公开(公告)号：US5901031A

公开(公告)日：1999-05-04

申请号：US594771

申请日：1996-01-31

Applicant: Tsutomu Ishige ,  Yasuhiro Negoro ,  Yuji Iyoda ,  Yasutaka Fujii ,  Katsuhiko Tanaka

Inventor： Tsutomu Ishige ,  Yasuhiro Negoro ,  Yuji Iyoda ,  Yasutaka Fujii ,  Katsuhiko Tanaka

IPC: H01G5/16 ,  H01G5/00

CPC classification number: H01G5/16

Abstract: A reference electrode is fixed on the bottom of a concave portion of a substrate. A movable electrode is provided so that its electrode face faces that of the reference electrode at an interval to form a capacitor by the movable and reference electrodes. A driving electrode for driving the movable electrode is fixed on the substrate at an interval from the movable electrode. The distance 2L between the driving and movable electrodes is twice the distance L between the movable and reference electrodes. An external bias voltage is applied between the driving and movable electrodes to deflect the movable electrode. This doubles the range of the displacement of the movable electrode, thereby increasing the capacity change rate of the variable capacitor.

Abstract translation: 参考电极固定在基板的凹部的底部。 设置可动电极，使得其电极面与参考电极的电极表面间隔一定距离，以通过可移动和参考电极形成电容器。 用于驱动可动电极的驱动电极以可动电极的间隔固定在基板上。 驱动电极和可动电极之间的距离2L是可移动电极和参考电极之间的距离L的两倍。 在驱动电极和可动电极之间施加外部偏置电压以使可动电极偏转。 这使可动电极的位移范围翻倍，从而增加了可变电容器的容量变化率。

公开(公告)号：US5561248A

公开(公告)日：1996-10-01

申请号：US211710

申请日：1994-04-21

Applicant: Yasuhiro Negoro

Inventor： Yasuhiro Negoro

IPC: G01P15/08 ,  G01P15/125 ,  H01L21/308 ,  H01L29/84

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0828

Abstract: An acceleration sensor having movable and stationary electrodes electrically insulated from each other in a reliable manner to improve the accuracy and sensitivity in the detection of acceleration. The acceleration sensor includes an upper substrate (1) of a low resistivity silicon material, a lower substrate (2) of an insulating material provided under the upper substrate (1), and an insulating groove (5) perforating the upper substrate (1) completely from the upper to lower side thereof and around the entire periphery of a support beam (4) in the upper substrate (1). By using the upper substrate (1), stationary blocks (6) are formed separately on the opposite sides of the support beam (4) in confronting relation therewith. As a result, the support beam (4) and the stationary blocks (6), each being formed of the same low resistance material, are electrically insulated from each other by the insulating groove (5). An acceleration signal is produced on the basis of a variation in electrostatic capacitance across movable and stationary electrodes, which are constituted by a mass portion (4C) of the support beam (4) and each of the stationary blocks (6).

Abstract translation: PCT No.PCT / JP93 / 01241 Sec。 371日期1994年04月21日 102（e）日期1994年4月21日PCT提交1993年9月2日PCT公布。 公开号WO94 / 06024 日期1994年3月17日具有以可靠的方式彼此电绝缘的可动和固定电极的加速度传感器，以提高加速度检测中的精度和灵敏度。 加速度传感器包括低电阻率硅材料的上基板（1），设置在上基板（1）下方的绝缘材料的下基板（2）和穿孔上基板（1）的绝缘槽（5） 完全从其上侧到下侧以及上部基板（1）中的支撑梁（4）的整个周边。 通过使用上基板（1），与支撑梁（4）的相对侧分别形成有固定块（6）。 结果，由相同的低电阻材料形成的支撑梁（4）和固定块（6）通过绝缘槽（5）彼此电绝缘。 基于由支撑梁（4）的质量部分（4C）和每个固定块（6）构成的可移动和固定电极的静电电容的变化产生加速度信号。

公开(公告)号：US06416831B1

公开(公告)日：2002-07-09

申请号：US08993615

申请日：1997-12-18

Applicant: Tetsuzo Hara ,  Yasuhiro Negoro

Inventor： Tetsuzo Hara ,  Yasuhiro Negoro

IPC: B65D8120

CPC classification number: B81B7/0077 ,  B81C2203/0145 ,  G01L9/0019 ,  G01L9/0042 ,  G01P1/023 ,  G01P5/00 ,  G01P2015/0828 ,  H01L23/10 ,  H01L2924/0002 ,  H01L2924/01079 ,  Y10T428/1317 ,  H01L2924/00

