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1.发明授权Electrostatic capacitance sensor, electrostatic capacitance sensor component, object mounting body and object mounting apparatus 有权静电电容传感器，静电电容传感器部件，物体安装体和物体安装装置公开(公告)号：US07161360B2
公开(公告)日：2007-01-09
申请号：US11002070
申请日：2004-12-03
IPC分类号： G01R27/26
CPC分类号： H03K17/955 , G01D5/2405 , H03K2217/960765
摘要： An electrostatic capacitance sensor, includes an electrostatic capacitance detector, an operational amplifier in which a feedback impedance circuit is connected between an output terminal and an inverse input terminal of the operational amplifier, a signal line connected between the inverse input terminal of the operational amplifier and the electrostatic capacitance detector, an alternating-current signal generator connected to a non-inverse input terminal of the operational amplifier, and a shield for shielding at least a portion of the signal line, the shield being connected to the non-inverse input terminal of the operational amplifier and the alternating-current signal generator. The electrostatic capacitance detector includes a detecting electrode and a shield electrode. The detecting electrode includes a detector-detecting electrode for detecting an object to be detected and an electrode introducer-detecting electrode for introducing an electrode to the detector-detecting electrode. The shield electrode is connected to the shield. At least a portion of the electrode introducer-detecting electrode is shielded by the shield electrode.
摘要翻译： 一种静电电容传感器，包括静电电容检测器，其中反馈阻抗电路连接在运算放大器的输出端和反相输入端之间的运算放大器，连接在运算放大器的反相输入端和 所述静电电容检测器，连接到所述运算放大器的非反相输入端的交流信号发生器和用于屏蔽所述信号线的至少一部分的屏蔽，所述屏蔽连接到所述运算放大器的非反相输入端 运算放大器和交流信号发生器。 静电电容检测器包括检测电极和屏蔽电极。 检测电极包括用于检测待检测物体的检测器检测电极和用于将电极引入检测器检测电极的电极引导器检测电极。 屏蔽电极连接到屏蔽。 电极引导器检测电极的至少一部分被屏蔽电极屏蔽。
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公开(公告)号：US06331780B1
公开(公告)日：2001-12-18
申请号：US09381780
申请日：1999-09-23
IPC分类号： G01R2726
CPC分类号： G01R27/2605
摘要： A static capacitance-to-voltage converter is capable of converting a static capacitance into a voltage without suffering from a stray capacitance formed between a signal and a shielding line or a stray capacitance formed between an exposed portion of the signal line and its surroundings. The static capacitance-to-voltage converter is formed of an operational amplifier placed in an imaginary short-circuit state between an inverting input and a non-inverting input thereof; a signal line having one end connected to the inverting input and the other end capable of being connected to a static capacitance; a shielding line surrounding the signal line and connected to the non-inverting input; an alternating current signal generator for applying the non-inverting input with an alternating current signal; and zero adjusters for adjusting the output of the static capacitance-to-voltage converter to minimum when no static capacitance is connected to the signal line.
摘要翻译： 静态电容 - 电压转换器能够将静态电容转换成电压，而不会在信号线与屏蔽线之间形成的寄生电容或信号线的暴露部分与其周围环境之间形成的杂散电容。 静态电容 - 电压转换器由在反相输入端和非反相输入端之间以假想短路状态放置的运算放大器形成; 信号线，其一端连接到反相输入，另一端能够连接到静态电容; 围绕信号线并连接到非反相输入的屏蔽线; 交流信号发生器，用于以交流信号施加所述非反相输入; 以及用于在静态电容连接到信号线时将静态电容 - 电压转换器的输出调整到最小的零点调整器。
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公开(公告)号：US06335642B1
公开(公告)日：2002-01-01
申请号：US09381673
申请日：1999-09-22
IPC分类号： H03D100
CPC分类号： G01R27/2605
摘要： A impedance-to-voltage converter for converting an impedance of a target to a voltage is described which comprises an operational amplifier (OP), a coaxial cable consisting a signal line and shielding element(s), and an AC signal generator. A feedback impedance circuit is connected between output and inverting terminals of the OP, and whereby a non-inverting terminal and the inverting terminal are an imaginal-short condition. One end of the signal line is connected to the inverting input terminal of the OP and the other end is connected to one electrode of the target and the AC signal generator is connected to the non-inverting input terminal of the OP. The shielding element comprises at least one shielding layer surrounding the signal line and is connected to the non-inverting input terminal of the OP, and thus the signal line and the shielding layer are the same voltage due to the imaginal-short of the input terminals of the OP, resulting in reduction of noise on the signal line.
