公开(公告)号：US06188546B1

公开(公告)日：2001-02-13

申请号：US08957386

申请日：1997-10-23

申请人： Yasuyuki Nakajima ,  Keii Ueno ,  Michio Takahashi ,  Masayasu Fujisawa ,  Katsuya Fukasawa ,  Issei Takemoto ,  Kooji Serizawa ,  Kazushige Hashimoto ,  Shigeo Nakamura ,  Yukimori Umakoshi ,  Mikio Tokuyama

发明人： Yasuyuki Nakajima ,  Keii Ueno ,  Michio Takahashi ,  Masayasu Fujisawa ,  Katsuya Fukasawa ,  Issei Takemoto ,  Kooji Serizawa ,  Kazushige Hashimoto ,  Shigeo Nakamura ,  Yukimori Umakoshi ,  Mikio Tokuyama

IPC分类号： G11B560

CPC分类号： G11B5/4853 ,  G11B5/3103 ,  G11B5/48 ,  G11B5/58

摘要： The magnetic head assembly including a magnetic head having a terminal composed of a conductive film and a supporting spring. The supporting spring has interconnecting patterns (lines) on the top thereof and a projective electrode. The terminal of the magnetic head is electrically connected to the projective electrode of the supporting spring by a solderless, direct contact connection. The magnetic head is fixed to the supporting spring by using a non-electrical bonding agent. This structure makes it possible to stabilize the position of the magnetic head assembly and the relative speed variation between the magnetic head element and the magnetic disk, thereby enhancing the reliability of the magnetic disk apparatus.

摘要翻译： 磁头组件包括具有由导电膜构成的端子和支撑弹簧的磁头。 支撑弹簧在其顶部具有互连图案（线）和突出电极。 磁头的端子通过无焊接的直接接触连接电连接到支撑弹簧的突出电极。 磁头通过非电接合剂固定在支撑弹簧上。 这种结构使得可以使磁头组件的位置和磁头元件与磁盘之间的相对速度变化稳定，从而提高磁盘装置的可靠性。

公开(公告)号：US5349745A

公开(公告)日：1994-09-27

申请号：US69586

申请日：1993-06-01

申请人： Takashi Kawabe ,  Eiji Ashida ,  Moriaki Fuyama ,  Tadayuki Iwakura ,  Hiroshi Fukui ,  Yoshikazu Tsuji ,  Shunichiro Kuwatsuka ,  Harunobu Saito ,  Yoshiki Hagiwara ,  Issei Takemoto ,  Masayasu Fujisawa

发明人： Takashi Kawabe ,  Eiji Ashida ,  Moriaki Fuyama ,  Tadayuki Iwakura ,  Hiroshi Fukui ,  Yoshikazu Tsuji ,  Shunichiro Kuwatsuka ,  Harunobu Saito ,  Yoshiki Hagiwara ,  Issei Takemoto ,  Masayasu Fujisawa

IPC分类号： G11B5/31 ,  G11B5/42

CPC分类号： G11B5/3116 ,  G11B5/3163 ,  Y10T29/49052

摘要： A method of fabricating a thin-film magnetic in which a mask pattern in etching a bottom pole is formed of first and second mask films in this order when viewed from the bottom pole, the first mask film is used for defining, by self-alignment, the length of that portion of the side edge of a top pole which is nearly perpendicular to a magnetic gap, the second mask film makes it possible to etch the bottom pole with high dimensional accuracy, a non-magnetic film is formed on the mask pattern having the bottom pole thereunder and the exposed region of a substrate, and the top pole is formed after the mask pattern has been exposed and removed.

摘要翻译： 一种制造薄膜磁性的方法，其中当从底极观察时，其中蚀刻底极中的掩模图案依次由第一和第二掩模膜形成，第一掩模膜用于通过自对准 ，几乎垂直于磁隙的顶极的侧边缘部分的长度，第二掩模膜使得可以以高尺寸精度蚀刻底极，在掩模上形成非磁性膜 具有底极的图案和基板的曝光区域，并且在掩模图案被曝光和去除之后形成顶极。

公开(公告)号：US5560743A

公开(公告)日：1996-10-01

申请号：US26770

申请日：1993-03-05

申请人： Hirotaka Imayama ,  Katsuya Fukasawa ,  Masayasu Fujisawa ,  Yoshiki Hagiwara

