Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the same
    3.
    发明授权
    Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the same 有权
    氟化环烯烃聚合物,氟化环烯烃单体及其聚合物的制备方法及其用途

    公开(公告)号:US06875819B2

    公开(公告)日:2005-04-05

    申请号:US10312506

    申请日:2002-04-25

    IPC分类号: C08G61/08 C08F8/04

    CPC分类号: C08G61/08

    摘要: The present invention is to provide a fluorine-containing polymer having excellent light transmission in the vacuum ultraviolet region of not more than 193 nm, a monomer favorably used for preparing the fluorine-containing polymer, a process for preparing the fluorine-containing polymer, and uses of the fluorine-containing polymer. The fluorine-containing polymer has at least a repeated unit structure represented by the following formula (1) and has an absorption coefficient of not more than 3.0 μm−1 at 157 nm of ultraviolet rays. wherein R1 to R12 are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, or the like; X1 is —CRaRb—, —NRa— or —PRa— (Ra and Rb are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, hydrogen, —O—, —S—, an alkyl group of 1 to 20 carbon atoms, or the like); at least one of R1 to R12 and X1 is fluorine or a fluorine-containing group; and n is 0 or an integer of 1 to 3.

    摘要翻译: 本发明提供一种在不大于193nm的真空紫外区域中具有优异透光性的含氟聚合物,有利地用于制备含氟聚合物的单体,制备含氟聚合物的方法,以及 使用含氟聚合物。 含氟聚合物至少具有由下式(1)表示的重复单元结构,并且在157nm处的紫外线具有不大于3.0μm-1的吸收系数。其中R 1至R“ 12>各自为氟,碳原子数1〜20的含氟烷基等; X 1为-CR a R b - , - NR a - 或-PR a - (R 5'和R b各自为氟,含氟烷基为 1〜20个碳原子,氢,-O - , - S-,1〜20个碳原子的烷基等); R 1至R 12和X 1中的至少一个为氟或含氟基团; n为0或1〜3的整数。