摘要翻译： 描述了用于将目标的阻抗转换为电压的阻抗 - 电压转换器，其包括运算放大器（OP），由信号线和屏蔽元件组成的同轴电缆以及AC信号发生器。 反馈阻抗电路连接在OP的输出端和反相端之间，由此非反相端和反相端都是成像短路状态。 信号线的一端连接到OP的反相输入端子，另一端连接到目标的一个电极，并且AC信号发生器连接到OP的非反相输入端子。 屏蔽元件包括围绕信号线的至少一个屏蔽层，并且连接到OP的非反相输入端子，因此由于输入端子的想象缺陷，信号线和屏蔽层是相同的电压 的OP，导致信号线上的噪声降低。
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4.发明申请Electrostatic capacitance sensor, electrostatic capacitance sensor component, object mounting body and object mounting apparatus 有权静电电容传感器，静电电容传感器部件，物体安装体和物体安装装置公开(公告)号：US20050140378A1
公开(公告)日：2005-06-30
申请号：US11002070
申请日：2004-12-03
IPC分类号： G01R27/26 , G01D5/24 , H01H36/00 , H03K17/955
CPC分类号： H03K17/955 , G01D5/2405 , H03K2217/960765
摘要： An electrostatic capacitance sensor, includes an electrostatic capacitance detector, an operational amplifier in which a feedback impedance circuit is connected between an output terminal and an inverse input terminal of the operational amplifier, a signal line connected between the inverse input terminal of the operational amplifier and the electrostatic capacitance detector, an alternating-current signal generator connected to a non-inverse input terminal of the operational amplifier, and a shield for shielding at least a portion of the signal line, the shield being connected to the non-inverse input terminal of the operational amplifier and the alternating-current signal generator. The electrostatic capacitance detector includes a detecting electrode and a shield electrode. The detecting electrode includes a detector-detecting electrode for detecting an object to be detected and an electrode introducer-detecting electrode for introducing an electrode to the detector-detecting electrode. The shield electrode is connected to the shield. At least a portion of the electrode introducer-detecting electrode is shielded by the shield electrode.
摘要翻译： 一种静电电容传感器，包括静电电容检测器，其中反馈阻抗电路连接在运算放大器的输出端和反相输入端之间的运算放大器，连接在运算放大器的反相输入端和 所述静电电容检测器，连接到所述运算放大器的非反相输入端的交流信号发生器和用于屏蔽所述信号线的至少一部分的屏蔽，所述屏蔽连接到所述运算放大器的非反相输入端 运算放大器和交流信号发生器。 静电电容检测器包括检测电极和屏蔽电极。 检测电极包括用于检测待检测物体的检测器检测电极和用于将电极引入检测器检测电极的电极引导器检测电极。 屏蔽电极连接到屏蔽。 电极引导器检测电极的至少一部分被屏蔽电极屏蔽。
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5.发明授权Electrostatic capacitance sensor, electrostatic capacitance sensor component, object mounting body and object mounting apparatus 失效静电电容传感器，静电电容传感器部件，物体安装体和物体安装装置公开(公告)号：US06828806B1
公开(公告)日：2004-12-07
申请号：US09619481
申请日：2000-07-19
IPC分类号： G01R2726
CPC分类号： H03K17/955 , G01D5/2405 , H03K2217/960765
摘要： An electrostatic capacitance sensor, includes an electrostatic capacitance detector, an operational amplifier in which a feedback impedance circuit is connected between an output terminal and an inverse input terminal of the operational amplifier, a signal line connected between the inverse input terminal of the operational amplifier and the electrostatic capacitance detector, an alternating-current signal generator connected to a non-inverse input terminal of the operational amplifier, and a shield for shielding at least a portion of the signal line, the shield being connected to the non-inverse input terminal of the operational amplifier and the alternating-current signal generator. The electrostatic capacitance detector includes a detecting electrode and a shield electrode. The detecting electrode includes a detector-detecting electrode for detecting an object to be detected and an electrode introducer-detecting electrode for introducing an electrode to the detector-detecting electrode. The shield electrode is connected to the shield. At least a portion of the electrode introducer-detecting electrode is shielded by the shield electrode.