发明人： Hirotaka Imayama ,  Katsuya Fukasawa ,  Masayasu Fujisawa ,  Yoshiki Hagiwara

IPC分类号： B08B5/02 ,  B24C1/04 ,  B24C3/12 ,  B24C3/22 ,  B24C9/00 ,  B24C3/04

CPC分类号： B08B5/02 ,  B24C1/04 ,  B24C3/22 ,  B24C9/003

摘要： A fine grain milling method which mixes powder into a high-pressure fluid, and injects the mixture to a workpiece covered with a mask or pattern to process the workpiece to a desired shape. Another high-pressure fluid is injected to remove the powder adhering to the workpiece thereby enabling an accurate transfer of the mask or pattern to the workpiece.

摘要翻译： 一种细粉研磨方法，将粉末混合到高压流体中，并将​​混合物注入覆盖有掩模或图案的工件上，以将工件加工成所需的形状。 注入另一高压流体以除去附着在工件上的粉末，从而能够将掩模或图案精确地传递到工件。

公开(公告)号：US5947796A

公开(公告)日：1999-09-07

申请号：US561256

申请日：1995-11-21

申请人： Hirotaka Imayama ,  Katsuya Fukasawa ,  Masayasu Fujisawa ,  Yoshiki Hagiwara

发明人： Hirotaka Imayama ,  Katsuya Fukasawa ,  Masayasu Fujisawa ,  Yoshiki Hagiwara

IPC分类号： B08B5/02 ,  B24C1/04 ,  B24C3/12 ,  B24C3/22 ,  B24C9/00

CPC分类号： B08B5/02 ,  B24C1/04 ,  B24C3/22 ,  B24C9/003

摘要： A fine grain milling method mixes powder into a high-pressure fluid, and injects the mixture to a work material covered with a mask to form the work material to a desired shape. In addition, the method injects anther high-pressure fluid to the powder adhered to the work material to remove the powder. The method can accurately transfer the mask pattern to the work material.

摘要翻译： 细粒磨法将粉末混合到高压流体中，并将​​混合物注入覆盖有掩模的工作材料，以将工件材料形成所需的形状。 此外，该方法将另外的高压流体注入附着在工件上的粉末以除去粉末。 该方法可以将掩模图案精确地转移到工件上。

公开(公告)号：US5567333A

公开(公告)日：1996-10-22

申请号：US263915

申请日：1994-06-22

申请人： Yasuo Hira ,  Tamaki Toba ,  Hirotaka Imayama ,  Atsuko Ohkawa ,  Masayasu Fujisawa ,  Kazuo Nate ,  Hideki Sonobe ,  Saburo Suzuki ,  Eisei Togawa ,  Hiroshi Ishizaki ,  Yoshiki Hagiwara

发明人： Yasuo Hira ,  Tamaki Toba ,  Hirotaka Imayama ,  Atsuko Ohkawa ,  Masayasu Fujisawa ,  Kazuo Nate ,  Hideki Sonobe ,  Saburo Suzuki ,  Eisei Togawa ,  Hiroshi Ishizaki ,  Yoshiki Hagiwara

IPC分类号： B23K15/00 ,  C23F4/00 ,  G11B5/31 ,  G11B5/60 ,  H01L21/302 ,  H01L21/3065 ,  B44C1/22

CPC分类号： G11B5/3106 ,  G11B5/60 ,  G11B5/6005 ,  G11B5/3163

摘要： A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55.degree.-85.degree.. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15.degree.-60.degree. and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g. CH.sub.2 FCF.sub.3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF.sub.6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic head and magnetic disc.

