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    Polishing pad and method for manufacturing semiconductor device
    3.
    发明申请
    Polishing pad and method for manufacturing semiconductor device 有权
    抛光垫及半导体器件制造方法

    公开(公告)号：US20060037699A1

    公开(公告)日：2006-02-23

    申请号：US10536621

    申请日：2003-11-27

    申请人： Masahiko Nakamori ,  Tetsuo Shimomura ,  Takatoshi Yamada ,  Kazuyuki Ogawa ,  Atsushi Kazuno ,  Kimihiro Watanabe

    发明人： Masahiko Nakamori ,  Tetsuo Shimomura ,  Takatoshi Yamada ,  Kazuyuki Ogawa ,  Atsushi Kazuno ,  Kimihiro Watanabe

    IPC分类号： C23F1/00

    CPC分类号： B24B37/205 ,  B24B37/013

    摘要： A polishing pad enabling a highly precise optical endpoint sensing during the polishing process and thus having excellent polishing characteristics (such as surface uniformity and in-plane uniformity) is disclosed. A polishing pad enabling to obtain the polishing profile of a large area of a wafer is also disclosed. A polishing pad of a first invention comprises a light-transmitting region having a transmittance of not less than 50% over the wavelength range of 400 to 700 nm. A polishing pad of a second invention comprises a light-transmitting region having a thickness of 0.5 to 4 mm and a transmittance of not less than 80% over the wavelength range of 600 to 700 nm. A polishing pad of a third invention comprises a light-transmitting region arranged between the central portion and the peripheral portion of the polishing pad and having a length (D) in the diametrical direction which is three times or more longer than the length (L) in the circumferential direction.

    摘要翻译： 公开了一种抛光垫，其能够在抛光过程中进行高精度的光学终点感测，因此具有优异的抛光特性（例如表面均匀性和面内均匀性）。 还公开了能够获得大面积晶片的抛光轮廓的抛光垫。 第一发明的抛光垫包括在400〜700nm的波长范围内具有不小于50％透射率的透光区域。 第二发明的抛光垫包括在600至700nm的波长范围内具有0.5至4mm厚度的透光区域和不小于80％的透光率。 第三发明的抛光垫包括布置在抛光垫的中心部分和周边部分之间的透光区域，其沿直径方向的长度（D）比长度（L）长三倍或更长， 在圆周方向。

    Vitrified bond tool and method of manufacturing the same
    4.
    发明授权
    Vitrified bond tool and method of manufacturing the same 有权
    陶瓷结合工具及其制造方法

    公开(公告)号：US07044990B2

    公开(公告)日：2006-05-16

    申请号：US10814166

    申请日：2004-04-01

    申请人： Junji Ishizaki ,  Kenji Ito ,  Tsuyoshi Fujii ,  Kimihiro Watanabe

    发明人： Junji Ishizaki ,  Kenji Ito ,  Tsuyoshi Fujii ,  Kimihiro Watanabe

    IPC分类号： B24D1/00 ,  B24B9/00

    CPC分类号： B24B53/12 ,  B24D18/00

    摘要： A vitrified bond tool including: (a) a support body; (b) a vitrified bond layer which is formed on a working surface of the support body; and (c) a plurality of abrasive grains which are held by the vitrified bond layer so as to be fixed relative to the working surface of the support body and which are spaced apart from each other with spacing between the adjacent ones of the abrasive grains. This vitrified bond tool is advantageously manufactured according to a method including the steps of (i) forming a pattern layer which includes a vitrified bond, in a predetermined pattern on the working surface of the support body; (ii) sprinkling the abrasive grains over the pattern layer before the pattern layer is dried; and (iii) firing the pattern layer and the abrasive grains which are bonded to the pattern layer and are arranged in the predetermined pattern on the working surface of the support body.

    摘要翻译： 一种玻璃化粘合工具，包括：（a）支撑体; （b）玻璃化接合层，其形成在所述支撑体的工作表面上; 和（c）由玻璃化接合层保持的多个磨粒，以相对于支撑体的工作面固定，并且在相邻的磨粒之间具有间隔。 该玻璃化粘合工具有利地根据包括以下步骤的方法制造：（i）在支撑体的工作表面上以预定图案形成包括玻璃化粘结的图案层; （ii）在图案层干燥之前将磨料颗粒洒在图案层上; 和（iii）烧结图案层和与图案层结合并以预定图案布置在支撑体的工作表面上的磨粒。

    Vitrified bond tool and method of manufacturing the same
    5.
    发明授权
    Vitrified bond tool and method of manufacturing the same 有权
    陶瓷结合工具及其制造方法

    公开(公告)号：US06755720B1

    公开(公告)日：2004-06-29

    申请号：US09613427

    申请日：2000-07-10

    申请人： Junji Ishizaki ,  Kenji Ito ,  Tsuyoshi Fujii ,  Kimihiro Watanabe

    发明人： Junji Ishizaki ,  Kenji Ito ,  Tsuyoshi Fujii ,  Kimihiro Watanabe

    IPC分类号： B24B100

    CPC分类号： B24B53/12 ,  B24D18/00

    摘要： A vitrified bond tool including: (a) a support body; (b) a vitrified bond layer which is formed on a working surface of the support body; and (c) a plurality of abrasive grains which are held by the vitrified bond layer so as to be fixed relative to the working surface of the support body and which are spaced apart from each other with spacing between the adjacent ones of the abrasive grains. This vitrified bond tool is advantageously manufactured according to a method including the steps of (i) forming a pattern layer which includes a vitrified bond, in a predetermined pattern on the working surface of the support body; (ii) sprinkling the abrasive grains over the pattern layer before the pattern layer is dried; and (iii) firing the pattern layer and the abrasive grains which are bonded to the pattern layer and are arranged in the predetermined pattern on the working surface of the support body.

    摘要翻译： 一种玻璃化粘合工具，包括：（a）支撑体; （b）玻璃化接合层，其形成在所述支撑体的工作表面上; 和（c）由玻璃化接合层保持的多个磨粒，以相对于支撑体的工作面固定，并且在相邻的磨粒之间具有间隔。 该玻璃化粘合工具有利地根据包括以下步骤的方法制造：（i）在支撑体的工作表面上以预定图案形成包括玻璃化粘结的图案层; （ii）在图案层干燥之前将磨料颗粒洒在图案层上; 和（iii）烧结图案层和与图案层结合并以预定图案布置在支撑体的工作表面上的磨粒。