公开(公告)号：US5386430A

公开(公告)日：1995-01-31

申请号：US92498

申请日：1993-07-16

申请人： Yasuo Yamagishi ,  Kanae Shimizu ,  Daisuke Mizutani ,  Tamotsu Owada ,  Yoshikatsu Ishizuki ,  Hideya Hashii

发明人： Yasuo Yamagishi ,  Kanae Shimizu ,  Daisuke Mizutani ,  Tamotsu Owada ,  Yoshikatsu Ishizuki ,  Hideya Hashii

IPC分类号： B23K26/00 ,  B23K26/03 ,  B23K26/06 ,  B23K26/38 ,  B23K26/40 ,  B23K101/42 ,  H01L21/768 ,  H01L23/522 ,  H05K1/02 ,  H05K3/00 ,  H01S3/22 ,  B05D3/06 ,  B29C37/00 ,  B23K

CPC分类号： B23K26/032 ,  B23K26/123 ,  B23K26/402 ,  H05K3/0035 ,  B23K2203/42 ,  H05K1/0269 ,  H05K2203/0207 ,  H05K2203/056 ,  H05K2203/163

摘要： An excimer laser ablation processing for forming via holes in a resin film by irradiation of an excimer laser wherein, the emission of light caused during the decomposition of the resin during the processing is detected, its intensity is measured, and the endpoint of the processing is judged or a comparison is made of the positions of light emission and the design positions for processing to examine for the presence of defects. Provision is made of a means for measuring the intensity and a means for judging the endpoint of the processing from the changes in the intensity of light emission during the processing.

摘要翻译： 一种准分子激光烧蚀处理，用于通过照射准分子激光器在树脂膜中形成通孔，其中检测在处理期间树脂分解期间引起的光的发射，测量其强度，并且处理的终点为 判断或比较发光的位置和处理的设计位置以检查是否存在缺陷。 提供了用于测量强度的装置和用于根据处理期间的发光强度的变化来判断处理的端点的装置。

公开(公告)号：US20070080349A1

公开(公告)日：2007-04-12

申请号：US11439994

申请日：2006-05-25

申请人： Atsuyuki Hoshino ,  Katsunori Misaki ,  Akihiro Matsui ,  Hideya Hashii

发明人： Atsuyuki Hoshino ,  Katsunori Misaki ,  Akihiro Matsui ,  Hideya Hashii

IPC分类号： H01L29/04

CPC分类号： G02F1/136227 ,  G02F1/133553 ,  G02F2001/136231 ,  G02F2201/122 ,  G02F2201/40 ,  G02F2203/09

摘要： The present invention relates to a substrate for a liquid crystal display device and a liquid crystal display device having the substrate, an object of the invention is to provide such a substrate for a display device that can be obtained by a simple production method with high reliability, and a liquid crystal display device having the same. A substrate for a display device contains: an accumulated electrode having an accumulated structure containing a lower layer formed on a substrate, and a upper layer containing ZnO and formed on the lower layer; an insulating film covering the accumulated electrode; a contact hole opening in the insulating film on the accumulated electrode; and a pixel electrode formed on the insulating film and being connected directly to the upper layer of the accumulated electrode through the contact hole.

摘要翻译： 本发明涉及一种液晶显示装置用基板和具有该基板的液晶显示装置，其目的在于提供一种能够通过简单的可靠性高的制造方法得到的显示装置用基板 ，以及具有该液晶显示装置的液晶显示装置。 用于显示装置的基板包括：累积电极，其具有包含形成在基板上的下层的累积结构，以及形成在下层上的含有ZnO的上层; 覆盖积聚电极的绝缘膜; 在所述积聚电极上的所述绝缘膜上开口的接触孔; 以及形成在绝缘膜上并通过接触孔直接连接到积聚电极的上层的像素电极。

公开(公告)号：US07956363B2

公开(公告)日：2011-06-07

申请号：US11439994

申请日：2006-05-25

申请人： Atsuyuki Hoshino ,  Katsunori Misaki ,  Akihiro Matsui ,  Hideya Hashii

发明人： Atsuyuki Hoshino ,  Katsunori Misaki ,  Akihiro Matsui ,  Hideya Hashii

IPC分类号： H01L29/786 ,  H01L27/14 ,  H01L29/04

CPC分类号： G02F1/136227 ,  G02F1/133553 ,  G02F2001/136231 ,  G02F2201/122 ,  G02F2201/40 ,  G02F2203/09

摘要： The present invention relates to a substrate for a liquid crystal display device and a liquid crystal display device having the substrate, an object of the invention is to provide such a substrate for a display device that can be obtained by a simple production method with high reliability, and a liquid crystal display device having the same. A substrate for a display device contains: an accumulated electrode having an accumulated structure containing a lower layer formed on a substrate, and a upper layer containing ZnO and formed on the lower layer; an insulating film covering the accumulated electrode; a contact hole opening in the insulating film on the accumulated electrode; and a pixel electrode formed on the insulating film and being connected directly to the upper layer of the accumulated electrode through the contact hole.

摘要翻译： 本发明涉及一种液晶显示装置用基板和具有该基板的液晶显示装置，其目的在于提供一种能够通过简单的可靠性高的制造方法得到的显示装置用基板 ，以及具有该液晶显示装置的液晶显示装置。 用于显示装置的基板包括：累积电极，其具有包含形成在基板上的下层的累积结构，以及形成在下层上的含有ZnO的上层; 覆盖积聚电极的绝缘膜; 在所述积聚电极上的所述绝缘膜上开口的接触孔; 以及形成在绝缘膜上并通过接触孔直接连接到积聚电极的上层的像素电极。