摘要翻译： 一种静电电容传感器，包括静电电容检测器，其中反馈阻抗电路连接在运算放大器的输出端和反相输入端之间的运算放大器，连接在运算放大器的反相输入端和 所述静电电容检测器，连接到所述运算放大器的非反相输入端的交流信号发生器和用于屏蔽所述信号线的至少一部分的屏蔽，所述屏蔽连接到所述运算放大器的非反相输入端 运算放大器和交流信号发生器。 静电电容检测器包括检测电极和屏蔽电极。 检测电极包括用于检测待检测物体的检测器检测电极和用于将电极引入检测器检测电极的电极引导器检测电极。 屏蔽电极连接到屏蔽。 电极引导器检测电极的至少一部分被屏蔽电极屏蔽。
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公开(公告)号：US06348809B1
公开(公告)日：2002-02-19
申请号：US09371546
申请日：1999-08-10
IPC分类号： G01R3126
CPC分类号： G01R27/2605
摘要： There is provided a probing and measurement system for measuring a capacitance value of a capacitance to be measured, by removing any influence made by a parasitic capacitance and a fluctuation thereof within a shield box 11. The probing and measurement system comprises a prober 1, a signal line having one end to be in contact with a sample to be measured, a shield line surrounding the signal line, and a capacitance measurement circuit 6. The capacitance measurement circuit 6 comprises an operational amplifier 61 having an inverting input terminal connected to the other end of the signal line and a non-inverting input terminal connected to the shield line, wherein an imaginary short state exists between the inverting input terminal and the non-inverting input terminal, and wherein a signal having a value corresponding to an electrostatic capacitance of the sample to be measured is outputted when an AC signal is applied to the non-inverting input terminal. Conductive portions of the shield box 11, conductive portions of a stand 13, a surface of the stand which contacts with the sample to be measured, and the shield line are placed at the same electric potential.
摘要翻译： 提供了一种用于测量待测电容的电容值的探测和测量系统，通过消除由屏蔽盒11内的寄生电容及其波动引起的任何影响。探测和测量系统包括探测器1， 信号线，其一端与要测量的样本接触，围绕信号线的屏蔽线以及电容测量电路6.电容测量电路6包括运算放大器61，其具有与另一个连接的反相输入端 信号线的端部和连接到屏蔽线的非反相输入端子，其中在反相输入端子和非反相输入端子之间存在虚拟短路状态，并且其中具有对应于静电电容值的信号 当将AC信号施加到非反相输入端时，输出要测量的样本。 屏蔽盒11的导电部分，支架13的导电部分，与待测样品接触的支架的表面和屏蔽线放置在相同的电位。
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7.发明授权Layout structure of capacitive element(s) and interconnections in a semiconductor 失效半导体中的电容元件和互连的布局结构
公开(公告)号：US5892266A
公开(公告)日：1999-04-06
申请号：US865442
申请日：1997-05-30
IPC分类号： H01L21/768 , H01L21/822 , H01L23/522 , H01L27/04 , H01L27/08 , H01L29/41
CPC分类号： H01L27/0805 , Y10S257/919
摘要： The present invention reduces parasitic capacitance in a capacitive element distribution system by running unit electrode lead lines and common electrode lead lines in different directions so that the conductor lines may be sufficiently separated to suppress parasitic capacitance.
