Apparatus for and method of forming electrode for lithium secondary cell
    9.
    发明授权
    Apparatus for and method of forming electrode for lithium secondary cell 失效
    锂二次电池电极形成装置及方法

    公开(公告)号:US06770175B2

    公开(公告)日:2004-08-03

    申请号:US10122315

    申请日:2002-04-16

    IPC分类号: C23C1434

    摘要: An apparatus, for forming an electrode for a lithium secondary cell capable of readily forming an active material layer constituted by at least two elements and controlling the composition of the active material layer, comprises a first sputtering source for sputtering a first material forming the active material layer onto the surface of the collector and a second sputtering source for sputtering a second material forming the active material layer onto the surface of the collector. Plasma regions of the first and second sputtering sources are arranged to overlap each other. The active material layer constituted by at least two elements is readily formed with excellent reproducibility, and its composition can be readily controlled by independently controlling power applied to the first sputtering source and the second sputtering source.

    摘要翻译: 一种用于形成用于容易地形成由至少两个元件构成的活性材料层并控制活性材料层的组成的锂二次电池的电极的装置,包括用于溅射形成活性材料的第一材料的第一溅射源 层和用于将形成活性物质层的第二材料溅射到集电体的表面上的第二溅射源。 第一和第二溅射源的等离子体区域被布置成彼此重叠。 由至少两种元素构成的活性物质层容易地形成具有优异的再现性,并且可以通过独立地控制施加到第一溅射源和第二溅射源的电力来容易地控制其组成。