摘要翻译： 磁头元件具有形成在其表面上的一个或多个轨道。 每个轨道形成为具有55°-85°的锥角。 为了形成轨道，进行离子铣削; 所使用的轨道基板允许倾斜角度为15°-60°并旋转; 并且作为离子研磨气体使用单独的氟化烃（例如CH 2 CF 3）气体或者所述氟化烃气体与Ar，SF 6等的混合气体。 因此，磁头轨道形状在磁头和磁盘之间的飞行高度变化很小。

公开(公告)号：US5456736A

公开(公告)日：1995-10-10

申请号：US26576

申请日：1993-03-05

申请人： Yoshiharu Waki ,  Masayasu Fujisawa ,  Shigeo Aikawa ,  Kenya Ohashi ,  Yukihiro Isono

发明人： Yoshiharu Waki ,  Masayasu Fujisawa ,  Shigeo Aikawa ,  Kenya Ohashi ,  Yukihiro Isono

IPC分类号： B24B37/04 ,  C09K11/68

CPC分类号： B24B37/04 ,  Y10S451/905

摘要： This invention provides a lap capable of reducing the pole recession produced between the substrate and the magnetic film when the air-bearing surface of a thin-film magnetic head is lapped, a lapping liquor used for such lapping, and a thin-film magnetic head having its air-bearing surface lapped by using them. Lapping is carried out by using a lap made of a material having both a phase of tin and a phase of brass with a greater rigidity in supporting the abrasive grains than tin, and a lapping liquor prepared by mixing an anionic surfactant (15) and an ampholytic surfactant (16). According to the present invention, it is possible to reduce the pole recession in the thin-film magnetic heads and to accordingly shorten the recording bit length of the magnetic discs.

摘要翻译： 本发明提供了一种能够减少在研磨薄膜磁头的空气轴承表面，用于研磨的研磨液和薄膜磁头的基板和磁性薄膜之间产生的极凹陷的搭接 通过使用它们的空气轴承表面进行研磨。 研磨是通过使用具有锡相和黄铜相的材料相比具有比锡更大的刚性支撑磨粒的材料制成的搭接，以及通过将阴离子表面活性剂（15）和 两性表面活性剂（16）。 根据本发明，可以减小薄膜磁头中的磁极退缩并相应地缩短磁盘的记录位长度。

公开(公告)号：US5371582A

公开(公告)日：1994-12-06

申请号：US99450

申请日：1993-07-30

申请人： Tamaki Toba ,  Atsuko Ohkawa ,  Yasuo Hira ,  Masayasu Fujisawa ,  Isao Hashimoto

发明人： Tamaki Toba ,  Atsuko Ohkawa ,  Yasuo Hira ,  Masayasu Fujisawa ,  Isao Hashimoto

IPC分类号： G01B11/06 ,  G01B11/22 ,  G02B5/18

CPC分类号： G01B11/0675 ,  G01B11/22

摘要： A thickness/depth measuring apparatus and method for measuring the thickness of a film forming a lattice-shaped mask and the depth of a groove formed on a workpiece during processing of the workpiece. The thickness/depth measuring apparatus and method provide for irradiating the workpiece with a coherent light beam, controlling the direction for linear polarization of the coherent light beam irradiated onto the workpiece, adjusting the incident angle of the coherent light beam irradiated onto the workpiece in a predetermined angular range, receiving and detecting reflected light reflected by the workpiece at different irradiated incident angles and including higher-order diffracted light; and calculating the thickness of the film and the depth of the groove in accordance with the intensity of the diffracted light detected.

摘要翻译： 用于测量形成格子状掩模的膜的厚度和在工件加工期间在工件上形成的凹槽的深度的厚度/深度测量装置和方法。 厚度/深度测量装置和方法提供用相干光束照射工件，控制照射到工件上的相干光束的线性偏振的方向，调节照射到工件上的相干光束的入射角 预定的角度范围，以不同的照射入射角接收和检测被工件反射的反射光，并包括高阶衍射光; 并且根据所检测的衍射光的强度来计算膜的厚度和凹槽的深度。

公开(公告)号：US06198601B1

公开(公告)日：2001-03-06

申请号：US09268711

申请日：1999-03-16

申请人： Yasuo Hira ,  Tamaki Toba ,  Hirotaka Imayama ,  Atsuko Ohkawa ,  Masayasu Fujisawa ,  Kazuo Nate ,  Hideki Sonobe ,  Saburo Suzuki ,  Eisei Togawa ,  Hiroshi Ishizaki ,  Yoshiki Hagiwara

发明人： Yasuo Hira ,  Tamaki Toba ,  Hirotaka Imayama ,  Atsuko Ohkawa ,  Masayasu Fujisawa ,  Kazuo Nate ,  Hideki Sonobe ,  Saburo Suzuki ,  Eisei Togawa ,  Hiroshi Ishizaki ,  Yoshiki Hagiwara

IPC分类号： G11B560

CPC分类号： G11B5/3106 ,  G11B5/3163 ,  G11B5/60 ,  G11B5/6005

摘要： A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55-85°. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15-60° and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g., CH2FCF3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic bead and magnetic disc.