摘要翻译： 本发明通过在不同方向上运行单元电极引线和公共电极引线来减小电容元件分配系统中的寄生电容，使得导体线可以被充分地分离以抑制寄生电容。
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公开(公告)号：US06194888B1
公开(公告)日：2001-02-27
申请号：US09402385
申请日：1999-10-04
IPC分类号： H03H100
CPC分类号： G01R27/2605
摘要： An impedance-to-voltage converter utilizes an operational amplifier to convert an impedance into a voltage without suffering from the influence of stray capacitances. The impedance-to-voltage converter is formed of an operational amplifier which has an imaginary short-circuit state between an inverting input and a non-inverting input thereof when an impedance element is connected between an output and the inverting input, a shielding line for shielding a line for connecting the impedance element to the inverting input, an AC signal generator connected to the non-inverting input, and a shielding line for shielding the signal line. The shielding lines are connected to the non-inverting input.
摘要翻译： 阻抗 - 电压转换器利用运算放大器将阻抗转换成电压而不受杂散电容的影响。 阻抗 - 电压转换器由运算放大器形成，当在输出端和反相输入端之间连接有阻抗元件时，其运算放大器具有反相输入端和非反相输入端之间的假想短路状态， 屏蔽用于将阻抗元件连接到反相输入的线，连接到非反相输入的AC信号发生器和用于屏蔽信号线的屏蔽线。 屏蔽线连接到非反相输入。
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9.发明授权Impedance detection circuit, impedance detection device, and impedance detection method 失效阻抗检测电路，阻抗检测装置和阻抗检测方法公开(公告)号：US06756790B2
公开(公告)日：2004-06-29
申请号：US09959759
申请日：2001-12-03
IPC分类号： G01R2700
CPC分类号： G01R27/02
摘要： A second operational amplifier (11) of a core unit (1) shorts an inverting input terminal and an output terminal. A signal line (19) is connected to a non-inverting input terminal. A capacitive sensor (18) is connected to the signal line (19). A first operational amplifier (12) earths the non-inverting input terminal. One end of a first resistance (15) and one end of a second resistance (16) are respectively connected to the inverting input terminal. The other end of the first resistance (15) is connected to an alternate current voltage generator (14). The other end of the second resistance (16) is connected to the output terminal of the first operational amplifier (11). A signal output terminal (21) of the core unit (1) is connected to an inverting amplification device (2). An alternate output terminal (22) of the core unit (1) and an inverting output terminal (42) of the inverting amplification device (2) are connected to an addition device (3). The non-inverting input terminal of operational amplifiers (36) and (40).
摘要翻译： 核心单元（1）的第二运算放大器（11）使反相输入端子和输出端子短路。 信号线（19）连接到非反相输入端子。 电容传感器（18）连接到信号线（19）。 第一运算放大器（12）接地非反相输入端。 第一电阻（15）的一端和第二电阻（16）的一端分别连接到反相输入端子。 第一电阻（15）的另一端连接到交流电压发生器（14）。 第二电阻（16）的另一端连接到第一运算放大器（11）的输出端。 核心单元（1）的信号输出端（21）连接到反相放大装置（2）。 核心单元（1）的替代输出端（22）和反相放大装置（2）的反相输出端（42）连接到加法装置（3）。 运算放大器（36）和（40）的非反相输入端。
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公开(公告)号：US6034549A
公开(公告)日：2000-03-07
申请号：US960626
申请日：1997-10-29
IPC分类号： H03K19/0185 , H03K19/0175
CPC分类号： H03K19/018521
摘要： A level shift circuit consisting MOSFETs is provided which comprises at least two bias voltage supply circuits and a driver circuit cascaded between input and output terminals of the level shift circuit. The first stage of the bias voltage supply circuits receives an input voltage and the last stage thereof supplies a level-shifted voltage to the driver circuit. The driver circuit includes N- and P-channel transistors. Gates of the transistors of the driver circuit receive the level-shifted voltage from the bias voltage supply circuits and the input voltage, respectively. Sources of the transistors of the driver circuit are commonly connected to the output terminal to provide an output voltage.
摘要翻译： 提供了包括MOSFET的电平移位电路，其包括至少两个偏置电压电源电路和级联在电平移位电路的输入和输出端子之间的驱动器电路。 偏置电压电路的第一级接收输入电压，其最后级向驱动电路提供电平移位电压。 驱动器电路包括N沟道晶体管和P沟道晶体管。 驱动器电路的晶体管的栅极分别接收来自偏压电源电路的电平移位电压和输入电压。 驱动电路的晶体管的源极通常连接到输出端以提供输出电压。
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