37/008 , F22B37/24 , F22B37/40 , Y02E20/326
摘要: A thermal power plant is proposed for achieving high reliability, low material cost, and low construction cost by devising the arrangement and structures of a boiler, steam turbines, and a flue gas treatment apparatus to reduce a usage amount of high-temperature resistance material and further to reduce a thermal elongation of piping. In a thermal power plant including a 2 pass-type boiler having a furnace for burning fuel, a rear heat recovery area for recovering heat from combustion gas exhausted from the furnace, steam turbines are arranged near the rear heat recovery area.
摘要翻译: 提出通过设计锅炉,蒸汽轮机和烟气处理装置的布置和结构来降低高温电阻材料的使用量,从而实现高可靠性,低材料成本和低建筑成本的火力发电厂, 进一步降低管道的热延伸率。 在包括具有用于燃烧燃料的炉的2通型锅炉的火力发电设备中,用于从从炉排出的燃烧气体中回收热量的后部热回收区域设置在后部热回收区域附近。
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公开(公告)号:US08578868B2
公开(公告)日:2013-11-12
申请号:US12893733
申请日:2010-09-29
CPC分类号: F23L7/007 , F23C9/003 , F23C2202/10 , F23C2900/06041 , F23D1/00 , F23J2215/50 , F23L2900/07001 , F23L2900/07005 , Y02E20/322 , Y02E20/344
摘要: An oxyfuel combustion boiler plant comprising: an air separation unit for manufacturing oxygen by separating nitrogen from air, a boiler having a burner for burning the oxygen supplied from the air separation unit and pulverized coal, and a primary system pipe for supplying the pulverized coal to the burner, an exhaust gas recirculation system pipe for supplying combustion exhaust gas discharged from the boiler to the primary system pipe, and a carbon dioxide capture unit for capturing carbon dioxide in the exhaust gas discharged from the boiler, the oxyfuel combustion boiler plant is further comprising: an oxygen supply pipe for supplying the oxygen manufactured by the air separation unit to the primary system pipe in the burner, and a pipe for supplying the combustion exhaust gas discharged from the boiler to the oxygen supply pipe, wherein an injection port of the oxygen supply pipe is disposed on an upstream side of an injection portion of the burner.
摘要翻译: 一种氧燃料燃烧锅炉设备,包括:空气分离单元,用于通过从空气中分离氮气来制造氧气,具有用于燃烧从空气分离单元和粉煤供应的氧气的燃烧器的锅炉,以及用于将粉煤供应到 燃烧器,用于将从锅炉排出的燃烧废气排放到主系统管的排气再循环系统管,以及用于捕获从锅炉排出的废气中的二氧化碳的二氧化碳捕获单元,氧燃料燃烧锅炉设备 包括:用于将由空气分离单元制造的氧气供应到燃烧器中的主系统管的供氧管,以及用于将从锅炉排出的燃烧废气供应到氧气供应管的管,其中, 供氧管设置在燃烧器的喷射部分的上游侧。
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公开(公告)号:US08561555B2
公开(公告)日:2013-10-22
申请号:US12708268
申请日:2010-02-18
CPC分类号: F23C9/003 , F01K13/02 , F23C9/08 , F23C2202/00 , F23C2202/50 , F23L7/007 , F23L2900/07001 , F23N2027/02 , F23N2037/04 , F23N2041/10 , Y02C10/06 , Y02E20/322 , Y02E20/344
摘要: An oxyfuel combustion boiler plant having a first boiler and a second boiler for injecting gas including oxygen in higher concentration than that in the air, gas including carbon dioxide in higher concentration than that in the air, and fuel from a burner and generating steam by combustion gas in a furnace, respectively, comprising: an exhaust gas supply pipe for supplying exhaust gas discharged from the first boiler to a burner of the second boiler, and a gas flow rate control apparatus for controlling a flow rate of exhaust gas flowing through the exhaust gas supply pipe.
摘要翻译: 一种具有第一锅炉和第二锅炉的含氧燃烧锅炉设备,其包括比空气中浓度高的气体,包括比空气中浓度高的二氧化碳的气体和来自燃烧器的燃料,以及通过燃烧产生蒸汽的气体 分别包括:用于将从第一锅炉排出的排气供给到第二锅炉的燃烧器的排气供给管,以及用于控制流过排气的废气的流量的气体流量控制装置 供气管。
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公开(公告)号:US08461182B2
公开(公告)日:2013-06-11
申请号:US13122281
申请日:2009-09-30
IPC分类号: A61K31/04 , C07D215/38
CPC分类号: C07D401/06 , C07D401/14
摘要: PROBLEMTo provide a novel compound, a pharmaceutically acceptable salt or a hydrate thereof useful for preventing or treating for depression, anxiety disorders (such as generalized anxiety disorder, posttraumatic stress disorder, panic disorder, obsessive-compulsive disorder or social anxiety disorder), attention deficit disorder, mania, manic-depressive illness, schizophrenia, mood disorders, stress, sleep disorders, attacks, memory impairment, cognitive impairment, dementia, amnesia, delirium, obesity, eating disorder, appetite disorder, hyperphagia, bulimia, cibophobia, diabetes, cardiovascular diseases, hypertension, dyslipidemia, myocardial infarction, movement disorder (such as Parkinson's disease, epilepsy, convulsion or tremor), drug abuse, drug addiction or sexual dysfunction, based on a melanin-concentrating hormone receptor (MCH receptor) antagonistic action.SOLUTIONA compound, a pharmaceutically acceptable salt or a hydrate thereof represented by the formula (I).