摘要翻译： 磁头元件具有形成在其表面上的一个或多个轨道。 每个轨道形成为具有55-85°的锥角。 为了形成轨道，进行离子铣削; 所使用的轨道基板允许具有15-60°的倾斜角并旋转; 作为离子研磨气体使用单独的氟化烃（例如CH 2 CF 3）或所述氟化烃气体与Ar，SF 6等的混合气体。 因此，磁头轨道形状在磁珠和磁盘之间的飞行高度变化很小。

公开(公告)号：US06690544B2

公开(公告)日：2004-02-10

申请号：US10320386

申请日：2002-12-17

申请人： Atsuko Okawa ,  Yasuo Hira ,  Hirotaka Imayama ,  Masayasu Fujisawa ,  Saburou Suzuki ,  Eisei Togawa ,  Noriyuki Saiki ,  Nobuo Suzuki ,  Hiroshi Agari ,  Kiyoshi Akamatsu ,  Hiromu Chiba

发明人： Atsuko Okawa ,  Yasuo Hira ,  Hirotaka Imayama ,  Masayasu Fujisawa ,  Saburou Suzuki ,  Eisei Togawa ,  Noriyuki Saiki ,  Nobuo Suzuki ,  Hiroshi Agari ,  Kiyoshi Akamatsu ,  Hiromu Chiba

IPC分类号： G11B560

CPC分类号： G11B5/6005 ,  Y10T29/49041

摘要： A magnetic head slider including a plurality of rails adapted to face a magnetic disk. Each of the rails has a longitudinal extension direction substantially in a direction of rotation of the magnetic disk, and a protective film is provided on a floating surface of at least one of the rails. A thickness of the protective film at least in a direction transverse to the longitudinal extension direction of the at least one of the rails is not uniform in the transverse direction.

摘要翻译： 一种磁头滑块，包括适于面向磁盘的多个导轨。 每个轨道具有基本上在磁盘的旋转方向上的纵向延伸方向，并且保护膜设置在至少一个轨道的浮动表面上。 保护膜的至少沿横向于至少一个轨道的纵向延伸方向的方向的厚度在横向方向上不均匀。

公开(公告)号：US5910864A

公开(公告)日：1999-06-08

申请号：US773783

申请日：1996-10-22

申请人： Yasuo Hira ,  Tamaki Toba ,  Hirotaka Imayama ,  Atsuko Ohkawa ,  Masayasu Fujisawa ,  Kazuo Nate ,  Hideki Sonobe ,  Saburo Suzuki ,  Eisei Togawa ,  Hiroshi Ishizaki ,  Yoshiki Hagiwara

发明人： Yasuo Hira ,  Tamaki Toba ,  Hirotaka Imayama ,  Atsuko Ohkawa ,  Masayasu Fujisawa ,  Kazuo Nate ,  Hideki Sonobe ,  Saburo Suzuki ,  Eisei Togawa ,  Hiroshi Ishizaki ,  Yoshiki Hagiwara

IPC分类号： B23K15/00 ,  C23F4/00 ,  G11B5/31 ,  G11B5/60 ,  H01L21/302 ,  H01L21/3065

CPC分类号： G11B5/3106 ,  G11B5/60 ,  G11B5/6005 ,  G11B5/3163

摘要： A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55-85.degree.. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15-60.degree. and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g., CH.sub.2 FCF.sub.3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF.sub.6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic head and magnetic disc.

摘要翻译： 磁头元件具有形成在其表面上的一个或多个轨道。 每个轨道形成为具有55-85°的锥角。 为了形成轨道，进行离子铣削; 所使用的轨道基板允许倾斜角度为15-60°并旋转; 作为离子研磨气体使用单独的氟化烃（例如CH 2 CF 3）或所述氟化烃气体与Ar，SF 6等的混合气体。 因此，磁头轨道形状在磁头和磁盘之间的飞行高度变化很小。