Abstract: An evacuated package with highly reliable vacuum-sealing and a method for producing an evacuated package with the evacuatable package. A lid portion is joined onto a substrate with an element accommodated in an evacuated space formed by the substrate and the lid portion. A connecting hole in the lid portion extends from the space to the top face of the lid portion. A metal film is formed around the complete peripheral region of the opening of the connecting hole, and a thermo-melting material is joined to the metal film to close the opening of the connecting hole so as to seal the element in the evacuated space. Before closing the opening of the connecting hole with the thermo-melting material, the space is evacuated, and simultaneously, the thermo-melting material is melted by heat and left until completely degassed in a vacuum. The degassed thermo-melting material is then pressed and joined to the metal film around the periphery of the opening of the connecting hole to close the opening with the thermo-melting material and vacuum-seal the space.

Abstract translation: 具有高度可靠的真空密封的抽真空包装以及用可抽出包装生产抽真空包装的方法。 将盖部分接合到具有容纳在由基板和盖部分形成的抽空空间中的元件的基板上。 盖部分中的连接孔从盖部分的空间延伸到顶面。 在连接孔的开口的整个周边区域周围形成金属膜，并且将热熔材料接合到金属膜上以封闭连接孔的开口，从而将元件密封在抽空空间中。 在用热熔材料关闭连接孔的开口之前，将空间抽真空，同时，热熔材料通过加热熔化并保持直至在真空中完全脱气。 然后将脱气的热熔材料按压并连接到连接孔的开口周围的金属膜，以用热熔材料封闭开口并真空密封该空间。

公开(公告)号：US06313563B1

公开(公告)日：2001-11-06

申请号：US09537908

申请日：2000-03-28

Applicant: Michio Kadota ,  Hiroshi Kawai ,  Junya Ago ,  Hideya Horiuchi ,  Yasuhiro Negoro

Inventor： Michio Kadota ,  Hiroshi Kawai ,  Junya Ago ,  Hideya Horiuchi ,  Yasuhiro Negoro

IPC: H03H925

CPC classification number: H03H9/02669

Abstract: An edge reflection type surface acoustic wave device includes a surface acoustic wave substrate made of a piezoelectric single crystal and having first and second opposite edges, and at least one interdigital transducer disposed on the surface acoustic wave substrate. The surface acoustic wave device is constructed such that a Shear Horizontal type surface acoustic wave is reflected between the first and second opposite edges. The surface acoustic wave substrate is made of an ion-implanted piezoelectric single crystal substrate.

Abstract translation: 边缘反射型声表面波装置包括由压电单晶制成并具有第一和第二相对边缘的表面声波基片和设置在表面声波基片上的至少一个叉指换能器。 表面声波装置被构造成使得剪切水平型表面声波在第一和第二相对边缘之间被反射。 表面声波衬底由离子注入的压电单晶衬底制成。

公开(公告)号：US06617183B2

公开(公告)日：2003-09-09

申请号：US09838031

申请日：2001-04-19

Applicant: Michio Kadota ,  Yasuhiro Negoro ,  Yoshinori Miura

Inventor： Michio Kadota ,  Yasuhiro Negoro ,  Yoshinori Miura

IPC: H01L21265

CPC classification number: H01L21/425 ,  C30B23/02 ,  C30B29/16 ,  H01L33/0087 ,  H01L33/0095

Abstract: A method for forming a p-type semiconductor film comprises the steps of: providing on a substrate a group II-VI compound semiconductor film which is doped with a p-type impurity and comprises either MgXZn1−XO (0≦X≦1) or CdXZn1−XO (0≦X≦1) and activating the p-type impurity by annealing the doped semiconductor film.