摘要翻译: 提供用于预防或治疗抑郁症,焦虑症(例如广泛性焦虑症,创伤后应激障碍,恐慌症,强迫症或社会焦虑症)的新型化合物,其药学上可接受的盐或水合物,注意力 缺陷障碍,躁狂症,躁狂抑郁症,精神分裂症,情绪障碍,压力,睡眠障碍,攻击,记忆障碍,认知障碍,痴呆,遗忘症,del妄,肥胖,进食障碍,食欲障碍,食欲过盛,贪食症, 基于黑色素浓度激素受体(MCH受体)拮抗作用的心血管疾病,高血压,血脂异常,心肌梗塞,运动障碍(例如帕金森病,癫痫,惊厥或震颤),药物滥用,药物成瘾或性功能障碍。 解决方案由式(I)表示的化合物,其药学上可接受的盐或其水合物。
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公开(公告)号:US08259344B2
公开(公告)日:2012-09-04
申请号:US12333627
申请日:2008-12-12
申请人: Hidehisa Mabuchi , Tsuyoshi Shibata
发明人: Hidehisa Mabuchi , Tsuyoshi Shibata
IPC分类号: G06F15/00
CPC分类号: G06F15/00 , B41J19/142 , B41J29/02 , B41J29/393
摘要: There is provided an ink jet printing apparatus in which unevenness that may occur at the edges of printing areas can be reduced also for various printing media including unspecified printing media. In the ink jet printing apparatus which uses a print head for ejecting ink and performs printing by scanning a predetermined area on a printing medium with the print head multiple times, the multiple times of scan including a forward scan and a backward scan, the apparatus comprising: a control unit that cases the print head to print patterns each of which is printed through multiple times of scan of the print head and has different portions in a time interval between the multiple times of scan, with different printing ratios for the multiple times of scan; and a setting unit that sets the printing ratios based on the test patterns.
摘要翻译: 提供了一种喷墨打印设备,其中,对于包括未指定的打印介质的各种打印介质,可以减少在打印区域的边缘处可能发生的不均匀性。 在使用用于喷墨的打印头并通过在打印头上多次扫描打印介质上的预定区域进行打印的喷墨打印设备中,包括正扫描和反向扫描的多次扫描包括 :控制单元,其将打印头设置为打印通过打印头的多次扫描打印的图案,并且在多次扫描之间的时间间隔中具有不同的部分,具有不同的打印倍数 扫描 以及设置单元,其基于测试图案来设置打印率。
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公开(公告)号:US08038247B2
公开(公告)日:2011-10-18
申请号:US12362338
申请日:2009-01-29
IPC分类号: B41J2/205
CPC分类号: B41J2/0458 , B41J2/04508
摘要: A recording apparatus for recording an image on a recording medium by scanning the recording medium with a recording head for discharging ink includes a thinning unit configured to thin data for discharging ink by the recording head on a plurality of areas formed by dividing scanning regions including at least a first scanning region and a second scanning region to be recorded each by one scan of the recording head in the scan direction, and a recording head drive unit configured to discharge ink by driving the recording head based on data which has been thinned by the thinning unit, wherein a boundary between the areas in the first scanning region is located in a different position from that of a boundary between areas in the second scanning region, which is adjacent to the first scanning region, in the scan direction.
摘要翻译: 一种用于通过用记录头扫描记录介质在记录介质上记录图像的记录装置,包括:稀疏单元,被配置为将由记录头排出的墨的数据薄化在多个区域上,所述多个区域由扫描区域 至少第一扫描区域和第二扫描区域被记录在扫描方向上的记录头的一次扫描,以及记录头驱动单元,被配置为基于通过所述扫描方向被变薄的数据驱动记录头来喷射墨水 其中第一扫描区域中的区域之间的边界与扫描方向上与第一扫描区域相邻的第二扫描区域中的区域之间的边界位于不同的位置。
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公开(公告)号:US20110178304A1
公开(公告)日:2011-07-21
申请号:US13122281
申请日:2009-09-30
IPC分类号: C07D401/10
CPC分类号: C07D401/06 , C07D401/14
摘要: Problem To provide a novel compound, a pharmaceutically acceptable salt or a hydrate thereof useful for preventing or treating for depression, anxiety disorders (such as generalized anxiety disorder, posttraumatic stress disorder, panic disorder, obsessive-compulsive disorder or social anxiety disorder), attention deficit disorder, mania, manic-depressive illness, schizophrenia, mood disorders, stress, sleep disorders, attacks, memory impairment, cognitive impairment, dementia, amnesia, delirium, obesity, eating disorder, appetite disorder, hyperphagia, bulimia, cibophobia, diabetes, cardiovascular diseases, hypertension, dyslipidemia, myocardial infarction, movement disorder (such as Parkinson's disease, epilepsy, convulsion or tremor), drug abuse, drug addiction or sexual dysfunction, based on a melanin-concentrating hormone receptor (MCH receptor) antagonistic action.Solution A compound, a pharmaceutically acceptable salt or a hydrate thereof represented by the formula (I).
摘要翻译: 问题提供用于预防或治疗抑郁症,焦虑症(例如广泛性焦虑症,创伤后应激障碍,恐慌症,强迫症或社会焦虑症)的新型化合物,其药学上可接受的盐或水合物,注意力 缺陷障碍,躁狂症,躁狂抑郁症,精神分裂症,情绪障碍,压力,睡眠障碍,攻击,记忆障碍,认知障碍,痴呆,遗忘症,del妄,肥胖,进食障碍,食欲障碍,食欲过盛,贪食症, 基于黑色素浓度激素受体(MCH受体)拮抗作用的心血管疾病,高血压,血脂异常,心肌梗塞,运动障碍(例如帕金森病,癫痫,惊厥或震颤),药物滥用,药物成瘾或性功能障碍。 溶液由式(I)表示的化合物,其药学上可接受的盐或其水合物。
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