Abstract translation: 一种形成p型半导体膜的方法包括以下步骤：在衬底上提供掺杂有p型杂质的II-VI族化合物半导体膜，其包含MgXZn1-XO（0≤x≤1） ）或CdXZn1-XO（0 <= X <= 1），并通过退火掺杂的半导体膜激活p型杂质。

公开(公告)号：US06386033B1

公开(公告)日：2002-05-14

申请号：US09332458

申请日：1999-06-14

Applicant: Yasuhiro Negoro

Inventor： Yasuhiro Negoro

IPC: G01P904

CPC classification number: G01C19/5719

Abstract: An angular velocity sensor includes: a board in the form of a flat plate; a rotational vibrator extended to the right and left from a central axis vertical to the board at the center of rotational vibration over the board and supported at the location of the central axis by rotational supporting beams so as to be rotationally vibrated; a first vibrator located on the left side of the rotational vibrator and supported by first supporting beams; a second vibrator located on the right side of the rotational vibrator and supported by second supporting beams; a rotational vibration generator for vibrating the second vibrator backward and forward when the first vibrator is vibrated forward and backward by giving rotational vibration to the rotational vibrator; a first displacement detector for detecting displacement of the first vibrator vibrated to the right and left when an angular velocity is applied around the central axis of the rotational vibrator in the state that rotational vibration is given to the rotational vibrator by the rotational vibration generator; and a second displacement detector for detecting displacement of the second vibrator vibrated to the right and left when an angular velocity is applied around the central axis of the rotational vibrator in the state that rotational vibration is given to the rotational vibrator by the rotational vibration generator.

Abstract translation: 角速度传感器包括：平板形式的板; 旋转振动器，其从在板上方的旋转振动中心的垂直于板的中心轴向左右延伸，并且通过旋转支撑梁在中心轴线的位置处被支撑以便被旋转地振动; 第一振动器，位于旋转振动器的左侧并由第一支撑梁支撑; 第二振动器，位于旋转振动器的右侧并由第二支撑梁支撑; 旋转振动发生器，用于当第一振动器向旋转振动器产生旋转振动而向前和向后振动时，使第二振动器向前和向前振动; 第一位移检测器，用于检测在通过旋转振动发生器向旋转振动器施加旋转振动的状态下，当围绕旋转振动器的中心轴施加角速度时，检测向左右振动的第一振动体的位移; 以及第二位移检测器，用于检测在通过旋转振动发生器向旋转振动器施加旋转振动的状态下，当围绕旋转振动器的中心轴施加角速度时，检测向左右振动的第二振动体的位移。

公开(公告)号：US5892154A

公开(公告)日：1999-04-06

申请号：US934713

申请日：1997-09-22

Applicant: Yasuhiro Negoro

Inventor： Yasuhiro Negoro

IPC: G01P15/125 ,  G01P15/18

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/0828

Abstract: An acceleration detection device is provided which is capable of detecting accelerations in two or more directions. The base end of a beam is fixed to a support section on a board. A weight is provided in the front end of the beam which is formed so as to extend horizontally along the board surface with a gap with it and the surface of the board. The position of the center of gravity G of the weight is set at a position spaced perpendicularly apart from the center axis of the beam in order that the inertial moment acts when an acceleration along the length (in the X direction) of the beam is applied. The front end surface of the weight is formed into an upright surface of a movable electrode, and a fixed electrode is formed at a position facing the movable electrode with a gap therebetween. When an acceleration in the X or Y direction is applied, the beam is flexed upwardly or downwardly in proportion to the magnitude of the acceleration, causing the weight to be inclined upwardly or downwardly while being displaced upwardly or downwardly. Thus, the electrostatic capacity between the movable electrode and the fixed electrode increases or decreases. The magnitude of the acceleration can be detected on the basis of the amount of such change of the electrostatic capacity.

Abstract translation: 提供一种能够检测两个或更多个方向上的加速度的加速度检测装置。 梁的基端固定在板上的支撑部分上。 在梁的前端设置有一个重量，梁的前端形成为沿着板表面与其表面和板的表面间隙水平延伸。 重量的重心G的位置被设定在与梁的中心轴线垂直隔开的位置处，以便当沿着梁的长度（在X方向上）的加速度时惯性力矩作用 。 重物的前端面形成为可动电极的直立面，固定电极形成在与可动电极相对的位置上，间隙为间隙。 当施加X或Y方向的加速度时，梁与加速度的大小成比例地向上或向下弯曲，导致重量向上或向下倾斜，同时向上或向下移动。 因此，可动电极和固定电极之间的静电电容增大或减小。 可以基于静电容量的这种变化量来检测加速度的大小。